JP6342868B2 - 被コーティング物品およびそのコーティング方法 - Google Patents
被コーティング物品およびそのコーティング方法 Download PDFInfo
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- JP6342868B2 JP6342868B2 JP2015197036A JP2015197036A JP6342868B2 JP 6342868 B2 JP6342868 B2 JP 6342868B2 JP 2015197036 A JP2015197036 A JP 2015197036A JP 2015197036 A JP2015197036 A JP 2015197036A JP 6342868 B2 JP6342868 B2 JP 6342868B2
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- 238000000576 coating method Methods 0.000 title claims description 89
- 239000011248 coating agent Substances 0.000 claims description 78
- 239000000758 substrate Substances 0.000 claims description 47
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 22
- 229910052751 metal Inorganic materials 0.000 claims description 15
- 239000002184 metal Substances 0.000 claims description 15
- 229910052802 copper Inorganic materials 0.000 claims description 12
- 239000010949 copper Substances 0.000 claims description 12
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 11
- 229910052721 tungsten Inorganic materials 0.000 claims description 8
- 229910001080 W alloy Inorganic materials 0.000 claims description 6
- 229910052741 iridium Inorganic materials 0.000 claims description 5
- 150000002739 metals Chemical class 0.000 claims description 5
- MOWMLACGTDMJRV-UHFFFAOYSA-N nickel tungsten Chemical compound [Ni].[W] MOWMLACGTDMJRV-UHFFFAOYSA-N 0.000 claims description 5
- 229910052763 palladium Inorganic materials 0.000 claims description 5
- 229910052697 platinum Inorganic materials 0.000 claims description 5
- 229910052750 molybdenum Inorganic materials 0.000 claims description 4
- 229910052709 silver Inorganic materials 0.000 claims description 4
- 239000002159 nanocrystal Substances 0.000 claims description 3
- 239000010410 layer Substances 0.000 description 89
- 238000004070 electrodeposition Methods 0.000 description 46
- 238000000034 method Methods 0.000 description 37
- 238000005260 corrosion Methods 0.000 description 33
- 230000007797 corrosion Effects 0.000 description 33
- 229910045601 alloy Inorganic materials 0.000 description 22
- 239000000956 alloy Substances 0.000 description 22
- 238000012360 testing method Methods 0.000 description 17
- 238000005259 measurement Methods 0.000 description 15
- 239000000203 mixture Substances 0.000 description 12
- 229910052759 nickel Inorganic materials 0.000 description 12
- 239000000463 material Substances 0.000 description 11
- 239000000523 sample Substances 0.000 description 10
- 238000007747 plating Methods 0.000 description 8
- 229910017392 Au—Co Inorganic materials 0.000 description 6
- 239000010931 gold Substances 0.000 description 6
- 229910000510 noble metal Inorganic materials 0.000 description 6
- 238000012545 processing Methods 0.000 description 5
- 238000010998 test method Methods 0.000 description 5
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 4
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 4
- 229910052737 gold Inorganic materials 0.000 description 4
- 229910017604 nitric acid Inorganic materials 0.000 description 4
- 239000002245 particle Substances 0.000 description 4
- 238000004833 X-ray photoelectron spectroscopy Methods 0.000 description 3
- 239000000654 additive Substances 0.000 description 3
- 239000011651 chromium Substances 0.000 description 3
- 238000000151 deposition Methods 0.000 description 3
- 239000012530 fluid Substances 0.000 description 3
