JP6316620B2 - 半導体素子及びその製造方法 - Google Patents
半導体素子及びその製造方法 Download PDFInfo
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- 239000004065 semiconductor Substances 0.000 title claims description 277
- 238000004519 manufacturing process Methods 0.000 title claims description 70
- 239000000758 substrate Substances 0.000 claims description 251
- 230000002093 peripheral effect Effects 0.000 claims description 174
- 239000002184 metal Substances 0.000 claims description 52
- 239000003990 capacitor Substances 0.000 claims description 19
- 239000012212 insulator Substances 0.000 claims description 7
- 230000000149 penetrating effect Effects 0.000 claims description 4
- 238000000034 method Methods 0.000 description 24
- 238000012986 modification Methods 0.000 description 16
- 230000004048 modification Effects 0.000 description 16
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 12
- 230000010365 information processing Effects 0.000 description 12
- 229910052710 silicon Inorganic materials 0.000 description 12
- 239000010703 silicon Substances 0.000 description 12
- 238000012545 processing Methods 0.000 description 11
- 239000013078 crystal Substances 0.000 description 9
- 238000002955 isolation Methods 0.000 description 9
- 239000002019 doping agent Substances 0.000 description 7
- 239000012535 impurity Substances 0.000 description 7
- 230000010354 integration Effects 0.000 description 7
- 238000012546 transfer Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 238000005498 polishing Methods 0.000 description 5
- 239000000126 substance Substances 0.000 description 5
- 239000011521 glass Substances 0.000 description 4
- 230000008646 thermal stress Effects 0.000 description 4
- 230000007257 malfunction Effects 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000012937 correction Methods 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000008021 deposition Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
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- Microelectronics & Electronic Packaging (AREA)
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- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
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Description
図1乃至図5は本発明の一実施形態による半導体素子の製造方法を示した断面図である。図6は図5の一部を示した断面図である。図7及び図8は図5の変形形態を示した断面図である。
図9乃至図11は比較のため本実施形態と異なる半導体素子を示した断面図である。図12は図11の一部を示した断面図である。
図13乃至図19は本発明の他の実施形態による半導体素子の製造方法を示した断面図である。
図20乃至図24は本発明のその他の実施形態による半導体素子の製造方法を示した断面図である。
図25乃至図29は本発明の一実施形態による半導体メモリ素子の製造方法を示した断面図である。図30及び図31は図29の変形形態を示した断面図である。
図32乃至図38は本発明の他の実施形態による半導体メモリ素子の製造方法を示した断面図である。図39及び図40は図38の変形形態を示した断面図である。
図41乃至図45は本発明のその他の実施形態による半導体メモリ素子の製造方法を示した断面図である。
図46乃至図50は本発明の一実施形態によるイメージセンサーの製造方法を示した断面図である。図51は図50の変形形態を示した断面図である。
図52乃至図57は本発明の一実施形態によるイメージセンサーの製造方法を示した断面図である。
図58は本発明の実施形態による半導体素子を具備するメモリカードを示したブロック図である。
20、200 セルアレイ
30、300 周辺回路
80 支持基板
81 第1支持基板
82 第2支持基板
92 ビア
94 パッド
100 半導体基板
100a 第1面
100b 第2面
