JP6557251B2 - 混合研磨剤タングステンcmp組成物 - Google Patents
混合研磨剤タングステンcmp組成物 Download PDFInfo
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- JP6557251B2 JP6557251B2 JP2016558618A JP2016558618A JP6557251B2 JP 6557251 B2 JP6557251 B2 JP 6557251B2 JP 2016558618 A JP2016558618 A JP 2016558618A JP 2016558618 A JP2016558618 A JP 2016558618A JP 6557251 B2 JP6557251 B2 JP 6557251B2
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- JP
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- Prior art keywords
- silica abrasive
- composition
- acid
- polishing
- particles
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000000203 mixture Substances 0.000 title claims description 215
- 239000010937 tungsten Substances 0.000 title claims description 43
- 229910052721 tungsten Inorganic materials 0.000 title claims description 43
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 348
- 238000005498 polishing Methods 0.000 claims description 234
- 239000002245 particle Substances 0.000 claims description 144
- 239000000377 silicon dioxide Substances 0.000 claims description 134
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 84
- 239000008119 colloidal silica Substances 0.000 claims description 61
- -1 aminosilane compound Chemical class 0.000 claims description 47
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 42
- 229910052742 iron Inorganic materials 0.000 claims description 41
- 239000000758 substrate Substances 0.000 claims description 37
- 238000000034 method Methods 0.000 claims description 34
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 claims description 28
- 150000001412 amines Chemical class 0.000 claims description 28
- 239000003381 stabilizer Substances 0.000 claims description 24
- OFOBLEOULBTSOW-UHFFFAOYSA-N Malonic acid Chemical compound OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 claims description 23
- 239000007800 oxidant agent Substances 0.000 claims description 23
- 239000000126 substance Substances 0.000 claims description 23
- 150000001875 compounds Chemical class 0.000 claims description 22
- 239000007788 liquid Substances 0.000 claims description 21
- 229910052757 nitrogen Inorganic materials 0.000 claims description 17
- 239000011164 primary particle Substances 0.000 claims description 16
- FZHAPNGMFPVSLP-UHFFFAOYSA-N silanamine Chemical compound [SiH3]N FZHAPNGMFPVSLP-UHFFFAOYSA-N 0.000 claims description 14
- 239000003112 inhibitor Substances 0.000 claims description 13
- 230000007935 neutral effect Effects 0.000 claims description 11
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 claims description 10
- 230000001590 oxidative effect Effects 0.000 claims description 10
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 claims description 9
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 claims description 8
- WNLRTRBMVRJNCN-UHFFFAOYSA-N adipic acid Chemical compound OC(=O)CCCCC(O)=O WNLRTRBMVRJNCN-UHFFFAOYSA-N 0.000 claims description 8
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 claims description 6
- XNGIFLGASWRNHJ-UHFFFAOYSA-N phthalic acid Chemical compound OC(=O)C1=CC=CC=C1C(O)=O XNGIFLGASWRNHJ-UHFFFAOYSA-N 0.000 claims description 6
- 150000001450 anions Chemical class 0.000 claims description 5
- 238000005530 etching Methods 0.000 claims description 5
- 150000004714 phosphonium salts Chemical class 0.000 claims description 5
