JP7017934B2 - 表面処理装置 - Google Patents

表面処理装置 Download PDF

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Publication number
JP7017934B2
JP7017934B2 JP2017556218A JP2017556218A JP7017934B2 JP 7017934 B2 JP7017934 B2 JP 7017934B2 JP 2017556218 A JP2017556218 A JP 2017556218A JP 2017556218 A JP2017556218 A JP 2017556218A JP 7017934 B2 JP7017934 B2 JP 7017934B2
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JP
Japan
Prior art keywords
roller
actuator
belt
force
workpiece
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2017556218A
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English (en)
Japanese (ja)
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JP2018516764A (ja
JP2018516764A5 (cg-RX-API-DMAC10.html
Inventor
ロナルド ナデレア
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ferrobotics Compliant Robot Technology GmbH
Original Assignee
Ferrobotics Compliant Robot Technology GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ferrobotics Compliant Robot Technology GmbH filed Critical Ferrobotics Compliant Robot Technology GmbH
Publication of JP2018516764A publication Critical patent/JP2018516764A/ja
Priority to JP2021176697A priority Critical patent/JP2022017427A/ja
Publication of JP2018516764A5 publication Critical patent/JP2018516764A5/ja
Application granted granted Critical
Publication of JP7017934B2 publication Critical patent/JP7017934B2/ja
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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B21/00—Machines or devices using grinding or polishing belts; Accessories therefor
    • B24B21/18—Accessories
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B21/00—Machines or devices using grinding or polishing belts; Accessories therefor
    • B24B21/04—Machines or devices using grinding or polishing belts; Accessories therefor for grinding plane surfaces
    • B24B21/12—Machines or devices using grinding or polishing belts; Accessories therefor for grinding plane surfaces involving a contact wheel or roller pressing the belt against the work
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B21/00—Machines or devices using grinding or polishing belts; Accessories therefor
    • B24B21/16—Machines or devices using grinding or polishing belts; Accessories therefor for grinding other surfaces of particular shape
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B21/00—Machines or devices using grinding or polishing belts; Accessories therefor
    • B24B21/18—Accessories
    • B24B21/20—Accessories for controlling or adjusting the tracking or the tension of the grinding belt
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B27/00—Other grinding machines or devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B27/00—Other grinding machines or devices
    • B24B27/0069—Other grinding machines or devices with means for feeding the work-pieces to the grinding tool, e.g. turntables, transfer means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00—Component parts such as frames, beds, carriages, headstocks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00—Component parts such as frames, beds, carriages, headstocks
    • B24B41/005—Feeding or manipulating devices specially adapted to grinding machines
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B47/00—Drives or gearings; Equipment therefor
    • B24B47/10—Drives or gearings; Equipment therefor for rotating or reciprocating working-spindles carrying grinding wheels or workpieces
    • B24B47/12—Drives or gearings; Equipment therefor for rotating or reciprocating working-spindles carrying grinding wheels or workpieces by mechanical gearing or electric power
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/08—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation involving liquid or pneumatic means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/16—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation taking regard of the load

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
JP2017556218A 2015-04-27 2016-04-25 表面処理装置 Active JP7017934B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2021176697A JP2022017427A (ja) 2015-04-27 2021-10-28 表面処理装置

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102015106480.4A DE102015106480A1 (de) 2015-04-27 2015-04-27 Vorrichtung zur Oberflächenbearbeitung
DE102015106480.4 2015-04-27
PCT/AT2016/050111 WO2016172751A1 (de) 2015-04-27 2016-04-25 Vorrichtung zur oberflächenbearbeitung

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2021176697A Division JP2022017427A (ja) 2015-04-27 2021-10-28 表面処理装置

Publications (3)

Publication Number Publication Date
JP2018516764A JP2018516764A (ja) 2018-06-28
JP2018516764A5 JP2018516764A5 (cg-RX-API-DMAC10.html) 2022-01-06
JP7017934B2 true JP7017934B2 (ja) 2022-02-09

Family

ID=56072142

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2017556218A Active JP7017934B2 (ja) 2015-04-27 2016-04-25 表面処理装置
JP2021176697A Pending JP2022017427A (ja) 2015-04-27 2021-10-28 表面処理装置

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2021176697A Pending JP2022017427A (ja) 2015-04-27 2021-10-28 表面処理装置

Country Status (7)

