JP6875722B2 - 基板加工装置 - Google Patents
基板加工装置 Download PDFInfo
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- JP6875722B2 JP6875722B2 JP2017000426A JP2017000426A JP6875722B2 JP 6875722 B2 JP6875722 B2 JP 6875722B2 JP 2017000426 A JP2017000426 A JP 2017000426A JP 2017000426 A JP2017000426 A JP 2017000426A JP 6875722 B2 JP6875722 B2 JP 6875722B2
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- 239000000758 substrate Substances 0.000 title claims description 213
- 239000000463 material Substances 0.000 claims description 179
- 230000032258 transport Effects 0.000 claims description 54
- 230000007246 mechanism Effects 0.000 claims description 33
- 230000003028 elevating effect Effects 0.000 claims description 14
- 230000015572 biosynthetic process Effects 0.000 claims description 3
- 238000009434 installation Methods 0.000 description 7
- 238000011144 upstream manufacturing Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 3
- 238000013459 approach Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
- 230000008859 change Effects 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 230000004044 response Effects 0.000 description 1
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25H—WORKSHOP EQUIPMENT, e.g. FOR MARKING-OUT WORK; STORAGE MEANS FOR WORKSHOPS
- B25H7/00—Marking-out or setting-out work
- B25H7/04—Devices, e.g. scribers, for marking
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67092—Apparatus for mechanical treatment
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25H—WORKSHOP EQUIPMENT, e.g. FOR MARKING-OUT WORK; STORAGE MEANS FOR WORKSHOPS
- B25H1/00—Work benches; Portable stands or supports for positioning portable tools or work to be operated on thereby
- B25H1/10—Work benches; Portable stands or supports for positioning portable tools or work to be operated on thereby with provision for adjusting holders for tool or work
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68764—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating caroussel
Description
本実施形態によれば、以下の効果が奏される。
以上、本発明の実施形態について説明したが、本発明は上記実施形態に何ら制限されるものではなく、また、本発明の実施形態も上記以外に種々の変更が可能である。
1a 制御部
10 基板
110 給材テーブル
120 搬送部
130 回転部
131 軸(回転軸)
150 枠部材(昇降部、中間部材)
151 シリンダ(昇降部、昇降機構)
200 搬送ユニット
201 駆動部
230 吸着部
300 スクライブユニット
310 テーブル
400 ブレイクユニット
Claims (7)
- 基板の表面にスクライブラインを形成するスクライブユニットと、
前記基板が載置されるとともに、載置された前記基板を吸着する給材テーブルと、
前記給材テーブルに前記基板を載置するための第1位置と、前記スクライブユニットに前記基板を受け渡すための第2位置との間で前記給材テーブルを搬送する搬送部と、
前記給材テーブルを上下に回転させる回転部と、
制御部と、を備え、
前記制御部は、前記第1位置でスクライブライン形成前の前記基板が載置された前記給材テーブルを、前記搬送部により、前記第2位置に搬送させ、前記第2位置で前記給材テーブルから前記スクライブユニットに前記基板を受け渡した後、前記搬送部により、前記給材テーブルを前記第1位置に搬送させ、前記第1位置において、前記回転部により前記給材テーブルを回転させて前記給材テーブルを下側に向けて、前記搬送部を駆動して前記給材テーブルを前記第2位置へと搬送した後、前記第2位置において、前記スクライブユニットによりスクライブラインが形成された前記基板を前記給材テーブルに吸着させる、
ことを特徴とする基板加工装置。 - 前記搬送部に対して前記給材テーブルを昇降させる昇降部を備え、
