JP6455174B2 - 回路装置、電子機器、移動体及び物理量検出装置の製造方法 - Google Patents

回路装置、電子機器、移動体及び物理量検出装置の製造方法 Download PDF

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Publication number
JP6455174B2
JP6455174B2 JP2015010023A JP2015010023A JP6455174B2 JP 6455174 B2 JP6455174 B2 JP 6455174B2 JP 2015010023 A JP2015010023 A JP 2015010023A JP 2015010023 A JP2015010023 A JP 2015010023A JP 6455174 B2 JP6455174 B2 JP 6455174B2
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Prior art keywords
circuit
frequency
oscillation
physical quantity
circuit device
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JP2015010023A
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Japanese (ja)
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JP2016133470A (ja
JP2016133470A5 (enExample
Inventor
哲平 樋口
哲平 樋口
牧 克彦
克彦 牧
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Seiko Epson Corp
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Seiko Epson Corp
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Priority to JP2015010023A priority Critical patent/JP6455174B2/ja
Priority to CN201610006275.5A priority patent/CN105823473B/zh
Priority to US14/996,524 priority patent/US10072929B2/en
Publication of JP2016133470A publication Critical patent/JP2016133470A/ja
Publication of JP2016133470A5 publication Critical patent/JP2016133470A5/ja
Priority to US16/058,391 priority patent/US10704907B2/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01CMEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5607Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
    • G01C19/5614Signal processing
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01CMEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5607Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
    • G01C19/5628Manufacturing; Trimming; Mounting; Housings
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01CMEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5642Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
    • G01C19/5649Signal processing
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03BGENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
    • H03B5/00Generation of oscillations using amplifier with regenerative feedback from output to input
    • H03B5/02Details
    • H03B5/04Modifications of generator to compensate for variations in physical values, e.g. power supply, load, temperature

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Signal Processing (AREA)
  • Manufacturing & Machinery (AREA)
  • Gyroscopes (AREA)
  • Inductance-Capacitance Distribution Constants And Capacitance-Resistance Oscillators (AREA)
  • Oscillators With Electromechanical Resonators (AREA)
JP2015010023A 2015-01-22 2015-01-22 回路装置、電子機器、移動体及び物理量検出装置の製造方法 Active JP6455174B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2015010023A JP6455174B2 (ja) 2015-01-22 2015-01-22 回路装置、電子機器、移動体及び物理量検出装置の製造方法
CN201610006275.5A CN105823473B (zh) 2015-01-22 2016-01-05 电路装置、电子设备、移动体以及物理量检测装置的制造方法
US14/996,524 US10072929B2 (en) 2015-01-22 2016-01-15 Circuit device, electronic apparatus, moving object and method of manufacturing of physical quantity detection device
US16/058,391 US10704907B2 (en) 2015-01-22 2018-08-08 Circuit device, electronic apparatus, moving object and method of manufacturing of physical quantity detection device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2015010023A JP6455174B2 (ja) 2015-01-22 2015-01-22 回路装置、電子機器、移動体及び物理量検出装置の製造方法

Publications (3)

Publication Number Publication Date
JP2016133470A JP2016133470A (ja) 2016-07-25
JP2016133470A5 JP2016133470A5 (enExample) 2018-03-01
JP6455174B2 true JP6455174B2 (ja) 2019-01-23

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US (2) US10072929B2 (enExample)
JP (1) JP6455174B2 (enExample)
CN (1) CN105823473B (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6455174B2 (ja) * 2015-01-22 2019-01-23 セイコーエプソン株式会社 回路装置、電子機器、移動体及び物理量検出装置の製造方法
JP7053564B2 (ja) * 2017-03-02 2022-04-12 ソニーセミコンダクタソリューションズ株式会社 発振回路、計時回路、電子機器および発振回路の制御方法
FR3076677B1 (fr) * 2018-01-09 2020-11-27 Inteva Products France Sas Circuit de comptage en cascade comportant une detection de seuil d'ondulation variable
DE102019215889A1 (de) * 2019-10-16 2021-04-22 Robert Bosch Gmbh Vorrichtung und Verfahren zum Betreiben eines Inertialsensors
TWI727673B (zh) * 2020-02-25 2021-05-11 瑞昱半導體股份有限公司 偏壓電流產生電路

