JP6632252B2 - 検出装置、インプリント装置、物品の製造方法及び照明光学系 - Google Patents

検出装置、インプリント装置、物品の製造方法及び照明光学系 Download PDF

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Publication number
JP6632252B2
JP6632252B2 JP2015164014A JP2015164014A JP6632252B2 JP 6632252 B2 JP6632252 B2 JP 6632252B2 JP 2015164014 A JP2015164014 A JP 2015164014A JP 2015164014 A JP2015164014 A JP 2015164014A JP 6632252 B2 JP6632252 B2 JP 6632252B2
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JP
Japan
Prior art keywords
light
alignment mark
illuminated
illumination
optical system
Prior art date
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Application number
JP2015164014A
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English (en)
Japanese (ja)
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JP2017041608A (ja
JP2017041608A5 (enExample
Inventor
貴光 古巻
貴光 古巻
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Canon Inc
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Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2015164014A priority Critical patent/JP6632252B2/ja
Priority to KR1020187007830A priority patent/KR102082584B1/ko
Priority to CN201680048330.5A priority patent/CN107924817B/zh
Priority to PCT/JP2016/003582 priority patent/WO2017033410A1/en
Priority to US15/753,924 priority patent/US10732523B2/en
Publication of JP2017041608A publication Critical patent/JP2017041608A/ja
Publication of JP2017041608A5 publication Critical patent/JP2017041608A5/ja
Application granted granted Critical
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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/02—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/28—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with deflection of beams of light, e.g. for direct optical indication
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/70191—Optical correction elements, filters or phase plates for controlling intensity, wavelength, polarisation, phase or the like
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70758—Drive means, e.g. actuators, motors for long- or short-stroke modules or fine or coarse driving
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
    • G03F7/70833—Mounting of optical systems, e.g. mounting of illumination system, projection system or stage systems on base-plate or ground
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7003—Alignment type or strategy, e.g. leveling, global alignment
    • G03F9/7042—Alignment for lithographic apparatus using patterning methods other than those involving the exposure to radiation, e.g. by stamping or imprinting
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34

Landscapes

  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • Environmental & Geological Engineering (AREA)
  • Public Health (AREA)
  • Epidemiology (AREA)
  • Health & Medical Sciences (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP2015164014A 2015-08-21 2015-08-21 検出装置、インプリント装置、物品の製造方法及び照明光学系 Active JP6632252B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2015164014A JP6632252B2 (ja) 2015-08-21 2015-08-21 検出装置、インプリント装置、物品の製造方法及び照明光学系
KR1020187007830A KR102082584B1 (ko) 2015-08-21 2016-08-03 검출 장치, 임프린트 장치, 물품 제조 방법, 조명 광학계 및 검출 방법
CN201680048330.5A CN107924817B (zh) 2015-08-21 2016-08-03 检测设备、压印装置、制造物品的方法、照明光学系统以及检测方法
PCT/JP2016/003582 WO2017033410A1 (en) 2015-08-21 2016-08-03 Detection device, imprint apparatus, method of manufacturing article, illumination optical system, and detection method
US15/753,924 US10732523B2 (en) 2015-08-21 2016-08-03 Detection device, imprint apparatus, method of manufacturing article, illumination optical system, and detection method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2015164014A JP6632252B2 (ja) 2015-08-21 2015-08-21 検出装置、インプリント装置、物品の製造方法及び照明光学系

Publications (3)

Publication Number Publication Date
JP2017041608A JP2017041608A (ja) 2017-02-23
JP2017041608A5 JP2017041608A5 (enExample) 2018-09-20
JP6632252B2 true JP6632252B2 (ja) 2020-01-22

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JP2015164014A Active JP6632252B2 (ja) 2015-08-21 2015-08-21 検出装置、インプリント装置、物品の製造方法及び照明光学系

Country Status (5)

Country Link
US (1) US10732523B2 (enExample)
JP (1) JP6632252B2 (enExample)
KR (1) KR102082584B1 (enExample)
CN (1) CN107924817B (enExample)
WO (1) WO2017033410A1 (enExample)

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JP7057094B2 (ja) * 2017-10-13 2022-04-19 キヤノン株式会社 位置検出装置、インプリント装置および、物品製造方法
JP7030533B2 (ja) * 2018-01-15 2022-03-07 キオクシア株式会社 インプリント装置、インプリント方法、及び半導体装置の製造方法
JP7038562B2 (ja) * 2018-02-13 2022-03-18 キヤノン株式会社 検出装置、リソグラフィ装置、および物品の製造方法
NL2021404B1 (en) * 2018-07-27 2020-01-31 Wavin Bv A system and a method for building a road
US11561284B2 (en) 2018-11-02 2023-01-24 Waymo Llc Parallax compensating spatial filters
JP7257853B2 (ja) * 2019-04-02 2023-04-14 キヤノン株式会社 位置検出装置、露光装置および物品製造方法
KR102665402B1 (ko) 2019-04-08 2024-05-09 에이에스엠엘 홀딩 엔.브이. 센서 장치, 및 리소그래피 측정 방법
JP7328806B2 (ja) * 2019-06-25 2023-08-17 キヤノン株式会社 計測装置、リソグラフィ装置、および物品の製造方法
JP7301452B2 (ja) * 2019-09-27 2023-07-03 エルジー・ケム・リミテッド マーキングを用いた光学フィルム、光学フィルムの製造装置および製造方法
JP7500258B2 (ja) 2020-04-10 2024-06-17 キヤノン株式会社 検出装置、リソグラフィ装置、物品の製造方法、及び検出方法
JP7716925B2 (ja) * 2020-08-28 2025-08-01 キヤノン株式会社 計測装置、計測方法、リソグラフィー装置、物品製造方法およびモデル
JP7614858B2 (ja) * 2021-01-26 2025-01-16 キヤノン株式会社 検出装置、リソグラフィ装置、および物品製造方法
BR112023015596A2 (pt) * 2021-02-03 2023-10-17 Tpi Composites Inc Rastreamento de coordenada espacial de componentes de conjunto de turbina eólica usando sistema de projeção a laser
JP7550814B2 (ja) * 2022-05-18 2024-09-13 キヤノン株式会社 検出装置、リソグラフィ装置、物品製造方法および検出システム
JP2023177409A (ja) * 2022-06-02 2023-12-14 キヤノン株式会社 インプリント装置、インプリント方法、物品の製造方法、及びコンピュータプログラム

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Also Published As

Publication number Publication date
KR102082584B1 (ko) 2020-02-27
WO2017033410A1 (en) 2017-03-02
JP2017041608A (ja) 2017-02-23
CN107924817B (zh) 2021-09-10
KR20180041736A (ko) 2018-04-24
CN107924817A (zh) 2018-04-17
US20180259863A1 (en) 2018-09-13
US10732523B2 (en) 2020-08-04

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