- -1 potassium ferricyanide Chemical compound 0.000 description 3
- 150000003839 salts Chemical class 0.000 description 3
- 238000000682 scanning probe acoustic microscopy Methods 0.000 description 3
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 3
- 239000010937 tungsten Substances 0.000 description 3
- 229910015373 AuCo Inorganic materials 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 2
- 239000011247 coating layer Substances 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000004090 dissolution Methods 0.000 description 2
- 238000009713 electroplating Methods 0.000 description 2
- 231100000086 high toxicity Toxicity 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 229910021645 metal ion Inorganic materials 0.000 description 2
- 239000011733 molybdenum Substances 0.000 description 2
- 229910052762 osmium Inorganic materials 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 229910052703 rhodium Inorganic materials 0.000 description 2
- 229910052707 ruthenium Inorganic materials 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 229910052717 sulfur Inorganic materials 0.000 description 2
- 229910052718 tin Inorganic materials 0.000 description 2
- 239000011135 tin Substances 0.000 description 2
- 229910000967 As alloy Inorganic materials 0.000 description 1
- 229910001369 Brass Inorganic materials 0.000 description 1
- 229910000906 Bronze Inorganic materials 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- KRKNYBCHXYNGOX-UHFFFAOYSA-K Citrate Chemical compound [O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O KRKNYBCHXYNGOX-UHFFFAOYSA-K 0.000 description 1
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- 229910019142 PO4 Inorganic materials 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- WGLPBDUCMAPZCE-UHFFFAOYSA-N Trioxochromium Chemical compound O=[Cr](=O)=O WGLPBDUCMAPZCE-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 239000012670 alkaline solution Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 239000012298 atmosphere Substances 0.000 description 1
- 239000003637 basic solution Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 239000010951 brass Substances 0.000 description 1
- 239000010974 bronze Substances 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 229910001430 chromium ion Inorganic materials 0.000 description 1
- 229910000423 chromium oxide Inorganic materials 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000002845 discoloration Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000012634 fragment Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052752 metalloid Inorganic materials 0.000 description 1
- 150000002738 metalloids Chemical class 0.000 description 1
- 239000002086 nanomaterial Substances 0.000 description 1
- LGQLOGILCSXPEA-UHFFFAOYSA-L nickel sulfate Chemical compound [Ni+2].[O-]S([O-])(=O)=O LGQLOGILCSXPEA-UHFFFAOYSA-L 0.000 description 1
- KERTUBUCQCSNJU-UHFFFAOYSA-L nickel(2+);disulfamate Chemical compound [Ni+2].NS([O-])(=O)=O.NS([O-])(=O)=O KERTUBUCQCSNJU-UHFFFAOYSA-L 0.000 description 1
- 229910000363 nickel(II) sulfate Inorganic materials 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- OFNHPGDEEMZPFG-UHFFFAOYSA-N phosphanylidynenickel Chemical compound [P].[Ni] OFNHPGDEEMZPFG-UHFFFAOYSA-N 0.000 description 1
- 235000021317 phosphate Nutrition 0.000 description 1
