JP6731344B2 - ハイブリッドの高−k first及び高−k lastリプレースメントゲートプロセス - Google Patents
ハイブリッドの高−k first及び高−k lastリプレースメントゲートプロセス Download PDFInfo
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- JP6731344B2 JP6731344B2 JP2016543602A JP2016543602A JP6731344B2 JP 6731344 B2 JP6731344 B2 JP 6731344B2 JP 2016543602 A JP2016543602 A JP 2016543602A JP 2016543602 A JP2016543602 A JP 2016543602A JP 6731344 B2 JP6731344 B2 JP 6731344B2
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- gate
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- gate dielectric
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- 238000000034 method Methods 0.000 title claims description 47
- 229910052751 metal Inorganic materials 0.000 claims description 69
- 239000002184 metal Substances 0.000 claims description 69
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 46
- 229920005591 polysilicon Polymers 0.000 claims description 46
- 239000000463 material Substances 0.000 claims description 44
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 30
- 238000000151 deposition Methods 0.000 claims description 22
- 229920002120 photoresistant polymer Polymers 0.000 claims description 22
- 235000012239 silicon dioxide Nutrition 0.000 claims description 15
- 239000000377 silicon dioxide Substances 0.000 claims description 15
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 claims description 8
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 8
- 229910052782 aluminium Inorganic materials 0.000 claims description 7
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 7
- 229910000838 Al alloy Inorganic materials 0.000 claims description 6
- UQZIWOQVLUASCR-UHFFFAOYSA-N alumane;titanium Chemical compound [AlH3].[Ti] UQZIWOQVLUASCR-UHFFFAOYSA-N 0.000 claims description 6
- 238000005498 polishing Methods 0.000 claims description 5
- 229910052697 platinum Inorganic materials 0.000 claims description 4
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 claims description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 3
- 239000010936 titanium Substances 0.000 claims description 3
