JP6386923B2 - 半導体評価装置およびチャックステージの検査方法 - Google Patents

半導体評価装置およびチャックステージの検査方法 Download PDF

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Publication number
JP6386923B2
JP6386923B2 JP2015012196A JP2015012196A JP6386923B2 JP 6386923 B2 JP6386923 B2 JP 6386923B2 JP 2015012196 A JP2015012196 A JP 2015012196A JP 2015012196 A JP2015012196 A JP 2015012196A JP 6386923 B2 JP6386923 B2 JP 6386923B2
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semiconductor
chuck stage
resistor
evaluation apparatus
inspection
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JP2016139646A (ja
JP2016139646A5 (enExample
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岡田　章
章 岡田
貴也 野口
貴也 野口
欽也 山下
欽也 山下
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Mitsubishi Electric Corp
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Mitsubishi Electric Corp
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Priority to JP2015012196A priority Critical patent/JP6386923B2/ja
Priority to CN201610052913.7A priority patent/CN105826216B/zh
Priority to KR1020160009153A priority patent/KR101789911B1/ko
Publication of JP2016139646A publication Critical patent/JP2016139646A/ja
Publication of JP2016139646A5 publication Critical patent/JP2016139646A5/ja
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/10—Measuring as part of the manufacturing process

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • General Engineering & Computer Science (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP2015012196A 2015-01-26 2015-01-26 半導体評価装置およびチャックステージの検査方法 Active JP6386923B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2015012196A JP6386923B2 (ja) 2015-01-26 2015-01-26 半導体評価装置およびチャックステージの検査方法
CN201610052913.7A CN105826216B (zh) 2015-01-26 2016-01-26 半导体评价装置、检查用半导体装置及卡盘台的检查方法
KR1020160009153A KR101789911B1 (ko) 2015-01-26 2016-01-26 반도체 평가 장치, 검사용 반도체 장치, 및 척 스테이지의 검사 방법

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JP2015012196A JP6386923B2 (ja) 2015-01-26 2015-01-26 半導体評価装置およびチャックステージの検査方法

Related Child Applications (1)

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JP2018092845A Division JP6553247B2 (ja) 2018-05-14 2018-05-14 検査用半導体装置

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JP2016139646A JP2016139646A (ja) 2016-08-04
JP2016139646A5 JP2016139646A5 (enExample) 2017-06-22
JP6386923B2 true JP6386923B2 (ja) 2018-09-05

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JP (1) JP6386923B2 (enExample)
KR (1) KR101789911B1 (enExample)
CN (1) CN105826216B (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6562896B2 (ja) * 2016-12-22 2019-08-21 三菱電機株式会社 半導体装置の評価装置およびそれを用いた半導体装置の評価方法
JP6719423B2 (ja) * 2017-06-26 2020-07-08 三菱電機株式会社 チャックステージ検査装置およびチャックステージ検査方法
JP7336256B2 (ja) * 2019-05-10 2023-08-31 東京エレクトロン株式会社 載置台及び載置台の作製方法
JP7281981B2 (ja) * 2019-06-27 2023-05-26 東京エレクトロン株式会社 プローバおよびプローブカードのプリヒート方法
WO2022202060A1 (ja) * 2021-03-26 2022-09-29 ローム株式会社 検査用半導体構造

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3039911B2 (ja) * 1995-06-13 2000-05-08 高砂熱学工業株式会社 基板表面の有機物汚染の評価装置および方法
JP3237741B2 (ja) 1995-11-30 2001-12-10 東京エレクトロン株式会社 クリーン度の高い検査装置
JP2003322665A (ja) * 2002-05-01 2003-11-14 Jsr Corp 電気抵抗測定用コネクター並びに回路基板の電気抵抗測定装置および測定方法
JP2004288761A (ja) * 2003-03-20 2004-10-14 Renesas Technology Corp 半導体素子のテスト方法
JP4387125B2 (ja) * 2003-06-09 2009-12-16 東京エレクトロン株式会社 検査方法及び検査装置
JP2006170700A (ja) * 2004-12-14 2006-06-29 Sony Corp プローブ校正用治具、校正用治具付きプローブカードおよび半導体ウェハ測定装置
JP2006220505A (ja) * 2005-02-09 2006-08-24 Micronics Japan Co Ltd 校正基板用治具
JP4967472B2 (ja) 2006-06-22 2012-07-04 富士電機株式会社 半導体装置
JP5449719B2 (ja) 2008-08-11 2014-03-19 日本特殊陶業株式会社 配線基板、ｉｃ電気特性検査用配線基板、及び配線基板の製造方法
JP2011077077A (ja) 2009-09-29 2011-04-14 Fuji Electric Systems Co Ltd 半導体試験装置
JP5631038B2 (ja) * 2010-04-01 2014-11-26 三菱電機株式会社 半導体装置の製造方法
JP5929612B2 (ja) * 2012-08-08 2016-06-08 三菱電機株式会社 半導体装置の測定方法、測定器
JP6084469B2 (ja) * 2013-01-28 2017-02-22 三菱電機株式会社 半導体評価装置および半導体評価方法

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Publication number Publication date
KR101789911B1 (ko) 2017-10-25
CN105826216A (zh) 2016-08-03
JP2016139646A (ja) 2016-08-04
KR20160091841A (ko) 2016-08-03
CN105826216B (zh) 2021-05-04

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