JP6304700B2 - 半導体パッケージ、モジュールおよび電気機器 - Google Patents
半導体パッケージ、モジュールおよび電気機器 Download PDFInfo
- Publication number
- JP6304700B2 JP6304700B2 JP2017018254A JP2017018254A JP6304700B2 JP 6304700 B2 JP6304700 B2 JP 6304700B2 JP 2017018254 A JP2017018254 A JP 2017018254A JP 2017018254 A JP2017018254 A JP 2017018254A JP 6304700 B2 JP6304700 B2 JP 6304700B2
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- electrode
- semiconductor layer
- parallel
- electrode pad
- semiconductor
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- 239000004065 semiconductor Substances 0.000 title claims description 741
- 239000000758 substrate Substances 0.000 claims description 400
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- 239000011347 resin Substances 0.000 claims description 128
- 239000002184 metal Substances 0.000 claims description 107
- 229910052751 metal Inorganic materials 0.000 claims description 107
- 229910052594 sapphire Inorganic materials 0.000 claims description 80
- 239000010980 sapphire Substances 0.000 claims description 80
- 230000010287 polarization Effects 0.000 claims description 29
- 230000005669 field effect Effects 0.000 claims description 11
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 152
- 229910002601 GaN Inorganic materials 0.000 description 151
- 239000010949 copper Substances 0.000 description 38
- 238000000034 method Methods 0.000 description 32
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- 230000017525 heat dissipation Effects 0.000 description 16
- 229920001721 polyimide Polymers 0.000 description 16
- 229910052581 Si3N4 Inorganic materials 0.000 description 11
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 11
- 239000000463 material Substances 0.000 description 10
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- 238000002507 cathodic stripping potentiometry Methods 0.000 description 7
- 239000004047 hole gas Substances 0.000 description 5
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- 229910000679 solder Inorganic materials 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 4
- 239000003990 capacitor Substances 0.000 description 4
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- 230000010354 integration Effects 0.000 description 4
- 229920000647 polyepoxide Polymers 0.000 description 4
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 239000012777 electrically insulating material Substances 0.000 description 3
- 239000000945 filler Substances 0.000 description 3
- 238000000465 moulding Methods 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 229910000881 Cu alloy Inorganic materials 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
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- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 239000005416 organic matter Substances 0.000 description 2
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- 238000005476 soldering Methods 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 1
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
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- 238000010248 power generation Methods 0.000 description 1
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- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000005533 two-dimensional electron gas Effects 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48135—Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip
- H01L2224/48137—Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip the bodies being arranged next to each other, e.g. on a common substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48245—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
- H01L2224/48247—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/484—Connecting portions
- H01L2224/4847—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a wedge bond
- H01L2224/48472—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a wedge bond the other connecting portion not on the bonding area also being a wedge bond, i.e. wedge-to-wedge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/49—Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
- H01L2224/491—Disposition
- H01L2224/4911—Disposition the connectors being bonded to at least one common bonding area, e.g. daisy chain
- H01L2224/49111—Disposition the connectors being bonded to at least one common bonding area, e.g. daisy chain the connectors connecting two common bonding areas, e.g. Litz or braid wires
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/181—Encapsulation
Landscapes
- Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
- Junction Field-Effect Transistors (AREA)
- Electrodes Of Semiconductors (AREA)