- 125000001436 propyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])[H] 0.000 claims description 5
- 239000001361 adipic acid Substances 0.000 claims description 4
- 235000011037 adipic acid Nutrition 0.000 claims description 4
- 229910000147 aluminium phosphate Inorganic materials 0.000 claims description 4
- 229910021485 fumed silica Inorganic materials 0.000 claims description 4
- TXXHDPDFNKHHGW-UHFFFAOYSA-N muconic acid Chemical compound OC(=O)C=CC=CC(O)=O TXXHDPDFNKHHGW-UHFFFAOYSA-N 0.000 claims description 4
- BDJRBEYXGGNYIS-UHFFFAOYSA-N nonanedioic acid Chemical compound OC(=O)CCCCCCCC(O)=O BDJRBEYXGGNYIS-UHFFFAOYSA-N 0.000 claims description 4
- WLJVNTCWHIRURA-UHFFFAOYSA-N pimelic acid Chemical compound OC(=O)CCCCCC(O)=O WLJVNTCWHIRURA-UHFFFAOYSA-N 0.000 claims description 4
- CXMXRPHRNRROMY-UHFFFAOYSA-N sebacic acid Chemical compound OC(=O)CCCCCCCCC(O)=O CXMXRPHRNRROMY-UHFFFAOYSA-N 0.000 claims description 4
- TYFQFVWCELRYAO-UHFFFAOYSA-N suberic acid Chemical compound OC(=O)CCCCCCC(O)=O TYFQFVWCELRYAO-UHFFFAOYSA-N 0.000 claims description 4
- KCXVZYZYPLLWCC-UHFFFAOYSA-N EDTA Chemical compound OC(=O)CN(CC(O)=O)CCN(CC(O)=O)CC(O)=O KCXVZYZYPLLWCC-UHFFFAOYSA-N 0.000 claims description 3
- XSQUKJJJFZCRTK-UHFFFAOYSA-N Urea Chemical compound NC(N)=O XSQUKJJJFZCRTK-UHFFFAOYSA-N 0.000 claims description 3
- VZCYOOQTPOCHFL-UPHRSURJSA-N maleic acid Chemical compound OC(=O)\C=C/C(O)=O VZCYOOQTPOCHFL-UPHRSURJSA-N 0.000 claims description 3
- 239000011976 maleic acid Substances 0.000 claims description 3
- 235000006408 oxalic acid Nutrition 0.000 claims description 3
- 238000007790 scraping Methods 0.000 claims description 3
- VZCYOOQTPOCHFL-UHFFFAOYSA-N trans-butenedioic acid Natural products OC(=O)C=CC(O)=O VZCYOOQTPOCHFL-UHFFFAOYSA-N 0.000 claims description 3
- XVOUMQNXTGKGMA-OWOJBTEDSA-N (E)-glutaconic acid Chemical compound OC(=O)C\C=C\C(O)=O XVOUMQNXTGKGMA-OWOJBTEDSA-N 0.000 claims description 2
- RTBFRGCFXZNCOE-UHFFFAOYSA-N 1-methylsulfonylpiperidin-4-one Chemical compound CS(=O)(=O)N1CCC(=O)CC1 RTBFRGCFXZNCOE-UHFFFAOYSA-N 0.000 claims description 2
- 125000000954 2-hydroxyethyl group Chemical group [H]C([*])([H])C([H])([H])O[H] 0.000 claims description 2
- CKLJMWTZIZZHCS-REOHCLBHSA-N L-aspartic acid Chemical compound OC(=O)[C@@H](N)CC(O)=O CKLJMWTZIZZHCS-REOHCLBHSA-N 0.000 claims description 2
- TXXHDPDFNKHHGW-CCAGOZQPSA-N Muconic acid Natural products OC(=O)\C=C/C=C\C(O)=O TXXHDPDFNKHHGW-CCAGOZQPSA-N 0.000 claims description 2
- KDYFGRWQOYBRFD-UHFFFAOYSA-N Succinic acid Natural products OC(=O)CCC(O)=O KDYFGRWQOYBRFD-UHFFFAOYSA-N 0.000 claims description 2
- JFCQEDHGNNZCLN-UHFFFAOYSA-N anhydrous glutaric acid Natural products OC(=O)CCCC(O)=O JFCQEDHGNNZCLN-UHFFFAOYSA-N 0.000 claims description 2
- 235000003704 aspartic acid Nutrition 0.000 claims description 2
- KXHPPCXNWTUNSB-UHFFFAOYSA-M benzyl(trimethyl)azanium;chloride Chemical compound [Cl-].C[N+](C)(C)CC1=CC=CC=C1 KXHPPCXNWTUNSB-UHFFFAOYSA-M 0.000 claims description 2
- OQFSQFPPLPISGP-UHFFFAOYSA-N beta-carboxyaspartic acid Natural products OC(=O)C(N)C(C(O)=O)C(O)=O OQFSQFPPLPISGP-UHFFFAOYSA-N 0.000 claims description 2
- KDYFGRWQOYBRFD-NUQCWPJISA-N butanedioic acid Chemical compound O[14C](=O)CC[14C](O)=O KDYFGRWQOYBRFD-NUQCWPJISA-N 0.000 claims description 2
- 239000004202 carbamide Substances 0.000 claims description 2
