JP6611727B2 - 熱電デバイス及びシステム - Google Patents

熱電デバイス及びシステム Download PDF

Info

Publication number
JP6611727B2
JP6611727B2 JP2016558675A JP2016558675A JP6611727B2 JP 6611727 B2 JP6611727 B2 JP 6611727B2 JP 2016558675 A JP2016558675 A JP 2016558675A JP 2016558675 A JP2016558675 A JP 2016558675A JP 6611727 B2 JP6611727 B2 JP 6611727B2
Authority
JP
Japan
Prior art keywords
thermoelectric
semiconductor substrate
holes
etching
heat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2016558675A
Other languages
English (en)
Japanese (ja)
Other versions
JP2017510992A (ja
JP2017510992A5 (enExample
Inventor
ボウカイ,アクラム,アイ.
サム,ダグラス,ダブリュー.
リアン,ハイファン
Original Assignee
マトリックス インダストリーズ,インコーポレイテッド
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by マトリックス インダストリーズ,インコーポレイテッド filed Critical マトリックス インダストリーズ,インコーポレイテッド
Publication of JP2017510992A publication Critical patent/JP2017510992A/ja
Publication of JP2017510992A5 publication Critical patent/JP2017510992A5/ja
Application granted granted Critical
Publication of JP6611727B2 publication Critical patent/JP6611727B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N10/00Thermoelectric devices comprising a junction of dissimilar materials, i.e. devices exhibiting Seebeck or Peltier effects
    • H10N10/01Manufacture or treatment
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N10/00Thermoelectric devices comprising a junction of dissimilar materials, i.e. devices exhibiting Seebeck or Peltier effects
    • H10N10/10Thermoelectric devices comprising a junction of dissimilar materials, i.e. devices exhibiting Seebeck or Peltier effects operating with only the Peltier or Seebeck effects
    • H10N10/17Thermoelectric devices comprising a junction of dissimilar materials, i.e. devices exhibiting Seebeck or Peltier effects operating with only the Peltier or Seebeck effects characterised by the structure or configuration of the cell or thermocouple forming the device
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N10/00Thermoelectric devices comprising a junction of dissimilar materials, i.e. devices exhibiting Seebeck or Peltier effects
    • H10N10/80Constructional details
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N10/00Thermoelectric devices comprising a junction of dissimilar materials, i.e. devices exhibiting Seebeck or Peltier effects
    • H10N10/80Constructional details
    • H10N10/85Thermoelectric active materials
    • H10N10/851Thermoelectric active materials comprising inorganic compositions
    • H10N10/8556Thermoelectric active materials comprising inorganic compositions comprising compounds containing germanium or silicon

Landscapes

  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
  • Weting (AREA)
  • Photovoltaic Devices (AREA)
JP2016558675A 2014-03-25 2015-03-24 熱電デバイス及びシステム Expired - Fee Related JP6611727B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201461970322P 2014-03-25 2014-03-25
US61/970,322 2014-03-25
US201462013468P 2014-06-17 2014-06-17
US62/013,468 2014-06-17
PCT/US2015/022312 WO2015148554A1 (en) 2014-03-25 2015-03-24 Thermoelectric devices and systems

Publications (3)

Publication Number Publication Date
JP2017510992A JP2017510992A (ja) 2017-04-13
JP2017510992A5 JP2017510992A5 (enExample) 2018-05-10
JP6611727B2 true JP6611727B2 (ja) 2019-11-27

Family

ID=54191580

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2016558675A Expired - Fee Related JP6611727B2 (ja) 2014-03-25 2015-03-24 熱電デバイス及びシステム

Country Status (6)

Country Link
US (3) US9263662B2 (enExample)
EP (1) EP3123532B1 (enExample)
JP (1) JP6611727B2 (enExample)
KR (1) KR20170026323A (enExample)
CN (1) CN106537621B (enExample)
WO (1) WO2015148554A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12352503B2 (en) 2019-06-19 2025-07-08 Pascal Lalanne Thermoelectric device for storage or conversion of energy

