JP6156716B2 - 搬送装置 - Google Patents
搬送装置 Download PDFInfo
- Publication number
- JP6156716B2 JP6156716B2 JP2012182091A JP2012182091A JP6156716B2 JP 6156716 B2 JP6156716 B2 JP 6156716B2 JP 2012182091 A JP2012182091 A JP 2012182091A JP 2012182091 A JP2012182091 A JP 2012182091A JP 6156716 B2 JP6156716 B2 JP 6156716B2
- Authority
- JP
- Japan
- Prior art keywords
- magnetic pole
- movable
- side magnetic
- guide
- width direction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 230000007246 mechanism Effects 0.000 claims description 23
- 230000009467 reduction Effects 0.000 claims description 5
- 230000032258 transport Effects 0.000 description 23
- 230000006837 decompression Effects 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 230000004907 flux Effects 0.000 description 2
- 239000010687 lubricating oil Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000001141 propulsive effect Effects 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 125000004122 cyclic group Chemical group 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
- H02K41/02—Linear motors; Sectional motors
- H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G54/00—Non-mechanical conveyors not otherwise provided for
- B65G54/02—Non-mechanical conveyors not otherwise provided for electrostatic, electric, or magnetic
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67709—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using magnetic elements
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
- H02K41/02—Linear motors; Sectional motors
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
- H02K41/02—Linear motors; Sectional motors
- H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
- H02K41/031—Synchronous motors; Motors moving step by step; Reluctance motors of the permanent magnet type
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K5/00—Casings; Enclosures; Supports
- H02K5/04—Casings or enclosures characterised by the shape, form or construction thereof
- H02K5/12—Casings or enclosures characterised by the shape, form or construction thereof specially adapted for operating in liquid or gas
- H02K5/128—Casings or enclosures characterised by the shape, form or construction thereof specially adapted for operating in liquid or gas using air-gap sleeves or air-gap discs
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Electromagnetism (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Linear Motors (AREA)
- Non-Mechanical Conveyors (AREA)
- Mechanical Engineering (AREA)
Description
2 移動体、搬送テーブル
23 取付部、二次側支持ブラケット
3 リニアモータ
31 一次側磁極部
32 二次側磁極部
4 リニアガイド
41 ガイド部、ガイドレール
42 被ガイド部、ガイドブロック
5 負荷軽減機構
Claims (3)
- 固定部と、
前記固定部に対して移動可能に設けられた可動部と、
前記固定部と前記可動部との間で構成される一対のリニアモータと、
前記可動部の移動方向を規定するリニアガイドと、
負荷軽減機構と、を備え、
前記リニアモータは、一次側磁極部と二次側磁極部とにより一組を構成し、当該一次側磁極部と二次側磁極部は、前記可動部を前記固定部に対して移動可能となるように対向配置され、
前記可動部は、
被搬送物を搬送することが可能な移動体と、
当該移動体における前記可動部の移動方向と直交する幅方向の両端部に分かれて位置する前記一次側磁極部または二次側磁極部のうち一方と、を備え、
前記固定部は前記一次側磁極部または二次側磁極部のうち他方を備え、
前記リニアガイド及び負荷軽減機構は、前記幅方向の両端部に分かれて位置し、
前記リニアガイドの直上位置または直下位置に前記負荷軽減機構を備え、
前記負荷軽減機構は、磁気反発力または磁気吸引力により前記可動部を上方に押圧することで、前記リニアガイドにかかる重量負荷を軽減する搬送装置。 - 前記固定部は、前記可動部を下方から支持する支持部を備え、
前記支持部は、前記可動部の移動方向を規定するための、長手方向に延び、前記リニアガイドの一部を構成するガイド部を備え、
前記可動部は、前記ガイド部に係合しつつ移動可能な、前記リニアガイドの一部を構成する被ガイド部を備え、
前記ガイド部及び被ガイド部は、前記固定部及び可動部の前記幅方向における両端部に分かれて位置し、
前記負荷軽減機構は前記ガイド部及び被ガイド部にかかる重量負荷を軽減するものであって、
前記可動部は、前記幅方向における両端部であり、前記ガイド部及び被ガイド部よりも前記幅方向における外側または内側に、前記一次側磁極部または二次側磁極部のいずれかを取り付けるための取付部を備える、請求項1に記載の搬送装置。 - 前記二次側磁極部は前記一次側磁極部に対向する位置に永久磁石を備える、請求項1または2に記載の搬送装置。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012182091A JP6156716B2 (ja) | 2012-08-21 | 2012-08-21 | 搬送装置 |
TW102129280A TWI574898B (zh) | 2012-08-21 | 2013-08-15 | Handling device |
US13/970,375 US9156632B2 (en) | 2012-08-21 | 2013-08-19 | Conveying apparatus |
KR1020130098333A KR102151460B1 (ko) | 2012-08-21 | 2013-08-20 | 반송 장치 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012182091A JP6156716B2 (ja) | 2012-08-21 | 2012-08-21 | 搬送装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2014042366A JP2014042366A (ja) | 2014-03-06 |
JP6156716B2 true JP6156716B2 (ja) | 2017-07-05 |
Family
ID=50147037
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012182091A Active JP6156716B2 (ja) | 2012-08-21 | 2012-08-21 | 搬送装置 |
Country Status (4)
Country | Link |
---|---|
US (1) | US9156632B2 (ja) |
JP (1) | JP6156716B2 (ja) |
KR (1) | KR102151460B1 (ja) |
TW (1) | TWI574898B (ja) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102011113000A1 (de) * | 2011-09-09 | 2013-03-14 | Weiss Gmbh | Transportvorrichtung |
JP6098923B2 (ja) * | 2012-12-27 | 2017-03-22 | シンフォニアテクノロジー株式会社 | 搬送装置 |
WO2014148434A1 (ja) * | 2013-03-22 | 2014-09-25 | 日立金属株式会社 | リニアモータ |
JP6266488B2 (ja) * | 2014-10-30 | 2018-01-24 | アズビル株式会社 | 温度管理装置、搬送装置、及び搬送台 |
JP2018001108A (ja) * | 2016-07-05 | 2018-01-11 | 日本電産コパル株式会社 | リニア振動モータ |
DE102016121674A1 (de) * | 2016-11-11 | 2018-05-17 | scia Systems GmbH | Vorrichtung zur Bearbeitung eines Bauteils, