JP6677058B2 - Ｓｎ−Ｚｎ−Ｏ系酸化物焼結体とその製造方法 - Google Patents

Ｓｎ−Ｚｎ−Ｏ系酸化物焼結体とその製造方法 Download PDF

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Publication number
JP6677058B2
JP6677058B2 JP2016082691A JP2016082691A JP6677058B2 JP 6677058 B2 JP6677058 B2 JP 6677058B2 JP 2016082691 A JP2016082691 A JP 2016082691A JP 2016082691 A JP2016082691 A JP 2016082691A JP 6677058 B2 JP6677058 B2 JP 6677058B2
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sintered body
powder
less
relative density
based oxide
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JP2016082691A
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Japanese (ja)
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JP2017160105A5 (enExample
JP2017160105A (ja
Inventor
勲雄 安東
勲雄 安東
誠 小沢
誠 小沢
茂 五十嵐
茂 五十嵐
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Sumitomo Metal Mining Co Ltd
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Sumitomo Metal Mining Co Ltd
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Priority to PCT/JP2016/086172 priority Critical patent/WO2017149882A1/ja
Priority to KR1020187024734A priority patent/KR20180116293A/ko
Priority to CN201680083127.1A priority patent/CN108698937B/zh
Priority to TW105141143A priority patent/TWI748971B/zh
Publication of JP2017160105A publication Critical patent/JP2017160105A/ja
Publication of JP2017160105A5 publication Critical patent/JP2017160105A5/ja
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    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C04B35/453—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zinc, tin, or bismuth oxides or solid solutions thereof with other oxides, e.g. zincates, stannates or bismuthates
    • C04B35/457—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zinc, tin, or bismuth oxides or solid solutions thereof with other oxides, e.g. zincates, stannates or bismuthates based on tin oxides or stannates
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
    • C04B35/62605—Treating the starting powders individually or as mixtures
    • C04B35/62695—Granulation or pelletising
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/64—Burning or sintering processes
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
    • C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3231—Refractory metal oxides, their mixed metal oxides, or oxide-forming salts thereof
    • C04B2235/3251—Niobium oxides, niobates, tantalum oxides, tantalates, or oxide-forming salts thereof
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3284—Zinc oxides, zincates, cadmium oxides, cadmiates, mercury oxides, mercurates or oxide forming salts thereof
    • C—CHEMISTRY; METALLURGY
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    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/50—Constituents or additives of the starting mixture chosen for their shape or used because of their shape or their physical appearance
    • C04B2235/54—Particle size related information
    • C04B2235/5418—Particle size related information expressed by the size of the particles or aggregates thereof
    • C04B2235/5436—Particle size related information expressed by the size of the particles or aggregates thereof micrometer sized, i.e. from 1 to 100 micron
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/60—Aspects relating to the preparation, properties or mechanical treatment of green bodies or pre-forms
    • C04B2235/604—Pressing at temperatures other than sintering temperatures
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/65—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
    • C04B2235/658—Atmosphere during thermal treatment
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
    • C04B2235/74—Physical characteristics
    • C04B2235/77—Density

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Compositions Of Oxide Ceramics (AREA)
  • Physical Vapour Deposition (AREA)
JP2016082691A 2016-03-04 2016-04-18 Ｓｎ−Ｚｎ−Ｏ系酸化物焼結体とその製造方法 Expired - Fee Related JP6677058B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
PCT/JP2016/086172 WO2017149882A1 (ja) 2016-03-04 2016-12-06 Ｓｎ－Ｚｎ－Ｏ系酸化物焼結体とその製造方法
KR1020187024734A KR20180116293A (ko) 2016-03-04 2016-12-06 Sn-Zn-O 계 산화물 소결체와 그 제조 방법
CN201680083127.1A CN108698937B (zh) 2016-03-04 2016-12-06 Sn-Zn-O系氧化物烧结体及其制造方法
TW105141143A TWI748971B (zh) 2016-03-04 2016-12-13 Ｓｎ-Ｚｎ-Ｏ系氧化物燒結體及其製造方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2016042332 2016-03-04
JP2016042332 2016-03-04

Publications (3)

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JP2017160105A JP2017160105A (ja) 2017-09-14
JP2017160105A5 JP2017160105A5 (enExample) 2018-10-04
JP6677058B2 true JP6677058B2 (ja) 2020-04-08

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JP (1) JP6677058B2 (enExample)
KR (1) KR20180116293A (enExample)
CN (1) CN108698937B (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019163494A (ja) * 2018-03-19 2019-09-26 住友金属鉱山株式会社 透明酸化物膜、透明酸化物膜の製造方法、酸化物焼結体及び透明樹脂基板
JP2021021122A (ja) * 2019-07-30 2021-02-18 住友金属鉱山株式会社 蒸着用タブレットと酸化物透明導電膜および酸化錫系焼結体の製造方法
CN115745573A (zh) * 2022-10-31 2023-03-07 芜湖映日科技股份有限公司 一种细晶izo靶材制备方法
CN118724584B (zh) * 2024-08-06 2025-04-25 深圳众诚达应用材料股份有限公司 一种低电阻的氧化锡基靶材及其制备方法

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05155651A (ja) * 1990-12-14 1993-06-22 Hitachi Metals Ltd 酸化インジウム系焼結体および酸化物焼結体の製造方法
WO2006075483A1 (ja) * 2005-01-12 2006-07-20 Idemitsu Kosan Co., Ltd. ＴＦＴ基板及びその製造方法、及び、Ａｌ配線を備えた透明導電膜積層基板及びその製造方法、及び、Ａｌ配線を備えた透明導電膜積層回路基板及びその製造方法、及び、酸化物透明導電膜材料
JP4552950B2 (ja) * 2006-03-15 2010-09-29 住友金属鉱山株式会社 ターゲット用酸化物焼結体、その製造方法、それを用いた透明導電膜の製造方法、及び得られる透明導電膜
JP4730204B2 (ja) * 2006-05-24 2011-07-20 住友金属鉱山株式会社 酸化物焼結体ターゲット、及びそれを用いた酸化物透明導電膜の製造方法
JP2008192604A (ja) * 2007-01-12 2008-08-21 Sumitomo Chemical Co Ltd 透明導電膜用材料
JP4745319B2 (ja) * 2007-11-15 2011-08-10 Ｊｘ日鉱日石金属株式会社 光情報記録媒体
WO2009148154A1 (ja) * 2008-06-06 2009-12-10 出光興産株式会社 酸化物薄膜用スパッタリングターゲットおよびその製造法
KR101671543B1 (ko) * 2008-11-20 2016-11-01 이데미쓰 고산 가부시키가이샤 ＺｎＯ-ＳｎＯ₂-Ｉｎ₂Ｏ₃계 산화물 소결체 및 비정질 투명 도전막
EP2447233A1 (en) * 2010-10-27 2012-05-02 Corning Incorporated Tin oxide-based thermoelectric materials
JP2012180248A (ja) * 2011-03-02 2012-09-20 Kobelco Kaken:Kk 酸化物焼結体およびスパッタリングターゲット
JP5686067B2 (ja) * 2011-08-05 2015-03-18 住友金属鉱山株式会社 Ｚｎ−Ｓｎ−Ｏ系酸化物焼結体とその製造方法
JP6278229B2 (ja) * 2012-08-10 2018-02-14 三菱マテリアル株式会社 透明酸化物膜形成用スパッタリングターゲット及びその製造方法
JP6341198B2 (ja) * 2013-04-12 2018-06-13 日立金属株式会社 酸化物半導体ターゲット、酸化物半導体膜及びその製造方法、並びに薄膜トランジスタ
CN104529426B (zh) * 2014-12-19 2016-08-24 江门安磁电子有限公司 用于120～160℃的高Bs低损耗锰锌铁氧体材料及其制造方法
TWM512182U (zh) * 2015-01-21 2015-11-11 Univ Tajen 醫療照護系統及其醫療教學裝置

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JP2017160105A (ja) 2017-09-14
KR20180116293A (ko) 2018-10-24
CN108698937A (zh) 2018-10-23
CN108698937B (zh) 2021-10-08

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