JP6425505B2 - 被加工物の研削方法 - Google Patents
被加工物の研削方法 Download PDFInfo
- Publication number
- JP6425505B2 JP6425505B2 JP2014232561A JP2014232561A JP6425505B2 JP 6425505 B2 JP6425505 B2 JP 6425505B2 JP 2014232561 A JP2014232561 A JP 2014232561A JP 2014232561 A JP2014232561 A JP 2014232561A JP 6425505 B2 JP6425505 B2 JP 6425505B2
- Authority
- JP
- Japan
- Prior art keywords
- grinding
- workpiece
- workpieces
- wheel
- grinding wheel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000000034 method Methods 0.000 title claims description 38
- 239000000758 substrate Substances 0.000 claims description 15
- 229910052594 sapphire Inorganic materials 0.000 claims description 5
- 239000010980 sapphire Substances 0.000 claims description 5
- 230000002093 peripheral effect Effects 0.000 description 10
- 230000004048 modification Effects 0.000 description 8
- 238000012986 modification Methods 0.000 description 8
- 239000002390 adhesive tape Substances 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 6
- 239000000463 material Substances 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 239000006061 abrasive grain Substances 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000004575 stone Substances 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B5/00—Machines or devices designed for grinding surfaces of revolution on work, including those which also grind adjacent plane surfaces; Accessories therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
- B24B7/10—Single-purpose machines or devices
- B24B7/16—Single-purpose machines or devices for grinding end-faces, e.g. of gauges, rollers, nuts, piston rings
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
- B24B7/20—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
- B24B7/22—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
- B24B7/228—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding thin, brittle parts, e.g. semiconductors, wafers
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Grinding Of Cylindrical And Plane Surfaces (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
Description
11a 表面
11b 裏面
13 保持部材
13a 表面
13b 裏面
15 粘着テープ(保持部材)
17 フレーム
2 研削装置
4 基台
4a 開口
6 支持壁
8 X軸移動テーブル
10 防塵防滴カバー
12 操作パネル
14 チャックテーブル
14a 保持面
16 Z軸移動機構
18 Z軸ガイドレール
20 Z軸移動プレート
22 Z軸ボールネジ
24 Z軸パルスモータ
26 支持構造
28 研削ユニット(研削手段)
30 スピンドルハウジング
32 スピンドル
34 ホイールマウント
36 研削ホイール
38 ホイール基台
38a 第1面
38b 第2面
40 第1の研削砥石
42 第2の研削砥石
46 研削ホイール
48 ホイール基台
50 研削砥石
D1 最小間隔
D2 間隔(半径方向の間隔)
R1 回転方向
R2 回転方向
Claims (4)
- 板状の被加工物を保持するチャックテーブルと、該被加工物を研削加工する研削ホイールを装着した研削手段と、を備える研削装置を用いて、複数の該被加工物を同時に研削加工する被加工物の研削方法であって、
複数の該被加工物を、隣接する2枚の該被加工物に間隔(ゼロを除く)が形成されるように保持部材に貼着する被加工物貼着工程と、
該保持部材に貼着された該複数の被加工物を該チャックテーブルで保持する保持工程と、
該研削ホイールを該複数の被加工物に接触させて該複数の被加工物を同時に研削加工する研削工程と、を備え、
該研削ホイールは、円盤状のホイール基台と、該ホイール基台の第1面に環状に配列された複数の第1の研削砥石と、該複数の第1の研削砥石の半径方向内側で該複数の第1の研削砥石と同心円状に配列された複数の第2の研削砥石と、を含み、該複数の第1の研削砥石と該複数の第2の研削砥石との該半径方向の間隔は、隣接する2枚の該被加工物の最小間隔よりも広いことを特徴とする被加工物の研削方法。 - 前記ホイール基台に配列された前記第2の研削砥石の数は、前記ホイール基台に配列された前記第1の研削砥石の数よりも少ないことを特徴とする請求項1記載の被加工物の研削方法。
- 前記ホイール基台に配列された前記第2の研削砥石の耐消耗性は、前記ホイール基台に配列された前記第1の研削砥石の耐消耗性よりも低いことを特徴とする請求項1記載の被加工物の研削方法。
- 前記被加工物は、サファイア基板又はSiC基板であることを特徴とする請求項1から請求項3のいずれかに記載の被加工物の研削方法。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2014232561A JP6425505B2 (ja) | 2014-11-17 | 2014-11-17 | 被加工物の研削方法 |