- 235000015165 citric acid Nutrition 0.000 claims description 2
- 125000005369 trialkoxysilyl group Chemical group 0.000 claims description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims 4
- 125000004169 (C1-C6) alkyl group Chemical group 0.000 claims 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims 2
- 229910052698 phosphorus Inorganic materials 0.000 claims 2
- 239000011574 phosphorus Substances 0.000 claims 2
- VYTBPJNGNGMRFH-UHFFFAOYSA-N acetic acid;azane Chemical compound N.N.CC(O)=O.CC(O)=O.CC(O)=O.CC(O)=O VYTBPJNGNGMRFH-UHFFFAOYSA-N 0.000 claims 1
- QQONPFPTGQHPMA-UHFFFAOYSA-N propylene Natural products CC=C QQONPFPTGQHPMA-UHFFFAOYSA-N 0.000 claims 1
- 125000004805 propylene group Chemical group [H]C([H])([H])C([H])([*:1])C([H])([H])[*:2] 0.000 claims 1
- 239000006185 dispersion Substances 0.000 description 61
- 239000003082 abrasive agent Substances 0.000 description 28
- 238000000108 ultra-filtration Methods 0.000 description 25
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 18
- 239000002002 slurry Substances 0.000 description 14
- 238000009826 distribution Methods 0.000 description 13
- VDZOOKBUILJEDG-UHFFFAOYSA-M tetrabutylammonium hydroxide Chemical compound [OH-].CCCC[N+](CCCC)(CCCC)CCCC VDZOOKBUILJEDG-UHFFFAOYSA-M 0.000 description 12
- 230000000694 effects Effects 0.000 description 11
- 230000008569 process Effects 0.000 description 10
- 239000003054 catalyst Substances 0.000 description 9
- 125000002091 cationic group Chemical group 0.000 description 9
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 8
- 125000003277 amino group Chemical group 0.000 description 8
- 239000003139 biocide Substances 0.000 description 8
- SZQUEWJRBJDHSM-UHFFFAOYSA-N iron(3+);trinitrate;nonahydrate Chemical compound O.O.O.O.O.O.O.O.O.[Fe+3].[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O SZQUEWJRBJDHSM-UHFFFAOYSA-N 0.000 description 8
- 229910017604 nitric acid Inorganic materials 0.000 description 8
- 229920000642 polymer Polymers 0.000 description 8
- 230000007423 decrease Effects 0.000 description 7
- 239000000463 material Substances 0.000 description 7
- 239000007787 solid Substances 0.000 description 7
- NLXLAEXVIDQMFP-UHFFFAOYSA-N Ammonia chloride Chemical compound [NH4+].[Cl-] NLXLAEXVIDQMFP-UHFFFAOYSA-N 0.000 description 6
- 239000002253 acid Substances 0.000 description 6
- 125000000217 alkyl group Chemical group 0.000 description 6
- 238000002156 mixing Methods 0.000 description 6
- 230000000717 retained effect Effects 0.000 description 6
- 239000000243 solution Substances 0.000 description 6
- 230000002902 bimodal effect Effects 0.000 description 5
- 230000003115 biocidal effect Effects 0.000 description 5
- 239000012141 concentrate Substances 0.000 description 5
- 230000002829 reductive effect Effects 0.000 description 5
- 230000002441 reversible effect Effects 0.000 description 5
- DHMQDGOQFOQNFH-UHFFFAOYSA-N Glycine Chemical compound NCC(O)=O DHMQDGOQFOQNFH-UHFFFAOYSA-N 0.000 description 4
- 125000004432 carbon atom Chemical group C* 0.000 description 4
- 239000008367 deionised water Substances 0.000 description 4
- 229910021641 deionized water Inorganic materials 0.000 description 4
- 238000001914 filtration Methods 0.000 description 4
- LLYCMZGLHLKPPU-UHFFFAOYSA-M perbromate Chemical compound [O-]Br(=O)(=O)=O LLYCMZGLHLKPPU-UHFFFAOYSA-M 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 238000012360 testing method Methods 0.000 description 4
