JP6381486B2 - 半導体基板のための反応性硬化プロセス - Google Patents

半導体基板のための反応性硬化プロセス Download PDF

Info

Publication number
JP6381486B2
JP6381486B2 JP2015110017A JP2015110017A JP6381486B2 JP 6381486 B2 JP6381486 B2 JP 6381486B2 JP 2015110017 A JP2015110017 A JP 2015110017A JP 2015110017 A JP2015110017 A JP 2015110017A JP 6381486 B2 JP6381486 B2 JP 6381486B2
Authority
JP
Japan
Prior art keywords
process chamber
semiconductor substrate
curing
pressure
less
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2015110017A
Other languages
English (en)
Japanese (ja)
Other versions
JP2015233137A5 (enExample
JP2015233137A (ja
Inventor
ベルト ヨングブレート
ベルト ヨングブレート
ディーター ピエール
ディーター ピエール
デル ユート コルネリウス エー． ファン
デル ユート コルネリウス エー． ファン
ヘルベルト テルホルスト
ヘルベルト テルホルスト
ルシアン ユディラ
ルシアン ユディラ
ラドコ ジー． バンクラス
ラドコ ジー． バンクラス
テオドルス ジー．エム． オーステルラーケン
テオドルス ジー．エム． オーステルラーケン
Original Assignee
エーエスエム アイピー ホールディング ビー．ブイ．
エーエスエム アイピー ホールディング ビー．ブイ．
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by エーエスエム アイピー ホールディング ビー．ブイ．, エーエスエム アイピー ホールディング ビー．ブイ． filed Critical エーエスエム アイピー ホールディング ビー．ブイ．
Publication of JP2015233137A publication Critical patent/JP2015233137A/ja
Publication of JP2015233137A5 publication Critical patent/JP2015233137A5/ja
Application granted granted Critical
Publication of JP6381486B2 publication Critical patent/JP6381486B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/60—Formation of materials, e.g. in the shape of layers or pillars of insulating materials
    • H10P14/65—Formation of materials, e.g. in the shape of layers or pillars of insulating materials characterised by treatments performed before or after the formation of the materials
    • H10P14/6516—Formation of materials, e.g. in the shape of layers or pillars of insulating materials characterised by treatments performed before or after the formation of the materials of treatments performed after formation of the materials
    • H10P14/6529—Formation of materials, e.g. in the shape of layers or pillars of insulating materials characterised by treatments performed before or after the formation of the materials of treatments performed after formation of the materials by exposure to a gas or vapour
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40—Oxides
    • C23C16/401—Oxides containing silicon
    • C23C16/402—Silicon dioxide
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/56—After-treatment
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/60—Formation of materials, e.g. in the shape of layers or pillars of insulating materials
    • H10P14/63—Formation of materials, e.g. in the shape of layers or pillars of insulating materials characterised by the formation processes
    • H10P14/6302—Non-deposition formation processes
    • H10P14/6304—Formation by oxidation, e.g. oxidation of the substrate
    • H10P14/6306—Formation by oxidation, e.g. oxidation of the substrate of the semiconductor materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/60—Formation of materials, e.g. in the shape of layers or pillars of insulating materials
    • H10P14/63—Formation of materials, e.g. in the shape of layers or pillars of insulating materials characterised by the formation processes
    • H10P14/6326—Deposition processes
    • H10P14/6328—Deposition from the gas or vapour phase
    • H10P14/6334—Deposition from the gas or vapour phase using decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition
    • H10P14/6336—Deposition from the gas or vapour phase using decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition in the presence of a plasma [PECVD]
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/60—Formation of materials, e.g. in the shape of layers or pillars of insulating materials
    • H10P14/69—Inorganic materials
    • H10P14/692—Inorganic materials composed of oxides, glassy oxides or oxide-based glasses
    • H10P14/6921—Inorganic materials composed of oxides, glassy oxides or oxide-based glasses containing silicon
    • H10P14/69215—Inorganic materials composed of oxides, glassy oxides or oxide-based glasses containing silicon the material being a silicon oxide, e.g. SiO2

