JP2014168054A5 - - Google Patents

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Publication number
JP2014168054A5
JP2014168054A5 JP2014013645A JP2014013645A JP2014168054A5 JP 2014168054 A5 JP2014168054 A5 JP 2014168054A5 JP 2014013645 A JP2014013645 A JP 2014013645A JP 2014013645 A JP2014013645 A JP 2014013645A JP 2014168054 A5 JP2014168054 A5 JP 2014168054A5
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JP
Japan
Prior art keywords
piezoelectric element
piezoelectric
piezoelectric material
element according
laminated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2014013645A
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English (en)
Japanese (ja)
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JP2014168054A (ja
JP6366283B2 (ja
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Priority to JP2014013645A priority Critical patent/JP6366283B2/ja
Priority claimed from JP2014013645A external-priority patent/JP6366283B2/ja
Publication of JP2014168054A publication Critical patent/JP2014168054A/ja
Publication of JP2014168054A5 publication Critical patent/JP2014168054A5/ja
Application granted granted Critical
Publication of JP6366283B2 publication Critical patent/JP6366283B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2014013645A 2013-01-29 2014-01-28 圧電材料、圧電素子、および電子機器 Active JP6366283B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2014013645A JP6366283B2 (ja) 2013-01-29 2014-01-28 圧電材料、圧電素子、および電子機器

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2013014615 2013-01-29
JP2013014615 2013-01-29
JP2014013645A JP6366283B2 (ja) 2013-01-29 2014-01-28 圧電材料、圧電素子、および電子機器

Publications (3)

Publication Number Publication Date
JP2014168054A JP2014168054A (ja) 2014-09-11
JP2014168054A5 true JP2014168054A5 (enExample) 2017-03-02
JP6366283B2 JP6366283B2 (ja) 2018-08-01

Family

ID=50150746

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014013645A Active JP6366283B2 (ja) 2013-01-29 2014-01-28 圧電材料、圧電素子、および電子機器

Country Status (6)

Country Link
US (1) US10308557B2 (enExample)
EP (1) EP2946419B1 (enExample)
JP (1) JP6366283B2 (enExample)
KR (1) KR20150115845A (enExample)
TW (1) TWI518050B (enExample)
WO (1) WO2014119705A1 (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101728255B1 (ko) * 2012-08-27 2017-04-18 캐논 가부시끼가이샤 압전 재료, 그것을 사용한 압전 소자 및 그 압전 소자를 사용한 전자 기기
US9431595B2 (en) * 2012-12-21 2016-08-30 Canon Kabushiki Kaisha Vibration wave driving device, image pickup device, optical apparatus, liquid discharge device, and electronic apparatus
CN105263882A (zh) * 2013-07-25 2016-01-20 日立金属株式会社 结晶取向压电陶瓷、压电体元件和结晶取向压电陶瓷的制造方法
JP6910290B2 (ja) * 2015-04-17 2021-07-28 太陽誘電株式会社 振動波形センサ及び波形解析装置
US10527843B2 (en) * 2017-05-12 2020-01-07 International Business Machines Corporation Ultra-sonic self-cleaning system
US11818955B2 (en) * 2021-08-26 2023-11-14 City University Of Hong Kong Method for forming piezoelectric films on surfaces of arbitrary morphologies
WO2023141615A2 (en) * 2022-01-21 2023-07-27 MEMS Drive (Nanjing) Co., Ltd. Mems deformable lens assembly and process flow

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US95805A (en) * 1869-10-12 Improvement in shoes
JP4417536B2 (ja) 2000-07-31 2010-02-17 京セラ株式会社 圧電磁器および圧電素子
JP3678234B2 (ja) * 2002-07-25 2005-08-03 株式会社村田製作所 積層型圧電部品の製造方法、及び積層型電子部品
JP4590868B2 (ja) * 2003-02-12 2010-12-01 株式会社デンソー 積層型圧電体素子及びその製造方法
CN100594198C (zh) 2005-04-28 2010-03-17 株式会社村田制作所 压电陶瓷组合物及该压电陶瓷组合物的制造方法以及压电陶瓷电子部件
JP4347288B2 (ja) * 2005-11-07 2009-10-21 キヤノン株式会社 撮像装置
JP2007258280A (ja) 2006-03-20 2007-10-04 Tdk Corp 積層型圧電素子
JP5386848B2 (ja) 2008-03-31 2014-01-15 Ｔｄｋ株式会社 圧電磁器
JP5399165B2 (ja) * 2008-11-17 2014-01-29 富士フイルム株式会社 成膜方法、成膜装置、圧電体膜、圧電素子、液体吐出装置、及び圧電型超音波振動子
JP5662197B2 (ja) 2010-03-18 2015-01-28 日本碍子株式会社 圧電／電歪焼結体、及び圧電／電歪素子
JP5675137B2 (ja) * 2010-03-23 2015-02-25 キヤノン株式会社 振動装置に用いられる圧電素子、振動装置、及び振動装置を有する塵埃除去装置
JP6021351B2 (ja) 2011-02-28 2016-11-09 キヤノン株式会社 圧電材料、圧電素子、液体吐出ヘッド、超音波モータ、塵埃除去装置およびデバイス
WO2012141105A1 (ja) * 2011-04-15 2012-10-18 株式会社村田製作所 圧電体薄膜素子
RU2561601C1 (ru) * 2011-07-05 2015-08-27 Кэнон Кабусики Кайся Пьезоэлектрический элемент, многослойный пьезоэлектрический элемент, головка для выброса жидкости, устройство для выброса жидкости, ультразвуковой двигатель, оптическое устройство и электронное устройство

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