- Insulated Metal Substrates For Printed Circuits (AREA)
- Structure Of Printed Boards (AREA)
- Production Of Multi-Layered Print Wiring Board (AREA)
- Lead Frames For Integrated Circuits (AREA)
- Led Devices (AREA)
- Led Device Packages (AREA)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP2017/034411 WO2018056426A1 (ja) | 2016-09-26 | 2017-09-25 | 半導体パッケージ、モジュールおよび電気機器 |
CN201780026378.0A CN109075148B (zh) | 2016-09-26 | 2017-09-25 | 半导体封装体、安装有半导体封装体的模块及电气设备 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016186741 | 2016-09-26 | ||
JP2016186741 | 2016-09-26 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2018031547A Division JP6744610B2 (ja) | 2016-09-26 | 2018-02-26 | 半導体パッケージ、モジュールおよび電気機器 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP6304700B2 true JP6304700B2 (ja) | 2018-04-04 |
JP2018056538A JP2018056538A (ja) | 2018-04-05 |
Family
ID=61828442
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2017018254A Active JP6304700B2 (ja) | 2016-09-26 | 2017-02-03 | 半導体パッケージ、モジュールおよび電気機器 |
JP2018031547A Active JP6744610B2 (ja) | 2016-09-26 | 2018-02-26 | 半導体パッケージ、モジュールおよび電気機器 |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2018031547A Active JP6744610B2 (ja) | 2016-09-26 | 2018-02-26 | 半導体パッケージ、モジュールおよび電気機器 |
Country Status (2)
Country | Link |
---|---|
JP (2) | JP6304700B2 (enrdf_load_stackoverflow) |
CN (1) | CN109075148B (enrdf_load_stackoverflow) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN115656298A (zh) * | 2022-10-25 | 2023-01-31 | 电子科技大学 | 一种基于oect的人工神经突触及其制备方法 |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10912195B2 (en) * | 2019-01-02 | 2021-02-02 | The Boeing Company | Multi-embedded radio frequency board and mobile device including the same |
CN110113877B (zh) * | 2019-06-06 | 2021-11-05 | 景旺电子科技(龙川)有限公司 | 一种激光切割法制作金属基线路板的方法 |
WO2021002225A1 (ja) * | 2019-07-01 | 2021-01-07 | ローム株式会社 | 半導体装置 |
JP7088132B2 (ja) * | 2019-07-10 | 2022-06-21 | 株式会社デンソー | 半導体装置及び電子装置 |
JP7298467B2 (ja) * | 2019-12-17 | 2023-06-27 | 三菱電機株式会社 | 半導体モジュールおよび半導体装置 |
WO2022055248A1 (ko) * | 2020-09-08 | 2022-03-17 | 한양대학교에리카산학협력단 | 열전 복합체 및 그 제조방법, 그리고 열전 복합체를 포함하는 열전 소자 및 반도체 소자 |
KR102597072B1 (ko) * | 2020-09-08 | 2023-11-01 | 한양대학교 에리카산학협력단 | 이성분계 산화물 2deg 및 2dhg 열전 소자 기반 능동 냉각 장치 및 그 제조방법 |
JP7337034B2 (ja) * | 2020-09-15 | 2023-09-01 | 三菱電機株式会社 | 半導体パッケージおよび半導体装置 |
CN112687740B (zh) * | 2020-12-30 | 2022-06-21 | 江苏大学 | 一种AlGaN/GaN高电子迁移率晶体管及制造方法 |
JP7571743B2 (ja) * | 2022-02-04 | 2024-10-23 | 株式会社デンソー | 半導体装置 |
WO2025033552A1 (ja) * | 2023-08-10 | 2025-02-13 | 京セラ株式会社 | 回路及び半導体素子 |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06821Y2 (ja) * | 1987-12-25 | 1994-01-05 | シチズン時計株式会社 | 半導体装置の実装構造 |
JP2001168123A (ja) * | 1999-12-09 | 2001-06-22 | Seiko Epson Corp | 半導体装置及びその製造方法、半導体装置の製造装置、回路基板並びに電子機器 |
JP2001358259A (ja) * | 2000-06-15 | 2001-12-26 | Seiko Epson Corp | 半導体パッケージ |
JP2003338519A (ja) * | 2002-05-21 | 2003-11-28 | Renesas Technology Corp | 半導体装置及びその製造方法 |
JP3918681B2 (ja) * | 2002-08-09 | 2007-05-23 | カシオ計算機株式会社 | 半導体装置 |
JP4386239B2 (ja) * | 2003-03-12 | 2009-12-16 | 株式会社ルネサステクノロジ | 半導体装置及びその製造方法 |
JP2006049682A (ja) * | 2004-08-06 | 2006-02-16 | Toshiba Corp | 半導体装置及びその製造方法 |
JP4549171B2 (ja) * | 2004-08-31 | 2010-09-22 | 三洋電機株式会社 | 混成集積回路装置 |
JP2009081293A (ja) * | 2007-09-26 | 2009-04-16 | Oki Semiconductor Co Ltd | 半導体チップ、及び複数の半導体チップが搭載された半導体装置 |
TWI402017B (zh) * | 2008-07-23 | 2013-07-11 | Nec Corp | 半導體裝置及其製造方法 |
JP2010050286A (ja) * | 2008-08-21 | 2010-03-04 | Toshiba Corp | 半導体装置 |
JP2010283265A (ja) * | 2009-06-08 | 2010-12-16 | Mitsubishi Electric Corp | 電気回路用気密パッケージ及び電気回路用気密パッケージの製造方法 |
JP5155989B2 (ja) * | 2009-11-30 | 2013-03-06 | 旭化成エレクトロニクス株式会社 | 半導体装置及びその製造方法 |
JP2014143326A (ja) * | 2013-01-24 | 2014-08-07 | Transphorm Japan Inc | 半導体装置、半導体装置の製造方法、リード、及びリードの製造方法 |
JP2015142077A (ja) * | 2014-01-30 | 2015-08-03 | 株式会社東芝 | 半導体装置 |
JP5828435B1 (ja) * | 2015-02-03 | 2015-12-09 | 株式会社パウデック | 半導体素子、電気機器、双方向電界効果トランジスタおよび実装構造体 |
JP2016171197A (ja) * | 2015-03-12 | 2016-09-23 | 株式会社東芝 | 半導体装置 |
-
2017
- 2017-02-03 JP JP2017018254A patent/JP6304700B2/ja active Active
- 2017-09-25 CN CN201780026378.0A patent/CN109075148B/zh active Active
-
2018
- 2018-02-26 JP JP2018031547A patent/JP6744610B2/ja active Active
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN115656298A (zh) * | 2022-10-25 | 2023-01-31 | 电子科技大学 | 一种基于oect的人工神经突触及其制备方法 |
Also Published As
Publication number | Publication date |
---|---|
CN109075148B (zh) | 2019-08-16 |
CN109075148A (zh) | 2018-12-21 |
JP6744610B2 (ja) | 2020-08-19 |
JP2018093221A (ja) | 2018-06-14 |
JP2018056538A (ja) | 2018-04-05 |
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