JP6842689B2 - 搬送装置およびスクライブシステム - Google Patents

搬送装置およびスクライブシステム Download PDF

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Publication number
JP6842689B2
JP6842689B2 JP2016235604A JP2016235604A JP6842689B2 JP 6842689 B2 JP6842689 B2 JP 6842689B2 JP 2016235604 A JP2016235604 A JP 2016235604A JP 2016235604 A JP2016235604 A JP 2016235604A JP 6842689 B2 JP6842689 B2 JP 6842689B2
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JP
Japan
Prior art keywords
substrate
cleaning
cleaning unit
brush
unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2016235604A
Other languages
English (en)
Japanese (ja)
Other versions
JP2018093071A (ja
Inventor
西尾　仁孝
仁孝 西尾
生芳 高松
生芳 高松
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsuboshi Diamond Industrial Co Ltd
Original Assignee
Mitsuboshi Diamond Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsuboshi Diamond Industrial Co Ltd filed Critical Mitsuboshi Diamond Industrial Co Ltd
Priority to JP2016235604A priority Critical patent/JP6842689B2/ja
Priority to TW106126025A priority patent/TWI746609B/zh
Priority to KR1020170110440A priority patent/KR102422164B1/ko
Priority to CN201710800226.3A priority patent/CN108147062B/zh
Publication of JP2018093071A publication Critical patent/JP2018093071A/ja
Application granted granted Critical
Publication of JP6842689B2 publication Critical patent/JP6842689B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G45/00—Lubricating, cleaning, or clearing devices
    • B65G45/10—Cleaning devices
    • B65G45/18—Cleaning devices comprising brushes
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B35/00—Transporting of glass products during their manufacture, e.g. hot glass lenses, prisms
    • C03B35/14—Transporting hot glass sheets or ribbons, e.g. by heat-resistant conveyor belts or bands
    • C03B35/20—Transporting hot glass sheets or ribbons, e.g. by heat-resistant conveyor belts or bands by gripping tongs or supporting frames
    • C03B35/202—Transporting hot glass sheets or ribbons, e.g. by heat-resistant conveyor belts or bands by gripping tongs or supporting frames by supporting frames
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B1/00—Cleaning by methods involving the use of tools
    • B08B1/20—Cleaning of moving articles, e.g. of moving webs or of objects on a conveyor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B11/00—Cleaning flexible or delicate articles by methods or apparatus specially adapted thereto
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25H—WORKSHOP EQUIPMENT, e.g. FOR MARKING-OUT WORK; STORAGE MEANS FOR WORKSHOPS
    • B25H7/00—Marking-out or setting-out work
    • B25H7/04—Devices, e.g. scribers, for marking
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00—Severing cooled glass
    • C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C03B33/023—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
    • C03B33/03—Glass cutting tables; Apparatus for transporting or handling sheet glass during the cutting or breaking operations
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00—Severing cooled glass
    • C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C03B33/023—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
    • C03B33/033—Apparatus for opening score lines in glass sheets
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
    • H01L21/3043—Making grooves, e.g. cutting

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Liquid Crystal (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
  • Dicing (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Cleaning In General (AREA)
  • Cleaning By Liquid Or Steam (AREA)
JP2016235604A 2016-12-05 2016-12-05 搬送装置およびスクライブシステム Active JP6842689B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2016235604A JP6842689B2 (ja) 2016-12-05 2016-12-05 搬送装置およびスクライブシステム
TW106126025A TWI746609B (zh) 2016-12-05 2017-08-02 搬送裝置及劃線系統
KR1020170110440A KR102422164B1 (ko) 2016-12-05 2017-08-30 반송체, 반송 장치 및 스크라이브 시스템
CN201710800226.3A CN108147062B (zh) 2016-12-05 2017-09-06 输送体、输送装置以及划线系统

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2016235604A JP6842689B2 (ja) 2016-12-05 2016-12-05 搬送装置およびスクライブシステム

Publications (2)

Publication Number Publication Date
JP2018093071A JP2018093071A (ja) 2018-06-14
JP6842689B2 true JP6842689B2 (ja) 2021-03-17

