JP6509376B2 - 太陽電池の製造方法 - Google Patents
太陽電池の製造方法 Download PDFInfo
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- JP6509376B2 JP6509376B2 JP2017557536A JP2017557536A JP6509376B2 JP 6509376 B2 JP6509376 B2 JP 6509376B2 JP 2017557536 A JP2017557536 A JP 2017557536A JP 2017557536 A JP2017557536 A JP 2017557536A JP 6509376 B2 JP6509376 B2 JP 6509376B2
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- 238000004519 manufacturing process Methods 0.000 title claims description 15
- 238000009792 diffusion process Methods 0.000 claims description 55
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 35
- 229910052710 silicon Inorganic materials 0.000 claims description 33
- 239000010703 silicon Substances 0.000 claims description 32
- 238000010304 firing Methods 0.000 claims description 30
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 13
- 229910052782 aluminium Inorganic materials 0.000 claims description 12
- 229910052709 silver Inorganic materials 0.000 claims description 11
- 239000004332 silver Substances 0.000 claims description 11
- 239000012535 impurity Substances 0.000 description 15
- 238000002161 passivation Methods 0.000 description 15
- 238000000034 method Methods 0.000 description 9
- 238000006243 chemical reaction Methods 0.000 description 5
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical group CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 125000004429 atom Chemical group 0.000 description 3
- 230000001681 protective effect Effects 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000000654 additive Substances 0.000 description 2
- 230000000996 additive effect Effects 0.000 description 2
- 239000012670 alkaline solution Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 125000004437 phosphorous atom Chemical group 0.000 description 2
- 229910052698 phosphorus Inorganic materials 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 229910001316 Ag alloy Inorganic materials 0.000 description 1
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical group [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- AZDRQVAHHNSJOQ-UHFFFAOYSA-N alumane Chemical group [AlH3] AZDRQVAHHNSJOQ-UHFFFAOYSA-N 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 239000007790 solid phase Substances 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0224—Electrodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers
- H01L31/068—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN homojunction type, e.g. bulk silicon PN homojunction solar cells or thin film polycrystalline silicon PN homojunction solar cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/547—Monocrystalline silicon PV cells
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- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Sustainable Development (AREA)
- Photovoltaic Devices (AREA)
Description
図1は、実施の形態1の太陽電池の製造方法の手順の概略を示すフローチャートである。図1に示す通り、まず、n型のシリコンウェハを用意する(S1)。次に、シリコンウェハの一方の面の側にp型拡散層を形成する(S2)。次に、シリコンウェハの他方の面に、n型拡散層を形成することを目的として、n型の成分の不純物を含むドーピングペーストを印刷によってペーストする(S3)。その後、p型拡散層を保護フィルムによって覆う。次に、シリコンウェハを加熱し、ドーピングペーストに含まれるn型の成分の不純物をシリコンウェハの他方の面の側に拡散させる。それにより、シリコンウェハの他方の面の側にn型拡散層を形成する(S4)。