Families Citing this family (61)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2814584A1 (en) 2010-10-22 2012-04-26 California Institute Of Technology Nanomesh phononic structures for low thermal conductivity and thermoelectric energy conversion materials
US9362015B2 (en) 2010-12-16 2016-06-07 The Regents Of The University Of Michigan Silicon-based solar cell with eutectic composition
US20130019918A1 (en) 2011-07-18 2013-01-24 The Regents Of The University Of Michigan Thermoelectric devices, systems and methods
US9595653B2 (en) 2011-10-20 2017-03-14 California Institute Of Technology Phononic structures and related devices and methods
WO2013109729A1 (en) 2012-01-17 2013-07-25 Silicium Energy, Inc. Systems and methods for forming thermoelectric devices
CN104756268B (zh) 2012-08-17 2017-10-24 美特瑞克斯实业公司 用于形成热电装置的系统和方法
WO2014070795A1 (en) 2012-10-31 2014-05-08 Silicium Energy, Inc. Methods for forming thermoelectric elements
US9809882B2 (en) * 2014-01-16 2017-11-07 The United States Of America, As Represented By The Secretary Of Commerce Article and process for selective deposition
CN106537621B (zh) 2014-03-25 2018-12-07 美特瑞克斯实业公司 热电设备和系统
KR101728937B1 (ko) * 2014-09-05 2017-04-21 고려대학교 산학협력단 나노파이버 열전 발전 모듈, 그 제조방법 및 이를 위한 나노파이버 제조 전기 방사 장치
JP2017530563A (ja) * 2014-09-22 2017-10-12 コンソルツィオ デルタ ティ リサーチ シリコン集積面外熱流束熱電発電機
CN107078202B (zh) * 2014-10-09 2019-07-19 德尔塔蒂研究财团 一种集成热电发电机
CN104467142B (zh) * 2014-10-15 2016-08-31 中国矿业大学 用于滚筒监测无线传感器节点的供能方法及装置
US20210249579A1 (en) * 2015-05-14 2021-08-12 Sridhar Kasichainula Flexible encapsulation of a flexible thin-film based thermoelectric device with sputter deposited layer of n-type and p-type thermoelectric legs
US20210249580A1 (en) * 2015-05-14 2021-08-12 Sridhar Kasichainula Flexible encapsulation of a flexible thin-film based thermoelectric device with sputter deposited layer of n-type and p-type thermoelectric legs
EP3163611B1 (en) * 2015-11-02 2021-06-30 ABB Schweiz AG Power electronic assembly
WO2017096094A1 (en) * 2015-12-01 2017-06-08 Silicium Energy, Inc. Thermoelectric devices and systems
US20170213951A1 (en) * 2016-01-27 2017-07-27 Korea Research Institute Of Standards And Science Flexible thin multi-layered thermoelectric energy generating module, voltage boosting module using super capacitor, and portable thermoelectric charging apparatus using the same
TW201809931A (zh) 2016-05-03 2018-03-16 麥崔克斯工業股份有限公司 熱電裝置及系統
US20180014585A1 (en) * 2016-07-17 2018-01-18 David Requena Polonio Temperature controlled garment
US10309242B2 (en) * 2016-08-10 2019-06-04 General Electric Company Ceramic matrix composite component cooling
US10355669B2 (en) * 2016-08-19 2019-07-16 General Electric Company Filtering system and an associated method thereof
US10473093B2 (en) * 2016-08-26 2019-11-12 Daegu Gyeongbuk Institute Of Science And Technology Soft actuator using thermoelectric effect
US10347497B2 (en) 2016-09-23 2019-07-09 The Board Of Trustees Of The University Of Illinois Catalyst-assisted chemical etching with a vapor-phase etchant
US10748781B2 (en) 2016-09-23 2020-08-18 The Board Of Trustees Of The University Of Illinois Catalyst-assisted chemical etching with a vapor-phase etchant