Family

ID=62468730

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2016235604A Active JP6842689B2 (ja) 2016-12-05 2016-12-05 搬送装置およびスクライブシステム

Country Status (4)

Country Link
JP (1) JP6842689B2 (zh)
KR (1) KR102422164B1 (zh)
CN (1) CN108147062B (zh)
TW (1) TWI746609B (zh)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109129386A (zh) * 2018-07-10 2019-01-04 伯恩光学(惠州)有限公司 划线机
TWI758826B (zh) * 2020-08-19 2022-03-21 萬潤科技股份有限公司 裁切方法、裁切設備及使用於該裁切方法之輔助元件
CN113333416B (zh) * 2021-06-16 2023-04-18 昆明欧迈科技有限公司 一种烟丝箱清扫装置
CN113695308B (zh) * 2021-07-20 2023-01-13 山东力冠微电子装备有限公司 一种半导体晶圆前处理系统
CN114472266B (zh) * 2022-01-14 2023-07-28 南京尚科得科技发展有限公司 一种医用隔离箱亚克力板处理设备

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2539911Y2 (ja) * 1992-01-13 1997-07-02 三星ダイヤモンド工業株式会社 自動基板裁断装置における清掃兼用搬送機
JP2578845Y2 (ja) * 1992-07-29 1998-08-20 三星ダイヤモンド工業株式会社 自動基板裁断装置における位置決め機能を有する搬送機
JP2004026539A (ja) 2002-06-24 2004-01-29 Nakamura Tome Precision Ind Co Ltd ガラス基板の割断加工方法及びその装置
JP4243990B2 (ja) * 2003-07-11 2009-03-25 日東電工株式会社 半導体ウエハ搬送方法および搬送装置
JP2009157247A (ja) * 2007-12-27 2009-07-16 Orc Mfg Co Ltd 露光装置
TWI406326B (zh) * 2008-10-24 2013-08-21 Macronix Int Co Ltd 集塵裝置、自動清潔裝置及自動清潔方法
CN201357414Y (zh) * 2009-02-19 2009-12-09 北京京东方光电科技有限公司 机械手臂
JP2011041444A (ja) * 2009-08-18 2011-02-24 Yokogawa Electric Corp 平面モータ
KR101968792B1 (ko) * 2011-11-16 2019-04-12 니폰 덴키 가라스 가부시키가이샤 판유리 할단장치, 판유리 할단방법, 판유리 제작방법 및 판유리 할단시스템
JP2014091652A (ja) * 2012-11-05 2014-05-19 Mitsuboshi Diamond Industrial Co Ltd 基板分断装置
CN203700180U (zh) * 2014-01-17 2014-07-09 宫庆长 一种玻璃屑清扫装置
CN204325131U (zh) * 2014-12-26 2015-05-13 芜湖东旭光电装备技术有限公司 玻璃碎屑清除装置
TWI735438B (zh) * 2015-03-30 2021-08-11 日商尼康股份有限公司 物體搬運裝置、曝光裝置、平板顯示器的製造方法、元件製造方法、物體搬運方法以及曝光方法
CN104889979B (zh) * 2015-05-20 2016-08-24 洛阳中冶重工机械有限公司 一种真空吸盘式码垛机械手
CN204779332U (zh) * 2015-06-10 2015-11-18 江西赣悦光伏玻璃有限公司 一种光伏玻璃智能化切割设备
CN205011631U (zh) * 2015-09-25 2016-02-03 嵊州市寰鼎玻璃科技有限公司 一种用于玻璃制造的自动裁片机
CN205387544U (zh) * 2016-03-17 2016-07-20 日本电气硝子株式会社 板玻璃割断装置
CN105922113B (zh) * 2016-06-20 2019-02-22 广东华技达精密机械有限公司 主板清洗机和主板清洗方法

Also Published As

Publication number Publication date
TW201821343A (zh) 2018-06-16
KR20180064270A (ko) 2018-06-14
KR102422164B1 (ko) 2022-07-18
CN108147062B (zh) 2021-11-30
TWI746609B (zh) 2021-11-21
CN108147062A (zh) 2018-06-12
JP2018093071A (ja) 2018-06-14

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