- RWSOTUBLDIXVET-UHFFFAOYSA-N Dihydrogen sulfide Chemical class S RWSOTUBLDIXVET-UHFFFAOYSA-N 0.000 description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 3
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 3
- 230000002378 acidificating effect Effects 0.000 description 3
- 235000019270 ammonium chloride Nutrition 0.000 description 3
- 150000003863 ammonium salts Chemical class 0.000 description 3
- 239000007864 aqueous solution Substances 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 238000007865 diluting Methods 0.000 description 3
- 238000010790 dilution Methods 0.000 description 3
- 239000012895 dilution Substances 0.000 description 3
- 230000003628 erosive effect Effects 0.000 description 3
- 230000007062 hydrolysis Effects 0.000 description 3
- 238000006460 hydrolysis reaction Methods 0.000 description 3
- 239000004615 ingredient Substances 0.000 description 3
- 238000011068 loading method Methods 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- VLTRZXGMWDSKGL-UHFFFAOYSA-N perchloric acid Chemical compound OCl(=O)(=O)=O VLTRZXGMWDSKGL-UHFFFAOYSA-N 0.000 description 3
- 229910052814 silicon oxide Inorganic materials 0.000 description 3
- CJAOGUFAAWZWNI-UHFFFAOYSA-N 1-n,1-n,4-n,4-n-tetramethylbenzene-1,4-diamine Chemical compound CN(C)C1=CC=C(N(C)C)C=C1 CJAOGUFAAWZWNI-UHFFFAOYSA-N 0.000 description 2
- XNCSCQSQSGDGES-UHFFFAOYSA-N 2-[2-[bis(carboxymethyl)amino]propyl-(carboxymethyl)amino]acetic acid Chemical compound OC(=O)CN(CC(O)=O)C(C)CN(CC(O)=O)CC(O)=O XNCSCQSQSGDGES-UHFFFAOYSA-N 0.000 description 2
- 239000004471 Glycine Substances 0.000 description 2
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 description 2
- KFSLWBXXFJQRDL-UHFFFAOYSA-N Peracetic acid Chemical compound CC(=O)OO KFSLWBXXFJQRDL-UHFFFAOYSA-N 0.000 description 2
- 229920003171 Poly (ethylene oxide) Polymers 0.000 description 2
- WCUXLLCKKVVCTQ-UHFFFAOYSA-M Potassium chloride Chemical compound [Cl-].[K+] WCUXLLCKKVVCTQ-UHFFFAOYSA-M 0.000 description 2
- JUJWROOIHBZHMG-UHFFFAOYSA-N Pyridine Chemical class C1=CC=NC=C1 JUJWROOIHBZHMG-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 2
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 2
- 230000002776 aggregation Effects 0.000 description 2
- 238000004220 aggregation Methods 0.000 description 2
- 235000001014 amino acid Nutrition 0.000 description 2
- 150000001413 amino acids Chemical class 0.000 description 2
- 125000004103 aminoalkyl group Chemical group 0.000 description 2
- 150000001768 cations Chemical class 0.000 description 2
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 238000012937 correction Methods 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 239000003989 dielectric material Substances 0.000 description 2
- DSDVUXRTYBTVRN-UHFFFAOYSA-N dimethyl(tetradecyl)azanium;bromide Chemical compound [Br-].CCCCCCCCCCCCCC[NH+](C)C DSDVUXRTYBTVRN-UHFFFAOYSA-N 0.000 description 2
- JRBPAEWTRLWTQC-UHFFFAOYSA-N dodecylamine Chemical compound CCCCCCCCCCCCN JRBPAEWTRLWTQC-UHFFFAOYSA-N 0.000 description 2
- 230000009881 electrostatic interaction Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 229960002449 glycine Drugs 0.000 description 2
