JP6256178B2 - 脆性材料基板のブレイク装置 - Google Patents
脆性材料基板のブレイク装置 Download PDFInfo
- Publication number
- JP6256178B2 JP6256178B2 JP2014092493A JP2014092493A JP6256178B2 JP 6256178 B2 JP6256178 B2 JP 6256178B2 JP 2014092493 A JP2014092493 A JP 2014092493A JP 2014092493 A JP2014092493 A JP 2014092493A JP 6256178 B2 JP6256178 B2 JP 6256178B2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- stage
- brittle material
- material substrate
- end material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
- Dicing (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Perforating, Stamping-Out Or Severing By Means Other Than Cutting (AREA)
- Microscoopes, Condenser (AREA)
- Sampling And Sample Adjustment (AREA)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2014092493A JP6256178B2 (ja) | 2014-04-28 | 2014-04-28 | 脆性材料基板のブレイク装置 |
TW103142982A TWI639566B (zh) | 2014-04-28 | 2014-12-10 | Cracking device for brittle material substrate |
KR1020150003344A KR20150124376A (ko) | 2014-04-28 | 2015-01-09 | 취성 재료 기판의 브레이크 장치 |
CN201510142652.3A CN105034179B (zh) | 2014-04-28 | 2015-03-27 | 脆性材料基板的裂断装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2014092493A JP6256178B2 (ja) | 2014-04-28 | 2014-04-28 | 脆性材料基板のブレイク装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2015208937A JP2015208937A (ja) | 2015-11-24 |
JP6256178B2 true JP6256178B2 (ja) | 2018-01-10 |
Family
ID=54441432
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2014092493A Active JP6256178B2 (ja) | 2014-04-28 | 2014-04-28 | 脆性材料基板のブレイク装置 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP6256178B2 (zh) |
KR (1) | KR20150124376A (zh) |
CN (1) | CN105034179B (zh) |
TW (1) | TWI639566B (zh) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6282176B2 (ja) * | 2014-05-29 | 2018-02-21 | 三星ダイヤモンド工業株式会社 | 脆性材料基板の端材分離装置 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09136319A (ja) * | 1995-11-15 | 1997-05-27 | Fujitsu Ten Ltd | 基板の分割装置 |
JP2001058317A (ja) * | 1999-08-20 | 2001-03-06 | Berudekkusu:Kk | スクライブ方法および装置 |
JP3792508B2 (ja) * | 2000-12-19 | 2006-07-05 | 三星ダイヤモンド工業株式会社 | 貼り合わせ脆性基板の分断方法 |
JP4646467B2 (ja) * | 2001-09-04 | 2011-03-09 | 旭化成せんい株式会社 | 紡績糸 |
KR20050102097A (ko) * | 2003-02-21 | 2005-10-25 | 미쓰보시 다이야몬도 고교 가부시키가이샤 | 기판 가공용 테이블 및 기판의 가공장치 |
JP2005225637A (ja) * | 2004-02-13 | 2005-08-25 | Toyota Industries Corp | パネル反転装置 |
JP5284725B2 (ja) * | 2008-08-29 | 2013-09-11 | 三星ダイヤモンド工業株式会社 | 脆性材料ブレーク装置 |
JP2011037104A (ja) * | 2009-08-10 | 2011-02-24 | Asahi Glass Co Ltd | 基板の分割装置および分割方法 |
JP5170195B2 (ja) * | 2010-09-24 | 2013-03-27 | 三星ダイヤモンド工業株式会社 | 樹脂付き脆性材料基板の分割方法 |
CN103381624A (zh) * | 2012-05-03 | 2013-11-06 | 江俊昇 | 易碎片状工作物的裁切方法及装置 |
JP5981791B2 (ja) * | 2012-07-18 | 2016-08-31 | 三星ダイヤモンド工業株式会社 | 脆性材料基板のブレイク装置 |
JP5744109B2 (ja) * | 2013-06-05 | 2015-07-01 | 三星ダイヤモンド工業株式会社 | 脆性基板搬送ユニット |
-
2014
- 2014-04-28 JP JP2014092493A patent/JP6256178B2/ja active Active
- 2014-12-10 TW TW103142982A patent/TWI639566B/zh not_active IP Right Cessation
-
2015
- 2015-01-09 KR KR1020150003344A patent/KR20150124376A/ko not_active Application Discontinuation
- 2015-03-27 CN CN201510142652.3A patent/CN105034179B/zh not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP2015208937A (ja) | 2015-11-24 |
CN105034179B (zh) | 2017-10-20 |
KR20150124376A (ko) | 2015-11-05 |
TWI639566B (zh) | 2018-11-01 |
TW201540678A (zh) | 2015-11-01 |
CN105034179A (zh) | 2015-11-11 |
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