- 150000003013 phosphoric acid derivatives Chemical class 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 238000009700 powder processing Methods 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
- XMVONEAAOPAGAO-UHFFFAOYSA-N sodium tungstate Chemical compound [Na+].[Na+].[O-][W]([O-])(=O)=O XMVONEAAOPAGAO-UHFFFAOYSA-N 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000007655 standard test method Methods 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- IIACRCGMVDHOTQ-UHFFFAOYSA-M sulfamate Chemical compound NS([O-])(=O)=O IIACRCGMVDHOTQ-UHFFFAOYSA-M 0.000 description 1
- 238000012876 topography Methods 0.000 description 1
- 231100000331 toxic Toxicity 0.000 description 1
- 230000002588 toxic effect Effects 0.000 description 1
- 229910052723 transition metal Inorganic materials 0.000 description 1
- 150000003624 transition metals Chemical class 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 239000000080 wetting agent Substances 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
Classifications
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- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D3/00—Electroplating: Baths therefor
- C25D3/02—Electroplating: Baths therefor from solutions
- C25D3/48—Electroplating: Baths therefor from solutions of gold
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B15/00—Layered products comprising a layer of metal
- B32B15/01—Layered products comprising a layer of metal all layers being exclusively metallic
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B15/00—Layered products comprising a layer of metal
- B32B15/01—Layered products comprising a layer of metal all layers being exclusively metallic
- B32B15/018—Layered products comprising a layer of metal all layers being exclusively metallic one layer being formed of a noble metal or a noble metal alloy
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B15/00—Layered products comprising a layer of metal
- B32B15/04—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B15/00—Layered products comprising a layer of metal
- B32B15/04—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
- B32B15/043—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material of metal
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B15/00—Layered products comprising a layer of metal
- B32B15/20—Layered products comprising a layer of metal comprising aluminium or copper
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C19/00—Alloys based on nickel or cobalt
- C22C19/03—Alloys based on nickel or cobalt based on nickel
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/02—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings only including layers of metallic material
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/02—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings only including layers of metallic material
- C23C28/021—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings only including layers of metallic material including at least one metal alloy layer
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/02—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings only including layers of metallic material
- C23C28/023—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings only including layers of metallic material only coatings of metal elements only
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/02—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings only including layers of metallic material