- 150000004693 imidazolium salts Chemical class 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- VCJMYUPGQJHHFU-UHFFFAOYSA-N iron(3+);trinitrate Chemical compound [Fe+3].[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O VCJMYUPGQJHHFU-UHFFFAOYSA-N 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical group 0.000 description 2
- 239000000693 micelle Substances 0.000 description 2
- 229920000620 organic polymer Polymers 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- KHIWWQKSHDUIBK-UHFFFAOYSA-N periodic acid Chemical compound OI(=O)(=O)=O KHIWWQKSHDUIBK-UHFFFAOYSA-N 0.000 description 2
- 125000000864 peroxy group Chemical group O(O*)* 0.000 description 2
- 239000011148 porous material Substances 0.000 description 2
- WGYKZJWCGVVSQN-UHFFFAOYSA-N propylamine Chemical compound CCCN WGYKZJWCGVVSQN-UHFFFAOYSA-N 0.000 description 2
- 239000004627 regenerated cellulose Substances 0.000 description 2
- 150000003839 salts Chemical class 0.000 description 2
- 230000001629 suppression Effects 0.000 description 2
- 150000003512 tertiary amines Chemical class 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- QGLWBTPVKHMVHM-KTKRTIGZSA-N (z)-octadec-9-en-1-amine Chemical compound CCCCCCCC\C=C/CCCCCCCCN QGLWBTPVKHMVHM-KTKRTIGZSA-N 0.000 description 1
- AUSZENUAIBDXEC-UHFFFAOYSA-L 1,1,4,4-tetrabutylpiperazine-1,4-diium;dibromide Chemical compound [Br-].[Br-].CCCC[N+]1(CCCC)CC[N+](CCCC)(CCCC)CC1 AUSZENUAIBDXEC-UHFFFAOYSA-L 0.000 description 1
- RYHBNJHYFVUHQT-UHFFFAOYSA-N 1,4-Dioxane Chemical compound C1COCCO1 RYHBNJHYFVUHQT-UHFFFAOYSA-N 0.000 description 1
- OJXXJELUFOEVBF-UHFFFAOYSA-L 1,5-dimethyl-1,5-diazoniabicyclo[3.2.2]nonane;dibromide Chemical compound [Br-].[Br-].C1C[N+]2(C)CC[N+]1(C)CCC2 OJXXJELUFOEVBF-UHFFFAOYSA-L 0.000 description 1
- FJLUATLTXUNBOT-UHFFFAOYSA-N 1-Hexadecylamine Chemical compound CCCCCCCCCCCCCCCCN FJLUATLTXUNBOT-UHFFFAOYSA-N 0.000 description 1
- COSSPXYCRNRXRX-UHFFFAOYSA-N 1-benzyl-3-methylimidazol-3-ium Chemical compound C1=[N+](C)C=CN1CC1=CC=CC=C1 COSSPXYCRNRXRX-UHFFFAOYSA-N 0.000 description 1
- IQQRAVYLUAZUGX-UHFFFAOYSA-N 1-butyl-3-methylimidazolium Chemical compound CCCCN1C=C[N+](C)=C1 IQQRAVYLUAZUGX-UHFFFAOYSA-N 0.000 description 1
- IRGDPGYNHSIIJJ-UHFFFAOYSA-N 1-ethyl-2,3-dimethylimidazol-3-ium Chemical compound CCN1C=C[N+](C)=C1C IRGDPGYNHSIIJJ-UHFFFAOYSA-N 0.000 description 1
- NJMWOUFKYKNWDW-UHFFFAOYSA-N 1-ethyl-3-methylimidazolium Chemical compound CCN1C=C[N+](C)=C1 NJMWOUFKYKNWDW-UHFFFAOYSA-N 0.000 description 1
- BMVXCPBXGZKUPN-UHFFFAOYSA-N 1-hexanamine Chemical compound CCCCCCN BMVXCPBXGZKUPN-UHFFFAOYSA-N 0.000 description 1
- VILCJCGEZXAXTO-UHFFFAOYSA-N 2,2,2-tetramine Chemical compound NCCNCCNCCN VILCJCGEZXAXTO-UHFFFAOYSA-N 0.000 description 1
- VQNQTIUCMJTZGX-UHFFFAOYSA-N 2-hydroxyethyl(triphenyl)phosphanium Chemical compound C=1C=CC=CC=1[P+](C=1C=CC=CC=1)(CCO)C1=CC=CC=C1 VQNQTIUCMJTZGX-UHFFFAOYSA-N 0.000 description 1
- JVRHDWRSHRSHHS-UHFFFAOYSA-N 3-hydroxysilylpropan-1-amine Chemical compound NCCC[SiH2]O JVRHDWRSHRSHHS-UHFFFAOYSA-N 0.000 description 1
- VXEGSRKPIUDPQT-UHFFFAOYSA-N 4-[4-(4-methoxyphenyl)piperazin-1-yl]aniline Chemical compound C1=CC(OC)=CC=C1N1CCN(C=2C=CC(N)=CC=2)CC1 VXEGSRKPIUDPQT-UHFFFAOYSA-N 0.000 description 1
- QYYMDNHUJFIDDQ-UHFFFAOYSA-N 5-chloro-2-methyl-1,2-thiazol-3-one;2-methyl-1,2-thiazol-3-one Chemical compound CN1SC=CC1=O.CN1SC(Cl)=CC1=O QYYMDNHUJFIDDQ-UHFFFAOYSA-N 0.000 description 1