US10842205B2 (en) * 2016-10-20 2020-11-24 Nike, Inc. Apparel thermo-regulatory system
KR102725310B1 (ko) * 2016-10-31 2024-11-04 주식회사 테그웨이 피드백 디바이스 및 이를 이용하는 열적 피드백 제공 방법
CN110268369A (zh) * 2016-10-31 2019-09-20 泰格韦有限公司 柔性热电模块和包含柔性热电模块的热电装置
USD819627S1 (en) 2016-11-11 2018-06-05 Matrix Industries, Inc. Thermoelectric smartwatch
JPWO2018143185A1 (ja) * 2017-01-31 2019-11-21 日本ゼオン株式会社 熱電変換モジュール
CN107017824A (zh) * 2017-03-23 2017-08-04 上海交通大学 一种光电热电复合发电装置
JP6675347B2 (ja) * 2017-03-28 2020-04-01 三菱電機エンジニアリング株式会社 熱電発電装置
JP7176248B2 (ja) * 2017-06-29 2022-11-22 三菱マテリアル株式会社 熱電変換材料、熱電変換素子、熱電変換モジュール、及び、熱電変換材料の製造方法
JP6858379B2 (ja) * 2017-07-27 2021-04-14 国立研究開発法人産業技術総合研究所 校正用熱電発電モジュール
JP6985661B2 (ja) * 2017-09-29 2021-12-22 マツダ株式会社 ペルチェ素子の製造方法及びその実装方法
KR102100385B1 (ko) * 2017-11-16 2020-04-13 포항공과대학교 산학협력단 실리사이드층을 포함하는 수직 나노선을 이용한 열전소자 및 이의 제조 방법
CN111655124A (zh) * 2017-11-22 2020-09-11 美特瑞克斯实业公司 热电设备和系统
US10866201B2 (en) * 2017-11-29 2020-12-15 Pratt & Whitney Canada Corp. Lubricant debris monitoring system for gas turbine engine
JP7242999B2 (ja) * 2018-03-16 2023-03-22 三菱マテリアル株式会社 熱電変換素子
WO2019186314A1 (en) * 2018-03-28 2019-10-03 3M Innovative Properties Company Flexible thermoelectric devices
CN110364617A (zh) * 2018-04-10 2019-10-22 深圳光启尖端技术有限责任公司 一种柔性热电器件的制造方法及其制得的柔性热电器件
WO2019230019A1 (ja) 2018-05-31 2019-12-05 三菱電機株式会社 太陽光発電パドル、その製造方法及び宇宙構造物
US10394292B1 (en) 2018-06-11 2019-08-27 Microsoft Technology Licensing, Llc Cryogenic computing system with thermal management using a metal preform
KR102511769B1 (ko) * 2018-09-11 2023-03-21 엘지이노텍 주식회사 열전모듈
US20220218514A1 (en) * 2019-05-14 2022-07-14 Verily Life Sciences Llc Ophthalmic devices, systems and methods for treating dry eye
TW202118096A (zh) * 2019-10-16 2021-05-01 日商科理克股份有限公司 熱電模組、及熱電模組用柱之製造方法
WO2021079733A1 (ja) * 2019-10-25 2021-04-29 パナソニックIpマネジメント株式会社 熱電変換装置、熱電変換装置の制御方法、熱電変換装置を用いて対象物を冷却及び/又は加熱する方法及び電子デバイス
CN114556602A (zh) * 2019-10-25 2022-05-27 松下知识产权经营株式会社 热电转换装置、热电转换装置的控制方法、使用热电转换装置冷却和/或加热对象物的方法及电子装置
CN110768582A (zh) * 2019-11-14 2020-02-07 Oppo广东移动通信有限公司 一种电子设备
KR102263385B1 (ko) * 2019-12-02 2021-06-11 한국과학기술연구원 신축성 열전소자 및 그 제조방법
US12010916B2 (en) * 2019-12-04 2024-06-11 The Board Of Regents Of The Nevada System Of Higher Education On Behalf Of The University Of Nevada Compliant three-dimensional thermoelectrics
JP7692197B2 (ja) * 2020-05-01 2025-06-13 株式会社Eサーモジェンテック 熱電発電モジュール及び生体位置検出システム
US11715851B2 (en) * 2020-06-17 2023-08-01 Samsung Sdi Co., Ltd. Battery module and vehicle including the same
CN213659375U (zh) * 2020-07-14 2021-07-09 北京嘉楠捷思信息技术有限公司 浸没式液冷散热装置的余热利用系统
CN111952322B (zh) * 2020-08-14 2022-06-03 电子科技大学 一种具有周期可调屈曲结构的柔性半导体薄膜及制备方法
JP7427564B2 (ja) * 2020-09-07 2024-02-05 新光電気工業株式会社 電子機器
US11825746B2 (en) 2020-09-23 2023-11-21 Micropower Global Limited Thermoelectric device
TWI732731B (zh) * 2020-12-31 2021-07-01 國立虎尾科技大學 自動照明裝置
CN112768593B (zh) * 2021-01-06 2022-06-28 南方科技大学 一种热电-光电器件
DE102023108066A1 (de) * 2023-03-29 2024-10-02 Mack Rides Gmbh & Co Kg Vorrichtung zur Rückgewinnung von Energie, Fahrzeug und Fahrgeschäft mit einer solchen Vorrichtung
KR102942829B1 (ko) * 2024-06-26 2026-03-23 주식회사 에프티이디 유연 열전 모듈 및 이를 포함하는 유닛