- 229910052719 titanium Inorganic materials 0.000 claims description 3
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 3
- 229910052721 tungsten Inorganic materials 0.000 claims description 3
- 239000010937 tungsten Substances 0.000 claims description 3
- 238000005530 etching Methods 0.000 claims 15
- 239000000758 substrate Substances 0.000 claims 5
- 229910017107 AlOx Inorganic materials 0.000 claims 4
- 229910003087 TiOx Inorganic materials 0.000 claims 4
- HLLICFJUWSZHRJ-UHFFFAOYSA-N tioxidazole Chemical compound CCCOC1=CC=C2N=C(NC(=O)OC)SC2=C1 HLLICFJUWSZHRJ-UHFFFAOYSA-N 0.000 claims 4
- 238000004519 manufacturing process Methods 0.000 description 13
- 238000000231 atomic layer deposition Methods 0.000 description 7
- 239000003989 dielectric material Substances 0.000 description 4
- 229910004129 HfSiO Inorganic materials 0.000 description 3
- 229910004298 SiO 2 Inorganic materials 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 3
- 150000002739 metals Chemical class 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 2
- 238000007704 wet chemistry method Methods 0.000 description 2
- 239000000969 carrier Substances 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229910021332 silicide Inorganic materials 0.000 description 1
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
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Description
Claims (19)
- 集積回路を形成するプロセスであって、
前記集積回路の部分的に処理されたウエハを提供することと、
850℃以上の温度で前記部分的に処理されたウエハ上に第1のゲート誘電体を成長させることと、
前記第1のゲート誘電体上に高−kの最初の(first)ゲート誘電体を堆積させることと、
前記高−kの最初のゲート誘電体上にリプレースメントゲートNMOSトランジスタのNMOSポリシリコンリプレースメントゲートを形成することと、
前記高−kの最初のゲート誘電体上にリプレースメントゲートPMOSトランジスタのPMOSポリシリコンリプレースメントゲートを形成することと、
前記リプレースメントゲートNMOSトランジスタの上と前記リプレースメントゲートPMOSトランジスタの上とにリプレースメントゲート誘電体を堆積させることと、
前記PMOSポリシリコンリプレースメントゲートの頂部を露出させ、前記NMOSポリシリコンリプレースメントゲートの頂部を露出させるために、前記リプレースメントゲート誘電体を平坦化することと、
前記NMOSポリシリコンリプレースメントゲートを覆って前記PMOSポリシリコンリプレースメントゲートを露出させるNMOSトランジスタフォトレジストパターンを形成することと、
PMOSリプレースメントゲートトレンチを形成するために前記PMOSポリシリコンリプレースメントゲートを取り除くことと、
前記PMOSリプレースメントゲートトレンチの底部から、前記高−kの最初のゲート誘電体を取り除き、前記第1のゲート誘電体を取り除くことと、
前記NMOSトランジスタフォトレジストパターンを取り除くことと、
少なくとも前記PMOSリプレースメントゲートトレンチの前記底部を覆う第2のゲート誘電体を形成することと、
