JP6608550B2 - 内蔵不揮発性メモリセルでfinfet・cmosデバイスを集積する方法 - Google Patents
内蔵不揮発性メモリセルでfinfet・cmosデバイスを集積する方法 Download PDFInfo
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- 238000000034 method Methods 0.000 title claims description 37
- 239000000758 substrate Substances 0.000 claims description 135
- 239000010410 layer Substances 0.000 claims description 81
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 28
- 229920005591 polysilicon Polymers 0.000 claims description 28
- 239000000463 material Substances 0.000 claims description 18
- 230000015572 biosynthetic process Effects 0.000 claims description 16
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 15
- 229910052710 silicon Inorganic materials 0.000 claims description 15
- 239000010703 silicon Substances 0.000 claims description 15
- 239000011241 protective layer Substances 0.000 claims description 12
- 238000005530 etching Methods 0.000 claims description 6
- 239000000126 substance Substances 0.000 claims description 2
- 239000004020 conductor Substances 0.000 claims 2
- 239000007769 metal material Substances 0.000 claims 2
- 238000005137 deposition process Methods 0.000 claims 1
- 238000007517 polishing process Methods 0.000 claims 1
- 229920002120 photoresistant polymer Polymers 0.000 description 28
- 150000004767 nitrides Chemical class 0.000 description 24
- 230000000873 masking effect Effects 0.000 description 11
- 239000007943 implant Substances 0.000 description 9
- 125000006850 spacer group Chemical group 0.000 description 9
- 239000002184 metal Substances 0.000 description 7
- 230000000903 blocking effect Effects 0.000 description 6
- 238000000151 deposition Methods 0.000 description 4
- 230000008021 deposition Effects 0.000 description 4
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 4
- 238000009413 insulation Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 229910021332 silicide Inorganic materials 0.000 description 3
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 3
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 230000002411 adverse Effects 0.000 description 2
- 238000000137 annealing Methods 0.000 description 2
- 238000000231 atomic layer deposition Methods 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 1
- 229910003481 amorphous carbon Inorganic materials 0.000 description 1
- 239000006117 anti-reflective coating Substances 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
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- H—ELECTRICITY
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/30604—Chemical etching
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/30625—With simultaneous mechanical treatment, e.g. mechanico-chemical polishing
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/3065—Plasma etching; Reactive-ion etching
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
- H01L21/8232—Field-effect technology
- H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
- H01L21/8238—Complementary field-effect transistors, e.g. CMOS
- H01L21/823821—Complementary field-effect transistors, e.g. CMOS with a particular manufacturing method of transistors with a horizontal current flow in a vertical sidewall of a semiconductor body, e.g. FinFET, MuGFET