Family Cites Families (143)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US365990A (en) 1887-07-05 Watch-case
US1000300A (en) 1910-01-11 1911-08-08 Harry W Secor Testing instrument.
US3653989A (en) 1970-04-02 1972-04-04 Rca Corp Zn DIFFUSION INTO GAP
CH604249B5 (enExample) 1975-05-07 1978-08-31 Centre Electron Horloger
JPS6027179B2 (ja) 1975-11-05 1985-06-27 日本電気株式会社 多孔質シリコンの形成方法
US4070821A (en) 1976-03-22 1978-01-31 Hughes Aircraft Company Electric watch battery contact spring
US4078945A (en) 1976-05-03 1978-03-14 Mobil Tyco Solar Energy Corporation Anti-reflective coating for silicon solar cells
US4261049A (en) 1977-11-16 1981-04-07 Citizen Watch Co., Ltd. Wristwatch with solar cells
US5089293A (en) 1984-07-31 1992-02-18 Rosemount Inc. Method for forming a platinum resistance thermometer
US4681657A (en) 1985-10-31 1987-07-21 International Business Machines Corporation Preferential chemical etch for doped silicon
JPS63266829A (ja) 1987-04-24 1988-11-02 Hitachi Ltd プラズマcvd膜の形成方法
KR970003907B1 (ko) 1988-02-12 1997-03-22 도오교오 에레구토론 가부시끼 가이샤 기판처리 장치 및 기판처리 방법
USD332408S (en) 1989-02-01 1993-01-12 PLD Private Label Development SA Wristwatch
US5139624A (en) 1990-12-06 1992-08-18 Sri International Method for making porous semiconductor membranes
SG93197A1 (en) 1991-02-15 2002-12-17 Canon Kk Etching solution for etching porous silicon, etching method using the etching solution and method of preparing semiconductor member using the etching solution
US5206523A (en) 1991-08-29 1993-04-27 Goesele Ulrich M Microporous crystalline silicon of increased band-gap for semiconductor applications
DE69232347T2 (de) 1991-09-27 2002-07-11 Canon K.K., Tokio/Tokyo Verfahren zur Behandlung eines Substrats aus Silizium
JP3352118B2 (ja) 1992-08-25 2002-12-03 キヤノン株式会社 半導体装置及びその製造方法
DE69330709T2 (de) 1992-12-28 2002-07-11 Canon K.K., Tokio/Tokyo Blickrichtungsdetektor und Kamera mit diesem Detektor
USD365767S (en) 1993-03-03 1996-01-02 Sportime Watches AG(Sportime Watches SA)(Sportime Watches Ltd.) Combined watch and bracelet
US6093941A (en) 1993-09-09 2000-07-25 The United States Of America As Represented By The Secretary Of The Navy Photonic silicon on a transparent substrate
US6017811A (en) 1993-09-09 2000-01-25 The United States Of America As Represented By The Secretary Of The Navy Method of making improved electrical contact to porous silicon
TW330313B (en) 1993-12-28 1998-04-21 Canon Kk A semiconductor substrate and process for producing same
US5510633A (en) 1994-06-08 1996-04-23 Xerox Corporation Porous silicon light emitting diode arrays and method of fabrication
US5565084A (en) 1994-10-11 1996-10-15 Qnix Computer Co., Ltd. Electropolishing methods for etching substrate in self alignment
JP3544827B2 (ja) 1996-10-16 2004-07-21 セイコーインスツルメンツ株式会社 熱電式腕時計
US5990605A (en) 1997-03-25 1999-11-23 Pioneer Electronic Corporation Electron emission device and display device using the same
US20050215063A1 (en) 1997-05-09 2005-09-29 Bergman Eric J System and methods for etching a silicon wafer using HF and ozone
US5981400A (en) 1997-09-18 1999-11-09 Cornell Research Foundation, Inc. Compliant universal substrate for epitaxial growth
WO1999019776A1 (en) 1997-10-14 1999-04-22 Seiko Instruments Inc. Watch containing flat heat conductor and provided with thermoelectric generation unit
US5895223A (en) 1997-12-10 1999-04-20 Industrial Technology Research Institute Method for etching nitride
USD409097S (en) 1998-01-23 1999-05-04 Omega S.A. Wristwatch
JP2967410B2 (ja) 1998-02-20 1999-10-25 セイコーインスツルメンツ株式会社 腕携帯機器
JP3032826B2 (ja) * 1998-03-05 2000-04-17 工業技術院長 熱電変換材料及びその製造方法
US6304520B1 (en) 1998-10-22 2001-10-16 Citizen Watch Co., Ltd. Wrist watch having thermoelectric generator
JP2000206272A (ja) 1998-11-13 2000-07-28 Seiko Instruments Inc 熱発電器付き電子時計
US6194323B1 (en) 1998-12-16 2001-02-27 Lucent Technologies Inc. Deep sub-micron metal etch with in-situ hard mask etch
US6313015B1 (en) 1999-06-08 2001-11-06 City University Of Hong Kong Growth method for silicon nanowires and nanoparticle chains from silicon monoxide