- QTBSBXVTEAMEQO-UHFFFAOYSA-M Acetate Chemical compound CC([O-])=O QTBSBXVTEAMEQO-UHFFFAOYSA-M 0.000 description 1
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical class N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 1
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 description 1
- 238000004438 BET method Methods 0.000 description 1
- 239000004342 Benzoyl peroxide Substances 0.000 description 1
- OMPJBNCRMGITSC-UHFFFAOYSA-N Benzoylperoxide Chemical compound C=1C=CC=CC=1C(=O)OOC(=O)C1=CC=CC=C1 OMPJBNCRMGITSC-UHFFFAOYSA-N 0.000 description 1
- BTBUEUYNUDRHOZ-UHFFFAOYSA-N Borate Chemical compound [O-]B([O-])[O-] BTBUEUYNUDRHOZ-UHFFFAOYSA-N 0.000 description 1
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- FOEGEZCXCLIKHJ-UHFFFAOYSA-L Br(=O)(=O)(=O)[O-].[Fe+2].Br(=O)(=O)(=O)[O-] Chemical compound Br(=O)(=O)(=O)[O-].[Fe+2].Br(=O)(=O)(=O)[O-] FOEGEZCXCLIKHJ-UHFFFAOYSA-L 0.000 description 1
- CPELXLSAUQHCOX-UHFFFAOYSA-M Bromide Chemical compound [Br-] CPELXLSAUQHCOX-UHFFFAOYSA-M 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- LZZYPRNAOMGNLH-UHFFFAOYSA-M Cetrimonium bromide Chemical compound [Br-].CCCCCCCCCCCCCCCC[N+](C)(C)C LZZYPRNAOMGNLH-UHFFFAOYSA-M 0.000 description 1
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 1
- 229910002554 Fe(NO3)3·9H2O Inorganic materials 0.000 description 1
- CWYNVVGOOAEACU-UHFFFAOYSA-N Fe2+ Chemical compound [Fe+2] CWYNVVGOOAEACU-UHFFFAOYSA-N 0.000 description 1
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- NRZWQKGABZFFKE-UHFFFAOYSA-N trimethylsulfonium Chemical compound C[S+](C)C NRZWQKGABZFFKE-UHFFFAOYSA-N 0.000 description 1
- 150000003658 tungsten compounds Chemical class 0.000 description 1
- OUYCCCASQSFEME-UHFFFAOYSA-N tyrosine Natural products OC(=O)C(N)CC1=CC=C(O)C=C1 OUYCCCASQSFEME-UHFFFAOYSA-N 0.000 description 1
- 235000002374 tyrosine Nutrition 0.000 description 1
- AQLJVWUFPCUVLO-UHFFFAOYSA-N urea hydrogen peroxide Chemical compound OO.NC(N)=O AQLJVWUFPCUVLO-UHFFFAOYSA-N 0.000 description 1
- 238000000733 zeta-potential measurement Methods 0.000 description 1
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- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
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Description
ここに開示された例では、9種のシリカ研磨剤分散液から選択された第1および第2のシリカ研磨剤を用いて、混合シリカ研磨剤の研磨組成物が調製された。分散液A1、B1、C1およびD1は、アミノシラン(アミノプロピルトリアルコキシシラン)で処理されたコロイド状シリカ分散液を、そのコロイド状シリカ粒子が、10mV超の永久的な正の電荷を有するように、含んでいた。分散液A2、B2、C2およびD2は、水溶液中に分散されたコロイド状シリカ粒子を含んでいた。A1、A2、B1、B2、C1、C2、D1およびD2中のコロイド状シリカ研磨剤は、それぞれ部分的に凝集されたシリカ研磨剤を含んでいたが、そのなかでは50%以上のコロイド状シリカ研磨剤粒子が、2つの凝集した一次粒子を含んでいた。分散液F2は、水溶液中に分散された、150m2/gの表面積を有する未処理のヒュームドシリカを含んでいた。それらの9種のシリカ研磨剤分散液についての更なる詳細が、表1に示されている。一次粒子径は、BET表面積測定値の慣用の球形外挿(spherical extrapolation)を用いて評価した。凝集粒子径は、CPSディスク遠心機、Model DC24000HR(CPS Instruments(Prairieville、ルイジアナ州)から入手可能)を用いて得た。
タングステン(W)研磨速度を、この例で、種々の研磨組成物について評価したが、研磨組成物のそれぞれは、例1の分散液A1、B1、C1およびD1から選択された第1および第2のシリカ研磨剤を含んでいた。この例では、第1および第2のシリカ研磨剤は、それぞれ10mV超の永久的な正の電荷を有するコロイド状シリカを含んでいた。この例では、第1および第2のシリカ研磨剤の相対的な量ならびに第1および第2のシリカ研磨剤の粒子径の、W研磨速度への効果を示している。それぞれの研磨組成物は、2.5のpHを有し、そして0.031質量%の硝酸第二鉄9水和物(Fe(NO3)3・9H2O)、0.04質量%のマロン酸、および2.4質量%び過酸化水素を含んでいた。W研磨速度は、W層を有する8インチのブランケットウエハを、Mirra(商標)CMP装置(Applied Materialsから入手可能)およびIC1010研磨パッドを用いて、2.5psiの下向き力、103rpmのプラテン速度、97rpmのヘッド速度、および150mL/分のスラリー流量で研磨することによって得た。研磨時間は2分間であった。第1および第2のシリカ研磨剤の質量パーセントおよび対応するW除去速度を、表2に示した。
