JP6914062B2 - 基板処理装置および基板処理方法 - Google Patents
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- JP6914062B2 JP6914062B2 JP2017040594A JP2017040594A JP6914062B2 JP 6914062 B2 JP6914062 B2 JP 6914062B2 JP 2017040594 A JP2017040594 A JP 2017040594A JP 2017040594 A JP2017040594 A JP 2017040594A JP 6914062 B2 JP6914062 B2 JP 6914062B2
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- H—ELECTRICITY
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- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02043—Cleaning before device manufacture, i.e. Begin-Of-Line process
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
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- H01L21/02101—Cleaning only involving supercritical fluids
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- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02296—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer
- H01L21/02299—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer pre-treatment
- H01L21/02307—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer pre-treatment treatment by exposure to a liquid
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- H01L21/02318—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer post-treatment
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- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
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- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67051—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
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- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
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- H—ELECTRICITY
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- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
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- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67253—Process monitoring, e.g. flow or thickness monitoring
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- H—ELECTRICITY
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- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
- H01L21/682—Mask-wafer alignment
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/10—Measuring as part of the manufacturing process
- H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
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- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/20—Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
Description
図1を参照しながら、実施形態に係る基板処理システム1の概略構成について説明する。図1は、実施形態に係る基板処理システム1の概略構成を示す図である。以下では、位置関係を明確にするために、互いに直交するX軸、Y軸およびZ軸を規定し、Z軸正方向を鉛直上向き方向とする。
次に、基板処理システム1における基板処理について図6を参照し説明する。図6は、本実施形態に係る基板処理システム1が実行する基板処理の処理手順を示すフローチャートである。
次に本実施形態の効果について説明する。
次に上記実施形態の変形例について説明する。
4 制御装置
14 受渡部(載置部)
16 洗浄処理ユニット(液処理部)
17 乾燥処理ユニット(後処理部)
18 基板搬送装置(基板搬送部)
19 制御部
19A 入力部
19B 検出部
19C 出力部
20 記憶部
43 ロードセル(測定部)
44 液量調整部(調整部)
46 IPA供給部
47 IPA吸引部
50 調整ユニット(測定部、調整部)
Claims (8)
- 基板の表面に純水による処理を含む洗浄処理を実行した後に、前記純水をIPA(イソプロピルアルコール)によって置換し、前記基板上にIPA液膜を形成する液処理部と、
前記IPA液膜が形成された前記基板の重量、前記IPA液膜の厚さのうち少なくとも一方を測定する測定部と、
前記測定部による測定結果に基づいて前記基板上の前記IPA液膜の液量を検出し、前記液量の良否を判定する検出部と、
前記IPA液膜が形成された前記基板を、超臨界流体と接触させて前記基板を乾燥させる後処理部とを備え、
前記測定部は、前記IPA液膜が形成される前および乾燥処理が行われた後の前記基板の重量を測定し、
前記検出部は、前記乾燥処理が行われた後の前記基板の重量に基づいて前記基板の乾燥状態を検出する
