JP6576038B2 - マイクロ表面実装デバイスパッケージング - Google Patents
マイクロ表面実装デバイスパッケージング Download PDFInfo
- Publication number
- JP6576038B2 JP6576038B2 JP2014543559A JP2014543559A JP6576038B2 JP 6576038 B2 JP6576038 B2 JP 6576038B2 JP 2014543559 A JP2014543559 A JP 2014543559A JP 2014543559 A JP2014543559 A JP 2014543559A JP 6576038 B2 JP6576038 B2 JP 6576038B2
- Authority
- JP
- Japan
- Prior art keywords
- carrier
- encapsulant
- die
- grinding
- packaging
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
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Classifications
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- H10W70/09—
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- H10W70/614—
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- H10W70/68—
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- H10W70/695—
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- H10W74/014—
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- H10W74/019—
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- H10W44/248—
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- H10W70/099—
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- H10W70/682—
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- H10W72/0198—
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- H10W72/073—
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- H10W72/241—
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- H10W72/874—
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- H10W72/9413—
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- H10W74/129—
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- H10W90/701—
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- H10W90/734—
Landscapes
- Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
- Dicing (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US13/303,053 US8450151B1 (en) | 2011-11-22 | 2011-11-22 | Micro surface mount device packaging |
| US13/303,053 | 2011-11-22 | ||
| PCT/US2012/066272 WO2013078323A1 (en) | 2011-11-22 | 2012-11-21 | Micro surface mount device packaging |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2015504608A JP2015504608A (ja) | 2015-02-12 |
| JP2015504608A5 JP2015504608A5 (enExample) | 2016-01-14 |
| JP6576038B2 true JP6576038B2 (ja) | 2019-09-18 |
Family
ID=48426012
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014543559A Active JP6576038B2 (ja) | 2011-11-22 | 2012-11-21 | マイクロ表面実装デバイスパッケージング |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US8450151B1 (enExample) |
| JP (1) | JP6576038B2 (enExample) |
| CN (1) | CN103918074B (enExample) |
| WO (1) | WO2013078323A1 (enExample) |
Families Citing this family (25)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8963336B2 (en) | 2012-08-03 | 2015-02-24 | Samsung Electronics Co., Ltd. | Semiconductor packages, methods of manufacturing the same, and semiconductor package structures including the same |
| KR101970291B1 (ko) * | 2012-08-03 | 2019-04-18 | 삼성전자주식회사 | 반도체 패키지의 제조 방법 |
| US9269675B2 (en) * | 2013-10-18 | 2016-02-23 | Taiwan Semiconductor Manufacturing Company Ltd. | Semiconductor device and manufacturing method thereof |
| US9390993B2 (en) * | 2014-08-15 | 2016-07-12 | Broadcom Corporation | Semiconductor border protection sealant |
| US10079156B2 (en) | 2014-11-07 | 2018-09-18 | Advanced Semiconductor Engineering, Inc. | Semiconductor package including dielectric layers defining via holes extending to component pads |
| US9721799B2 (en) * | 2014-11-07 | 2017-08-01 | Advanced Semiconductor Engineering, Inc. | Semiconductor package with reduced via hole width and reduced pad patch and manufacturing method thereof |
| CN106601628A (zh) * | 2016-12-30 | 2017-04-26 | 通富微电子股份有限公司 | 一种芯片的封装方法及芯片封装结构 |
| WO2018135705A1 (ko) * | 2017-01-17 | 2018-07-26 | 주식회사 네패스 | 반도체 패키지의 제조 방법 |
| KR101901987B1 (ko) * | 2017-01-17 | 2018-09-27 | 주식회사 네패스 | 반도체 패키지의 제조 방법 |
| WO2018135706A1 (ko) * | 2017-01-17 | 2018-07-26 | 주식회사 네패스 | 반도체 패키지의 제조 방법 |
| WO2018135707A1 (ko) * | 2017-01-17 | 2018-07-26 | 주식회사 네패스 | 반도체 패키지 제조용 트레이 |
| WO2018135708A1 (ko) * | 2017-01-17 | 2018-07-26 | 주식회사 네패스 | 반도체 패키지의 제조 방법 |
| EP3389085B1 (en) * | 2017-04-12 | 2019-11-06 | Nxp B.V. | Method of making a plurality of packaged semiconductor devices |
| WO2020170002A1 (en) * | 2019-02-23 | 2020-08-27 | Chengdu Eswin Sip Technology Co., Ltd. | Encapsulated fan-in semiconductor package with heat spreader and method of manufacturing the same |
