JP2014141401A5 - - Google Patents
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- Publication number
- JP2014141401A5 JP2014141401A5 JP2013269670A JP2013269670A JP2014141401A5 JP 2014141401 A5 JP2014141401 A5 JP 2014141401A5 JP 2013269670 A JP2013269670 A JP 2013269670A JP 2013269670 A JP2013269670 A JP 2013269670A JP 2014141401 A5 JP2014141401 A5 JP 2014141401A5
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric element
- piezoelectric material
- weight
- piezoelectric
- parts
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000463 material Substances 0.000 claims description 23
- 239000002184 metal Substances 0.000 claims description 6
- 229910052751 metal Inorganic materials 0.000 claims description 6
- 229910044991 metal oxide Inorganic materials 0.000 claims description 6
- 150000004706 metal oxides Chemical class 0.000 claims description 6
- 229910052802 copper Inorganic materials 0.000 claims description 4
- 229910052748 manganese Inorganic materials 0.000 claims description 3
- 230000003287 optical effect Effects 0.000 claims description 2
- 239000007788 liquid Substances 0.000 claims 5
- 229910052719 titanium Inorganic materials 0.000 claims 4
- 229910052726 zirconium Inorganic materials 0.000 claims 4
- 239000000428 dust Substances 0.000 claims 3
- 238000003384 imaging method Methods 0.000 claims 3
- 229910052718 tin Inorganic materials 0.000 claims 3
- 229910052759 nickel Inorganic materials 0.000 claims 1
- 229910052763 palladium Inorganic materials 0.000 claims 1
- 229910052709 silver Inorganic materials 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013269670A JP6312424B2 (ja) | 2012-12-28 | 2013-12-26 | 圧電材料、圧電素子、および電子機器 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012287242 | 2012-12-28 | ||
| JP2012287242 | 2012-12-28 | ||
| JP2013269670A JP6312424B2 (ja) | 2012-12-28 | 2013-12-26 | 圧電材料、圧電素子、および電子機器 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2014141401A JP2014141401A (ja) | 2014-08-07 |
| JP2014141401A5 true JP2014141401A5 (enExample) | 2017-02-02 |
| JP6312424B2 JP6312424B2 (ja) | 2018-04-18 |
Family
ID=51016802
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013269670A Active JP6312424B2 (ja) | 2012-12-28 | 2013-12-26 | 圧電材料、圧電素子、および電子機器 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US9520549B2 (enExample) |
| JP (1) | JP6312424B2 (enExample) |
| CN (1) | CN103910526A (enExample) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI545814B (zh) * | 2012-11-02 | 2016-08-11 | 佳能股份有限公司 | 壓電式材料、壓電式元件及電子設備 |
| CN104955642A (zh) * | 2012-11-02 | 2015-09-30 | 佳能株式会社 | 压电材料、压电元件和电子设备 |
| JP2015134707A (ja) * | 2013-12-18 | 2015-07-27 | キヤノン株式会社 | 圧電材料、圧電素子および電子機器 |
| JP6643089B2 (ja) * | 2015-01-09 | 2020-02-12 | キヤノン株式会社 | 圧電材料、圧電素子、およびこれを用いた装置 |
| JP6623970B2 (ja) * | 2016-08-03 | 2019-12-25 | Tdk株式会社 | 圧電素子 |
| JP7012430B2 (ja) * | 2016-12-21 | 2022-01-28 | 東芝テック株式会社 | 薬液吐出装置と薬液滴下装置 |
| JP7320091B2 (ja) * | 2021-02-10 | 2023-08-02 | 住友化学株式会社 | 圧電薄膜付き積層基板、圧電薄膜付き積層基板の製造方法、圧電薄膜素子、スパッタリングターゲット材、およびスパッタリングターゲット材の製造方法 |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5344456B2 (ja) | 2008-03-11 | 2013-11-20 | 独立行政法人物質・材料研究機構 | 非鉛系圧電材料 |
| CN101333106A (zh) | 2008-07-30 | 2008-12-31 | 山东大学 | 改性钛酸钡基压电陶瓷材料及其应用 |
| JP5217997B2 (ja) | 2008-10-20 | 2013-06-19 | Ｔｄｋ株式会社 | 圧電磁器、振動子及び超音波モータ |
| KR101578271B1 (ko) * | 2010-11-26 | 2015-12-16 | 캐논 가부시끼가이샤 | 압전 세라믹, 압전 세라믹의 제조 방법, 압전 소자, 액체 토출 헤드, 초음파 모터 및 먼지 클리너 |
| US9660175B2 (en) * | 2012-03-30 | 2017-05-23 | Canon Kabushiki Kaisha | Piezoelectric ceramic, method for manufacturing piezoelectric ceramic, piezoelectric element, and electronic device |
| US9240542B2 (en) * | 2012-04-24 | 2016-01-19 | Canon Kabushiki Kiasha | Piezoelectric ceramic, piezoelectric element, ultrasonic motor, and dust removing device |
| TWI545814B (zh) * | 2012-11-02 | 2016-08-11 | 佳能股份有限公司 | 壓電式材料、壓電式元件及電子設備 |
| EP2933996B1 (en) * | 2014-04-18 | 2018-09-19 | Canon Kabushiki Kaisha | Dust removal apparatus and image pickup apparatus |
-
2013
- 2013-12-23 US US14/139,776 patent/US9520549B2/en not_active Expired - Fee Related
- 2013-12-26 JP JP2013269670A patent/JP6312424B2/ja active Active
- 2013-12-27 CN CN201310740321.0A patent/CN103910526A/zh active Pending
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