少なくとも前記PMOSリプレースメントゲートトレンチ内に高−kの最後の(last)ゲート誘電体を堆積させることと、
前記高−kの最後のゲート誘電体上にPMOS金属ゲート材料を堆積させることと、
前記リプレースメントゲートPMOSトランジスタの領域を覆って前記リプレースメントゲートNMOSトランジスタの領域を露出させるPMOSトランジスタフォトレジストパターンを形成することと、
前記リプレースメントゲートNMOSトランジスタの領域から前記PMOS金属ゲート材料をエッチングすることと、
前記リプレースメントゲートNMOSトランジスタの領域から前記高−kの最後のゲート誘電体をエッチングすることと、
NMOSリプレースメントゲートトレンチを形成するために前記NMOSポリシリコンリプレースメントゲートをエッチングすることと、
前記PMOSトランジスタフォトレジストパターンを取り除くことと、
少なくとも前記NMOSリプレースメントゲートトレンチ内にNMOS金属ゲート材料を堆積させることと、
前記NMOSリプレースメントゲートトレンチにおいてNMOS金属ゲートを形成し、前記PMOSリプレースメントゲートトレンチにおいてPMOS金属ゲートを形成するために、前記NMOS金属ゲート材料と前記PMOS金属ゲート材料とを研磨して取り除くことと、
を含む、プロセス。 - 請求項1に記載のプロセスであって、
前記第1のゲート誘電体が、0.5〜1.5nmの範囲の厚みを有する二酸化シリコンであり、
前記第2のゲート誘電体が、約0.6nmの厚みを有する、プロセス。 - 請求項1に記載のプロセスであって、
前記高−kの最初のゲート誘電体が、HfOxとHfSiOxとHfSiONとZrO2とHfZrOxとAlOxとTiOxとから成るグループから選択され、
前記高−kの最後のゲート誘電体が、HfOxとHfSiOxとHfSiONとZrO2とHfZrOxとAlOxとTiOxとから成るグループから選択される、プロセス。 - 請求項1に記載のプロセスであって、
前記NMOS金属ゲート材料が、チタンとアルミニウムとチタンアルミニウム合金とタングステンとから成るグループから選択され、
前記PMOS金属ゲート材料が、チタン窒化物と窒化タンタルとアルミニウムとプラチナとから成るグループから選択される、プロセス。 - 請求項1に記載のプロセスであって、
前記第1のゲート誘電体が、0.5〜1.5nmの範囲の厚みを有する窒化された二酸化シリコンであり、
前記高−kの最初のゲート誘電体が、1〜3nmの範囲の厚みを有するHfOxであり、
前記NMOS金属ゲート材料が、約3nmの厚みを有するチタンアルミニウム合金であり、
前記第2のゲート誘電体が、約0.6nmの厚みを有してSC1で化学成長され、
前記高−kの最後のゲート誘電体が、1〜3nmの範囲の厚みを有するHfOxであり、
前記PMOS金属ゲート材料が、約8nmの厚みを有するチタン窒化物である、プロセス。 - 集積回路を形成するプロセスであって、
前記集積回路の部分的に処理されたウエハを提供することと、
850℃以上の温度で前記部分的に処理されたウエハ上に第1のゲート誘電体を成長させることと、
前記第1のゲート誘電体上に高−kの最初の(first)ゲート誘電体を堆積させることと、
前記高−kの最初のゲート誘電体上にリプレースメントゲートNMOSトランジスタのNMOSポリシリコンリプレースメントゲートを形成することと、
前記高−kの最初のゲート誘電体上にリプレースメントゲートPMOSトランジスタのPMOSポリシリコンリプレースメントゲートを形成することと、
前記リプレースメントゲートNMOSトランジスタの上と前記リプレースメントゲートPMOSトランジスタの上とにリプレースメントゲート誘電体を堆積させることと、
前記PMOSポリシリコンリプレースメントゲートの頂部と前記NMOSポリシリコンリプレースメントゲートの頂部とを露出させるために、前記リプレースメントゲート誘電体を平坦化することと、
前記NMOSポリシリコンリプレースメントゲートを取り除くことによってNMOSリプレースメントゲートトレンチを形成することと、
前記PMOSポリシリコンリプレースメントゲートを取り除くことによってPMOSリプレースメントゲートトレンチを形成することと、
前記NMOSリプレースメントゲートトレンチを覆って前記PMOSリプレースメントゲートトレンチを露出させるNMOSトランジスタフォトレジストパターンを形成することと、
前記PMOSリプレースメントゲートトレンチの底部から、前記高−kの最初のゲート誘電体を取り除き、前記の第1のゲート誘電体を取り除くことと、
前記NMOSトランジスタフォトレジストパターンを取り除くことと、
第2のゲート誘電体を形成することであって、前記第2のゲート誘電体が、少なくとも前記PMOSリプレースメントゲートトレンチの底部を覆う、前記第2のゲート誘電体を形成することと、
