JP6246460B2 - 回転式位置検出装置 - Google Patents

回転式位置検出装置 Download PDF

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Publication number
JP6246460B2
JP6246460B2 JP2012195723A JP2012195723A JP6246460B2 JP 6246460 B2 JP6246460 B2 JP 6246460B2 JP 2012195723 A JP2012195723 A JP 2012195723A JP 2012195723 A JP2012195723 A JP 2012195723A JP 6246460 B2 JP6246460 B2 JP 6246460B2
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Japan
Prior art keywords
distance
light source
detection device
scale plate
rotary position
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JP2012195723A
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English (en)
Japanese (ja)
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JP2013061330A5 (enExample
JP2013061330A (ja
Inventor
ウルリヒ・ベンナー
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Dr Johannes Heidenhain GmbH
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Dr Johannes Heidenhain GmbH
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Publication of JP2013061330A publication Critical patent/JP2013061330A/ja
Publication of JP2013061330A5 publication Critical patent/JP2013061330A5/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP2012195723A 2011-09-13 2012-09-06 回転式位置検出装置 Active JP6246460B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102011082570.3 2011-09-13
DE201110082570 DE102011082570A1 (de) 2011-09-13 2011-09-13 Rotatorische Positionsmesseinrichtung

Publications (3)

Publication Number Publication Date
JP2013061330A JP2013061330A (ja) 2013-04-04
JP2013061330A5 JP2013061330A5 (enExample) 2015-10-29
JP6246460B2 true JP6246460B2 (ja) 2017-12-13

Family

ID=46801323

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012195723A Active JP6246460B2 (ja) 2011-09-13 2012-09-06 回転式位置検出装置

Country Status (5)

Country Link
US (1) US8937726B2 (enExample)
EP (1) EP2570780B1 (enExample)
JP (1) JP6246460B2 (enExample)
CN (1) CN102997948B (enExample)
DE (1) DE102011082570A1 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102012222077A1 (de) 2012-12-03 2014-06-05 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
DE102016224012A1 (de) * 2016-12-02 2018-06-07 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung und Verfahren zum Betreiben einer Positionsmesseinrichtung
CN111458343B (zh) * 2019-01-18 2024-08-06 深圳中科飞测科技股份有限公司 检测设备及检测方法
JP7120200B2 (ja) * 2019-10-15 2022-08-17 株式会社デンソー 回転角検出装置

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4572952A (en) * 1982-07-28 1986-02-25 Adrian March Research Ltd. Position sensor with moire interpolation
US4844617A (en) * 1988-01-20 1989-07-04 Tencor Instruments Confocal measuring microscope with automatic focusing
JPH07888Y2 (ja) * 1988-02-22 1995-01-11 株式会社ミツトヨ 光学式変位検出器
JP2749900B2 (ja) * 1989-09-11 1998-05-13 株式会社三協精機製作所 位置検出方法
JP2653186B2 (ja) * 1989-09-27 1997-09-10 キヤノン株式会社 ヘッドアップディスプレイ装置
JP3500214B2 (ja) * 1994-12-28 2004-02-23 日本電産コパル株式会社 光学式エンコーダ
JPH09105625A (ja) * 1995-10-13 1997-04-22 Topcon Corp 距離測定装置
JP3509830B2 (ja) 1995-11-08 2004-03-22 株式会社安川電機 光学式ロータリエンコーダ
JPH1123321A (ja) * 1997-06-30 1999-01-29 Canon Inc 光学スケール及びそれを用いた変位情報測定装置
JP3459755B2 (ja) * 1997-06-30 2003-10-27 キヤノン株式会社 変位情報測定装置
EP0978708B1 (de) * 1998-08-01 2005-10-05 Dr. Johannes Heidenhain GmbH Rotatorische Positionsmesseinrichtung
DE19908328A1 (de) * 1999-02-26 2000-08-31 Heidenhain Gmbh Dr Johannes Optische Positionsmeßeinrichtung
JP2002139353A (ja) * 2000-11-06 2002-05-17 Olympus Optical Co Ltd 光学式ロータリエンコーダ
GB0103582D0 (en) * 2001-02-14 2001-03-28 Renishaw Plc Position determination system
EP1396704B1 (de) * 2002-08-07 2015-10-07 Dr. Johannes Heidenhain GmbH Interferenzielle Positionsmesseinrichtung
DE102006021017A1 (de) * 2006-05-05 2007-11-08 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
DE102006042743A1 (de) * 2006-09-12 2008-03-27 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
JP2008292352A (ja) * 2007-05-25 2008-12-04 Mitsutoyo Corp 反射型エンコーダ
JP2009210374A (ja) * 2008-03-04 2009-09-17 Nikon Corp エンコーダ及び受光ユニット
DE102008025870A1 (de) * 2008-05-31 2009-12-03 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung
DE102008044858A1 (de) * 2008-08-28 2010-03-04 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung
DE102010029211A1 (de) * 2010-05-21 2011-11-24 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung

Also Published As

Publication number Publication date
US8937726B2 (en) 2015-01-20
US20130063732A1 (en) 2013-03-14
EP2570780A3 (de) 2017-01-11
CN102997948A (zh) 2013-03-27
EP2570780A2 (de) 2013-03-20
EP2570780B1 (de) 2018-01-03
JP2013061330A (ja) 2013-04-04
DE102011082570A1 (de) 2013-03-14
CN102997948B (zh) 2016-06-29

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