JP6297789B2 - 配線の形成方法および半導体装置の作製方法 - Google Patents
配線の形成方法および半導体装置の作製方法 Download PDFInfo
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- JP6297789B2 JP6297789B2 JP2013098209A JP2013098209A JP6297789B2 JP 6297789 B2 JP6297789 B2 JP 6297789B2 JP 2013098209 A JP2013098209 A JP 2013098209A JP 2013098209 A JP2013098209 A JP 2013098209A JP 6297789 B2 JP6297789 B2 JP 6297789B2
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/423—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions not carrying the current to be rectified, amplified or switched
- H01L29/42312—Gate electrodes for field effect devices
- H01L29/42316—Gate electrodes for field effect devices for field-effect transistors
- H01L29/4232—Gate electrodes for field effect devices for field-effect transistors with insulated gate
- H01L29/42384—Gate electrodes for field effect devices for field-effect transistors with insulated gate for thin film field effect transistors, e.g. characterised by the thickness or the shape of the insulator or the dimensions, the shape or the lay-out of the conductor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/34—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies not provided for in groups H01L21/0405, H01L21/0445, H01L21/06, H01L21/16 and H01L21/18 with or without impurities, e.g. doping materials
- H01L21/44—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/38 - H01L21/428
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
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Description
本実施の形態では、本発明の一態様に係る配線およびその形成方法について説明する。
本実施の形態では、本発明の一態様に係るトランジスタおよびその作製方法について説明する。
本実施の形態では、先の実施の形態で示したトランジスタを適用した表示装置について説明する。
本実施の形態では、先の実施の形態で示した半導体装置を適用した電子機器の例について説明する。
54 導電膜
54a 導電膜
56 導電膜
56a 導電膜
56b 導電膜
58 レジストマスク
60 基板
62 導電膜
62a 導電膜
64 導電膜
64a 導電膜
66 導電膜
66a 導電膜
66b 導電膜
68 レジストマスク
100 基板
102 下地絶縁膜
104 ゲート電極
104a 導電膜
104b 導電膜
104c 導電膜
106 酸化物半導体膜
112 ゲート絶縁膜
116a ソース電極
116b ドレイン電極
118 保護絶縁膜
200 ガラス基板
204 ゲート電極
206 酸化物半導体膜
212 ゲート絶縁膜
216a ソース電極
216b ドレイン電極
218 保護絶縁膜
250 領域
252 領域
300 ガラス基板
304 銅膜
306 導電膜
308 レジストマスク
320 白金膜
400 ガラス基板
402 窒化タンタル膜
404 銅膜
406 タングステン膜
408 レジストマスク
410 窒化シリコン膜
412 酸化窒化シリコン膜
420 白金膜
421 白金膜
500 ガラス基板
502 窒化タンタル膜
504 銅膜
506 導電膜
508 レジストマスク
520 白金膜
719 発光素子
720 絶縁膜
721 絶縁膜
741 トランジスタ
742 キャパシタ
743 スイッチ素子
744 信号線
750 画素
751 トランジスタ
752 キャパシタ
753 液晶素子
754 走査線
755 信号線
781 電極
782 発光層
783 電極
784 隔壁
785a 中間層
785b 中間層
785c 中間層
785d 中間層
786a 発光層
786b 発光層
786c 発光層
791 電極
792 絶縁膜
793 液晶層
794 絶縁膜
795 スペーサ
796 電極
797 基板
9300 筐体
9301 ボタン
9302 マイクロフォン
9303 表示部
9304 スピーカ
9305 カメラ
9310 筐体
9311 表示部
9320 筐体
9321 ボタン
9322 マイクロフォン
9323 表示部
9630 筐体
9631a 表示部
9631b 表示部
9633 留め具
9638 操作スイッチ
Claims (10)
- 銅を含む第1の導電膜と、前記第1の導電膜上の第2の導電膜と、を有する積層膜において、
前記第2の導電膜は、タングステン、コバルト、ニッケル、スズおよびモリブデンのいずれか一種以上を含む導電膜であり、
前記第2の導電膜上にレジストマスクを形成し、
前記レジストマスクをマスクとして前記第2の導電膜の一部を除去し、
前記レジストマスクおよび一部が除去された前記第2の導電膜をマスクとして前記第1の導電膜の一部を除去することで、15°以上45°以下のテーパー角を有する前記第1の導電膜を形成した後、前記レジストマスクを除去し、
前記レジストマスクを除去した後、一部が除去された前記第2の導電膜の前記第1の導電膜と接しない領域を除去することを特徴とする配線の形成方法。 - 請求項1において、
前記第1の導電膜は、前記第2の導電膜と接する領域のエッチング速度が高いことを特徴とする配線の形成方法。 - 請求項1または請求項2において、
前記第1の導電膜下に、窒素を含む絶縁膜または窒素を含む導電膜が設けられることを特徴とする配線の形成方法。 - 請求項1乃至3のいずれか一において、
前記レジストマスクを除去した後、一部が除去された前記第2の導電膜を除去することを特徴とする配線の形成方法。 - 銅を含む第1の導電膜と、前記第1の導電膜上の第2の導電膜と、を有する積層膜において、
前記第2の導電膜は、タングステン、コバルト、ニッケル、スズおよびモリブデンのいずれか一種以上を含む導電膜であり、
前記第2の導電膜上にレジストマスクを形成し、
前記レジストマスクをマスクとして前記第2の導電膜の一部を除去し、
前記レジストマスクおよび一部が除去された前記第2の導電膜をマスクとして前記第1の導電膜の一部を除去することで、15°以上45°以下のテーパー角を有する前記第1の導電膜を形成した後、前記レジストマスクを除去し、
前記レジストマスクを除去した後、一部が除去された前記第2の導電膜の前記第1の導電膜と接しない領域を除去することでゲート電極を形成し、
前記ゲート電極上にゲート絶縁膜を成膜し、
前記ゲート絶縁膜を介して前記ゲート電極と重なる半導体膜を形成し、
前記半導体膜と接する一対の電極を形成することを特徴とする半導体装置の作製方法。 - 請求項5において、
前記第1の導電膜は、前記第2の導電膜と接する領域のエッチング速度が高いことを特徴とする半導体装置の作製方法。 - 請求項5または請求項6において、
前記第1の導電膜下に、窒素を含む絶縁膜または窒素を含む導電膜が設けられることを特徴とする半導体装置の作製方法。 - 請求項5乃至7のいずれか一において、
前記半導体膜は酸化物半導体膜であることを特徴とする半導体装置の作製方法。 - 請求項5乃至8のいずれか一において、
前記ゲート絶縁膜は、窒化シリコン膜または酸化窒化シリコン膜を一部に含むことを特徴とする半導体装置の作製方法。 - 請求項5乃至9のいずれか一において、
前記レジストマスクを除去した後、一部が除去された前記第2の導電膜を除去することを特徴とする半導体装置の作製方法。
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2013
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US8932903B2 (en) | 2015-01-13 |
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US20130302938A1 (en) | 2013-11-14 |
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