高−kの最後の(last)ゲート誘電体を堆積させることと、
PMOS金属ゲート材料を堆積させることと、
前記リプレースメントゲートPMOSトランジスタの領域を覆って前記リプレースメントゲートNMOSトランジスタの領域を露出させるPMOSトランジスタフォトレジストパターンを形成することと、
前記リプレースメントゲートNMOSトランジスタの領域から前記PMOS金属ゲート材料をエッチングすることと、
前記リプレースメントゲートNMOSトランジスタの領域から前記高−kの最後のゲート誘電体をエッチングすることと、
少なくとも前記NMOSリプレースメントゲートトレンチ内にNMOS金属ゲート材料を堆積させることと、
前記NMOSリプレースメントゲートトレンチにおいてNMOS金属ゲートを形成し、前記PMOSリプレースメントゲートトレンチにおいてPMOS金属ゲートを形成するために、前記NMOS金属ゲート材料と前記PMOS金属ゲート材料とを研磨して取り除くことと、
を含む、プロセス。 - 請求項6に記載のプロセスであって、
前記高−kの最初のゲート誘電体がHfOxであり、
前記高−kの最後のゲート誘電体がHfSiONであり、
前記高−kの最後のゲート誘電体をエッチングすることが、約80℃の温度で1000:1のHFを用いて前記高−kの最後のゲート誘電体をエッチングすることを含む、プロセス。 - 請求項6に記載のプロセスであって、
前記高−kの最初のゲート誘電体がHfOxであり、
前記高−kの最後のゲート誘電体がZrO2であり、
前記高−kの最後のゲート誘電体をエッチングすることが、約80℃の温度で1000:1のHFを用いて前記高−kの最後のゲート誘電体をエッチングすることを含む、プロセス。 - 請求項6に記載のプロセスであって、
前記第1のゲート誘電体が、0.5〜1.5nmの範囲の厚みを有する二酸化シリコンであり、
前記第2のゲート誘電体が、約0.6nmの厚みまでSC1において化学成長された酸化物である、プロセス。 - 請求項6に記載のプロセスであって、
前記高−kの最初のゲート誘電体が、HfOxとHfSiOxとHfSiONとZrO2とHfZrOxとAlOxとTiOxとから成るグループから選択され、
前記高−kの最後のゲート誘電体が、HfOxとHfSiOxとHfSiONとZrO2とHfZrOxとAlOxとTiOxとから成るグループから選択される、プロセス。 - 請求項6に記載のプロセスであって、
前記NMOS金属ゲート材料が、チタンとアルミニウムとチタンアルミニウム合金とタングステンとから成るグループから選択され、
前記PMOS金属ゲート材料が、チタン窒化物と窒化タンタルとアルミニウムとプラチナとから成るグループから選択される、プロセス。 - 請求項6に記載のプロセスであって、
前記第1のゲート誘電体が、0.5〜1.5nmの範囲の厚みを有する窒化された二酸化シリコンであり、
前記高−kの最初のゲート誘電体が、1〜3nmの範囲の厚みを有するHfOxであり、
前記NMOS金属ゲート材料が、約3nmの厚みを有するチタンアルミニウム合金であり、
前記第2のゲート誘電体が、約0.6nmの厚みを有してSC1で化学成長され、
前記高−kの最後のゲート誘電体が、1〜3nmの範囲の厚みを有するHfSiON又はZrO2であり、
前記PMOS金属ゲート材料が、約8nmの厚みを有するチタン窒化物である、プロセス。 - 集積回路を形成するプロセスであって、
基板上に第1のゲート誘電体を成長させることと、
前記第1のゲート誘電体上に高−kの最初のゲート誘電体を堆積することと、
前記高−kの最初のゲート誘電体上に第1のポリシリコンリプレースメントゲートと第2のポリシリコンリプレースメントゲートとを形成することと、
前記基板の上にリプレースメントゲート誘電体を堆積することと、
前記第1のポリシリコンリプレースメントゲートと前記第2のポリシリコンリプレースメントゲートとを露出させるために前記リプレースメントゲート誘電体を平坦化することと、
前記第1のポリシリコンリプレースメントゲートを除去することによって第1のゲートトレンチを形成することと、
前記第2のポリシリコンリプレースメントゲートを除去することによって第2のゲートトレンチを形成することと、
前記第2のゲートトレンチから前記高−kの最初のゲート誘電体と前記第1のゲート誘電体とを除去することであって、前記第1のゲートトレンチからは除去しない、前記高−kの最初のゲート誘電体と前記第1のゲート誘電体とを除去することと、
前記第2のゲートトレンチ内を含む前記基板の上に第2のゲート誘電体を形成することと、
前記第1のゲートトレンチと前記第2のゲートトレンチとの両方内を含む前記基板上に高−kの最後のゲート誘電体を堆積することと、
前記第1のゲートトレンチ内と前記第2のゲートトレンチ内とを含む前記高−kの最後のゲート誘電体上にPMOS金属ゲート材料を堆積することと、
