JP6301978B2 - 熱伝導シート、熱伝導シートの製造方法、放熱部材及び半導体装置 - Google Patents

熱伝導シート、熱伝導シートの製造方法、放熱部材及び半導体装置 Download PDF

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JP6301978B2
JP6301978B2 JP2016012663A JP2016012663A JP6301978B2 JP 6301978 B2 JP6301978 B2 JP 6301978B2 JP 2016012663 A JP2016012663 A JP 2016012663A JP 2016012663 A JP2016012663 A JP 2016012663A JP 6301978 B2 JP6301978 B2 JP 6301978B2
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Prior art keywords
heat
heat conductive
conductive sheet
sheet
carbon fiber
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JP2016012663A
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Japanese (ja)
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JP2017135211A5 (enExample
JP2017135211A (ja
Inventor
紘希 金谷
紘希 金谷
優 野村
優 野村
俊介 内田
俊介 内田
信一 内田
信一 内田
荒巻　慶輔
慶輔 荒巻
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Dexerials Corp
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Dexerials Corp
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Priority to JP2016012663A priority Critical patent/JP6301978B2/ja
Application filed by Dexerials Corp filed Critical Dexerials Corp
Priority to KR1020207016571A priority patent/KR102151931B1/ko
Priority to CN201780006145.4A priority patent/CN108463882B/zh
Priority to US16/072,334 priority patent/US10526519B2/en
Priority to KR1020187009825A priority patent/KR102075893B1/ko
Priority to PCT/JP2017/001122 priority patent/WO2017130755A1/ja
Priority to KR1020197030256A priority patent/KR20190120421A/ko
Publication of JP2017135211A publication Critical patent/JP2017135211A/ja
Publication of JP2017135211A5 publication Critical patent/JP2017135211A5/ja
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    • H01L24/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
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    • H01L2924/16717—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 400 C and less than 950 C
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    • H01L2924/166—Material
    • H01L2924/167—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
    • H01L2924/16738—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950 C and less than 1550 C
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