Claims (2)
- n型シリコンウェハの一方の面にp型拡散層を形成するステップと、
前記n型シリコンウェハの他方の面にn型拡散層を形成するステップと、
前記p型拡散層の外側に銀とアルミニウムとによって構成されるp型側ペーストを設けるステップと、
前記n型拡散層の外側に銀によって構成されるn型側ペーストを設けるステップと、
前記p型側ペースト及び前記n型側ペーストが設けられた前記n型シリコンウェハの温度を、550℃から700℃までの範囲内の温度であって、いずれかの温度を基準として前記基準から上下20℃の帯域内の温度で20秒以上の期間にわたって保ち、その後、前記n型シリコンウェハを、700℃を超える温度となるように加熱して、前記p型側ペーストと前記n型側ペーストとを焼成するステップと
を含むことを特徴とする太陽電池の製造方法。 - 前記p型側ペーストと前記n型側ペーストとを焼成するステップにおいて、ヒータを用いて焼成し、前記p型側ペーストを、前記n型側ペーストよりも前記ヒータから離して位置させることを特徴とする請求項1に記載の太陽電池の製造方法。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP2015/085706 WO2017109835A1 (ja) | 2015-12-21 | 2015-12-21 | 太陽電池の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2017109835A1 JPWO2017109835A1 (ja) | 2018-03-29 |
JP6509376B2 true JP6509376B2 (ja) | 2019-05-08 |
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Application Number | Title | Priority Date | Filing Date |
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JP2017557536A Expired - Fee Related JP6509376B2 (ja) | 2015-12-21 | 2015-12-21 | 太陽電池の製造方法 |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP6509376B2 (ja) |
TW (1) | TWI622182B (ja) |
WO (1) | WO2017109835A1 (ja) |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5556669A (en) * | 1978-10-20 | 1980-04-25 | Matsushita Electric Ind Co Ltd | Semiconductor device and its manufacture |
JP3722326B2 (ja) * | 1996-12-20 | 2005-11-30 | 三菱電機株式会社 | 太陽電池の製造方法 |
JP3968001B2 (ja) * | 2002-11-26 | 2007-08-29 | 京セラ株式会社 | 太陽電池素子の形成方法 |
JP4846219B2 (ja) * | 2004-09-24 | 2011-12-28 | シャープ株式会社 | 結晶シリコン太陽電池の製造方法 |
JP5203970B2 (ja) * | 2006-12-25 | 2013-06-05 | ナミックス株式会社 | 結晶系シリコン基板の電極形成用導電性ペースト |
CN101179100A (zh) * | 2007-01-17 | 2008-05-14 | 江苏林洋新能源有限公司 | 一种大面积低弯曲超薄型双面照光太阳能电池制作方法 |
CN102751343A (zh) * | 2007-11-15 | 2012-10-24 | 日立化成工业株式会社 | 太阳能电池单体 |
US20120000523A1 (en) * | 2008-06-04 | 2012-01-05 | Lg Chem, Ltd. | Metal paste composition for forming electrode and silver-carbon composite electrode and silicon solar cell using the same |
US7615393B1 (en) * | 2008-10-29 | 2009-11-10 | Innovalight, Inc. | Methods of forming multi-doped junctions on a substrate |
JP2010223483A (ja) * | 2009-03-23 | 2010-10-07 | Mitsubishi Electric Corp | 焼成炉及び焼成炉を使用して作製した太陽電池セル |
CN102834933B (zh) * | 2009-09-18 | 2016-03-30 | 乔治洛德方法研究和开发液化空气有限公司 | 性能改善的太阳能电池 |
FR2959351B1 (fr) * | 2010-04-26 | 2013-11-08 | Photowatt Int | Procede de preparation d’une structure de type n+pp+ ou de type p+nn+ sur plaques de silicium |
JP2012248560A (ja) * | 2011-05-25 | 2012-12-13 | Panasonic Corp | 太陽電池の製造方法 |
JP2015516672A (ja) * | 2012-02-26 | 2015-06-11 | ソレクセル、インコーポレイテッド | レーザ分割及び装置層移設のためのシステム及び方法 |
JP2014220346A (ja) * | 2013-05-07 | 2014-11-20 | 株式会社村田製作所 | 太陽電池セルおよびその製造方法 |
-
2015
- 2015-12-21 WO PCT/JP2015/085706 patent/WO2017109835A1/ja active Application Filing
- 2015-12-21 JP JP2017557536A patent/JP6509376B2/ja not_active Expired - Fee Related
-
2016
- 2016-11-30 TW TW105139420A patent/TWI622182B/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
JPWO2017109835A1 (ja) | 2018-03-29 |
WO2017109835A1 (ja) | 2017-06-29 |
TW201733144A (zh) | 2017-09-16 |
TWI622182B (zh) | 2018-04-21 |
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