AU6425800A (en) 1999-06-30 2001-01-22 Max-Delbruck-Centrum Fur Molekulare Medizin Agents for the diagnosis, prognosis and treatment of malignant diseases
JP2004502554A (ja) 2000-03-22 2004-01-29 ユニバーシティー オブ マサチューセッツ ナノシリンダー・アレイ
GB2364933B (en) 2000-07-18 2002-12-31 Lg Electronics Inc Method of horizontally growing carbon nanotubes
US6790785B1 (en) 2000-09-15 2004-09-14 The Board Of Trustees Of The University Of Illinois Metal-assisted chemical etch porous silicon formation method
WO2002103752A2 (en) 2000-11-27 2002-12-27 The Board Of Trustees Of The University Of Illinois Metal-assisted chemical etch to produce porous group iii-v materials
WO2002073699A2 (en) 2001-03-14 2002-09-19 University Of Massachusetts Nanofabrication
CA2442985C (en) 2001-03-30 2016-05-31 The Regents Of The University Of California Methods of fabricating nanostructures and nanowires and devices fabricated therefrom
US20080257395A1 (en) * 2001-12-12 2008-10-23 Hi-Z Corporation Miniature quantum well thermoelectric device
CN1150128C (zh) 2002-03-15 2004-05-19 清华大学 一种合成纳米硅线阵列的方法
US7161168B2 (en) 2002-07-30 2007-01-09 The Regents Of The University Of California Superlattice nanopatterning of wires and complex patterns
US7135728B2 (en) 2002-09-30 2006-11-14 Nanosys, Inc. Large-area nanoenabled macroelectronic substrates and uses therefor
JP4434575B2 (ja) * 2002-12-13 2010-03-17 キヤノン株式会社 熱電変換素子及びその製造方法
US20040152240A1 (en) 2003-01-24 2004-08-05 Carlos Dangelo Method and apparatus for the use of self-assembled nanowires for the removal of heat from integrated circuits
CA103755S (en) 2003-02-21 2004-09-07 Montblanc Simplo Gmbh Watchcase
US7629531B2 (en) 2003-05-19 2009-12-08 Digital Angel Corporation Low power thermoelectric generator
US7075161B2 (en) * 2003-10-23 2006-07-11 Agilent Technologies, Inc. Apparatus and method for making a low capacitance artificial nanopore
US7181836B2 (en) 2003-12-19 2007-02-27 General Electric Company Method for making an electrode structure
US20050193742A1 (en) 2004-02-10 2005-09-08 Its Kool, Llc Personal heat control devicee and method
TW200526824A (en) 2004-02-11 2005-08-16 Ind Tech Res Inst Manufacturing method of silicon nanowire
US20050205883A1 (en) 2004-03-19 2005-09-22 Wierer Jonathan J Jr Photonic crystal light emitting device
US7115971B2 (en) 2004-03-23 2006-10-03 Nanosys, Inc. Nanowire varactor diode and methods of making same
KR100553317B1 (ko) 2004-04-23 2006-02-20 한국과학기술연구원 실리콘 나노선을 이용한 실리콘 광소자 및 이의 제조방법
US7465871B2 (en) 2004-10-29 2008-12-16 Massachusetts Institute Of Technology Nanocomposites with high thermoelectric figures of merit
US7309830B2 (en) 2005-05-03 2007-12-18 Toyota Motor Engineering & Manufacturing North America, Inc. Nanostructured bulk thermoelectric material
US9865790B2 (en) 2004-12-07 2018-01-09 Toyota Motor Engineering & Manufacturing North America, Inc. Nanostructured bulk thermoelectric material
US7254953B2 (en) 2005-01-06 2007-08-14 Caterpillar Inc Thermoelectric heat exchange element
US8044293B2 (en) 2005-02-18 2011-10-25 GM Global Technology Operations LLC High performance thermoelectric nanocomposite device
US7291282B2 (en) 2005-03-01 2007-11-06 Hewlett-Packard Development Company, L.P. Method of fabricating a mold for imprinting a structure
JP2006261451A (ja) 2005-03-17 2006-09-28 Sony Corp エッチング方法
USD536994S1 (en) 2005-05-31 2007-02-20 Casio Keisanki Kabushiki Kaisha Wrist watch
TWI284734B (en) 2005-12-20 2007-08-01 Nat Univ Chung Cheng Sensing apparatus containing noble metal and sensing system and method thereof
JP2007273746A (ja) 2006-03-31 2007-10-18 Sumitomo Chemical Co Ltd 固体表面の微細加工方法および発光素子
US7369410B2 (en) * 2006-05-03 2008-05-06 International Business Machines Corporation Apparatuses for dissipating heat from semiconductor devices
DE102006020823B4 (de) 2006-05-04 2008-04-03 Siltronic Ag Verfahren zur Herstellung einer polierten Halbleiterscheibe
US20070261730A1 (en) * 2006-05-12 2007-11-15 General Electric Company Low dimensional thermoelectrics fabricated by semiconductor wafer etching
US20070277866A1 (en) 2006-05-31 2007-12-06 General Electric Company Thermoelectric nanotube arrays
