JP6301795B2 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JP6301795B2 JP6301795B2 JP2014191061A JP2014191061A JP6301795B2 JP 6301795 B2 JP6301795 B2 JP 6301795B2 JP 2014191061 A JP2014191061 A JP 2014191061A JP 2014191061 A JP2014191061 A JP 2014191061A JP 6301795 B2 JP6301795 B2 JP 6301795B2
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- 239000004065 semiconductor Substances 0.000 title claims description 62
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 70
- 239000012535 impurity Substances 0.000 claims description 66
- 229910052757 nitrogen Inorganic materials 0.000 claims description 35
- 229910052782 aluminium Inorganic materials 0.000 claims description 19
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 19
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 16
- 229910052710 silicon Inorganic materials 0.000 claims description 16
- 239000010703 silicon Substances 0.000 claims description 16
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 8
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 8
- 229910010271 silicon carbide Inorganic materials 0.000 description 120
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 112
- 239000010410 layer Substances 0.000 description 70
- 239000000758 substrate Substances 0.000 description 56
- 238000004519 manufacturing process Methods 0.000 description 21
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 18
- 239000003990 capacitor Substances 0.000 description 18
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 14
- 229910052799 carbon Inorganic materials 0.000 description 14
- 230000000694 effects Effects 0.000 description 8
- 229910052759 nickel Inorganic materials 0.000 description 8
- 238000010586 diagram Methods 0.000 description 6
- 230000005684 electric field Effects 0.000 description 6
- 239000013078 crystal Substances 0.000 description 5
- 238000011156 evaluation Methods 0.000 description 5
- 239000011229 interlayer Substances 0.000 description 5
- 238000000034 method Methods 0.000 description 4
- 238000001004 secondary ion mass spectrometry Methods 0.000 description 4
- 230000009471 action Effects 0.000 description 3
- 238000005468 ion implantation Methods 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 230000005669 field effect Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 229910021334 nickel silicide Inorganic materials 0.000 description 2
- RUFLMLWJRZAWLJ-UHFFFAOYSA-N nickel silicide Chemical compound [Ni]=[Si]=[Ni] RUFLMLWJRZAWLJ-UHFFFAOYSA-N 0.000 description 2
- 239000012299 nitrogen atmosphere Substances 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 229920005591 polysilicon Polymers 0.000 description 2
- 238000005036 potential barrier Methods 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 238000009499 grossing Methods 0.000 description 1
- 229910052735 hafnium Inorganic materials 0.000 description 1
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 description 1
