JP6731911B2 - 転送基板および対応する樹脂を使用してチップをターゲットウエハに接合するための方法 - Google Patents
転送基板および対応する樹脂を使用してチップをターゲットウエハに接合するための方法 Download PDFInfo
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- JP6731911B2 JP6731911B2 JP2017512667A JP2017512667A JP6731911B2 JP 6731911 B2 JP6731911 B2 JP 6731911B2 JP 2017512667 A JP2017512667 A JP 2017512667A JP 2017512667 A JP2017512667 A JP 2017512667A JP 6731911 B2 JP6731911 B2 JP 6731911B2
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- chip
- transfer substrate
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- target wafer
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- H01L2924/157—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2924/15738—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950 C and less than 1550 C
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Description
[0001]本出願は、それらの開示全体がすべての目的のために参照により本明細書に組み込まれる、2014年9月5日に出願された米国仮特許出願第62/046,500号、および2014年12月5日に出願された「Semiconductor Bonding with Compliant Resin and Utilizing Hydrogen Implantation for Transfer−Wafer Removal」と題する米国非仮特許出願第14/562,169号の優先権を主張する。
(1)樹脂を用いてチップに取り付けられた転送ウエハの除去は、ターゲットウエハ上の接合部位からチップを引き裂く傾向がある、熱およびせん断力を時々使用し、ならびに/あるいは
(2)樹脂を用いてチップに取り付けられた転送ウエハの除去は、レーザーを用いて転送ウエハの基板を通して樹脂の剥離を可能にするために、短波長の光(例えば、200nmから400nmまでの波長を有する紫外(UV)光)に対して透明である材料(例えば、ガラスまたはサファイア)から製造された転送ウエハの基板を時々使用する。残念ながら、使用されている透明材料(例えば、ガラスおよびサファイア)は、ターゲットウエハの熱膨張係数とは異なる熱膨張係数を有する。例えば、いくつかの実施形態では、ターゲットウエハはシリコン基板を備える。チップをターゲットウエハのシリコン基板に接合するために非シリコン転送基板(例えば、ガラスまたはサファイア)を使用することを試みると、シリコン基板と非シリコン基板との間の膨張差はチップ配置許容差よりも大きい。この問題は大きい非シリコン基板(例えば、200mmに等しいかまたはそれよりも大きい直径をもつ基板)を使用するときに増大する。アニール中に、チップは室温において元の整合から数十ミクロンだけシフトされ得る(例えば、転送ウエハのエッジにおけるチップ)。シリコン、InP、およびGaAsは約900nmよりも短い波長をもつ光に対して不透過性であり、したがって、樹脂から転送ウエハを剥離する際に、シリコン、InP、またはGaAsを通って照らすためにUV光は使用できないことに留意されたい。
Claims (15)
- 対応する樹脂を使用してチップをターゲットウエハに接合するための方法であって、前記方法は、
転送基板に注入領域を形成することであって、前記注入領域が前記転送基板において第1の深度で形成される、ことと、
ライザーを形成するために前記転送基板の一部分をエッチングすることであって、
エッチングされる前記転送基板の前記一部分が第2の深度にエッチングされ、
前記第2の深度が前記転送基板の表面に関して前記第1の深度よりも大きく、
前記ライザーの一部は、前記ライザーが前記注入領域の一部分を備えるように、前記第2の深度にエッチングされない、
ことと、
対応する樹脂を前記転送基板に適用することと、
前記対応する樹脂にチップを固定することであって、前記チップが、前記ライザーの上方の前記対応する樹脂に固定される、ことと、
前記対応する樹脂の過多を除去することであって、
前記対応する樹脂の前記過多が、前記ライザーと前記チップの間にない樹脂を含み、
前記対応する樹脂の前記過多を除去することが、前記対応する樹脂の柱を残し、
前記対応する樹脂の前記柱が前記ライザーと前記チップとの間にある、
ことと、
前記チップを前記ターゲットウエハに接合することであって、前記チップを前記ターゲットウエハに接合することは、前記チップが前記対応する樹脂の前記柱に固定されている間に実施される、ことと、