US20100065810A1 (en) 2006-09-07 2010-03-18 Max-Planck-Gessellschaft Zur Foerderung Der Wissenschaften E.V. Method Of Synthesizing Semiconductor Nanostructures And Nanostructures Synthesized By The Method
US7515790B2 (en) 2006-11-09 2009-04-07 Electronics And Telecommunications Research Institute Two-dimensional planar photonic crystal superprism device and method of manufacturing the same
US8101449B2 (en) 2007-01-03 2012-01-24 Toyota Motor Engineering & Manufacturing North America, Inc. Process for altering thermoelectric properties of a material
US20080314429A1 (en) 2007-02-09 2008-12-25 Stichting Imec Nederland Method for Thermal Matching of a Thermoelectric Generator with a Heat Source Having High Thermal Resistance and Thermoelectric Generator thus Obtained
EP1976034A3 (en) 2007-03-29 2011-11-09 Stichting IMEC Nederland Method for manufacturing a thermopile, the thermopile thus obtrained and a thermoelectric generator comprising such thermopiles
US8641912B2 (en) 2007-05-23 2014-02-04 California Institute Of Technology Method for fabricating monolithic two-dimensional nanostructures
WO2009008127A1 (ja) 2007-07-09 2009-01-15 Kabushiki Kaisha Toshiba 熱電変換モジュールとそれを用いた熱交換器、熱電温度調節装置および熱電発電装置
WO2009014985A2 (en) 2007-07-20 2009-01-29 California Institute Of Technology Methods and devices for controlling thermal conductivity and thermoelectric power of semiconductor nanowires
US8227681B2 (en) * 2007-07-20 2012-07-24 GM Global Technology Operations LLC Active material apparatus with activating thermoelectric device thereon and method of fabrication
CN104392933B (zh) 2007-08-21 2017-11-07 加州大学评议会 具有高性能热电性质的纳米结构
TW200913653A (en) 2007-09-12 2009-03-16 da-peng Zheng Watch-type body-temperature-charged interruption-free mobile phone device
US7855153B2 (en) * 2008-02-08 2010-12-21 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing semiconductor device
TW200935635A (en) * 2008-02-15 2009-08-16 Univ Nat Chiao Tung Method of manufacturing nanometer-scale thermoelectric device
EP2131406A1 (en) 2008-06-02 2009-12-09 Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO A method for manufacturing a thermoelectric generator, a wearable thermoelectric generator and a garment comprising the same
WO2010003629A2 (en) 2008-07-08 2010-01-14 Max-Planck-Gesellschaft Zur Förderung Der Wissenschaft E. V. Thermoelectric apparatus and methods of manufacturing the same
US8318386B2 (en) 2008-08-07 2012-11-27 Rolith Inc. Fabrication of nanostructured devices
US8486843B2 (en) 2008-09-04 2013-07-16 The Board Of Trustrees Of The University Of Illinois Method of forming nanoscale three-dimensional patterns in a porous material
KR101249292B1 (ko) 2008-11-26 2013-04-01 한국전자통신연구원 열전소자, 열전소자 모듈, 및 그 열전 소자의 형성 방법
TWI380487B (en) 2008-12-12 2012-12-21 Ind Tech Res Inst Thermoelectric device
JP5282598B2 (ja) 2009-02-17 2013-09-04 富士通株式会社 熱電変換素子の製造方法
WO2010114887A1 (en) 2009-03-31 2010-10-07 Georgia Tech Research Corporation Metal-assisted chemical etching of substrates
EP2436043A2 (en) 2009-05-28 2012-04-04 GMZ Energy, Inc. Thermoelectric system and method of operating same
US20120174956A1 (en) * 2009-08-06 2012-07-12 Laird Technologies, Inc. Thermoelectric Modules, Thermoelectric Assemblies, and Related Methods
EP2475612A4 (en) 2009-09-11 2017-09-13 Jp Laboratories, Inc. Monitoring devices and processes based on transformation, destruction and conversion of nanostructures
WO2011049804A2 (en) * 2009-10-21 2011-04-28 The Board Of Trustees Of The University Of Illinois Method of forming an array of high aspect ratio semiconductor nanostructures
US20110114146A1 (en) 2009-11-13 2011-05-19 Alphabet Energy, Inc. Uniwafer thermoelectric modules
USD646183S1 (en) 2009-12-09 2011-10-04 Montres DeWitt SA Watch case
US8569740B2 (en) * 2010-01-12 2013-10-29 MicroXact Inc. High efficiency thermoelectric materials and devices
JP2011153776A (ja) * 2010-01-28 2011-08-11 Mitsubishi Electric Corp 冷却装置
TWI472477B (zh) 2010-03-02 2015-02-11 國立臺灣大學 矽奈米結構與其製造方法及應用
CN103081107B (zh) 2010-03-09 2017-02-08 得克萨斯州大学系统董事会 多孔和非多孔纳米结构