- C23C28/026—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings only including layers of metallic material including at least one amorphous metallic material layer
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
- C23C30/005—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process on hard metal substrates
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D3/00—Electroplating: Baths therefor
- C25D3/02—Electroplating: Baths therefor from solutions
- C25D3/12—Electroplating: Baths therefor from solutions of nickel or cobalt
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
- C25D5/10—Electroplating with more than one layer of the same or of different metals
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
- C25D5/10—Electroplating with more than one layer of the same or of different metals
- C25D5/12—Electroplating with more than one layer of the same or of different metals at least one layer being of nickel or chromium
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
- C25D5/18—Electroplating using modulated, pulsed or reversing current
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
- C25D5/60—Electroplating characterised by the structure or texture of the layers
- C25D5/615—Microstructure of the layers, e.g. mixed structure
- C25D5/617—Crystalline layers
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
- C25D5/60—Electroplating characterised by the structure or texture of the layers
- C25D5/615—Microstructure of the layers, e.g. mixed structure
- C25D5/619—Amorphous layers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
- H01R13/00—Details of coupling devices of the kinds covered by groups H01R12/70 or H01R24/00 - H01R33/00
- H01R13/02—Contact members
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Description
ループから選択された金属を含み、前記第2層が0.762μm(30マイクロインチ)よりも小さい厚さを有する。
のケースでは、第2層の厚さは、0.508μm(20マイクロインチ)よりも薄いこともある(例えば、約0.0254μm〜約0.508μm(約1マイクロインチ〜約20マイクロインチ)の間、幾つかのケースでは、約0.127μm〜約0.508μm(約5マイクロインチ〜約20マイクロインチ)の間である)。また、幾つかのケースでは、第2層の厚さは、0.254μm(10マイクロインチ)よりも薄いこともある(例えば、約0.0254μm〜約0.254μm(約1マイクロインチ〜約10マイクロインチ)の間、幾つかのケースでは、約0.127μm〜約0.254μm(約5マイクロインチ〜約10マイクロインチ)の間)である。幾つかの実施形態では、第2層の厚さは、第2層が表面で本質的に透明になるように選択される。これ以外の厚さが、第2層に適切であることも考えられる。
は他の、電圧、電位、電流および/または電流密度における変化が電着処理中に組み込まれることもある。例えば、制御された電圧のパルスは、制御された電流または電流密度のパルスと交互に入れ替わることがある。一般に、電着処理中に、電位は、コーティングされる基板(例えば基材)上に存在し、印加された電圧、電流、または電流密度における変化は基板上の電位への変化へとつながる。幾つかのケースでは、以下に、さらに十分に記述されるように、電着処理は、一又は複数のセグメントからなる波形の使用を含むことがあり、各セグメントは、電着状態(例えば、電流密度、電流持続時間、電着槽の温度等)の特定の組合せに関している。
スでは60〜66g/Lで生成されることがある。
できる。例えば、1に等しい面密度は、スポットで占められた表面積が100%であることを指し、0.5に等しい面密度は、スポットで占められた表面積が50%であることを指し、また、零に等しい面密度は、表面積にはスポットで占められた箇所がないことを指す。
B845のプロトコルクラスIIaに従って混合ガス流に5日間晒された被コーティング物品は、0.10よりも小さい、幾つかのケースでは、0.05よりも小さい、また幾つかのケースでは、零のスポッティング面密度を有する。幾つかの実施形態では、これらの状態に晒された被コーティング物品は、3スポット/cm2よりも小さい、幾つかの実施形態では、2スポット/cm2よりも小さい、また、幾つかの実施形態では、0スポット/cm2の数密度のスポットを有している。スポットの面密度および数密度は上記の範囲外にあることも考えられる。
検討されるような、物品について、腐食テストを受けさせる前後で測定されてもよい。コーティングの接触抵抗は前述のように測定されてもよい。幾つかのケースでは、コーティングは、摩耗痕跡の有無を視覚的に検査されてもよい。幾つかの実施形態では、摩耗痕跡は、指定負荷での指定回数の往復動作サイクルの後に、摩耗痕跡の間に露出した基材の幅を測定することにより分析されてもよい。幾つかの場合では、該分析は、単純に合格/不合格テストにしてもよく、摩耗痕跡間の露出した基材の幅閾値を、露出された物品の前記閾値を超える幅の存在はテストに不合格になることを示すように設定する。
実施例
実施例1