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Formation Of Insulating Films (AREA)
  • Chemical Vapour Deposition (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
JP2015110017A 2014-06-05 2015-05-29 半導体基板のための反応性硬化プロセス Active JP6381486B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201462008404P 2014-06-05 2014-06-05
US62/008,404 2014-06-05

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2018113074A Division JP6836551B2 (ja) 2014-06-05 2018-06-13 半導体基板のための反応性硬化プロセス

Publications (3)

Publication Number Publication Date
JP2015233137A JP2015233137A (ja) 2015-12-24
JP2015233137A5 JP2015233137A5 (enExample) 2016-11-04
JP6381486B2 true JP6381486B2 (ja) 2018-08-29

Family

ID=54770158

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2015110017A Active JP6381486B2 (ja) 2014-06-05 2015-05-29 半導体基板のための反応性硬化プロセス
JP2018113074A Active JP6836551B2 (ja) 2014-06-05 2018-06-13 半導体基板のための反応性硬化プロセス

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2018113074A Active JP6836551B2 (ja) 2014-06-05 2018-06-13 半導体基板のための反応性硬化プロセス

Country Status (4)

Country Link
US (2) US9431238B2 (enExample)
JP (2) JP6381486B2 (enExample)
KR (1) KR102172363B1 (enExample)
TW (1) TWI666682B (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017171817A1 (en) * 2016-03-31 2017-10-05 Intel Corporation Flowable dielectrics from vapor phase precursors
KR20190137967A (ko) * 2017-06-02 2019-12-11 어플라이드 머티어리얼스, 인코포레이티드 기판 상에 증착된 막들의 품질 개선
JP6752249B2 (ja) * 2018-03-27 2020-09-09 株式会社Ｋｏｋｕｓａｉ Ｅｌｅｃｔｒｉｃ 半導体装置の製造方法、基板処理装置およびプログラム
TW202107528A (zh) * 2019-04-30 2021-02-16 美商得昇科技股份有限公司 氫氣輔助的大氣自由基氧化
KR102771903B1 (ko) 2019-08-16 2025-02-27 삼성전자주식회사 저유전체 물질 층을 포함하는 반도체 소자 형성 방법
US20240167153A1 (en) * 2021-03-30 2024-05-23 Lam Research Corporation In-situ film annealing in substrate processing