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- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/08—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind
- H01L27/085—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only
- H01L27/088—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only the components being field-effect transistors with insulated gate
- H01L27/092—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only the components being field-effect transistors with insulated gate complementary MIS field-effect transistors
- H01L27/0924—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only the components being field-effect transistors with insulated gate complementary MIS field-effect transistors including transistors with a horizontal current flow in a vertical sidewall of a semiconductor body, e.g. FinFET, MuGFET
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/423—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions not carrying the current to be rectified, amplified or switched
- H01L29/42312—Gate electrodes for field effect devices
- H01L29/42316—Gate electrodes for field effect devices for field-effect transistors
- H01L29/4232—Gate electrodes for field effect devices for field-effect transistors with insulated gate
- H01L29/42324—Gate electrodes for transistors with a floating gate
- H01L29/42328—Gate electrodes for transistors with a floating gate with at least one additional gate other than the floating gate and the control gate, e.g. program gate, erase gate or select gate
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- H10B—ELECTRONIC MEMORY DEVICES
- H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
- H10B41/40—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by the peripheral circuit region
- H10B41/42—Simultaneous manufacture of periphery and memory cells
- H10B41/49—Simultaneous manufacture of periphery and memory cells comprising different types of peripheral transistor
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B43/00—EEPROM devices comprising charge-trapping gate insulators
- H10B43/30—EEPROM devices comprising charge-trapping gate insulators characterised by the memory core region
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- Condensed Matter Physics & Semiconductors (AREA)
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- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Semiconductor Memories (AREA)
- Non-Volatile Memory (AREA)
Description
Claims (13)
- メモリデバイスを形成する方法であって、
基板の第1の表面区域上に、かつ前記基板の第1の表面区域から絶縁して、離間された第1の導電性ブロックの対を形成することであって、前記離間された第1の導電性ブロックの各対について、前記第1の導電性ブロックの間の区域が、内部領域を画定し、前記第1の導電性ブロックの外側の区域が、外部領域を画定する、形成することと、
複数のソース領域を形成することであって、各々が前記基板内、かつ前記内部領域のうちの1つ内に配置される、形成することと、
第2の導電性ブロックを形成することであって、各々が前記ソース領域のうちの1つ上に配置され、かつ前記ソース領域のうちの1つから絶縁される、形成することと、
第3の導電性ブロックを形成することであって、各々が前記外部領域のうちの1つ内に配置され、前記基板上に配置され、かつ前記基板から絶縁される、形成することと、
前記第1、第2、及び第3の導電性ブロック上に保護層を形成することと、
前記保護層の形成の後、
前記基板の第2の表面区域内でシリコンエッチングを実施して、前記基板のフィンを形成することと、
第4の導電性ブロックを形成することであって、各々が前記基板の前記フィンのうちの1つの上面及び側面に沿って延在し、かつ前記基板の前記フィンのうちの1つの上面及び側面から絶縁される、形成することと、
前記シリコンエッチングの前記実施及び前記第4の導電性ブロックの前記形成の後、
前記保護層を除去することと、
エッチングを実施して、前記第3の導電性ブロックの各々の中央部分を選択的に除去することと、
複数のドレイン領域を形成することであって、各々が前記基板内、かつ前記第3の導電性ブロックのうちの1つに隣接して配置される、形成することと、
前記基板の前記フィンの各々に第2のソース領域及び第2のドレイン領域を形成することと、を含む、方法。 - 前記基板の前記フィンの各々について、前記第4の導電性ブロックが、前記第2のソース領域と前記第2のドレイン領域との間に配置されている、請求項1に記載の方法。
