JP6312424B2 - 圧電材料、圧電素子、および電子機器 - Google Patents

圧電材料、圧電素子、および電子機器 Download PDF

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Publication number
JP6312424B2
JP6312424B2 JP2013269670A JP2013269670A JP6312424B2 JP 6312424 B2 JP6312424 B2 JP 6312424B2 JP 2013269670 A JP2013269670 A JP 2013269670A JP 2013269670 A JP2013269670 A JP 2013269670A JP 6312424 B2 JP6312424 B2 JP 6312424B2
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JP
Japan
Prior art keywords
piezoelectric
piezoelectric element
piezoelectric material
electrode
weight
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2013269670A
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English (en)
Japanese (ja)
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JP2014141401A (ja
JP2014141401A5 (enExample
Inventor
田中　秀典
秀典 田中
小山　信也
信也 小山
潤平 林
潤平 林
齋藤　宏
宏 齋藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2013269670A priority Critical patent/JP6312424B2/ja
Publication of JP2014141401A publication Critical patent/JP2014141401A/ja
Publication of JP2014141401A5 publication Critical patent/JP2014141401A5/ja
Application granted granted Critical
Publication of JP6312424B2 publication Critical patent/JP6312424B2/ja
Active legal-status Critical Current
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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/09—Forming piezoelectric or electrostrictive materials
    • H10N30/093—Forming inorganic materials
    • H10N30/097—Forming inorganic materials by sintering
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H10N30/853—Ceramic compositions
    • H10N30/8536—Alkaline earth metal based oxides, e.g. barium titanates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/03—Specific materials used
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/04—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification
    • G02B7/08—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification adapted to co-operate with a remote control mechanism
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/16—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors using travelling waves, i.e. Rayleigh surface waves
    • H02N2/163—Motors with ring stator
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/04—Treatments to modify a piezoelectric or electrostrictive property, e.g. polarisation characteristics, vibration characteristics or mode tuning
    • H10N30/045—Treatments to modify a piezoelectric or electrostrictive property, e.g. polarisation characteristics, vibration characteristics or mode tuning by polarising
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047—Membrane type
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/877—Conductive materials

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Compositions Of Oxide Ceramics (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
JP2013269670A 2012-12-28 2013-12-26 圧電材料、圧電素子、および電子機器 Active JP6312424B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2013269670A JP6312424B2 (ja) 2012-12-28 2013-12-26 圧電材料、圧電素子、および電子機器

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2012287242 2012-12-28
JP2012287242 2012-12-28
JP2013269670A JP6312424B2 (ja) 2012-12-28 2013-12-26 圧電材料、圧電素子、および電子機器

Publications (3)

Publication Number Publication Date
JP2014141401A JP2014141401A (ja) 2014-08-07
JP2014141401A5 JP2014141401A5 (enExample) 2017-02-02
JP6312424B2 true JP6312424B2 (ja) 2018-04-18

Family

ID=51016802

Family Applications (1)

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JP2013269670A Active JP6312424B2 (ja) 2012-12-28 2013-12-26 圧電材料、圧電素子、および電子機器

Country Status (3)

Country Link
US (1) US9520549B2 (enExample)
JP (1) JP6312424B2 (enExample)
CN (1) CN103910526A (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI545814B (zh) * 2012-11-02 2016-08-11 佳能股份有限公司 壓電式材料、壓電式元件及電子設備
CN104955642A (zh) * 2012-11-02 2015-09-30 佳能株式会社 压电材料、压电元件和电子设备
JP2015134707A (ja) * 2013-12-18 2015-07-27 キヤノン株式会社 圧電材料、圧電素子および電子機器
JP6643089B2 (ja) * 2015-01-09 2020-02-12 キヤノン株式会社 圧電材料、圧電素子、およびこれを用いた装置
JP6623970B2 (ja) * 2016-08-03 2019-12-25 Tdk株式会社 圧電素子
JP7012430B2 (ja) * 2016-12-21 2022-01-28 東芝テック株式会社 薬液吐出装置と薬液滴下装置
JP7320091B2 (ja) * 2021-02-10 2023-08-02 住友化学株式会社 圧電薄膜付き積層基板、圧電薄膜付き積層基板の製造方法、圧電薄膜素子、スパッタリングターゲット材、およびスパッタリングターゲット材の製造方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5344456B2 (ja) 2008-03-11 2013-11-20 独立行政法人物質・材料研究機構 非鉛系圧電材料
CN101333106A (zh) 2008-07-30 2008-12-31 山东大学 改性钛酸钡基压电陶瓷材料及其应用
JP5217997B2 (ja) 2008-10-20 2013-06-19 Ｔｄｋ株式会社 圧電磁器、振動子及び超音波モータ
KR101578271B1 (ko) * 2010-11-26 2015-12-16 캐논 가부시끼가이샤 압전 세라믹, 압전 세라믹의 제조 방법, 압전 소자, 액체 토출 헤드, 초음파 모터 및 먼지 클리너
US9660175B2 (en) * 2012-03-30 2017-05-23 Canon Kabushiki Kaisha Piezoelectric ceramic, method for manufacturing piezoelectric ceramic, piezoelectric element, and electronic device
US9240542B2 (en) * 2012-04-24 2016-01-19 Canon Kabushiki Kiasha Piezoelectric ceramic, piezoelectric element, ultrasonic motor, and dust removing device
TWI545814B (zh) * 2012-11-02 2016-08-11 佳能股份有限公司 壓電式材料、壓電式元件及電子設備
EP2933996B1 (en) * 2014-04-18 2018-09-19 Canon Kabushiki Kaisha Dust removal apparatus and image pickup apparatus

Also Published As

Publication number Publication date
US20140184876A1 (en) 2014-07-03
CN103910526A (zh) 2014-07-09
JP2014141401A (ja) 2014-08-07
US9520549B2 (en) 2016-12-13

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