前記制御部は、前記第2位置において前記昇降部により前記給材テーブルを昇降させて、前記スクライブユニットによりスクライブラインが形成された前記基板を前記給材テーブルに吸着させる、請求項1に記載の基板加工装置。 - 前記昇降部は、
前記回転部の回転軸に固定された中間部材と、
前記中間部材に対して前記給材テーブルを昇降させる昇降機構と、を備える、請求項2に記載の基板加工装置。 - 前記制御部は、前記スクライブユニットによりスクライブラインが形成された前記基板を前記第2位置で前記給材テーブルに吸着させた後、前記搬送部を駆動して前記給材テーブルを前記第1位置へと搬送し、前記第1位置において前記回転部を駆動して前記給材テーブルを上下に回転させて前記基板を表裏反転させる、請求項1ないし3の何れか一項に記載の基板加工装置。
- 前記搬送部により前記第2位置に位置付けられた前記給材テーブル上の前記基板を前記スクライブユニットに設けられたテーブルに搬送する搬送ユニットを備える、請求項1ないし4の何れか一項に記載の基板加工装置。
- 前記搬送ユニットは、前記給材テーブル上の前記基板を上側から吸着するための吸着部と、前記吸着部を上下に移動させるための駆動部と、を備える、請求項5に記載の基板加工装置。
- 前記基板に形成されたスクライブラインに沿って前記基板を分断するブレイクユニットを備え、
前記搬送部は、さらに前記ブレイクユニットに前記基板を受け渡すための第3位置に前記給材テーブルを搬送し、
前記制御部は、前記スクライブユニットによりスクライブラインが形成された前記基板を表裏反転させた状態で支持する前記給材テーブルを、前記搬送部を駆動して前記第3位置へと搬送する、請求項1ないし6の何れか一項に記載の基板加工装置。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017000426A JP6875722B2 (ja) | 2017-01-05 | 2017-01-05 | 基板加工装置 |
KR1020170167473A KR20180080985A (ko) | 2017-01-05 | 2017-12-07 | 기판 가공 장치 |
TW106142957A TW201837000A (zh) | 2017-01-05 | 2017-12-07 | 基板加工裝置 |
CN201711399459.3A CN108274445A (zh) | 2017-01-05 | 2017-12-21 | 基板加工装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017000426A JP6875722B2 (ja) | 2017-01-05 | 2017-01-05 | 基板加工装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2018108698A JP2018108698A (ja) | 2018-07-12 |
JP6875722B2 true JP6875722B2 (ja) | 2021-05-26 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2017000426A Active JP6875722B2 (ja) | 2017-01-05 | 2017-01-05 | 基板加工装置 |
Country Status (4)
Country | Link |
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JP (1) | JP6875722B2 (ja) |
KR (1) | KR20180080985A (ja) |
CN (1) | CN108274445A (ja) |
TW (1) | TW201837000A (ja) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108908749B (zh) * | 2018-07-25 | 2020-05-01 | 龙口市兴民安全玻璃有限公司 | 一种圆形玻璃钻孔机 |
JP7114424B2 (ja) * | 2018-09-13 | 2022-08-08 | 株式会社Screenホールディングス | 基板処理装置および基板処理方法 |
CN111233313B (zh) * | 2018-11-29 | 2022-11-01 | 塔工程有限公司 | 基板切割装置 |
CN109571347B (zh) * | 2018-12-29 | 2023-10-20 | 昆山拓誉自动化科技有限公司 | 平板灯装配线用叠装工位 |
CN110125885A (zh) * | 2019-06-20 | 2019-08-16 | 珠海格力智能装备有限公司 | 寻位装置 |
CN113246048B (zh) * | 2021-07-06 | 2021-10-01 | 苏州有道芯量智能科技有限公司 | 一种载物平台装置及其自动调平控制方法 |
CN114406959A (zh) * | 2021-09-29 | 2022-04-29 | 安徽工程大学 | 用于半导体集成电路粒子碰撞噪声试验的夹具 |
-
2017
- 2017-01-05 JP JP2017000426A patent/JP6875722B2/ja active Active
- 2017-12-07 TW TW106142957A patent/TW201837000A/zh unknown
- 2017-12-07 KR KR1020170167473A patent/KR20180080985A/ko active Search and Examination
- 2017-12-21 CN CN201711399459.3A patent/CN108274445A/zh not_active Withdrawn
Also Published As
Publication number | Publication date |
---|---|
CN108274445A (zh) | 2018-07-13 |
TW201837000A (zh) | 2018-10-16 |
JP2018108698A (ja) | 2018-07-12 |
KR20180080985A (ko) | 2018-07-13 |
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