Country Link
US (1) US10974362B2 (cg-RX-API-DMAC10.html)
EP (1) EP3288712B1 (cg-RX-API-DMAC10.html)
JP (2) JP7017934B2 (cg-RX-API-DMAC10.html)
KR (1) KR102480548B1 (cg-RX-API-DMAC10.html)
CN (1) CN107666985A (cg-RX-API-DMAC10.html)
DE (1) DE102015106480A1 (cg-RX-API-DMAC10.html)
WO (1) WO2016172751A1 (cg-RX-API-DMAC10.html)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101944958B1 (ko) * 2017-06-07 2019-02-07 주식회사 제이로보텍 그라인더 장치
DE102020111292A1 (de) 2020-04-24 2021-10-28 Ferrobotics Compliant Robot Technology Gmbh Schnellspannsystem zur verbindung von werkzeugmaschinen mit einem roboter
CN112077674A (zh) * 2020-09-08 2020-12-15 合肥江丰电子材料有限公司 一种靶材组件中背板的抛光工艺
DE102020131967A1 (de) * 2020-12-02 2022-06-02 Ferrobotics Compliant Robot Technology Gmbh Werkzeugmaschine für robotergestütztes bearbeiten von werkstücken mit zwei rotierbaren werkzeugen
CN112720188B (zh) * 2020-12-25 2022-12-06 邵武市泽诚机械有限公司 一种打磨机

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19825698A1 (de) 1998-06-09 1999-12-23 Shl Seelmann Haering Und Lehr Bandschleifmaschine
DE10013340A1 (de) 2000-03-17 2001-09-27 Carat Robotic Innovation Gmbh Bandschleifmaschine mit Andruckregelung
JP2002301659A (ja) 2001-04-03 2002-10-15 Kawasaki Heavy Ind Ltd 自動仕上げ方法および装置
JP2003220546A (ja) 2002-01-24 2003-08-05 Soken Kogyo Kk ベルト式研磨装置
JP2009016759A (ja) 2007-07-09 2009-01-22 Nihon Micro Coating Co Ltd 半導体ウェーハ端面研磨装置およびこれに用いる研磨ヘッド

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6389263A (ja) 1986-10-02 1988-04-20 Toshiba Corp ベルトグラインダ−装置
US4841683A (en) * 1987-12-23 1989-06-27 Williams Clarence W Roll grinding system
DE4030158A1 (de) * 1990-09-24 1992-03-26 Hau Simex Gmbh Bandschleifmaschine
WO1993002834A1 (de) * 1991-07-31 1993-02-18 Farros Blatter Ag Schleifgerät zum schleifen einer zylindrischen oder sphärischen oberfläche einer walze, insbesondere einer walze einer papiermaschine
CH686350A5 (de) * 1992-02-07 1996-03-15 Sig Schweiz Industrieges Bandschleifmaschine.
JPH08108359A (ja) * 1994-10-07 1996-04-30 Fuji Photo Film Co Ltd 研磨装置
JPH10549A (ja) 1996-06-12 1998-01-06 Nisshinbo Ind Inc 研磨加工装置
DE69919538T2 (de) * 1998-01-20 2005-09-08 Metso Paper, Inc. Verfahren ung vorrichtung zur konditionierung einer walze, insbesondere von einer walze in einer papierherstellungs- oder veredelungsvorrichtung
KR20020034408A (ko) * 2000-11-01 2002-05-09 이구택 스트립 연마 벨트의 위치 교정장치
US6561870B2 (en) * 2001-03-30 2003-05-13 Lam Research Corporation Adjustable force applying air platen and spindle system, and methods for using the same
DE102012005439A1 (de) * 2012-03-20 2013-09-26 Texmag Gmbh Vertriebsgesellschaft Vorrichtung zum Beeinflussen einer laufenden Warenbahn
CN203779279U (zh) * 2013-12-07 2014-08-20 泸州职业技术学院 自适应压力机械手打磨装置
CN103692317B (zh) * 2013-12-10 2017-01-25 深圳先进技术研究院 带力反馈的砂带机
EP2974827B1 (de) 2014-07-17 2017-01-25 Franke Water Systems AG Verfahren zum Betreiben einer Bandschleifvorrichtung

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19825698A1 (de) 1998-06-09 1999-12-23 Shl Seelmann Haering Und Lehr Bandschleifmaschine
DE10013340A1 (de) 2000-03-17 2001-09-27 Carat Robotic Innovation Gmbh Bandschleifmaschine mit Andruckregelung
JP2002301659A (ja) 2001-04-03 2002-10-15 Kawasaki Heavy Ind Ltd 自動仕上げ方法および装置
JP2003220546A (ja) 2002-01-24 2003-08-05 Soken Kogyo Kk ベルト式研磨装置
JP2009016759A (ja) 2007-07-09 2009-01-22 Nihon Micro Coating Co Ltd 半導体ウェーハ端面研磨装置およびこれに用いる研磨ヘッド

Also Published As

Publication number Publication date
WO2016172751A1 (de) 2016-11-03
DE102015106480A1 (de) 2016-10-27
KR102480548B1 (ko) 2022-12-22
JP2018516764A (ja) 2018-06-28
EP3288712B1 (de) 2023-10-11
US20180126512A1 (en) 2018-05-10
EP3288712C0 (de) 2023-10-11
EP3288712A1 (de) 2018-03-07
CN107666985A (zh) 2018-02-06
KR20170140261A (ko) 2017-12-20
US10974362B2 (en) 2021-04-13
JP2022017427A (ja) 2022-01-25

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