タングステン(W)研磨速度が、この例において、種々の研磨組成物について評価され、研磨組成物のそれぞれは、例1の分散液A1、B1、C1およびD1から選択された第1および第2のシリカ研磨剤を含んでいた。この例の第1および第2のシリカ研磨剤は、それぞれ10mV超の永久的な正の電荷を有するコロイド状シリカを含んでいた。また、この例は、第1および第2のシリカ研磨剤の相対的な量ならびに第1および第2のシリカ研磨剤の粒子径の、W研磨速度への効果を示している。それぞれの研磨組成物は、2.5のpHを有しており、そして0.031質量%の硝酸第二鉄9水和物、0.04質量%のマロン酸、および2.4質量%の過酸化水素を含んでいた。W研磨速度は、W層を有する8インチのブランケットウエハを、Mirra(商標)CMP装置(Applied Materialsから入手可能)およびIC1010研磨パッドを用いて、2.5psiの下向き力、103rpmのプラテン速度、97rpmのヘッド速度、および150mL/分のスラリー流量で研磨することによって得た。この例での研磨時間は1分間であった。第1および第2のシリカ研磨剤の質量パーセントおよび対応するW除去速度を、表3に示した。例2では、研磨組成物3Aおよび3Bは、例2の研磨組成物2Eおよび2Hに対応し、唯一の違いは研磨時間であることに注意しなければならない。
タングステン(W)研磨速度が、この例において、種々の研磨組成物で評価され、研磨組成物の3つは、例1の分散液B1およびD1から選択された第1および第2のシリカ研磨剤を含んでいた。この例は、第1および第2のシリカ研磨剤の相対的な量の、W研磨速度への効果を示している。それぞれの研磨組成物は、2.5のpHを有しており、そして0.031質量%の硝酸第二鉄9水和物、0.04質量%のマロン酸、2500ppmのグリシン、および2.4質量%の過酸化水素を含んでいた。W研磨速度は、W層を有する8インチのブランケットウエハを、Mirra(商標)CMP装置(Applied Materialsから入手可能)およびIC1010研磨パッドを用いて、2.5psiの下向き力、103rpmのプラテン速度、97rpmのヘッド速度、および150mL/分のスラリー流量で研磨することによって得た。この例での研磨時間は1分間であった。第1および第2のシリカ研磨剤の質量パーセントおよび対応するW除去速度を、表4に示した。
タングステン(W)研磨速度が、この例において、種々の研磨組成物で評価され、研磨組成物の4つは、例1の分散液B1、B2およびC1から選択された第1および第2のシリカ研磨剤を含んでいた。この例は、第1および第2のシリカ研磨剤の相対的な量の、W研磨速度およびウエハをきれいにする(clear)時間(終点の時間)への効果を示している。それぞれの研磨組成物は、2.5のpHを有しており、そして0.031質量%の硝酸第二鉄9水和物、0.04質量%のマロン酸、2500ppmのグリシン、および2.4質量%の過酸化水素を含んでいた。W研磨速度は、W層を有する8インチのブランケットウエハを、Mirra(商標)CMP装置(Applied Materialsから入手可能)およびIC1010研磨パッドを用いて、2.5psiの下向き力、103rpmのプラテン速度、97rpmのヘッド速度、および150mL/分のスラリー流量で研磨することによって得た。この例での研磨時間は1分間であった。第1および第2のシリカ研磨剤の質量パーセントおよび対応するW除去速度およびウエハクリア(clear)時間を、表5に示した。
タングステン(W)研磨速度が、この例において、種々の研磨組成物で評価され、研磨組成物の5つは、例1の分散液B1、D2およびF1から選択された第1および第2のシリカ研磨剤を含んでいた。この例は、第1および第2のシリカ研磨剤の相対的な量の、W研磨速度およびウエハをきれいにする(clear)時間(終点の時間)への効果を示している。それぞれの研磨組成物は、2.5のpHを有しており、そして0.031質量%の硝酸第二鉄9水和物、0.04質量%のマロン酸、および2.4質量%の過酸化水素を含んでいた。W研磨速度は、W層を有する8インチのブランケットウエハを、Mirra(商標)CMP装置(Applied Materialsから入手可能)およびIC1010研磨パッドを用いて、2.5psiの下向き力、103rpmのプラテン速度、97rpmのヘッド速度、および150mL/分のスラリー流量で研磨することによって得た。この例での研磨時間は2分間であった。第1および第2のシリカ研磨剤の質量パーセントおよび対応するW除去速度を、表6に示した。
タングステン(W)研磨速度が、この例において、種々の研磨組成物で評価され、研磨組成物の6つは、例1の分散液B1、C1およびD2から選択された第1および第2のシリカ研磨剤を含んでいた。この例は、第1および第2のシリカ研磨剤の相対的な量の、W研磨速度およびウエハをきれいにする(clear)時間(終点の時間)への効果を示している。それぞれの研磨組成物は、2.5のpHを有しており(硝酸を用いて調整された)、そして0.031質量%の硝酸第二鉄9水和物、0.04質量%のマロン酸、100ppmのテトラブチルアンモニウムヒドロキシド(TBAH)、および2.4質量%の過酸化水素を含んでいた。W研磨速度は、W層を有する8インチのブランケットウエハを、Mirra(商標)CMP装置(Applied Materialsから入手可能)およびIC1010研磨パッドを用いて、2.5psiの下向き力、103rpmのプラテン速度、97rpmのヘッド速度、および150mL/分のスラリー流量で研磨することによって得た。この例での研磨時間は2分間であった。第1および第2のシリカ研磨剤の質量パーセントおよび対応するW除去速度を、表7に示した。
ゼータ電位測定値および電導度測定値は、ろ過の前後に、種々の研磨組成物について得た。それぞれの組成物の200mLを、Millipore Ultracell再生セルロース限外濾過ディスク(100000ダルトンのMWカットオフおよび6.3nmの孔径を有する)を通してろ過(濃縮)した。残りの分散液(限外濾過ディスクによって保持された約65mL)を収集し、そして硝酸でpH2.6に調整した脱イオン水を用いて、当初の200mLの体積に補充した。この手順を、合計で3回の限外濾過サイクル(そのサイクルのそれぞれは、限外濾過工程および補充工程を含んでいる)で繰り返した。研磨組成物のゼータ電位を、限外濾過手順の前後に(すなわち、初期の研磨組成物および3回限外濾過および補充された研磨組成物)、Model DT 1202音響および電気−音響分光計(Dispersion Technologiesから入手可能)を用いて測定した。研磨組成物の電気伝導性は、標準の電導計を用いて、限外濾過手順の前後に測定した。
粒子径分布を、例1の分散液B1、C1およびD2を用いて調製した5種の研磨組成物について評価した。研磨組成物9A、9Bおよび9Cは、分散液B1、C1およびD2をそれぞれDI水で希釈して、1質量%の最終的なコロイド状シリカ濃度にすることによって調製された。研磨組成物9Dは、分散液B1およびD2を希釈および混合することによって、最終的な混合物が、B1分散液からの0.2質量%のコロイド状シリカ粒子およびD2分散液からの0.3質量%のコロイド状シリカ粒子を含むように、調製された。研磨組成物9Eは、分散液C1およびD2を希釈および混合することによって、最終的な混合物が、C1分散液からの0.2質量%のコロイド状シリカ粒子およびD2分散液からの0.3質量%のコロイド状シリカ粒子を含むように、調製された。研磨組成物9Dおよび9Eでは、D1分散液は、非永久的な正の電荷を有する粒子を得るように、100ppm(質量基準)のTBAHで更に処理した。研磨組成物9Dおよび9Eは、193ppm(質量基準)の硝酸第二鉄9水和物、250ppm(質量基準)のマロン酸、および7ppm(質量基準)のKathon殺生物剤を更に含んでいた。5種の研磨組成物(9A、9B、9C、9Dおよび9E)のそれぞれのpHは、硝酸を用いて2.5に調整した。