前記第1のゲートトレンチから前記PMOS金属ゲート材料をエッチングすることと、
前記第1のゲートトレンチから前記高−kの最後のゲート誘電体をエッチングすることと、
前記基板の上と第1のゲートトレンチ内とにNMOS金属ゲート材料を堆積することであって、前記第2のゲートトレンチには堆積しない、前記NMOS金属ゲート材料を堆積することと、
前記NMOS金属ゲート材料と前記PMOS金属ゲート材料とを研磨することによって前記NMOSリプレースメントゲートトレンチ内にNMOS金属ゲートを形成して前記PMOSリプレースメントゲートトレンチ内にPMOS金属ゲートを形成することと、
を含む、プロセス。 - 請求項13に記載のプロセスであって、
前記高−kの最初のゲート誘電体がHfOXである、プロセス。 - 請求項13に記載のプロセスであって、
前記高−kの最後のゲート誘電体がHfSiONである、プロセス。 - 請求項13に記載のプロセスであって、
前記高−kの最後のゲート誘電体をエッチングすることが、約80℃の温度で1000:1の比のHFを用いて前記高−kの最後のゲート誘電体をエッチングすることを含む、プロセス。 - 請求項13に記載のプロセスであって、
前記高−kの最後のゲート誘電体がZrO2である、プロセス。 - 請求項13に記載のプロセスであって、
前記高−kの最初のゲート誘電体が0.5〜1.5nmの範囲の厚さを備える2酸化シリコンであり、
前記第2のゲート誘電体が、SC1で約0.6nmの厚さまで酸化化学成長されたものである、プロセス。 - 集積回路を形成するプロセスであって、
部分的に処理されたウェハ上に第1のゲート誘電体を成長させることと、
前記第1のゲート誘電体上に高−kの最初のゲート誘電体を堆積することと、
前記高−kの最初のゲート誘電体上にNMOSトランジスタのNMOSポリシリコンリプレースメントゲートを形成することと、
前記高−kの最初のゲート誘電体上にPMOSトランジスタのPMOSポリシリコンリプレースメントゲートを形成することと、
前記NMOSトランジスタの領域の上と前記PMOSトランジスタの領域の上とにプリメタル誘電体を堆積することと、
前記PMOSポリシリコンリプレースメントゲートの頂部と前記NMOSポリシリコンリプレースメントゲートの頂部とを露出させるために前記プリメタル誘電体を平坦化することと、
前記NMOSポリシリコンリプレースメントゲートを除去することによってNMOSリプレースメントゲートトレンチを形成することと、
前記PMOSポリシリコンリプレースメントゲートを除去することによってPMOSリプレースメントゲートトレンチを形成することと、
前記NMOSポリシリコンリプレースメントゲートと前記PMOSポリシリコンリプレースメントゲートとを除去した後にNMOSトランジスタフォトレジストパターンを形成することであって、前記NMOSトランジスタフォトレジストパターンが前記NMOSリプレースメントゲートトレンチを覆って前記PMOSリプレースメントゲートトレンチを露出させる、前記NMOSトランジスタフォトレジストパターンを形成することと、
前記高−kの最初のゲート誘電体を除去して前記PMOSリプレースメントゲートトレンチの底部から前記第1のゲート誘電体を除去することと、
前記NMOSトランジスタフォトレジストパターンを除去することと、
第2のゲート誘電体を形成することであって、前記第2のゲート誘電体が少なくとも前記PMOSリプレースメントゲートトレンチの底部を覆う、前記第2のゲート誘電体を形成することと、
前記PMOSリプレースメントゲートトレンチ内と前記NMOSリプレースメントゲートトレンチ内とに高−kの最後のゲート誘電体を堆積することと、
PMOS金属ゲート材料を堆積することと、
PMOSトランジスタフォトレジストパターンを形成することであって、前記PMOSトランジスタフォトレジストパターンが前記PMOSトランジスタの領域を覆って前記NMOSトランジスタの領域を露出させる、前記PMOSトランジスタフォトレジストパターンを形成することと、
前記NMOSリプレースメントゲートトレンチを含む前記NMOSトランジスタの領域から前記PMOS金属ゲート材料をエッチングすることと、
前記NMOSリプレースメントゲートトレンチを含む前記NMOSトランジスタの領域から前記高−kの最後のゲート誘電体をエッチングすることと、
少なくとも前記NMOSリプレースメントゲートトレンチ内にNMOS金属ゲート材料を堆積することと、
前記NMOS金属ゲート材料と前記PMOS金属ゲート材料とを研磨することによって前記NMOSリプレースメントゲートトレンチ内にNMOS金属ゲートを形成して前記PMOSリプレースメントゲートトレンチ内にPMOS金属ゲートを形成することと、
を含む、プロセス。
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