| US11488931B2 (en) | 2018-02-23 | 2022-11-01 | Chengdu Eswin Sip Technology Co., Ltd. | Encapsulated fan-in semiconductor package with heat spreader and method of manufacturing the same |
| US12230539B2 (en) | 2018-08-01 | 2025-02-18 | Texas Instruments Incorporated | Wafer chip scale packaging with ball attach before repassivation |
| US10541220B1 (en) | 2018-08-02 | 2020-01-21 | Texas Instruments Incorporated | Printed repassivation for wafer chip scale packaging |
| US11183460B2 (en) | 2018-09-17 | 2021-11-23 | Texas Instruments Incorporated | Embedded die packaging with integrated ceramic substrate |
| US10650957B1 (en) | 2018-10-31 | 2020-05-12 | Texas Instruments Incorporated | Additive deposition low temperature curable magnetic interconnecting layer for power components integration |
| US11031332B2 (en) | 2019-01-31 | 2021-06-08 | Texas Instruments Incorporated | Package panel processing with integrated ceramic isolation |
| US10879155B2 (en) | 2019-05-09 | 2020-12-29 | Texas Instruments Incorporated | Electronic device with double-sided cooling |
| CN114514605A (zh) * | 2019-11-22 | 2022-05-17 | 华为技术有限公司 | 芯片封装、电子设备及芯片封装制备方法 |
| KR102635853B1 (ko) * | 2020-04-29 | 2024-02-13 | 주식회사 네패스라웨 | 반도체 패키지 및 이의 제조방법 |
| KR102684002B1 (ko) * | 2020-12-14 | 2024-07-11 | 주식회사 네패스 | 반도체 패키지 제조방법 및 이에 이용되는 가이드 프레임 |
| CN113064333A (zh) * | 2021-03-19 | 2021-07-02 | 北京智创芯源科技有限公司 | 一种微小晶片的光刻方法、晶片载片及光刻工装 |
Family Cites Families (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2738568B2 (ja) * | 1989-09-06 | 1998-04-08 | 新光電気工業株式会社 | 半導体チップモジュール |
| US5384691A (en) | 1993-01-08 | 1995-01-24 | General Electric Company | High density interconnect multi-chip modules including embedded distributed power supply elements |
| US6054772A (en) | 1998-04-29 | 2000-04-25 | National Semiconductor Corporation | Chip sized package |
| JP4526651B2 (ja) * | 1999-08-12 | 2010-08-18 | 富士通セミコンダクター株式会社 | 半導体装置 |
| JP2001313350A (ja) * | 2000-04-28 | 2001-11-09 | Sony Corp | チップ状電子部品及びその製造方法、並びにその製造に用いる疑似ウエーハ及びその製造方法 |
| US6825108B2 (en) * | 2002-02-01 | 2004-11-30 | Broadcom Corporation | Ball grid array package fabrication with IC die support structures |
| JP2003298005A (ja) * | 2002-02-04 | 2003-10-17 | Casio Comput Co Ltd | 半導体装置およびその製造方法 |
| US6908784B1 (en) | 2002-03-06 | 2005-06-21 | Micron Technology, Inc. | Method for fabricating encapsulated semiconductor components |
| JP2003297977A (ja) * | 2002-03-28 | 2003-10-17 | Sanyu Rec Co Ltd | 電子部品の製造方法 |
| US6803303B1 (en) * | 2002-07-11 | 2004-10-12 | Micron Technology, Inc. | Method of fabricating semiconductor component having encapsulated, bonded, interconnect contacts |
| US6936929B1 (en) | 2003-03-17 | 2005-08-30 | National Semiconductor Corporation | Multichip packages with exposed dice |
| JP2006339354A (ja) * | 2005-06-01 | 2006-12-14 | Tdk Corp | 半導体ic及びその製造方法、並びに、半導体ic内蔵モジュール及びその製造方法 |
| US8030138B1 (en) | 2006-07-10 | 2011-10-04 | National Semiconductor Corporation | Methods and systems of packaging integrated circuits |
| JP2008300560A (ja) * | 2007-05-30 | 2008-12-11 | Sony Corp | 半導体装置及びその製造方法 |
| US8018050B2 (en) | 2007-11-01 | 2011-09-13 | National Semiconductor Corporation | Integrated circuit package with integrated heat sink |
| US7749809B2 (en) | 2007-12-17 | 2010-07-06 | National Semiconductor Corporation | Methods and systems for packaging integrated circuits |
| US20090212428A1 (en) * | 2008-02-22 | 2009-08-27 | Advanced Chip Engineering Technology Inc. | Re-distribution conductive line structure and the method of forming the same |
| JP5075890B2 (ja) | 2008-09-03 | 2012-11-21 | 株式会社東芝 | 半導体装置及び半導体装置の製造方法 |
| JP2010219489A (ja) * | 2009-02-20 | 2010-09-30 | Toshiba Corp | 半導体装置およびその製造方法 |
| CN101924039B (zh) * | 2009-06-15 | 2016-05-18 | 日月光半导体制造股份有限公司 | 半导体封装件及其制造方法 |
-
2011
- 2011-11-22 US US13/303,053 patent/US8450151B1/en active Active
-
2012
- 2012-11-21 WO PCT/US2012/066272 patent/WO2013078323A1/en not_active Ceased
- 2012-11-21 CN CN201280054601.XA patent/CN103918074B/zh active Active
- 2012-11-21 JP JP2014543559A patent/JP6576038B2/ja active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CN103918074A (zh) | 2014-07-09 |
| US8450151B1 (en) | 2013-05-28 |
| WO2013078323A1 (en) | 2013-05-30 |
| US20130127043A1 (en) | 2013-05-23 |
| CN103918074B (zh) | 2017-06-09 |
| JP2015504608A (ja) | 2015-02-12 |
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