Claims (26)
- タングステンを含む基材を研磨するために用いられる化学機械研磨組成物であって、
水系の液体キャリア;
該液体キャリアに分散された第1のシリカ研磨剤、該第1のシリカ研磨剤は、少なくとも10mVの永久的な正の電荷を有するコロイド状シリカ研磨剤である;ならびに、
該液体キャリアに分散された第2のシリカ研磨剤、該第2のシリカ研磨剤は、中性の電荷または非永久的な正の電荷を有している、
を含んでなる化学機械研磨組成物。 - 前記第1のシリカ研磨剤が、少なくとも20mVの永久的な正の電荷を有する、請求項1記載の組成物。
- 前記第1のシリカ研磨剤が、アミノシラン化合物を含む、請求項1記載の組成物。
- 前記アミノシラン化合物が、プロピル基含有アミノシランである、請求項3記載の組成物。
- 前記アミノシラン化合物が、ビス(2−ヒドロキシエチル)−3−アミノプロピルトリアルコキシシラン、ジエチルアミノメチルトリアルコキシシラン、(N,N−ジエチル−3−アミノプロピル)トリアルコキシシラン)、3−(N−スチリルメチル−2−アミノエチルアミノプロピルトリアルコキシシラン、アミノプロピルトリアルコキシシラン、(2−N−ベンジルアミノエチル)−3−アミノプロピルトリアルコキシシラン)、トリアルコキシシリルプロピル−N,N,N−トリメチルアンモニウムクロリド、N−(トリアルコキシシリルエチル)ベンジル−N,N,N−トリメチルアンモニウムクロリド、(ビス(メチルジアルコキシシリルプロピル)−N−メチルアミン、ビス(トリアルコキシシリルプロピル)尿素、ビス(3−(トリアルコキシシリル)プロピル)−エチレンジアミン、ビス(トリアルコキシシリルプロピル)アミン、ビス(トリアルコキシシリルプロピル)アミンおよびそれらの混合物からなる群から選択される、請求項3記載の組成物。
- 前記第2のシリカ研磨剤が、10mV未満の非永久的な正の電荷を有する、請求項1記載の組成物。
- (a)前記第1のシリカ研磨剤が、アミノシラン化合物を含み、かつ、
(b)前記第2のシリカ研磨剤が、化学式R1R2R3R4N+X−を有するアンモニウム塩または化学式R1R2R3R4P+X−を有するホスホニウム塩と接触しており、ここでNは窒素を表し、Pはリンを表し、R1、R2、R3およびR4は、独立してC1〜C6アルキル基を表し、そしてXはアニオンを表す、
請求項1記載の組成物。 - 前記第2のシリカ研磨剤の平均粒子径が、前記第1のシリカ研磨剤の平均粒子径に対して少なくとも20ナノメートル異なっている、請求項1記載の組成物。
- 前記第2のシリカ研磨剤の前記の平均粒子径が、前記第1のシリカ研磨剤の前記平均粒子径よりも少なくとも20ナノメートル大きい、請求項8記載の組成物。
- (a)前記第1のシリカ研磨剤の前記平均粒子径が、20〜110ナノメートルの範囲であり、かつ、
(b)前記第2のシリカ研磨剤の前記平均粒子径が、90〜180ナノメートルの範囲である、
請求項9記載の組成物。 - 前記第2のシリカ研磨剤が、熱分解法シリカ(pyrogenic silica)である、請求項1記載の組成物。
- 前記第2のシリカ研磨剤が、コロイド状シリカである、請求項1記載の組成物。
- (a)前記第1のシリカ研磨剤が、コロイド状シリカ研磨剤粒子を含み、該コロイド状シリカ研磨剤粒子の50%以上が、2つもしくは3つ以上が凝集された一次粒子を含み、かつ、
(b)前記第2のシリカ研磨剤が、コロイド状シリカ研磨剤粒子を含み、該コロイド状シリカ研磨剤粒子の50%以上が、2つもしくは3つ以上が凝集された一次粒子を含む、
請求項1記載の組成物。 - 1.5〜5の範囲のpHを有する、請求項1記載の組成物。
- 鉄含有促進剤を更に含む、請求項1記載の組成物。
- 前記鉄含有促進剤が、溶解性の鉄含有種を含み、かつ、前記組成物が、該溶解性の鉄含有種に結合された安定剤を更に含み、該安定剤が、酢酸、リン酸、フタル酸、クエン酸、アジピン酸、シュウ酸、マロン酸、アスパラギン酸、コハク酸、グルタル酸、ピメリン酸、スベリン酸、アゼライン酸、セバシン酸、マレイン酸、グルタコン酸、ムコン酸、エチレンジアミン四酢酸、プロピレンジアミン四酢酸、およびそれらの混合物からなる群から選択される、請求項15記載の組成物。
- 過酸化水素酸化剤を更に含む、請求項1記載の組成物。
- アミン含有化合物を含むタングステンエッチング抑制剤を更に含む、請求項1記載の組成物。
- 1.5〜5の範囲のpHを有し、かつ、
鉄含有促進剤、および、
アミン含有化合物を含むタングステンエッチング抑制剤、
を更に含む、請求項1記載の組成物。 - タングステン層を含む基材を化学機械研磨する方法であって、
(a)該基材を、以下の(i)〜(iii)を含む研磨組成物と接触させること、
(i)水系の液体キャリア、
(ii)該液体キャリアに分散された第1のシリカ研磨剤、該第1のシリカ研磨剤は、少なくとも10mVの永久的な正の電荷を有するコロイド状シリカ研磨剤である、および、
(iii)該液体キャリア中に分散された第2のシリカ研磨剤、該第2のシリカ研磨剤は、中性の電荷もしくは非永久的な正の電荷を有している、
(b)該研磨組成物を、該基材に対して動かすこと、ならびに、
(c)該基材を削り取って、該基材から該タングステンの一部を除去し、そしてそれによって該基材を研磨すること、
を含んでなる、方法。 - 前記第1のシリカ研磨剤が、プロピル基含有アミノシラン化合物を含む、請求項20記載の方法。
- 前記第2のシリカ研磨剤が、化学式R1R2R3R4N+X−を有するアンモニウム塩または化学式R1R2R3R4P+X−を有するホスホニウム塩と接触しており、ここでNは窒素を表し、Pはリンを表し、R1、R2、R3およびR4は、独立してC1〜C6アルキル基を表し、そしてXはアニオンを表す、請求項21記載の方法。
- 前記研磨組成物が、1.5〜5の範囲のpHを有し、かつ鉄含有促進剤を更に含む、請求項20記載の方法。
- 前記研磨組成物が、アミン含有化合物を含むタングステンエッチング抑制剤を更に含む、請求項20記載の方法。
- (a)前記第1のシリカ研磨剤の平均粒子径が、20〜110ナノメートルの範囲であり、
(b)前記第2のシリカ研磨剤の平均粒子径が、90〜180ナノメートルの範囲であり、かつ、
(c)前記第2のシリカ研磨剤の平均粒子径が、前記第1のシリカ研磨剤の平均粒子径よりも少なくとも20ナノメートル大きい、
請求項20記載の方法。 - (a)前記第1のシリカ研磨剤が、コロイド状シリカ研磨剤粒子を含み、該コロイド状シリカ研磨剤粒子の50%以上が、2つもしくは3つ以上が凝集された一次粒子を含み、かつ、
(b)前記第2のシリカ研磨剤が、コロイド状シリカ研磨剤粒子を含み、該コロイド状シリカ研磨剤粒子の50%以上が、2つもしくは3つ以上が凝集された一次粒子を含む、
請求項20記載の方法。
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KR102408747B1 (ko) | 2022-06-15 |
EP3122836B1 (en) | 2019-08-14 |
EP3122836A1 (en) | 2017-02-01 |
US9127187B1 (en) | 2015-09-08 |
US20150267082A1 (en) | 2015-09-24 |
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