CA2814584A1 (en) 2010-10-22 2012-04-26 California Institute Of Technology Nanomesh phononic structures for low thermal conductivity and thermoelectric energy conversion materials
US20150083180A1 (en) * 2010-11-16 2015-03-26 Electron Holding, Llc Systems, methods and/or apparatus for thermoelectric energy generation
US9240328B2 (en) 2010-11-19 2016-01-19 Alphabet Energy, Inc. Arrays of long nanostructures in semiconductor materials and methods thereof
US8736011B2 (en) 2010-12-03 2014-05-27 Alphabet Energy, Inc. Low thermal conductivity matrices with embedded nanostructures and methods thereof
CN103314458A (zh) 2010-12-20 2013-09-18 波士顿学院理事会 具有提高的品质因数的半赫斯勒合金及其制造方法
US9048004B2 (en) 2010-12-20 2015-06-02 Gmz Energy, Inc. Half-heusler alloys with enhanced figure of merit and methods of making
WO2012088085A1 (en) 2010-12-21 2012-06-28 Alphabet Energy, Inc. Arrays of filled nanostructures with protruding segments and methods thereof
KR101864211B1 (ko) 2010-12-30 2018-06-05 한국전자통신연구원 실리콘 나노선 기반의 열전소자 및 그 제조 방법
US8580100B2 (en) 2011-02-24 2013-11-12 Massachusetts Institute Of Technology Metal deposition using seed layers
US20120282435A1 (en) 2011-03-24 2012-11-08 University Of Massachusetts Nanostructured Silicon with Useful Thermoelectric Properties
US9238133B2 (en) * 2011-05-09 2016-01-19 The Invention Science Fund I, Llc Method, device and system for modulating an activity of brown adipose tissue in a vertebrate subject
CN103636103B (zh) 2011-06-30 2015-07-29 株式会社日立制作所 旋转电机
US20130019918A1 (en) 2011-07-18 2013-01-24 The Regents Of The University Of Michigan Thermoelectric devices, systems and methods
US20130087180A1 (en) 2011-10-10 2013-04-11 Perpetua Power Source Technologies, Inc. Wearable thermoelectric generator system
WO2013082537A1 (en) * 2011-12-01 2013-06-06 Quarkstar Llc Solid-state lighting device and method of manufacturing same
TWI419202B (zh) 2011-12-06 2013-12-11 Univ Nat Taiwan 大面積薄型單晶矽之製作技術
WO2013109729A1 (en) 2012-01-17 2013-07-25 Silicium Energy, Inc. Systems and methods for forming thermoelectric devices
CN104205382A (zh) 2012-01-25 2014-12-10 阿尔法贝特能源公司 用于热回收系统的模块化热电单元及其方法
DE102012105086B4 (de) * 2012-06-13 2014-02-13 Karlsruher Institut für Technologie Gewickeltes und gefaltetes thermoelektrisches System und Verfahren zu dessen Herstellung
EP2879631A2 (en) * 2012-08-03 2015-06-10 Board Of Regents, The University Of Texas System Devices and systems for thermoelectric heating and cooling of mammalian tissue
CN104756268B (zh) 2012-08-17 2017-10-24 美特瑞克斯实业公司 用于形成热电装置的系统和方法
US9018639B2 (en) * 2012-10-26 2015-04-28 Dow Corning Corporation Flat SiC semiconductor substrate
WO2014070795A1 (en) * 2012-10-31 2014-05-08 Silicium Energy, Inc. Methods for forming thermoelectric elements
USD736103S1 (en) 2013-01-11 2015-08-11 Lvmh Swiss Manufactures Sa Watch case
JP2016518707A (ja) * 2013-03-14 2016-06-23 ウェイク フォレスト ユニバーシティ 熱電装置及び物品並びにその応用
US20140299169A1 (en) * 2013-04-09 2014-10-09 Perpetua Power Source Technologies, Inc. Electronic power management system for a wearable thermoelectric generator
USD744866S1 (en) 2013-04-17 2015-12-08 LVHM Swiss Manufactures SA Watch case and dial
US20140326287A1 (en) 2013-05-02 2014-11-06 Perpetua Power Source Technologies, Inc. Wearable thermoelectric generator assembly and method of manufacturing same
US10182937B2 (en) 2013-10-11 2019-01-22 Embr Labs Inc. Methods and apparatuses for manipulating temperature
KR101493797B1 (ko) * 2013-10-18 2015-02-17 한국과학기술원 메쉬형 기판을 이용한 플랙시블 열전소자 및 그 제조방법
US20150162517A1 (en) 2013-12-06 2015-06-11 Sridhar Kasichainula Voltage generation across temperature differentials through a flexible thin film thermoelectric device
JP1526348S (enExample) 2014-02-19 2018-06-04
JP2017512606A (ja) 2014-03-03 2017-05-25 フィジオキュー インコーポレイテッドPhysiocue, Inc. 片頭痛と他の頭痛の治療の方法
CN106537621B (zh) 2014-03-25 2018-12-07 美特瑞克斯实业公司 热电设备和系统
WO2015180034A1 (zh) * 2014-05-27 2015-12-03 浙江大学 一种高优值的P型FeNbTiSb热电材料及其制备方法
JP1532690S (enExample) 2014-06-05 2015-09-07
WO2017096094A1 (en) 2015-12-01 2017-06-08 Silicium Energy, Inc. Thermoelectric devices and systems
TW201809931A (zh) 2016-05-03 2018-03-16 麥崔克斯工業股份有限公司 熱電裝置及系統