この実施例では、本発明の幾つかの実施形態に従って生成された第1層を有するコーティングを含む物品の耐食性と、従来のコーティングを有する2つの物品の耐食性とを比較する。図2A〜図2Cはそれぞれ、ASTM B0735−06に従って30分間硝酸蒸気に晒された後の物品を示している。図2Aは、逆パルス状のDC電流を使用したNi−Wの層(およそ1.016〜1.27μm(40〜50マイクロインチ)厚さ)がコーティングされた銅基材を示しており、本質的に腐食はない。図2Bは、ニッケルでコーティングされた(およそ1.016〜1.27μm(40〜50マイクロインチ)厚さで、パルス状のDC電流を使用してNi−スルファミン酸塩槽で電着)銅基材を示しており、著しい腐食があった。図2Cは、電気めっきしたニッケルリン(EP−NiP)でコーティングされた(およそ1.016〜1.27μm(40〜50マイクロインチ)厚さで、パルス状のDC電流を使用して電着された)銅基材を示しており、著しい腐食があった。この実施例は、従来の被コーティング物品と比較して、本発明の被コーティング物品は耐食性が改善されたことを実証している。
実施例2
この実施例では、本発明の幾つかの実施形態に従って生成された第1層を有するコーティングを含む物品の耐久性と、従来のコーティングを有する物品の耐久性とを比較する。図3Aは、被コーティング物品の耐久性を分析するためのテスト手順の概略図である。摩耗表面と同じ材料で被コーティング物品がめっきされた対応物100は、50gの負荷の被コーティング物品110に対して定常に保持される一方、経路120に沿って対応物に対して約1サイクル/秒の頻度で、500サイクル分相互に移動される。図3Bは、ニッケルでコーティングされた(およそ1.016〜1.27μm(40〜50マイクロインチ)厚さで、スルファミン酸ニッケル槽およびパルス状のDC電流を使用して電着)銅基材を示しており、広範囲に及ぶ摩耗痕跡130がある。図3Cは、Ni−Wでコーティングされた(およそ1.016〜1.27μm(40〜50マイクロインチ)厚さで、パルス状の逆DC電流を使用して電着)銅基材を示しており、摩耗痕跡が大幅に少ない。この実施例は、従来の被コーティング物品と比較して、本発明の被コーティング物品は耐久性が改善されたことを実証している。
実施例3
この実施例では、本発明の幾つかの実施形態に従って生成された2つの層を有するコーティングを含む物品の耐食性と、従来のコーティングを有する2つの物品の耐食性とを比較する。図4A〜4Dはそれぞれ、ASTM B0845−97R08E01に従って5日間混合ガス流に晒された後の物品を示している。図4A〜4Bは、Ni−Wの第1層(およそ1.016μm(40マイクロインチ厚さで、パルス状の逆DC電流を使用して電着される)、および0.508μm(20マイクロインチ)厚さのAu−Co合金(図4A)または0.762μm(30マイクロインチ)厚さのAu−Co合金(図4B)がコーティングされた銅基材を示しており、本質的に腐食はない。図4C〜4Dは、ニッケル
の第1層(Ni−スルファミン酸塩槽およびパルス状のDC電流を使用して電着)、および0.508μm(20マイクロインチ)厚さのAu−Co合金(図4C)または0.762μm(30マイクロインチ)厚さのAu−Co合金(図4D)がコーティングされた銅基材を示しており、著しい腐食および孔食があった。この実施例は、従来の被コーティング物品と比較して、本発明の被コーティング物品は耐食性が改善されたことを実証している。
実施例4
この実施例では、腐食状態に晒された、本発明の幾つかの実施形態に従って生成された2つの層を有するコーティングを含む物品の耐食性と、腐食状態に晒された、従来のコーティングを有する2つの物品の耐食性とを比較する。図5A〜5Dは、実施例3からの被コーティング物品の低レベル接触抵抗を数値化し、それぞれ複数回反復して行った結果を示している。図5Aは、Ni−Wおよび0.508μm(20マイクロインチ)のAuCo合金でコーティングされた基材の接触抵抗を示しており、図5Bは、Ni−Wおよび0.762μm(30マイクロインチ)のAuCo合金でコーティングされた基材の接触抵抗を示している。接触抵抗は、両方のケースで10mΩよりも小さく、これは、このテストで「合格」として定められた閾値であった。図5Cおよび5Dは、それぞれ、ニッケル(Niスルファミン酸塩槽を使用して電着される)、および0.508μm(20マイクロインチ)の金または0.762μm(30マイクロインチ)の金でコーティングされた基材の接触抵抗を示している。両方の物品は、データの位置が10mΩを超えて示されているので、接触抵抗テストに不合格である。この実施例は、従来の被コーティング物品と比較して、本発明の被コーティング物品は腐食状態への露出後の接触抵抗が改善されたことを実証している。
実施例5
この実施例では、腐食状態に晒された、本発明の幾つかの実施形態に従って生成された2つの層を有するコーティングを含む物品の耐食性と、腐食状態に晒された、従来のコーティングを有する2つの物品の耐食性とを比較する。図6は、それぞれ硝酸蒸気に2時間晒された一連の被コーティング物品の立体鏡図(倍率:〜10X)である。第1層(逆パルスDC電流を使用して電着されたNi−W)の厚さは、列の上にそれぞれ示され、列内の各基材上の第1層の厚さ(左から右に向かって、0.508μm(20マイクロインチ)、0.762μm(30マイクロインチ)、1.016μm(40マイクロインチ))にそれぞれ相当する。第2層(Au−Co)の厚さは、行の左にそれぞれ示され、行内の各基材の第2層の厚さ(上から下に向かって、0.1016μm(4マイクロインチ)、0.254μm(10マイクロインチ)、0.508μm(20マイクロインチ)、0.762μm(30マイクロインチ))にそれぞれ相当する。図7は、図6のものと同じ仕様の一連の被コーティング物品の非拡大図であり、それぞれ混合ガス流に5日間晒されたものである。図8A〜8Dは、図7に示される被コーティング物品の接触抵抗測定結果を示している。パルス電流制御され、図9A〜9Bは、硝酸蒸気に2時間晒された後の(パルスDC電流を使用して電着された)Ep−Nipの第1層およびAu−Coの第2層を含む物品の接触抵抗測定結果を示している。この実施例は、従来の被コーティング物品と比較して、本発明の被コーティング物品は腐食状態への露出後の接触抵抗が改善されたことを実証している。
Claims (9)
- 銅を含む基材と、
該基材の上に形成されたコーティングと
を備えるコーティング体において、前記コーティングが、
Niと、WおよびMoの一方又は両方とを含む第1層であって、該第1層が0.127μm(5マイクロインチ)よりも大きい厚さを有し、前記第1層がナノ結晶体微細構造またはアモルファス構造を有することと、
前記第1層の上に形成された第2層であって、該第2層がAu、Ru、Os、Rh、Ir、Pd、Pt、およびAgのうちの1つ以上からなるグループから選択された金属を含み、前記第2層が0.762μm(30マイクロインチ)よりも小さい厚さを有し、前記第2層がナノ結晶体微細構造またはアモルファス構造を有することとを備える物品。 - 前記第1層は0.508μm(20マイクロインチ)よりも大きい厚さを有する、請求項1に記載の物品。
- 前記第2層は0.508μm(20マイクロインチ)よりも小さい厚さを有する、請求項1に記載の物品。
- 前記第2層は0.254μm(10マイクロインチ)よりも小さい厚さを有する、請求項1に記載の物品。
- 前記第1層はニッケルタングステン合金を含む、請求項1に記載の物品。
- 前記コーティングは、ASTM B735に従って硝酸蒸気に2時間晒された後に10mΩよりも小さい接触抵抗を有する、請求項1に記載の物品。
- 前記コーティングは、ASTM B735に従って硝酸蒸気に2時間晒された後に1スポット/cm 2 より小さいスポット数密度を有する、請求項1に記載の物品。
- 前記第1層は前記基材上に直接形成される、請求項1に記載の物品。
- 前記物品は電気コネクタである、請求項1に記載の物品。
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