Family Cites Families (44)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4784975A (en) * 1986-10-23 1988-11-15 International Business Machines Corporation Post-oxidation anneal of silicon dioxide
DE69327176T2 (de) 1992-07-04 2000-05-31 Trikon Equipments Ltd., Littleton-Upon-Severn Behandlungsverfahren für eine halbleiterscheibe.
JP3660469B2 (ja) * 1996-07-05 2005-06-15 日本電信電話株式会社 Ｓｏｉ基板の製造方法
JP3291227B2 (ja) 1997-11-28 2002-06-10 大陽東洋酸素株式会社 過酸化水素蒸気による処理システムにおける過酸化水素蒸気濃度検出方法及びその装置
JP3392789B2 (ja) 1999-09-14 2003-03-31 三菱重工業株式会社 熱酸化方法およびその装置
DE19960333C2 (de) * 1999-12-15 2002-12-19 Tetra Laval Holdings & Finance Vorrichtung zum Herstellen eines Gasgemisches und deren Verwendung
JP2001230246A (ja) 2000-02-17 2001-08-24 Mitsubishi Heavy Ind Ltd 半導体の熱酸化方法および熱酸化装置
US6492283B2 (en) 2000-02-22 2002-12-10 Asm Microchemistry Oy Method of forming ultrathin oxide layer
JP3437830B2 (ja) * 2000-11-28 2003-08-18 東京エレクトロン株式会社 成膜方法
US6759081B2 (en) 2001-05-11 2004-07-06 Asm International, N.V. Method of depositing thin films for magnetic heads
US6562735B1 (en) 2001-12-11 2003-05-13 Lsi Logic Corporation Control of reaction rate in formation of low k carbon-containing silicon oxide dielectric material using organosilane, unsubstituted silane, and hydrogen peroxide reactants
US6905939B2 (en) 2002-02-27 2005-06-14 Applied Materials, Inc. Process for forming silicon oxide material
JPWO2004027849A1 (ja) 2002-09-20 2006-01-19 株式会社日立国際電気 半導体装置の製造方法および基板処理装置
US20060165904A1 (en) 2005-01-21 2006-07-27 Asm Japan K.K. Semiconductor-manufacturing apparatus provided with ultraviolet light-emitting mechanism and method of treating semiconductor substrate using ultraviolet light emission
EP1790758A1 (en) 2005-11-25 2007-05-30 Interuniversitair Microelektronica Centrum ( Imec) Atomic layer deposition (ald) method for producing a high quality layer
US20060286306A1 (en) 2005-06-17 2006-12-21 Asm Japan K.K. Method of producing advanced low dielectric constant film by UV light emission
US20070009673A1 (en) 2005-07-06 2007-01-11 Asm Japan K.K. Insulation film and method for manufacturing same
JP2008010441A (ja) * 2006-06-27 2008-01-17 Toshiba Corp シリコン酸化膜の形成方法
KR101060633B1 (ko) * 2006-07-20 2011-08-31 신에쓰 가가꾸 고교 가부시끼가이샤 반도체 디바이스의 제조 방법 및 기판 처리 장치
US7718553B2 (en) 2006-09-21 2010-05-18 Asm Japan K.K. Method for forming insulation film having high density
US20080220619A1 (en) 2007-03-09 2008-09-11 Asm Japan K.K. Method for increasing mechanical strength of dielectric film by using sequential combination of two types of uv irradiation
US7781352B2 (en) 2007-06-06 2010-08-24 Asm Japan K.K. Method for forming inorganic silazane-based dielectric film
US7501292B2 (en) 2007-07-19 2009-03-10 Asm Japan K.K. Method for managing UV irradiation for curing semiconductor substrate
JP2009084625A (ja) * 2007-09-28 2009-04-23 Tokyo Electron Ltd 原料ガスの供給システム及び成膜装置
US20090093135A1 (en) 2007-10-04 2009-04-09 Asm Japan K.K. Semiconductor manufacturing apparatus and method for curing material with uv light
US20090093134A1 (en) 2007-10-05 2009-04-09 Asm Japan K.K Semiconductor manufacturing apparatus and method for curing materials with uv light
US7651959B2 (en) 2007-12-03 2010-01-26 Asm Japan K.K. Method for forming silazane-based dielectric film
US7622369B1 (en) 2008-05-30 2009-11-24 Asm Japan K.K. Device isolation technology on semiconductor substrate
US20090305515A1 (en) 2008-06-06 2009-12-10 Dustin Ho Method and apparatus for uv curing with water vapor
US8765233B2 (en) 2008-12-09 2014-07-01 Asm Japan K.K. Method for forming low-carbon CVD film for filling trenches
US8980382B2 (en) * 2009-12-02 2015-03-17 Applied Materials, Inc. Oxygen-doping for non-carbon radical-component CVD films
US8741788B2 (en) * 2009-08-06 2014-06-03 Applied Materials, Inc. Formation of silicon oxide using non-carbon flowable CVD processes
US20110151677A1 (en) * 2009-12-21 2011-06-23 Applied Materials, Inc. Wet oxidation process performed on a dielectric material formed from a flowable cvd process
US8647992B2 (en) * 2010-01-06 2014-02-11 Applied Materials, Inc. Flowable dielectric using oxide liner
JP2012060000A (ja) 2010-09-10 2012-03-22 Toshiba Corp シリコン酸化膜の製造装置
US20120177846A1 (en) * 2011-01-07 2012-07-12 Applied Materials, Inc. Radical steam cvd
US8445078B2 (en) 2011-04-20 2013-05-21 Applied Materials, Inc. Low temperature silicon oxide conversion
WO2013077321A1 (ja) * 2011-11-21 2013-05-30 株式会社日立国際電気 半導体装置の製造装置、半導体装置の製造方法及び記録媒体
JP6199744B2 (ja) 2011-12-20 2017-09-20 株式会社日立国際電気 基板処理装置、半導体装置の製造方法および気化装置
JP6290856B2 (ja) * 2012-03-28 2018-03-07 ラシリック, インコーポレイテッドRASIRC, Inc. 多成分溶液からプロセスガスを送達する方法
TW201403711A (zh) * 2012-07-02 2014-01-16 應用材料股份有限公司 利用氣相化學暴露之低ｋ介電質損傷修復
WO2014014511A1 (en) 2012-07-16 2014-01-23 Rasirc Method, system, and device for delivery of high purity hydrogen peroxide
CN104428877B (zh) * 2012-07-27 2016-12-07 株式会社日立国际电气 衬底处理装置、半导体器件的制造方法
US9171715B2 (en) 2012-09-05 2015-10-27 Asm Ip Holding B.V. Atomic layer deposition of GeO2

