JP6328874B2 - シート貼付装置および装置の大型化防止方法 - Google Patents
シート貼付装置および装置の大型化防止方法 Download PDFInfo
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- JP6328874B2 JP6328874B2 JP2012159676A JP2012159676A JP6328874B2 JP 6328874 B2 JP6328874 B2 JP 6328874B2 JP 2012159676 A JP2012159676 A JP 2012159676A JP 2012159676 A JP2012159676 A JP 2012159676A JP 6328874 B2 JP6328874 B2 JP 6328874B2
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67132—Apparatus for placing on an insulating substrate, e.g. tape
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
- B65H29/00—Delivering or advancing articles from machines; Advancing articles to or into piles
- B65H29/54—Article strippers, e.g. for stripping from advancing elements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
- B65H35/00—Delivering articles from cutting or line-perforating machines; Article or web delivery apparatus incorporating cutting or line-perforating devices, e.g. adhesive tape dispensers
- B65H35/0006—Article or web delivery apparatus incorporating cutting or line-perforating devices
- B65H35/0013—Article or web delivery apparatus incorporating cutting or line-perforating devices and applying the article or the web by adhesive to a surface
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L21/6836—Wafer tapes, e.g. grinding or dicing support tapes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2207/00—Indexing codes relating to constructional details, configuration and additional features of a handling device, e.g. Conveyors
- B65G2207/02—Use of adhesive
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
- B65H2301/00—Handling processes for sheets or webs
- B65H2301/40—Type of handling process
- B65H2301/44—Moving, forwarding, guiding material
- B65H2301/443—Moving, forwarding, guiding material by acting on surface of handled material
- B65H2301/4433—Moving, forwarding, guiding material by acting on surface of handled material by means holding the material
- B65H2301/44335—Moving, forwarding, guiding material by acting on surface of handled material by means holding the material using adhesive forces
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L2221/68327—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support used during dicing or grinding
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Description
特許文献1に記載のシート貼付装置は、ウェハを供給するウェハ供給部と、リングフレームを供給するリングフレーム供給部と、各供給部から供給されたウェハおよびリングフレームに接着シートを貼付するマウント機構とを備え、接着シートを介してウェハおよびリングフレームを一体化するように構成されている。
なお、実施形態におけるX軸、Y軸、Z軸は、それぞれが直交する関係にあり、X軸およびY軸は、水平面内の軸とし、Z軸は、水平面に直交する軸とする。さらに、各実施形態では、Y軸と平行な矢印AR方向から観た場合を基準とし、方向を示した場合、「上」がZ軸の矢印方向で「下」がその逆方向、「左」がX軸の矢印方向で「右」がその逆方向、「前」がY軸の矢印方向で「後」がその逆方向とする。
先ず、原反RSを図2に示すようにセットする。そして、ウェハカセット21を図1で示す位置にセットし、複数のリングフレームRFをポール35に沿うようにして支持部材32上に積層してセットすると、開口スペースSPが形成されるとともに、フレーム収容手段3が直動モータ34を駆動し、積層されたリングフレームRFを上昇させ、最上部に位置するリングフレームRFが所定の位置でセンサ36に検知されて直動モータ34の駆動が停止する。
すなわち、開口スペースSP内に当該シート貼付装置1の構成要素、つまり制御手段10が配置されるので、開口スペースSPを有効利用することができ、従来であれば、リングフレームRFの開口部RF1外に配置されていたものを当該リングフレームRFの開口部RF1内に配置してシート貼付装置1が無駄に大型化することを防止することができる。
また、押圧ローラ94に替えて、ブレード材、ゴム、樹脂、スポンジ等による押圧部材を採用することができ、エア噴き付けにより押圧する構成も採用することができる。
さらに、剥離板93にかえて、ローラ等による剥離部材を採用してもよい。
さらに、前記実施形態で示した不要部材収容箱13を開口スペースSP内に配置してもよい。
また、シート貼付装置1が、特願平10−231608ように被着体に貼付した接着シートを所定形状に切断する切断手段を備える場合、切断された接着シートの不要部分を不要部材収容箱13に収容してもよい。
さらに、ウェハ収容手段2やフレーム収容手段3は、複数設けてもよい。
3 フレーム収容手段
6 支持手段
7 搬送手段
9 貼付手段
10 制御手段(構成要素)
13 不要部材収容箱(廃棄物収容手段、構成要素)
