JP6867243B2 - 放熱板及びその製造方法と電子部品装置 - Google Patents

放熱板及びその製造方法と電子部品装置 Download PDF

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Publication number
JP6867243B2
JP6867243B2 JP2017123920A JP2017123920A JP6867243B2 JP 6867243 B2 JP6867243 B2 JP 6867243B2 JP 2017123920 A JP2017123920 A JP 2017123920A JP 2017123920 A JP2017123920 A JP 2017123920A JP 6867243 B2 JP6867243 B2 JP 6867243B2
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Japan
Prior art keywords
protruding portion
protrusion
heat radiating
protruding
radiating plate
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JP2017123920A
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English (en)
Japanese (ja)
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JP2019009292A (ja
JP2019009292A5 (https=
Inventor
卓也 黒澤
卓也 黒澤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shinko Electric Industries Co Ltd
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Shinko Electric Industries Co Ltd
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Publication date
Application filed by Shinko Electric Industries Co Ltd filed Critical Shinko Electric Industries Co Ltd
Priority to JP2017123920A priority Critical patent/JP6867243B2/ja
Priority to US15/987,390 priority patent/US10461013B2/en
Publication of JP2019009292A publication Critical patent/JP2019009292A/ja
Publication of JP2019009292A5 publication Critical patent/JP2019009292A5/ja
Application granted granted Critical
Publication of JP6867243B2 publication Critical patent/JP6867243B2/ja
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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W40/00Arrangements for thermal protection or thermal control
    • H10W40/20Arrangements for cooling
    • H10W40/22Arrangements for cooling characterised by their shape, e.g. having conical or cylindrical projections
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/01Manufacture or treatment
    • H10W70/02Manufacture or treatment of conductive package substrates serving as an interconnection, e.g. of metal plates
    • H10W70/027Mechanical treatments, e.g. deforming, punching or cutting
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/851Dispositions of multiple connectors or interconnections
    • H10W72/874On different surfaces
    • H10W72/877Bump connectors and die-attach connectors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00Encapsulations, e.g. protective coatings
    • H10W74/10Encapsulations, e.g. protective coatings characterised by their shape or disposition
    • H10W74/15Encapsulations, e.g. protective coatings characterised by their shape or disposition on active surfaces of flip-chip devices, e.g. underfills
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00Package configurations
    • H10W90/701Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/721Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors
    • H10W90/724Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors between a chip and a stacked insulating package substrate, interposer or RDL
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00Package configurations
    • H10W90/701Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/731Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors
    • H10W90/734Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors between a chip and a stacked insulating package substrate, interposer or RDL

Landscapes

  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
  • Cooling Or The Like Of Electrical Apparatus (AREA)
JP2017123920A 2017-06-26 2017-06-26 放熱板及びその製造方法と電子部品装置 Active JP6867243B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2017123920A JP6867243B2 (ja) 2017-06-26 2017-06-26 放熱板及びその製造方法と電子部品装置
US15/987,390 US10461013B2 (en) 2017-06-26 2018-05-23 Heat sink and electronic component device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2017123920A JP6867243B2 (ja) 2017-06-26 2017-06-26 放熱板及びその製造方法と電子部品装置

Publications (3)

Publication Number Publication Date
JP2019009292A JP2019009292A (ja) 2019-01-17
JP2019009292A5 JP2019009292A5 (https=) 2020-02-27
JP6867243B2 true JP6867243B2 (ja) 2021-04-28

Family

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JP2017123920A Active JP6867243B2 (ja) 2017-06-26 2017-06-26 放熱板及びその製造方法と電子部品装置

Country Status (2)

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US (1) US10461013B2 (https=)
JP (1) JP6867243B2 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10510595B2 (en) 2018-04-30 2019-12-17 Taiwan Semiconductor Manufacturing Company, Ltd. Integrated fan-out packages and methods of forming the same
US20210035921A1 (en) 2019-07-30 2021-02-04 Intel Corporation Soldered metallic reservoirs for enhanced transient and steady-state thermal performance
JP2023183142A (ja) * 2022-06-15 2023-12-27 キオクシア株式会社 半導体装置および半導体装置の製造方法

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5151777A (en) * 1989-03-03 1992-09-29 Delco Electronics Corporation Interface device for thermally coupling an integrated circuit to a heat sink
JPH0531248A (ja) 1991-08-02 1993-02-09 Sophia Co Ltd 遊技機
JPH0531248U (ja) * 1991-09-30 1993-04-23 シヤープ株式会社 樹脂封止型電力半導体装置
JP3313009B2 (ja) 1995-05-19 2002-08-12 新光電気工業株式会社 放熱部材、リードフレーム及び半導体装置
JPH11112169A (ja) 1997-10-06 1999-04-23 Nippon Light Metal Co Ltd 集積回路モジュール用放熱板及びその製造方法
JP2001338999A (ja) * 2000-05-30 2001-12-07 Kyocera Corp 半導体素子収納用パッケージ
US20030131476A1 (en) * 2001-09-28 2003-07-17 Vlad Ocher Heat conduits and terminal radiator for microcircuit packaging and manufacturing process
JP2003277853A (ja) * 2002-03-26 2003-10-02 Dowa Mining Co Ltd ヒートスプレッダ用銅合金
JP2005012127A (ja) * 2003-06-20 2005-01-13 Denso Corp 電子制御装置
JP4910439B2 (ja) * 2006-03-23 2012-04-04 富士通セミコンダクター株式会社 半導体装置
JP5733893B2 (ja) * 2009-12-22 2015-06-10 新光電気工業株式会社 電子部品装置
JP5368377B2 (ja) * 2010-06-02 2013-12-18 三菱電機株式会社 電子部品パッケージおよびその製造方法
JP5719566B2 (ja) 2010-11-04 2015-05-20 新光電気工業株式会社 Icパッケージ用放熱板及び放熱板を有するicパッケージの接続装置
JP5898919B2 (ja) * 2011-10-31 2016-04-06 新光電気工業株式会社 半導体装置
JP6007535B2 (ja) * 2012-03-22 2016-10-12 日本電気株式会社 中空封止構造及びそれを備えた中空パッケージ
US9524917B2 (en) * 2014-04-23 2016-12-20 Optiz, Inc. Chip level heat dissipation using silicon
JP6421050B2 (ja) * 2015-02-09 2018-11-07 株式会社ジェイデバイス 半導体装置

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JP2019009292A (ja) 2019-01-17
US20180374773A1 (en) 2018-12-27
US10461013B2 (en) 2019-10-29

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