TW104133535A TWI668751B (zh) | 2014-11-17 | 2015-10-13 | Grinding method of workpiece |
US14/937,229 US9821427B2 (en) | 2014-11-17 | 2015-11-10 | Grinding method for workpieces |
KR1020150159527A KR102243872B1 (ko) | 2014-11-17 | 2015-11-13 | 피가공물의 연삭 방법 |
DE102015222535.6A DE102015222535A1 (de) | 2014-11-17 | 2015-11-16 | Schleifverfahren für Werkstücke |
CN201510783173.XA CN105609414B (zh) | 2014-11-17 | 2015-11-16 | 被加工物的磨削方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2014232561A JP6425505B2 (ja) | 2014-11-17 | 2014-11-17 | 被加工物の研削方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2016093875A JP2016093875A (ja) | 2016-05-26 |
JP6425505B2 true JP6425505B2 (ja) | 2018-11-21 |
Family
ID=55855688
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2014232561A Active JP6425505B2 (ja) | 2014-11-17 | 2014-11-17 | 被加工物の研削方法 |
Country Status (6)
Country | Link |
---|---|
US (1) | US9821427B2 (ja) |
JP (1) | JP6425505B2 (ja) |
KR (1) | KR102243872B1 (ja) |
CN (1) | CN105609414B (ja) |
DE (1) | DE102015222535A1 (ja) |
TW (1) | TWI668751B (ja) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6887722B2 (ja) * | 2016-10-25 | 2021-06-16 | 株式会社ディスコ | ウェーハの加工方法及び切削装置 |
JP6858539B2 (ja) * | 2016-12-08 | 2021-04-14 | 株式会社ディスコ | 研削装置 |
US10876517B2 (en) * | 2017-12-22 | 2020-12-29 | Wind Solutions, Llc | Slew ring repair and damage prevention |
JP7118558B2 (ja) * | 2019-01-17 | 2022-08-16 | 株式会社ディスコ | 被加工物の加工方法 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5139496A (ja) * | 1974-09-30 | 1976-04-02 | Sohei Nakano | Kensakuban |
JPS5760929Y2 (ja) * | 1980-07-07 | 1982-12-25 | ||
JPS61226272A (ja) * | 1985-03-29 | 1986-10-08 | Toshiba Corp | ウエ−ハ研削用砥石 |
JP2006082197A (ja) * | 2004-09-17 | 2006-03-30 | Toyoda Mach Works Ltd | 砥石車 |
CN1897226A (zh) * | 2005-07-11 | 2007-01-17 | 上海华虹Nec电子有限公司 | 一种化学机械抛光机 |
JP2009166150A (ja) * | 2008-01-11 | 2009-07-30 | Denso Corp | ウェハの製造方法 |
JP5295731B2 (ja) * | 2008-11-21 | 2013-09-18 | 株式会社ディスコ | ウエーハの研削方法 |
JP2010247311A (ja) | 2009-04-20 | 2010-11-04 | Disco Abrasive Syst Ltd | 被加工物の研削方法 |
JP5619559B2 (ja) * | 2010-10-12 | 2014-11-05 | 株式会社ディスコ | 加工装置 |
US9120194B2 (en) * | 2011-07-21 | 2015-09-01 | Taiwan Semiconductor Manufacturing Company, Ltd. | Apparatus for wafer grinding |
JP2014004663A (ja) * | 2012-06-26 | 2014-01-16 | Disco Abrasive Syst Ltd | 被加工物の加工方法 |
-
2014
- 2014-11-17 JP JP2014232561A patent/JP6425505B2/ja active Active
-
2015
- 2015-10-13 TW TW104133535A patent/TWI668751B/zh active
- 2015-11-10 US US14/937,229 patent/US9821427B2/en active Active
- 2015-11-13 KR KR1020150159527A patent/KR102243872B1/ko active IP Right Grant
- 2015-11-16 DE DE102015222535.6A patent/DE102015222535A1/de active Pending
- 2015-11-16 CN CN201510783173.XA patent/CN105609414B/zh active Active
Also Published As
Publication number | Publication date |
---|---|
TWI668751B (zh) | 2019-08-11 |
DE102015222535A1 (de) | 2016-05-19 |
TW201620028A (zh) | 2016-06-01 |
KR102243872B1 (ko) | 2021-04-22 |
KR20160058700A (ko) | 2016-05-25 |
US20160136771A1 (en) | 2016-05-19 |
CN105609414B (zh) | 2020-06-12 |
US9821427B2 (en) | 2017-11-21 |
JP2016093875A (ja) | 2016-05-26 |
CN105609414A (zh) | 2016-05-25 |
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