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12352503B2 (en) 2019-06-19 2025-07-08 Pascal Lalanne Thermoelectric device for storage or conversion of energy

Also Published As

Publication number Publication date
US20180240957A1 (en) 2018-08-23
WO2015148554A1 (en) 2015-10-01
JP2017510992A (ja) 2017-04-13
CN106537621B (zh) 2018-12-07
US9263662B2 (en) 2016-02-16
US10644216B2 (en) 2020-05-05
US20150280099A1 (en) 2015-10-01
EP3123532A4 (en) 2017-11-08
EP3123532A1 (en) 2017-02-01
US20160197259A1 (en) 2016-07-07
CN106537621A (zh) 2017-03-22
KR20170026323A (ko) 2017-03-08
EP3123532B1 (en) 2018-11-21

Similar Documents

Publication Publication Date Title
JP6611727B2 (ja) 熱電デバイス及びシステム
US10580955B2 (en) Thermoelectric devices and systems
US20180351069A1 (en) Thermoelectric devices and systems
Zhang et al. Laser processing of crumpled porous graphene/MXene nanocomposites for a standalone gas sensing system
Cai et al. Laser direct writing and selective metallization of metallic circuits for integrated wireless devices
US20200343433A1 (en) Thermoelectric devices and systems
Gerein et al. Effect of ac electrodeposition conditions on the growth of high aspect ratio copper nanowires in porous aluminum oxide templates
US20200388743A1 (en) Methods for forming thermoelectric elements
Cao et al. Vertical phase-engineering MoS2 nanosheet-enhanced textiles for efficient moisture-based energy generation
CN105819512A (zh) 一种过渡金属硫化物的快速制备方法
Karmakar et al. Highly stable electrochemical supercapacitor performance of self-assembled ferromagnetic Q-carbon
Priyadarshani et al. Semiconductor-to-metal-like behavior of Si with dopant concentration—an electrochemical investigation and illustration with surface hydride formation and hydrogen evolution reaction
HK40003216A (zh) 热电设备和系统
HK40002492A (en) Thermoelectric devices and systems
Sheikh et al. Robust nanogenerator based on vertically aligned ZnO nanorods using copper substrate
Liao et al. Boosting Gel‐Based Thermogalvanic Energy Harvesting via Metal Oxide Nanostructured Electrodes

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20180322

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20180322

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20181227

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20190107

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20190328

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20190531

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20191002

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20191029

R150 Certificate of patent or registration of utility model

Ref document number: 6611727

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

LAPS Cancellation because of no payment of annual fees