100c 第3面
103 フィールド領域
107 連結コンタクト
110 整列キー
205 セルトランジスター
206 ビットライン
208、308、508 絶縁膜
209 キャパシター
210 セルトランジスター層
220 キャパシター層
202、302、502 素子分離膜
305 周辺トランジスター
306 金属配線
500 ピクセルアレイ
504a 移送トランジスター
504b リセットトランジスター
504c ソースフォロワートランジスター
504d 選択トランジスター
505 ピクセルトランジスター
506 連結配線
509 フォトダイオード
1200 メモリカード
1210、1311 メモリ
1220、1312 メモリコントローラ
1221 SRAM
1222、1330、1420 中央処理装置
1223 ホストインターフェイス
1224 誤謬修正コード
1225 メモリインターフェイス
1230 ホスト
1300、1400 情報処理システム
1310 メモリシステム
1320 モデム
1340、1440 RAM
1350 ユーザーインターフェイス
1360 システムバス
1410 イメージセンサー
1430 入出力装置
1450 コンパクトディスクドライブ
1460 ハードディスクドライブ
1470 バス
4000、4000a、5000 CMOSイメージセンサー
Claims (10)
- 上面とその反対面である下面とを有する半導体基板と、
前記半導体基板の上面上に配置された上部回路と、
前記半導体基板の下面上に配置された下部回路と、
前記半導体基板を貫通して前記上部回路と前記下部回路とを電気的に連結する垂直な連結コンタクトと、
前記半導体基板を貫通して前記上部回路と前記下部回路とを垂直整列させる整列キーと、を含み、
前記半導体基板は、前記上部回路と前記下部回路との間に配置された絶縁膜を含み、前記整列キーは、前記絶縁膜を垂直貫通し、
前記整列キーは、絶縁体を含むことを特徴とする半導体素子。 - 前記上部回路は、セルトランジスターを有するセルアレイを含み、
前記下部回路は、周辺トランジスターを有する周辺回路を含み、
前記セルトランジスターは、前記半導体基板を中心に前記周辺トランジスターと反対方向を向く垂直対称(vertically symmetric)であることを特徴とする請求項1に記載の半導体素子。 - 前記セルアレイは、前記セルトランジスターと電気的に連結されたビットラインをさらに含み、
前記下部回路は、前記周辺トランジスターと電気的に連結された金属配線をさらに含み、
前記連結コンタクトは、前記ビットラインと前記金属配線とを電気的に連結することを特徴とする請求項2に記載の半導体素子。 - 前記下部回路上に付着された支持基板と、
前記支持基板を貫通して前記金属配線と連結されたビアと、
前記支持基板上に配置されて前記ビアと連結されたパッドと、をさらに含み、
前記金属配線は、前記半導体基板と前記支持基板との間に配置され、
前記金属配線は、前記支持基板に隣接して配置されることを特徴とする請求項3に記載の半導体素子。 - 第1面とその反対面である第2面とを有する半導体基板を提供し、
前記半導体基板を貫通して前記第1面から前記第2面に向かって延長され、前記第2面に至らない絶縁領域を形成する段階と、
互いに平行に離隔して前記絶縁領域を貫通して前記第1面から前記第2面に向かって延長され、前記第2面に至らない整列キーと連結コンタクトとを形成する段階と、
前記半導体基板の第1面上に前記連結コンタクトと電気的に連結される第1回路を形成する段階と、
前記第1回路上に支持基板を形成し、
前記半導体基板の第2面をリセスして前記絶縁領域と前記整列キーと前記連結コンタクトとを露出させる第3面を形成する段階と、
前記半導体基板の第3面上に前記連結コンタクトと電気的に連結される第2回路を形成する段階とを含み、
前記整列キーは、絶縁体を含むことを特徴とする半導体素子の製造方法。 - 上面とその反対面である下面とを有する半導体基板と、
前記半導体基板の下面上に提供された、セルトランジスターを有するセルアレイと、
前記半導体基板の上面上に提供された、周辺トランジスターを有する周辺回路と、
前記上面から前記下面まで延長されて前記セルアレイを前記周辺回路に垂直整列させる整列キーと、
前記上面から前記下面まで延長されて前記セルアレイを前記周辺回路に電気的に連結する連結コンタクトと、を含み、
前記セルトランジスターと前記周辺トランジスターとは、前記半導体基板を中心に反対方向を向く垂直対称(vertically symmetric)であり、
前記整列キーは、絶縁体を含むことを特徴とする半導体素子。 - 前記セルアレイは、前記セルトランジスターに電気的に連結されたビットラインをさらに含み、
前記周辺回路は、前記周辺トランジスターに電気的に連結された金属配線をさらに含み、
前記連結コンタクトは、前記ビットラインを前記金属配線に電気的に連結することを特徴とする請求項6に記載の半導体素子。 - 前記セルアレイは、前記セルトランジスター上に提供されたキャパシターをさらに含み、
前記キャパシターは、前記セルトランジスターに電気的に連結されたことを特徴とする請求項6に記載の半導体素子。 - 上面とその反対面である下面とを有する半導体基板と、
前記半導体基板を貫通して前記上面から前記下面まで延長された絶縁領域と、
前記絶縁領域を貫通して前記上面から前記下面まで延長された絶縁性の整列キーと、
前記絶縁領域を貫通して前記上面から前記下面まで延長された導電性の連結コンタクトと、
前記半導体基板の上面上に提供されて前記連結コンタクトと電気的に連結された第1回路と、
前記半導体基板の下面上に提供されて前記連結コンタクトと電気的に連結された第2回路と、を含み、
前記整列キーは、前記第1回路を前記第2回路に垂直整列させることを特徴とする半導体素子。 - 前記第1回路と前記第2回路との中の、
いずれか1つは、セルトランジスターを有するセルアレイを含み、
その他の1つは、周辺トランジスターを有する周辺回路を含み、
前記セルトランジスターと前記周辺トランジスターとは、前記半導体基板を中心に反対方向を向く垂直対称(vertically symmetric)であることを特徴とする請求項9に記載の半導体素子。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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KR10-2013-0022848 | 2013-03-04 | ||
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