前記ライザーの残余部分が前記転送基板から分離可能であるように、前記注入領域において前記転送基板を砕くことと、
前記ライザーの前記残余部分から前記転送基板を除去することであって、前記ライザーの前記残余部分が前記対応する樹脂の前記柱に接続される、ことと、
前記対応する樹脂の前記柱から前記ライザーの前記残余部分を除去することであって、前記ライザーの前記残余部分から前記転送基板を除去した後に、前記ライザーの前記残余部分が前記対応する樹脂の前記柱から除去される、ことと
前記チップから前記対応する樹脂の前記柱を除去することであって、前記チップから前記対応する樹脂の前記柱を除去することは、前記対応する樹脂の前記柱から前記ライザーの前記残余部分を除去した後に実施される、ことと
含む、方法。 - 前記対応する樹脂中にピットを形成することをさらに含み、
前記ピットは、前記ピットを形成するために前記対応する樹脂の一部分を除去することによって形成され、
前記ピットは、前記ライザーの上方の前記対応する樹脂において形成され、
前記チップは前記ピットの表面に固定される、
請求項1に記載の方法。 - 前記チップの側部を保護するために前記ピットを材料で充填することと、
前記チップが前記対応する樹脂に固定されている間に前記チップの一部分を除去することと
をさらに含む、請求項2に記載の方法。 - 前記チップの側部を保護するための前記材料はフォトレジストまたはポリマー材料である、請求項3に記載の方法。
- 前記チップに材料を適用することをさらに含み、
前記チップに適用される前記材料は、前記チップを前記ターゲットウエハに接合する際に使用され、
前記チップに適用される前記材料は、前記チップが前記対応する樹脂に固定されている間に適用される、
請求項1に記載の方法。 - 前記ターゲットウエハはシリコンを備え、
前記転送基板はシリコンを備え、
前記チップはIII−V族半導体材料を備える、
請求項1に記載の方法。 - 前記転送基板は200nmから400nmまでの範囲の光に対して不透過性である、請求項1に記載の方法。
- 前記注入領域は水素、B、He、またはSi注入領域である、請求項1に記載の方法。
- 前記ターゲットウエハは、リセスを形成する壁およびフロアを備え、
前記チップは、前記ターゲットウエハの前記リセスの前記フロアに接合され、
前記ライザーは前記リセスの幅よりも大きい幅を有する、
請求項1に記載の方法。 - 前記チップは、前記ターゲットウエハにおいて見つけられない光学的、電気的、および/または磁気的性質を有する、請求項1に記載の方法。
- 前記チップはレーザーのための利得媒質を備える、請求項1に記載の方法。
- 前記対応する樹脂に第2のチップを固定することと、
前記ターゲットウエハに前記チップを接合するのと同時に前記ターゲットウエハに前記第2のチップを接合することと
をさらに含む、請求項1に記載の方法。 - 対応する樹脂を使用してチップをターゲットウエハに接合するための方法であって、前記方法は、
対応する樹脂を転送基板に適用することであって、前記転送基板が、200nmから400nmまでの範囲の紫外光に対して不透過性である、ことと、
前記対応する樹脂中にピットを形成することと、
前記対応する樹脂の前記ピットにおいてチップを固定することと、
前記対応する樹脂の過多を除去することであって、前記対応する樹脂の前記過多を除去することが、前記転送基板と前記チップとの間に前記対応する樹脂の柱を残す、ことと、
前記チップを前記ターゲットウエハに接合することであって、前記チップを前記ターゲットウエハに接合することは、前記チップが前記対応する樹脂の前記柱に固定されている間に実施される、ことと、
前記対応する樹脂の前記柱から前記転送基板を除去することと、
前記チップから前記対応する樹脂の前記柱を除去することと
を含む、方法。 - 前記ピットをフォトレジストおよび/またはポリマー材料で充填することと、
前記チップが前記ピット中にある間に前記チップの一部を除去するかまたは前記チップに材料を追加することと
をさらに含む、請求項13に記載の前記対応する樹脂を使用してチップを前記ターゲットウエハに接合するための方法。 - 前記転送基板に注入領域を形成することと、
前記注入領域において前記転送基板を砕くことと
をさらに含む、請求項13に記載の前記対応する樹脂を使用してチップを前記ターゲットウエハに接合するための方法。
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US14/562,169 US9209142B1 (en) | 2014-09-05 | 2014-12-05 | Semiconductor bonding with compliant resin and utilizing hydrogen implantation for transfer-wafer removal |
PCT/US2015/048176 WO2016036874A1 (en) | 2014-09-05 | 2015-09-02 | Semiconductor bonding with compliant resin and utilizing hydrogen implantation for transfer-wafer removal |
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