- 229910000449 hafnium oxide Inorganic materials 0.000 description 1
- WIHZLLGSGQNAGK-UHFFFAOYSA-N hafnium(4+);oxygen(2-) Chemical compound [O-2].[O-2].[Hf+4] WIHZLLGSGQNAGK-UHFFFAOYSA-N 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- GFQYVLUOOAAOGM-UHFFFAOYSA-N zirconium(iv) silicate Chemical compound [Zr+4].[O-][Si]([O-])([O-])[O-] GFQYVLUOOAAOGM-UHFFFAOYSA-N 0.000 description 1
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Description
本実施形態の半導体装置は、アクセプタの濃度をNA、ドナーの濃度をNDとする場合に、表面にNA−ND<5×1015cm−3の第1の領域を有し、表面が、{000−1}面に対し0度以上10度以下傾斜した面、又は法線方向が<000−1>方向に対し80度以上90度以下傾斜した面であるSiC層と、ゲート電極と、SiC層とゲート電極との間に設けられるゲート絶縁膜と、SiC層とゲート絶縁膜との間に設けられ、窒素の濃度が1×1022cm−3より高い第2の領域と、を備える。
本実施形態の半導体装置は、SiC層の表面が、法線方向が<000−1>方向に対し80度以上90度以下傾斜した面であること以外は、第1の実施形態と同様である。したがって、第1の実施形態と重複する内容については記述を省略する。
本実施形態の半導体装置は、トレンチゲート型のMISFETであること以外は、第1の実施形態と同様である。したがって、第1の実施形態と重複する内容については記述を省略する。
また、SiC基板10の第1の面がカーボン面に対し0度以上10度以下傾斜した面、第2の面がシリコン面に対し0度以上10度以下傾斜した面である。
本実施形態の半導体装置は、MISFETではなく、IGBT(Insulated Gate Bipolar Transistor)であること以外は、第1の実施形態と同様である。したがって、第1の実施形態と重複する内容については記述を省略する。
本実施形態の半導体装置は、MISFETではなく、MISキャパシタであること以外は、第1の実施形態と同様である。したがって、第1の実施形態と重複する内容については記述を省略する。
14 ドリフト領域
16 ベース領域
18 ソース領域
28 ゲート絶縁膜
30 ゲート電極
38 表面領域(第1の領域)
40 界面領域(第2の領域)
100 MISFET(半導体装置)
200 MISFET(半導体装置)
300 MISFET(半導体装置)
400 MISキャパシタ(半導体装置)
Claims (8)
- p型不純物の濃度をNA、n型不純物の濃度をNDとする場合に、表面にNA−ND<5×1015cm−3 でN A <5×10 15 cm −3 であるn型の第1の領域を有し、表面が、{000−1}面に対し0度以上10度以下傾斜した面、又は法線方向が<000−1>方向に対し80度以上90度以下傾斜した面であるSiC層と、
ゲート電極と、
前記SiC層と前記ゲート電極との間に設けられるゲート絶縁膜と、
前記SiC層と前記ゲート絶縁膜との間に設けられ、窒素の濃度が1×1022cm−3より高い第2の領域と、
を備え、
前記SiC層が、前記第1の領域の前記ゲート絶縁膜と反対側に、p型の不純物濃度が1×10 16 cm −3 以上のベース領域を有する半導体装置。 - 前記第1の領域のアルミニウムの濃度が5×1015cm−3未満である請求項1記載の半導体装置。
- 前記ゲート絶縁膜から、前記第2の領域の窒素の濃度が1×1019cm−3以下となる位置までの距離が10nm以下である請求項1又は請求項2記載の半導体装置。
- 前記SiC層が、前記第1の領域の前記ゲート絶縁膜と反対側に、前記ベース領域を挟んで設けられるn型のソース領域及びn型のドリフト領域と、を更に備える請求項1乃至請求項3いずれか一項記載の半導体装置。
- 前記第1の領域の幅は20nm以下である請求項1乃至請求項4いずれか一項記載の半導体装置。
- 前記ゲート絶縁膜は、シリコン酸化膜又はシリコン酸窒化膜である請求項1乃至請求項5いずれか一項記載の半導体装置。
- 前記法線方向が<000−1>方向に対し80度以上90度以下傾斜した面は、{1−100}面に対し0度以上10度以下傾斜した面、又は{11−20}面に対し0度以上10度以下傾斜した面である請求項1乃至請求項6いずれか一項記載の半導体装置。
- 前記第1の領域は、窒素を含有する請求項1乃至請求項7いずれか一項記載の半導体装置。
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US10147813B2 (en) * | 2016-03-04 | 2018-12-04 | United Silicon Carbide, Inc. | Tunneling field effect transistor |
JP6862384B2 (ja) * | 2018-03-21 | 2021-04-21 | 株式会社東芝 | 半導体装置、半導体装置の製造方法、インバータ回路、駆動装置、車両、及び、昇降機 |
JP6896672B2 (ja) * | 2018-03-21 | 2021-06-30 | 株式会社東芝 | 半導体装置及びその製造方法 |
JP6957536B2 (ja) * | 2019-01-04 | 2021-11-02 | 株式会社東芝 | 半導体装置、インバータ回路、駆動装置、車両、及び、昇降機 |
US10998418B2 (en) * | 2019-05-16 | 2021-05-04 | Cree, Inc. | Power semiconductor devices having reflowed inter-metal dielectric layers |
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US8283973B2 (en) * | 2009-08-19 | 2012-10-09 | Panasonic Corporation | Semiconductor element, semiconductor device, and electric power converter |
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