Family Cites Families (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7528682B2 (en) * 2002-03-06 2009-05-05 Piedek Technical Laboratory Electronic apparatus having display portion and oscillator and manufacturing method of the same
JP2005167927A (ja) 2003-12-05 2005-06-23 Seiko Instruments Inc Cr発振回路
US20080012611A1 (en) * 2004-07-22 2008-01-17 Yasuhito Sugimoto Clock Generator Circuit With Spectrum Spreading
JP4098298B2 (ja) * 2004-11-16 2008-06-11 ローム株式会社 Cr発振回路および電子装置
JP5495356B2 (ja) * 2005-06-01 2014-05-21 シチズンホールディングス株式会社 物理量センサ
JP2007043339A (ja) * 2005-08-01 2007-02-15 Epson Toyocom Corp 水晶発振器
CN101379694A (zh) * 2006-02-20 2009-03-04 新泻精密株式会社 振荡电路
JP4874023B2 (ja) * 2006-07-20 2012-02-08 日本電波工業株式会社 圧電振動子の製造方法、圧電振動子及び電子部品
US7895894B2 (en) 2006-11-06 2011-03-01 Seiko Epson Corporation Driver device, physical quantity measuring device, and electronic instrument
JP5200491B2 (ja) 2006-11-06 2013-06-05 セイコーエプソン株式会社 駆動装置、物理量測定装置及び電子機器
DE102006055589B4 (de) * 2006-11-24 2012-07-19 Infineon Technologies Ag Messvorrichtung und Messgrößensensor mit gekoppelter Verarbeitungs- und Anregungsfrequenz
WO2009038587A1 (en) * 2007-09-21 2009-03-26 Qualcomm Incorporated Signal generator with adjustable frequency
JP2009162645A (ja) 2008-01-08 2009-07-23 Panasonic Corp 慣性速度センサ信号処理回路およびそれを備える慣性速度センサ装置
JP4794596B2 (ja) 2008-04-04 2011-10-19 パナソニック株式会社 物理量検出回路、物理量センサ装置
JP5369525B2 (ja) 2008-07-28 2013-12-18 パナソニック株式会社 Pll回路およびそれを用いた角速度センサ
JP5262530B2 (ja) * 2008-09-30 2013-08-14 セイコーエプソン株式会社 電子デバイス及び電子デバイスの製造方法
JP2010185714A (ja) 2009-02-10 2010-08-26 Panasonic Corp 物理量センサシステム、物理量センサ装置
TW201044791A (en) * 2009-04-24 2010-12-16 Integrated Device Tech Clock, frequency reference, and other reference signal generator with frequency stability over temperature variation
JP2011049665A (ja) * 2009-08-25 2011-03-10 Seiko Instruments Inc 圧電振動子、圧電振動子の製造方法、発振器、電子機器および電波時計
JP2011069628A (ja) * 2009-09-24 2011-04-07 Seiko Epson Corp 物理量測定装置及び電子機器
CN102081426B (zh) * 2009-11-30 2013-06-12 原相科技股份有限公司 可调式振荡器的频率调整装置及频率调整方法
JP5601292B2 (ja) 2011-03-31 2014-10-08 株式会社デンソー デジタル位相同期回路および物理量検出センサ
CN103168419A (zh) * 2011-05-09 2013-06-19 松下电器产业株式会社 Rc振荡电路
JP2013058947A (ja) 2011-09-09 2013-03-28 Rohm Co Ltd クロック発振回路
JP5862313B2 (ja) * 2012-01-11 2016-02-16 株式会社ソシオネクスト 基準電圧生成回路,それを有する発振回路および発振回路の発振周波数の校正方法
JP6123983B2 (ja) * 2012-09-28 2017-05-10 セイコーエプソン株式会社 発振回路、半導体集積回路装置、振動デバイス、電子機器、および移動体
JP6185741B2 (ja) 2013-04-18 2017-08-23 ルネサスエレクトロニクス株式会社 周波数同期ループ回路及び半導体集積回路
JP6277689B2 (ja) 2013-11-27 2018-02-14 セイコーエプソン株式会社 検出装置、センサー、電子機器及び移動体
JP6455174B2 (ja) * 2015-01-22 2019-01-23 セイコーエプソン株式会社 回路装置、電子機器、移動体及び物理量検出装置の製造方法
JP2016171493A (ja) 2015-03-13 2016-09-23 セイコーエプソン株式会社 回路装置、電子機器及び移動体
JP6589333B2 (ja) * 2015-03-30 2019-10-16 セイコーエプソン株式会社 回路装置、電子機器及び移動体

Also Published As

Publication number Publication date
US10072929B2 (en) 2018-09-11
CN105823473A (zh) 2016-08-03
CN105823473B (zh) 2020-11-17
US20180347983A1 (en) 2018-12-06
US10704907B2 (en) 2020-07-07
US20160216113A1 (en) 2016-07-28
JP2016133470A (ja) 2016-07-25

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