- 前記第2及び第3の導電性ブロックの前記形成が、
前記基板上に導電性材料の層を形成することと、
化学機械研磨プロセスを実施して、導電性材料の前記層の上面を平坦化することと、を含む、請求項1に記載の方法。 - 前記第4の導電性ブロックが、高K誘電層によって前記基板の前記フィンの前記上面及び側面から絶縁される、請求項1に記載の方法。
- 前記第4の導電性ブロックが、金属材料を含む、請求項4に記載の方法。
- 前記第1、第2、及び第3の導電性ブロックが、ポリシリコン材料を含む、請求項5に記載の方法。
- 前記基板の第3の表面区域上に、かつ前記基板の第3の表面区域から絶縁して第5の導電性ブロックを形成することと、
前記基板の前記第3の表面区域の前記第5の導電性ブロックに隣接して第3のソース領域及び第3のドレイン領域を形成することと、を更に含む、請求項1に記載の方法。 - 前記第2、第3、及び第5の導電性ブロックの前記形成が、
前記基板の前記第1の表面区域上に第1の酸化物層を形成することと、
前記基板の前記第3の表面区域上に第2の酸化物層を形成することと、
ポリシリコン堆積プロセスを使用して前記第1及び第2の酸化物層上にポリシリコンの層を形成することと、を含み、
前記第3の導電性ブロックの各々の前記中央部分を選択的に除去するための前記エッチングの前記実施が、前記第2の酸化物層上の前記ポリシリコン層の選択された部分を除去することを更に含み、
前記第2の酸化物層が、前記第1の酸化物層よりも厚い厚さを有する、請求項7に記載の方法。 - メモリデバイスを形成する方法であって、
基板の第1の表面区域上に、かつ前記基板の第1の表面区域から絶縁して、離間された第1の導電性ブロックの対を形成することであって、前記離間された第1の導電性ブロックの各対について、前記第1の導電性ブロックの間の区域が、内部領域を画定し、前記第1の導電性ブロックの外側の区域が、外部領域を画定する、形成することと、
複数のソース領域を形成することであって、各々が前記基板内、かつ前記内部領域のうちの1つの内に配置される、形成することと、
前記基板の前記第1の表面区域上、かつ前記基板の第2及び第3の表面区域上に第1の酸化物層を形成することと、
前記基板の前記第1の表面区域から前記第1の酸化物層を除去することと、
前記基板の前記第1の表面区域上に第2の酸化物層を形成することと、
前記基板の前記第1、第2、及び第3の表面区域上にポリシリコン層を形成することと、
各々が前記ソース領域のうちの1つ上に配置され、かつ前記ソース領域のうちの1つから絶縁された前記ポリシリコン層の第1のブロック、及び各々が前記外部領域のうちの1つ内、かつ前記第2の酸化物層上に配置された前記ポリシリコン層の第2のブロックを残して、前記基板の前記第1の表面区域上の前記ポリシリコン層の上面を平坦化することと、
前記第1の導電性ブロック上、かつ前記ポリシリコン層の前記第1及び第2のブロック上に保護層を形成することと、
前記保護層の形成の後、
前記基板の前記第2の表面区域から前記ポリシリコン層及び前記第1の酸化物層を除去することと、
前記基板の第2の表面区域内でシリコンエッチングを実施して、前記基板のフィンを形成することと、
第2の導電性ブロックを形成することであって、各々が前記基板の前記フィンのうちの1つの上面及び側面に沿って延在し、かつ前記基板の前記フィンのうちの1つの上面及び側面から絶縁される、形成することと、
前記シリコンエッチングの実施及び第2の導電性ブロックの形成の後、
前記保護層を除去することと、
エッチングを実施して、前記ポリシリコンの前記第2のブロックの各々の中央部分、及び前記基板の前記第3の表面区域上の前記ポリシリコン層の選択された部分を選択的に除去して、前記ポリシリコンの第3のブロックを残すことと、
複数のドレイン領域を形成することであって、各々が前記基板内、かつポリシリコンの前記第2のブロックのうちの1つに隣接して配置される、形成することと、
前記基板の前記フィンの各々に第2のソース領域及び第2のドレイン領域を形成することと、
前記基板の前記第3の表面区域内の前記ポリシリコンの前記第3のブロックに隣接して、第3のソース領域及び第3のドレイン領域を形成することと、を含む、方法。 - 前記第2の酸化物層が、前記第1の酸化物層の厚さよりも厚い厚さを有する、請求項9に記載の方法。
- 前記基板の前記フィンの各々について、前記第2の導電性ブロックが、前記第2のソース領域と前記第2のドレイン領域との間に配置されている、請求項9に記載の方法。
- 前記第2の導電性ブロックが、高K誘電層によって前記基板の前記フィンの前記上面及び側面から絶縁される、請求項9に記載の方法。
- 前記第2の導電性ブロックが、金属材料を含む、請求項12に記載の方法。
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
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US201662341005P | 2016-05-24 | 2016-05-24 | |
US62/341,005 | 2016-05-24 | ||
US15/489,548 | 2017-04-17 | ||
US15/489,548 US9985042B2 (en) | 2016-05-24 | 2017-04-17 | Method of integrating FinFET CMOS devices with embedded nonvolatile memory cells |
PCT/US2017/028034 WO2017204937A1 (en) | 2016-05-24 | 2017-04-18 | Method of integrating finfet cmos devices with embedded nonvolatile memory cells |
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JP2019517155A JP2019517155A (ja) | 2019-06-20 |
JP6608550B2 true JP6608550B2 (ja) | 2019-11-20 |
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KR (1) | KR101963548B1 (ja) |
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KR101963548B1 (ko) | 2019-03-28 |
CN109196649A (zh) | 2019-01-11 |
JP2019517155A (ja) | 2019-06-20 |
TWI641116B (zh) | 2018-11-11 |
US9985042B2 (en) | 2018-05-29 |
CN109196649B (zh) | 2019-12-24 |
EP3465762B1 (en) | 2022-06-01 |
EP3465762A1 (en) | 2019-04-10 |
TW201804604A (zh) | 2018-02-01 |
EP3465762A4 (en) | 2019-06-19 |
WO2017204937A1 (en) | 2017-11-30 |
US20170345840A1 (en) | 2017-11-30 |
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