CN102997948B - 旋转位置测量装置 - Google Patents

旋转位置测量装置 Download PDF

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Publication number
CN102997948B
CN102997948B CN201210338229.7A CN201210338229A CN102997948B CN 102997948 B CN102997948 B CN 102997948B CN 201210338229 A CN201210338229 A CN 201210338229A CN 102997948 B CN102997948 B CN 102997948B
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CN
China
Prior art keywords
distance
light source
detection device
measurement apparatus
rotation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201210338229.7A
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English (en)
Chinese (zh)
Other versions
CN102997948A (zh
Inventor
U.本纳
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
John Nei Si Heidenhain Doctor Co Ltd
Original Assignee
John Nei Si Heidenhain Doctor Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
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Application filed by John Nei Si Heidenhain Doctor Co Ltd filed Critical John Nei Si Heidenhain Doctor Co Ltd
Publication of CN102997948A publication Critical patent/CN102997948A/zh
Application granted granted Critical
Publication of CN102997948B publication Critical patent/CN102997948B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
  • Length Measuring Devices By Optical Means (AREA)
CN201210338229.7A 2011-09-13 2012-09-13 旋转位置测量装置 Expired - Fee Related CN102997948B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE201110082570 DE102011082570A1 (de) 2011-09-13 2011-09-13 Rotatorische Positionsmesseinrichtung
DE102011082570.3 2011-09-13

Publications (2)

Publication Number Publication Date
CN102997948A CN102997948A (zh) 2013-03-27
CN102997948B true CN102997948B (zh) 2016-06-29

Family

ID=46801323

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201210338229.7A Expired - Fee Related CN102997948B (zh) 2011-09-13 2012-09-13 旋转位置测量装置

Country Status (5)

Country Link
US (1) US8937726B2 (enExample)
EP (1) EP2570780B1 (enExample)
JP (1) JP6246460B2 (enExample)
CN (1) CN102997948B (enExample)
DE (1) DE102011082570A1 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102012222077A1 (de) 2012-12-03 2014-06-05 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
DE102016224012A1 (de) * 2016-12-02 2018-06-07 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung und Verfahren zum Betreiben einer Positionsmesseinrichtung
CN111458343B (zh) * 2019-01-18 2024-08-06 深圳中科飞测科技股份有限公司 检测设备及检测方法
JP7120200B2 (ja) * 2019-10-15 2022-08-17 株式会社デンソー 回転角検出装置

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4572952A (en) * 1982-07-28 1986-02-25 Adrian March Research Ltd. Position sensor with moire interpolation
US4844617A (en) * 1988-01-20 1989-07-04 Tencor Instruments Confocal measuring microscope with automatic focusing
CN1155069A (zh) * 1995-10-13 1997-07-23 株式会社拓普康 距离测定装置
CN101067560A (zh) * 2006-05-05 2007-11-07 约翰尼斯海登海恩博士股份有限公司 位置测量装置
WO2009144057A1 (de) * 2008-05-31 2009-12-03 Dr. Johannes Heidenhain Gmbh Optische positionsmesseinrichtung
CN102138060A (zh) * 2008-08-28 2011-07-27 约翰尼斯海登海恩博士股份有限公司 光学位置测量设备

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07888Y2 (ja) * 1988-02-22 1995-01-11 株式会社ミツトヨ 光学式変位検出器
JP2749900B2 (ja) * 1989-09-11 1998-05-13 株式会社三協精機製作所 位置検出方法
JP2653186B2 (ja) * 1989-09-27 1997-09-10 キヤノン株式会社 ヘッドアップディスプレイ装置
JP3500214B2 (ja) * 1994-12-28 2004-02-23 日本電産コパル株式会社 光学式エンコーダ
JP3509830B2 (ja) 1995-11-08 2004-03-22 株式会社安川電機 光学式ロータリエンコーダ
JP3459755B2 (ja) * 1997-06-30 2003-10-27 キヤノン株式会社 変位情報測定装置
JPH1123321A (ja) * 1997-06-30 1999-01-29 Canon Inc 光学スケール及びそれを用いた変位情報測定装置
DE59912617D1 (de) * 1998-08-01 2006-02-16 Heidenhain Gmbh Dr Johannes Rotatorische Positionsmesseinrichtung
DE19908328A1 (de) * 1999-02-26 2000-08-31 Heidenhain Gmbh Dr Johannes Optische Positionsmeßeinrichtung
JP2002139353A (ja) * 2000-11-06 2002-05-17 Olympus Optical Co Ltd 光学式ロータリエンコーダ
GB0103582D0 (en) * 2001-02-14 2001-03-28 Renishaw Plc Position determination system
DE10333772A1 (de) * 2002-08-07 2004-02-26 Dr. Johannes Heidenhain Gmbh Interferenzielle Positionsmesseinrichtung
DE102006042743A1 (de) * 2006-09-12 2008-03-27 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
JP2008292352A (ja) * 2007-05-25 2008-12-04 Mitsutoyo Corp 反射型エンコーダ
JP2009210374A (ja) * 2008-03-04 2009-09-17 Nikon Corp エンコーダ及び受光ユニット
DE102010029211A1 (de) * 2010-05-21 2011-11-24 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4572952A (en) * 1982-07-28 1986-02-25 Adrian March Research Ltd. Position sensor with moire interpolation
US4844617A (en) * 1988-01-20 1989-07-04 Tencor Instruments Confocal measuring microscope with automatic focusing
CN1155069A (zh) * 1995-10-13 1997-07-23 株式会社拓普康 距离测定装置
CN101067560A (zh) * 2006-05-05 2007-11-07 约翰尼斯海登海恩博士股份有限公司 位置测量装置
WO2009144057A1 (de) * 2008-05-31 2009-12-03 Dr. Johannes Heidenhain Gmbh Optische positionsmesseinrichtung
CN102138060A (zh) * 2008-08-28 2011-07-27 约翰尼斯海登海恩博士股份有限公司 光学位置测量设备

Also Published As

Publication number Publication date
CN102997948A (zh) 2013-03-27
EP2570780A3 (de) 2017-01-11
DE102011082570A1 (de) 2013-03-14
US8937726B2 (en) 2015-01-20
EP2570780A2 (de) 2013-03-20
JP2013061330A (ja) 2013-04-04
US20130063732A1 (en) 2013-03-14
EP2570780B1 (de) 2018-01-03
JP6246460B2 (ja) 2017-12-13

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PB01 Publication
CB02 Change of applicant information
CB02 Change of applicant information

Address after: German Te Rauen Rohit

Applicant after: DR. JOHANNES HEIDENHAIN GmbH

Address before: German Te Rauen Rohit

Applicant before: Dr. Johannes Heidenhain GmbH

COR Change of bibliographic data

Free format text: CORRECT: APPLICANT; FROM: DR. JOHANNES HEIDENHAIN GMBH TO: HEIDENHAIN GMBH. DOCTOR JOHANNES

C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20160629