基板処理装置。 - 検出された前記液量が規定範囲内ではない場合に、前記液量が前記規定範囲内となるように前記液量を調整する調整部を備える
請求項1に記載の基板処理装置。 - 外部から搬入された前記基板が載置される載置部を備え、
前記載置部は、前記調整部を有する
請求項2に記載の基板処理装置。 - 前記載置部は、前記測定部を有する
請求項3に記載の基板処理装置。 - 前記基板を搬送する基板搬送部を備え、
前記基板搬送部は、前記測定部を有する
請求項1から4のいずれか一つに記載の基板処理装置。 - 前記液処理部は、前記測定部を有する
請求項1から5のいずれか一つに記載の基板処理装置。 - 検出された前記液量を記憶する記憶部を備える
請求項1から6のいずれか一つに記載の基板処理装置。 - 基板の表面に純水による処理を含む洗浄処理を実行した後に、前記純水をIPA(イソプロピルアルコール)によって置換し、前記基板上にIPA液膜を形成する液処理工程と、
前記IPA液膜が形成された前記基板の重量、前記IPA液膜の厚さのうち少なくとも一方を測定する測定工程と、
前記測定工程による測定結果に基づいて前記基板上の前記IPA液膜の液体の液量を検出し、前記液量の良否を判定する検出工程と、
前記IPA液膜が形成された前記基板を、超臨界流体と接触させて前記基板を乾燥させる後処理工程とを含み、
前記IPA液膜が形成される前および乾燥処理が行われた後の前記基板の重量が測定され、
前記乾燥処理が行われた後の前記基板の重量に基づいて前記基板の乾燥状態が検出される
基板処理方法。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017040594A JP6914062B2 (ja) | 2017-03-03 | 2017-03-03 | 基板処理装置および基板処理方法 |
KR1020180024216A KR102456832B1 (ko) | 2017-03-03 | 2018-02-28 | 기판 처리 장치 및 기판 처리 방법 |
US15/908,967 US20180254180A1 (en) | 2017-03-03 | 2018-03-01 | Substrate processing apparatus and substrate processing method |
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JP2017040594A JP6914062B2 (ja) | 2017-03-03 | 2017-03-03 | 基板処理装置および基板処理方法 |
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JP2018147994A JP2018147994A (ja) | 2018-09-20 |
JP6914062B2 true JP6914062B2 (ja) | 2021-08-04 |
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US (1) | US20180254180A1 (ja) |
JP (1) | JP6914062B2 (ja) |
KR (1) | KR102456832B1 (ja) |
Families Citing this family (2)
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JP7261052B2 (ja) * | 2019-03-26 | 2023-04-19 | 株式会社Screenホールディングス | 基板処理装置およびその搬送制御方法 |
WO2023210485A1 (ja) * | 2022-04-28 | 2023-11-02 | 東京エレクトロン株式会社 | 基板処理装置および基板処理方法 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH1092781A (ja) * | 1996-06-04 | 1998-04-10 | Ebara Corp | 基板の搬送方法及び装置 |
DE102004007952B3 (de) * | 2004-02-18 | 2005-09-01 | Infineon Technologies Ag | Verfahren zum Bestimmen der Tiefe von in einem Trägersubstrat ausgebildeten Vertiefungen |
GB0804499D0 (en) * | 2008-03-11 | 2008-04-16 | Metryx Ltd | Measurement apparatus and method |
JP2011040572A (ja) * | 2009-08-11 | 2011-02-24 | Toshiba Corp | 基板処理装置および基板処理方法 |
JP4927158B2 (ja) * | 2009-12-25 | 2012-05-09 | 東京エレクトロン株式会社 | 基板処理方法、その基板処理方法を実行させるためのプログラムを記録した記録媒体及び基板処理装置 |
JP5471740B2 (ja) * | 2010-04-08 | 2014-04-16 | 東京エレクトロン株式会社 | 基板処理装置 |
US8851816B2 (en) * | 2011-04-07 | 2014-10-07 | Microtronic, Inc. | Apparatus, system, and methods for weighing and positioning wafers |
JP5522124B2 (ja) | 2011-06-28 | 2014-06-18 | 東京エレクトロン株式会社 | 基板処理装置、基板処理方法および記憶媒体 |
JP6522915B2 (ja) * | 2014-09-26 | 2019-05-29 | 倉敷紡績株式会社 | 基板上の液体成分の測定方法および基板処理装置 |
KR102063322B1 (ko) * | 2016-05-27 | 2020-01-08 | 세메스 주식회사 | 기판 처리 장치 및 방법 |
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2017
- 2017-03-03 JP JP2017040594A patent/JP6914062B2/ja active Active
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2018
- 2018-02-28 KR KR1020180024216A patent/KR102456832B1/ko active IP Right Grant
- 2018-03-01 US US15/908,967 patent/US20180254180A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
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KR102456832B1 (ko) | 2022-10-19 |
KR20180101218A (ko) | 2018-09-12 |
JP2018147994A (ja) | 2018-09-20 |
US20180254180A1 (en) | 2018-09-06 |
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