CN105823473B - 电路装置、电子设备、移动体以及物理量检测装置的制造方法 - Google Patents

电路装置、电子设备、移动体以及物理量检测装置的制造方法 Download PDF

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Publication number
CN105823473B
CN105823473B CN201610006275.5A CN201610006275A CN105823473B CN 105823473 B CN105823473 B CN 105823473B CN 201610006275 A CN201610006275 A CN 201610006275A CN 105823473 B CN105823473 B CN 105823473B
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China
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circuit
frequency
oscillation
physical quantity
quantity sensor
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CN105823473A (zh
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樋口哲平
牧克彦
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Seiko Epson Corp
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Seiko Epson Corp
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01CMEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5607Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
    • G01C19/5614Signal processing
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01CMEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5607Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
    • G01C19/5628Manufacturing; Trimming; Mounting; Housings
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01CMEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5642Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
    • G01C19/5649Signal processing
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03BGENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
    • H03B5/00Generation of oscillations using amplifier with regenerative feedback from output to input
    • H03B5/02Details
    • H03B5/04Modifications of generator to compensate for variations in physical values, e.g. power supply, load, temperature

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Signal Processing (AREA)
  • Manufacturing & Machinery (AREA)
  • Gyroscopes (AREA)
  • Inductance-Capacitance Distribution Constants And Capacitance-Resistance Oscillators (AREA)
  • Oscillators With Electromechanical Resonators (AREA)
CN201610006275.5A 2015-01-22 2016-01-05 电路装置、电子设备、移动体以及物理量检测装置的制造方法 Active CN105823473B (zh)

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JP2015010023A JP6455174B2 (ja) 2015-01-22 2015-01-22 回路装置、電子機器、移動体及び物理量検出装置の製造方法
JP2015-010023 2015-01-22

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CN105823473A CN105823473A (zh) 2016-08-03
CN105823473B true CN105823473B (zh) 2020-11-17

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US (2) US10072929B2 (enExample)
JP (1) JP6455174B2 (enExample)
CN (1) CN105823473B (enExample)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6455174B2 (ja) * 2015-01-22 2019-01-23 セイコーエプソン株式会社 回路装置、電子機器、移動体及び物理量検出装置の製造方法
WO2018159033A1 (ja) * 2017-03-02 2018-09-07 ソニーセミコンダクタソリューションズ株式会社 発振回路、計時回路、電子機器および発振回路の制御方法
FR3076677B1 (fr) * 2018-01-09 2020-11-27 Inteva Products France Sas Circuit de comptage en cascade comportant une detection de seuil d'ondulation variable
DE102019215889A1 (de) * 2019-10-16 2021-04-22 Robert Bosch Gmbh Vorrichtung und Verfahren zum Betreiben eines Inertialsensors
TWI727673B (zh) * 2020-02-25 2021-05-11 瑞昱半導體股份有限公司 偏壓電流產生電路

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US7528682B2 (en) * 2002-03-06 2009-05-05 Piedek Technical Laboratory Electronic apparatus having display portion and oscillator and manufacturing method of the same
JP2005167927A (ja) 2003-12-05 2005-06-23 Seiko Instruments Inc Cr発振回路
WO2006009159A1 (ja) * 2004-07-22 2006-01-26 Rohm Co., Ltd クロック生成回路および通信装置
JP4098298B2 (ja) 2004-11-16 2008-06-11 ローム株式会社 Cr発振回路および電子装置
JP5495356B2 (ja) * 2005-06-01 2014-05-21 シチズンホールディングス株式会社 物理量センサ
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JPWO2007097063A1 (ja) * 2006-02-20 2009-07-09 Nsc株式会社 発振回路
JP4874023B2 (ja) * 2006-07-20 2012-02-08 日本電波工業株式会社 圧電振動子の製造方法、圧電振動子及び電子部品
JP5200491B2 (ja) 2006-11-06 2013-06-05 セイコーエプソン株式会社 駆動装置、物理量測定装置及び電子機器
US7895894B2 (en) 2006-11-06 2011-03-01 Seiko Epson Corporation Driver device, physical quantity measuring device, and electronic instrument
DE102006055589B4 (de) * 2006-11-24 2012-07-19 Infineon Technologies Ag Messvorrichtung und Messgrößensensor mit gekoppelter Verarbeitungs- und Anregungsfrequenz
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CN102081426B (zh) * 2009-11-30 2013-06-12 原相科技股份有限公司 可调式振荡器的频率调整装置及频率调整方法
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JP5158293B2 (ja) * 2011-05-09 2013-03-06 パナソニック株式会社 Rc発振回路
JP2013058947A (ja) 2011-09-09 2013-03-28 Rohm Co Ltd クロック発振回路
JP5862313B2 (ja) * 2012-01-11 2016-02-16 株式会社ソシオネクスト 基準電圧生成回路,それを有する発振回路および発振回路の発振周波数の校正方法
JP6123983B2 (ja) * 2012-09-28 2017-05-10 セイコーエプソン株式会社 発振回路、半導体集積回路装置、振動デバイス、電子機器、および移動体
JP6185741B2 (ja) 2013-04-18 2017-08-23 ルネサスエレクトロニクス株式会社 周波数同期ループ回路及び半導体集積回路
JP6277689B2 (ja) 2013-11-27 2018-02-14 セイコーエプソン株式会社 検出装置、センサー、電子機器及び移動体
JP6455174B2 (ja) * 2015-01-22 2019-01-23 セイコーエプソン株式会社 回路装置、電子機器、移動体及び物理量検出装置の製造方法
JP2016171493A (ja) 2015-03-13 2016-09-23 セイコーエプソン株式会社 回路装置、電子機器及び移動体
JP6589333B2 (ja) * 2015-03-30 2019-10-16 セイコーエプソン株式会社 回路装置、電子機器及び移動体

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Publication number Publication date
JP6455174B2 (ja) 2019-01-23
US10072929B2 (en) 2018-09-11
CN105823473A (zh) 2016-08-03
JP2016133470A (ja) 2016-07-25
US10704907B2 (en) 2020-07-07
US20180347983A1 (en) 2018-12-06
US20160216113A1 (en) 2016-07-28

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