34 直動モータ(昇降手段、構成要素)
34A リニアモータ(昇降手段、構成要素)
AS 接着シート
RF リングフレーム(フレーム部材)
RF1 開口部
SP 開口スペース
WF ウェハ(被着体)
Claims (3)
- 接着シートを介して被着体と一体化されるフレーム部材を収容可能なフレーム収容手段と、
前記フレーム部材および前記被着体のうちの少なくともフレーム部材を支持する支持手段と、
前記フレーム収容手段から前記フレーム部材を前記支持手段に搬送する搬送手段と、
前記支持手段に支持されたフレーム部材または、フレーム部材および被着体に前記接着シートを当接させて貼付する貼付手段とを備え、
前記フレーム部材は、開口部を備え、
前記フレーム収容手段に前記フレーム部材を収容したときの当該フレーム部材の開口部で形成される開口スペース内に、当該シート貼付装置の構成要素が配置されることを特徴とするシート貼付装置。 - 前記構成要素は、当該シート貼付装置を制御する制御手段、前記フレーム部材を昇降させる昇降手段、および当該シート貼付装置で発生した不要物を収容する廃棄物収容手段のうち少なくとも1であることを特徴とする請求項1に記載のシート貼付装置。
- 接着シートを介して被着体と一体化されるフレーム部材を収容可能なフレーム収容手段を備えた装置の大型化防止方法であって、
前記フレーム収容手段に前記フレーム部材を収容したときの当該フレーム部材の開口部で形成される開口スペース内に、前記装置の構成要素を配置することを特徴とする装置の大型化防止方法。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012159676A JP6328874B2 (ja) | 2012-07-18 | 2012-07-18 | シート貼付装置および装置の大型化防止方法 |
TW102123610A TWI623971B (zh) | 2012-07-18 | 2013-07-02 | Sheet sticking device and method for preventing enlargement of the device |
CN201310298219.XA CN103579045B (zh) | 2012-07-18 | 2013-07-16 | 片材粘贴装置及片材粘贴装置的大型化防止方法 |
KR1020130084030A KR102064727B1 (ko) | 2012-07-18 | 2013-07-17 | 시트 부착 장치 및 장치의 대형화 방지 방법 |
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JP2012159676A JP6328874B2 (ja) | 2012-07-18 | 2012-07-18 | シート貼付装置および装置の大型化防止方法 |
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JP2014022555A JP2014022555A (ja) | 2014-02-03 |
JP6328874B2 true JP6328874B2 (ja) | 2018-05-23 |
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JP2012159676A Active JP6328874B2 (ja) | 2012-07-18 | 2012-07-18 | シート貼付装置および装置の大型化防止方法 |
Country Status (4)
Country | Link |
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JP (1) | JP6328874B2 (ja) |
KR (1) | KR102064727B1 (ja) |
CN (1) | CN103579045B (ja) |
TW (1) | TWI623971B (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
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JP6710050B2 (ja) * | 2016-01-19 | 2020-06-17 | 株式会社ディスコ | 搬送装置 |
JP6678516B2 (ja) * | 2016-05-31 | 2020-04-08 | リンテック株式会社 | シート貼付装置および貼付方法 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01120840A (ja) * | 1987-11-04 | 1989-05-12 | Nec Corp | 半導体マウント設備のリードフレーム供給装置 |
JPH09416A (ja) * | 1995-06-23 | 1997-01-07 | Akuteibu:Kk | 衣服用ハンガー |
JP3888754B2 (ja) * | 1997-12-08 | 2007-03-07 | 日東電工株式会社 | 半導体ウエハの自動貼付け装置 |
JP4001671B2 (ja) * | 1998-03-26 | 2007-10-31 | 宮城沖電気株式会社 | テープ剥離方法、テープ剥離機構及びテープ剥離装置 |
JP3770820B2 (ja) * | 2001-10-03 | 2006-04-26 | 日東電工株式会社 | 保護テープの貼付け方法 |
JP2003297908A (ja) * | 2002-04-02 | 2003-10-17 | Mitsubishi Electric Corp | 粘着シートの剥離装置およびこれを用いた剥離方法 |
JP4090416B2 (ja) * | 2003-09-30 | 2008-05-28 | 日東電工株式会社 | 粘着テープ付ワークの離脱方法及び離脱装置 |
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2012
- 2012-07-18 JP JP2012159676A patent/JP6328874B2/ja active Active
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2013
- 2013-07-02 TW TW102123610A patent/TWI623971B/zh active
- 2013-07-16 CN CN201310298219.XA patent/CN103579045B/zh active Active
- 2013-07-17 KR KR1020130084030A patent/KR102064727B1/ko active IP Right Grant
Also Published As
Publication number | Publication date |
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CN103579045B (zh) | 2019-02-15 |
JP2014022555A (ja) | 2014-02-03 |
CN103579045A (zh) | 2014-02-12 |
TW201409556A (zh) | 2014-03-01 |
KR102064727B1 (ko) | 2020-01-10 |
KR20140011279A (ko) | 2014-01-28 |
TWI623971B (zh) | 2018-05-11 |
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