Also Published As

Publication number Publication date
KR102172363B1 (ko) 2020-11-02
US20170011910A1 (en) 2017-01-12
JP2015233137A (ja) 2015-12-24
US20150357184A1 (en) 2015-12-10
JP2018198318A (ja) 2018-12-13
KR20150140232A (ko) 2015-12-15
JP6836551B2 (ja) 2021-03-03
TWI666682B (zh) 2019-07-21
TW201603113A (zh) 2016-01-16
US9431238B2 (en) 2016-08-30

Similar Documents

Publication Publication Date Title
JP6836551B2 (ja) 半導体基板のための反応性硬化プロセス
US10041167B2 (en) Cyclic sequential processes for forming high quality thin films
TWI752452B (zh) 半導體裝置之製造方法、基板處理方法、基板處理裝置及程式
JP2004193622A (ja) 多孔誘電体材料のｃｖｄ法
TW202208663A (zh) 含矽及氮膜的製造方法
TWI742327B (zh) 半導體裝置之製造方法、基板處理方法、基板處理裝置及程式
JP2004507071A (ja) 急速熱Ｎ２処理による、Ｓｉ（１００）上の超薄窒化物の成長
JP6752249B2 (ja) 半導体装置の製造方法、基板処理装置およびプログラム
KR102154114B1 (ko) 반도체 장치의 제조 방법, 기판 처리 장치 및 프로그램
JP2007109984A (ja) 酸化膜形成方法
JP4032889B2 (ja) 絶縁膜の形成方法
JP6836655B2 (ja) 基板処理装置、半導体装置の製造方法及びプログラム
JP6242283B2 (ja) 成膜方法
Hernández et al. Kinetics and Compositional Dependence on the Microwave Power and SiH4/N 2 Flow Ratio of Silicon Nitride Deposited by Electron Cyclotron Resonance Plasmas
CN111902918B (zh) 半导体装置的制造方法、基板处理装置以及记录介质
JP6987948B2 (ja) 半導体装置の製造方法、基板処理方法、基板処理装置、およびプログラム
US20250125142A1 (en) Substrate processing method for filling one or more gaps on a surface of a substrate
US20250054753A1 (en) Substrate processing method
US10790136B2 (en) Method of manufacturing semiconductor device, substrate processing system and non-transitory computer-readable recording medium
JP2025127715A (ja) 改質方法
WO2019058477A1 (ja) 半導体装置の製造方法、基板処理装置およびプログラム
JPWO2019064434A1 (ja) 半導体装置の製造方法、基板処理装置及びプログラム
JP2009277686A (ja) 絶縁膜の成膜方法および絶縁膜

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20160914

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20160914

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20170616

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20170704

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20171004

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20171204

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20180213

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20180613

A911 Transfer to examiner for re-examination before appeal (zenchi)

Free format text: JAPANESE INTERMEDIATE CODE: A911

Effective date: 20180621

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20180710

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20180731

R150 Certificate of patent or registration of utility model

Ref document number: 6381486

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250