KR102082584B1 - 검출 장치, 임프린트 장치, 물품 제조 방법, 조명 광학계 및 검출 방법 - Google Patents

검출 장치, 임프린트 장치, 물품 제조 방법, 조명 광학계 및 검출 방법 Download PDF

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KR102082584B1
KR102082584B1 KR1020187007830A KR20187007830A KR102082584B1 KR 102082584 B1 KR102082584 B1 KR 102082584B1 KR 1020187007830 A KR1020187007830 A KR 1020187007830A KR 20187007830 A KR20187007830 A KR 20187007830A KR 102082584 B1 KR102082584 B1 KR 102082584B1
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South Korea
Prior art keywords
alignment mark
light beam
illumination
angle distribution
illuminated
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Korean (ko)
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KR20180041736A (ko
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다카미츠 고마키
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캐논 가부시끼가이샤
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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7003—Alignment type or strategy, e.g. leveling, global alignment
    • G03F9/7042—Alignment for lithographic apparatus using patterning methods other than those involving the exposure to radiation, e.g. by stamping or imprinting
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/02—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/28—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with deflection of beams of light, e.g. for direct optical indication
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/70191—Optical correction elements, filters or phase plates for controlling intensity, wavelength, polarisation, phase or the like
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70758—Drive means, e.g. actuators, motors for long- or short-stroke modules or fine or coarse driving
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
    • G03F7/70833—Mounting of optical systems, e.g. mounting of illumination system, projection system or stage systems on base-plate or ground
    • H01L21/027—
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P76/00—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Mechanical Engineering (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Length Measuring Devices By Optical Means (AREA)
KR1020187007830A 2015-08-21 2016-08-03 검출 장치, 임프린트 장치, 물품 제조 방법, 조명 광학계 및 검출 방법 Active KR102082584B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2015164014A JP6632252B2 (ja) 2015-08-21 2015-08-21 検出装置、インプリント装置、物品の製造方法及び照明光学系
JPJP-P-2015-164014 2015-08-21
PCT/JP2016/003582 WO2017033410A1 (en) 2015-08-21 2016-08-03 Detection device, imprint apparatus, method of manufacturing article, illumination optical system, and detection method

Publications (2)

Publication Number Publication Date
KR20180041736A KR20180041736A (ko) 2018-04-24
KR102082584B1 true KR102082584B1 (ko) 2020-02-27

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KR1020187007830A Active KR102082584B1 (ko) 2015-08-21 2016-08-03 검출 장치, 임프린트 장치, 물품 제조 방법, 조명 광학계 및 검출 방법

Country Status (5)

Country Link
US (1) US10732523B2 (enExample)
JP (1) JP6632252B2 (enExample)
KR (1) KR102082584B1 (enExample)
CN (1) CN107924817B (enExample)
WO (1) WO2017033410A1 (enExample)

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US10502830B2 (en) 2016-10-13 2019-12-10 Waymo Llc Limitation of noise on light detectors using an aperture
JP7057094B2 (ja) * 2017-10-13 2022-04-19 キヤノン株式会社 位置検出装置、インプリント装置および、物品製造方法
JP7030533B2 (ja) 2018-01-15 2022-03-07 キオクシア株式会社 インプリント装置、インプリント方法、及び半導体装置の製造方法
JP7038562B2 (ja) * 2018-02-13 2022-03-18 キヤノン株式会社 検出装置、リソグラフィ装置、および物品の製造方法
NL2021404B1 (en) * 2018-07-27 2020-01-31 Wavin Bv A system and a method for building a road
US11561284B2 (en) 2018-11-02 2023-01-24 Waymo Llc Parallax compensating spatial filters
JP7257853B2 (ja) * 2019-04-02 2023-04-14 キヤノン株式会社 位置検出装置、露光装置および物品製造方法
KR102665402B1 (ko) 2019-04-08 2024-05-09 에이에스엠엘 홀딩 엔.브이. 센서 장치, 및 리소그래피 측정 방법
JP7328806B2 (ja) * 2019-06-25 2023-08-17 キヤノン株式会社 計測装置、リソグラフィ装置、および物品の製造方法
JP7301452B2 (ja) * 2019-09-27 2023-07-03 エルジー・ケム・リミテッド マーキングを用いた光学フィルム、光学フィルムの製造装置および製造方法
JP7500258B2 (ja) 2020-04-10 2024-06-17 キヤノン株式会社 検出装置、リソグラフィ装置、物品の製造方法、及び検出方法
JP7716925B2 (ja) * 2020-08-28 2025-08-01 キヤノン株式会社 計測装置、計測方法、リソグラフィー装置、物品製造方法およびモデル
JP7614858B2 (ja) 2021-01-26 2025-01-16 キヤノン株式会社 検出装置、リソグラフィ装置、および物品製造方法
WO2022169929A1 (en) * 2021-02-03 2022-08-11 Tpi Composites, Inc. Spatial coordinate tracking of wind turbine assembly components using laser projection system
JP7550814B2 (ja) * 2022-05-18 2024-09-13 キヤノン株式会社 検出装置、リソグラフィ装置、物品製造方法および検出システム
JP2023177409A (ja) * 2022-06-02 2023-12-14 キヤノン株式会社 インプリント装置、インプリント方法、物品の製造方法、及びコンピュータプログラム
JP2024170791A (ja) * 2023-05-29 2024-12-11 株式会社Ｓｃｒｅｅｎホールディングス 観察装置、観察方法および基板処理装置

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US20080230725A1 (en) 2007-03-23 2008-09-25 Yukio Taniguchi Crystallization apparatus, crystallization method, device, and light modulation element
US20120328725A1 (en) 2011-06-21 2012-12-27 Canon Kabushiki Kaisha Position detection apparatus, imprint apparatus, and position detection method
US20130100459A1 (en) 2011-10-21 2013-04-25 Canon Kabushiki Kaisha Detector, imprint apparatus, and article manufacturing method
US9304403B2 (en) 2013-01-02 2016-04-05 Taiwan Semiconductor Manufacturing Company, Ltd. System and method for lithography alignment

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US20080230725A1 (en) 2007-03-23 2008-09-25 Yukio Taniguchi Crystallization apparatus, crystallization method, device, and light modulation element
US20120328725A1 (en) 2011-06-21 2012-12-27 Canon Kabushiki Kaisha Position detection apparatus, imprint apparatus, and position detection method
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US9304403B2 (en) 2013-01-02 2016-04-05 Taiwan Semiconductor Manufacturing Company, Ltd. System and method for lithography alignment

Also Published As

Publication number Publication date
CN107924817A (zh) 2018-04-17
CN107924817B (zh) 2021-09-10
US10732523B2 (en) 2020-08-04
WO2017033410A1 (en) 2017-03-02
KR20180041736A (ko) 2018-04-24
JP2017041608A (ja) 2017-02-23
US20180259863A1 (en) 2018-09-13
JP6632252B2 (ja) 2020-01-22

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