JP2014168054A5 - - Google Patents

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Publication number
JP2014168054A5
JP2014168054A5 JP2014013645A JP2014013645A JP2014168054A5 JP 2014168054 A5 JP2014168054 A5 JP 2014168054A5 JP 2014013645 A JP2014013645 A JP 2014013645A JP 2014013645 A JP2014013645 A JP 2014013645A JP 2014168054 A5 JP2014168054 A5 JP 2014168054A5
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JP
Japan
Prior art keywords
piezoelectric element
piezoelectric
piezoelectric material
element according
laminated
Prior art date
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Application number
JP2014013645A
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English (en)
Japanese (ja)
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JP2014168054A (ja
JP6366283B2 (ja
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Priority to JP2014013645A priority Critical patent/JP6366283B2/ja
Priority claimed from JP2014013645A external-priority patent/JP6366283B2/ja
Publication of JP2014168054A publication Critical patent/JP2014168054A/ja
Publication of JP2014168054A5 publication Critical patent/JP2014168054A5/ja
Application granted granted Critical
Publication of JP6366283B2 publication Critical patent/JP6366283B2/ja
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JP2014013645A 2013-01-29 2014-01-28 圧電材料、圧電素子、および電子機器 Active JP6366283B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2014013645A JP6366283B2 (ja) 2013-01-29 2014-01-28 圧電材料、圧電素子、および電子機器

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2013014615 2013-01-29
JP2013014615 2013-01-29
JP2014013645A JP6366283B2 (ja) 2013-01-29 2014-01-28 圧電材料、圧電素子、および電子機器

Publications (3)

Publication Number Publication Date
JP2014168054A JP2014168054A (ja) 2014-09-11
JP2014168054A5 true JP2014168054A5 (enExample) 2017-03-02
JP6366283B2 JP6366283B2 (ja) 2018-08-01

Family

ID=50150746

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014013645A Active JP6366283B2 (ja) 2013-01-29 2014-01-28 圧電材料、圧電素子、および電子機器

Country Status (6)

Country Link
US (1) US10308557B2 (enExample)
EP (1) EP2946419B1 (enExample)
JP (1) JP6366283B2 (enExample)
KR (1) KR20150115845A (enExample)
TW (1) TWI518050B (enExample)
WO (1) WO2014119705A1 (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2873103B1 (en) * 2012-08-27 2020-10-28 Canon Kabushiki Kaisha Piezoelectric material and piezoelectric element using the same, and electronic apparatus using the piezoelectronic element
WO2014098244A1 (en) * 2012-12-21 2014-06-26 Canon Kabushiki Kaisha Vibration wave driving device, image pickup device, optical apparatus, liquid discharge device, and electronic apparatus
WO2015012344A1 (ja) * 2013-07-25 2015-01-29 日立金属株式会社 結晶配向圧電セラミックス、圧電体素子および結晶配向圧電セラミックスの製造方法
US10842396B2 (en) * 2015-04-17 2020-11-24 Taiyo Yuden Co., Ltd. Vibration waveform sensor and waveform analysis device
US10527843B2 (en) * 2017-05-12 2020-01-07 International Business Machines Corporation Ultra-sonic self-cleaning system
US11818955B2 (en) * 2021-08-26 2023-11-14 City University Of Hong Kong Method for forming piezoelectric films on surfaces of arbitrary morphologies
CN117795389A (zh) * 2022-01-21 2024-03-29 麦斯卓微电子(南京)有限公司 Mems可变形透镜装配和工艺流程

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US95805A (en) * 1869-10-12 Improvement in shoes
JP4417536B2 (ja) 2000-07-31 2010-02-17 京セラ株式会社 圧電磁器および圧電素子
JP3678234B2 (ja) * 2002-07-25 2005-08-03 株式会社村田製作所 積層型圧電部品の製造方法、及び積層型電子部品
JP4590868B2 (ja) * 2003-02-12 2010-12-01 株式会社デンソー 積層型圧電体素子及びその製造方法
EP1876156B1 (en) * 2005-04-28 2014-12-10 Murata Manufacturing Co., Ltd. Piezoelectric ceramic composition, process for producing said piezoelectric ceramic composition, and piezoelectric ceramic electronic component
JP4347288B2 (ja) * 2005-11-07 2009-10-21 キヤノン株式会社 撮像装置
JP2007258280A (ja) * 2006-03-20 2007-10-04 Tdk Corp 積層型圧電素子
JP5386848B2 (ja) 2008-03-31 2014-01-15 Ｔｄｋ株式会社 圧電磁器
JP5399165B2 (ja) * 2008-11-17 2014-01-29 富士フイルム株式会社 成膜方法、成膜装置、圧電体膜、圧電素子、液体吐出装置、及び圧電型超音波振動子
JP5662197B2 (ja) 2010-03-18 2015-01-28 日本碍子株式会社 圧電／電歪焼結体、及び圧電／電歪素子
JP5675137B2 (ja) * 2010-03-23 2015-02-25 キヤノン株式会社 振動装置に用いられる圧電素子、振動装置、及び振動装置を有する塵埃除去装置
CN103415489B (zh) * 2011-02-28 2016-01-06 佳能株式会社 压电材料、压电元件、液体排出头、超声马达和去尘装置
WO2012141105A1 (ja) 2011-04-15 2012-10-18 株式会社村田製作所 圧電体薄膜素子
KR101602427B1 (ko) 2011-07-05 2016-03-10 캐논 가부시끼가이샤 압전 엘리먼트, 적층 압전 엘리먼트, 액체 토출 헤드, 액체 토출 장치, 초음파 모터, 광학 장치 및 전자 장치

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