JPS6483101A - Diffracted beam separation optical system - Google Patents
Diffracted beam separation optical systemInfo
- Publication number
- JPS6483101A JPS6483101A JP62241233A JP24123387A JPS6483101A JP S6483101 A JPS6483101 A JP S6483101A JP 62241233 A JP62241233 A JP 62241233A JP 24123387 A JP24123387 A JP 24123387A JP S6483101 A JPS6483101 A JP S6483101A
- Authority
- JP
- Japan
- Prior art keywords
- diffraction
- diffracted
- mask
- diffracted beams
- diffraction lattice
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Optical Transform (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
PURPOSE:To take out a beam intensity signal having a high S/N ratio using a high sensitivity detector having a large caliber, by once condensing diffracted beams approaching each other and subsequently changing the beam paths of the diffracted beams by a reflecting mirror having a sharp wedge shape. CONSTITUTION:When the first diffraction lattice 5 is formed on a mask 4 and the second diffraction lattice 7 is formed on a water 6 to perform the alignment of the mask and the wafer, the beam emitted from a laser 1 is split into two beam by a splitting prism 2 and incident to an illumination lens 3 to parallelly illuminate the diffraction lattices 5, 7. The diffraction lattices 5, 7 emit parallel diffracted beams approaching each other and these diffracted beams are once converged by a cylindrical lens 9 and subsequently reflected to photodectors separately by a reflecting prism 10 whose leading end is formed into a sharp wedge shape. By this method, the diffracted beam from the diffraction lattice 5 on the mask 4 and the diffracted beam from the diffraction lattice 7 on the wafer 7 can be separated and detected using the photodetectors 11, 12 each having a large diameter.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62241233A JPS6483101A (en) | 1987-09-25 | 1987-09-25 | Diffracted beam separation optical system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62241233A JPS6483101A (en) | 1987-09-25 | 1987-09-25 | Diffracted beam separation optical system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6483101A true JPS6483101A (en) | 1989-03-28 |
Family
ID=17071182
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62241233A Pending JPS6483101A (en) | 1987-09-25 | 1987-09-25 | Diffracted beam separation optical system |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6483101A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5191465A (en) * | 1990-03-28 | 1993-03-02 | Matsushita Electric Industrial Co., Ltd. | Optical apparatus for alignment of reticle and wafer in exposure apparatus |
| JP2017041608A (en) * | 2015-08-21 | 2017-02-23 | キヤノン株式会社 | Detection device, imprinting device, manufacturing method for article and illumination optical system |
| CN115684086A (en) * | 2022-10-12 | 2023-02-03 | 江苏科技大学 | Device and method for measuring solution refractive index based on double-wedge interference model |
-
1987
- 1987-09-25 JP JP62241233A patent/JPS6483101A/en active Pending
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5191465A (en) * | 1990-03-28 | 1993-03-02 | Matsushita Electric Industrial Co., Ltd. | Optical apparatus for alignment of reticle and wafer in exposure apparatus |
| JP2017041608A (en) * | 2015-08-21 | 2017-02-23 | キヤノン株式会社 | Detection device, imprinting device, manufacturing method for article and illumination optical system |
| WO2017033410A1 (en) * | 2015-08-21 | 2017-03-02 | Canon Kabushiki Kaisha | Detection device, imprint apparatus, method of manufacturing article, illumination optical system, and detection method |
| CN107924817A (en) * | 2015-08-21 | 2018-04-17 | 佳能株式会社 | Detection device, imprinting apparatus, method, lamp optical system and the detection method for manufacturing article |
| KR20180041736A (en) * | 2015-08-21 | 2018-04-24 | 캐논 가부시끼가이샤 | Detection device, imprint device, article manufacturing method, illumination optical system and detection method |
| US10732523B2 (en) | 2015-08-21 | 2020-08-04 | Canon Kabushiki Kaisha | Detection device, imprint apparatus, method of manufacturing article, illumination optical system, and detection method |
| CN115684086A (en) * | 2022-10-12 | 2023-02-03 | 江苏科技大学 | Device and method for measuring solution refractive index based on double-wedge interference model |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR880006659A (en) | Optical pickup | |
| JPS5753832A (en) | Method and device for recording of optical information | |
| KR890017627A (en) | Barcode Detection Method of Barcode Reader Using Hologram Scanner and Scanning Optical System | |
| DE69317957D1 (en) | Device for generating laser beams | |
| JPS57150812A (en) | Dark field illuminating optical system | |
| JPS5752005A (en) | Focus detecting method | |
| JPS6483101A (en) | Diffracted beam separation optical system | |
| IT1234466B (en) | DIFFERENTIAL FLUORESCENCE LIDAR AND RELATED METHOD OF DETECTION | |
| FR2442457A1 (en) | Detection of objects passing through light beam - uses two beams of different wavelengths to eliminate erroneous reflections and has optical filter on reflector support cap | |
| JPS6455746A (en) | Optical pickup device | |
| JPS5686340A (en) | Automatic detector for foreign matter | |
| JPS5746334A (en) | Optical information reproducer | |
| JPS57105831A (en) | Detector for optical position | |
| JPS5515144A (en) | Photo circuit element | |
| JPS57105832A (en) | Detector for optical position | |
| JPS5461545A (en) | Optically scanning location | |
| JPS56133704A (en) | Focus error detector | |
| JPS5667815A (en) | Optical scanner | |
| JPS57120242A (en) | Optical information reproducing device | |
| SU1663433A1 (en) | Device for determination of radiation axis shift relative to direction on illuminated object | |
| SU1026105A1 (en) | Cat's eye optical characteristic measuring device | |
| JPS57103008A (en) | Optical position detector | |
| SU853550A1 (en) | Device for measuring angular accelerations | |
| JPS5764712A (en) | Detector for focusing position | |
| EP0364940A3 (en) | Readout apparatus for ring laser gyroscope |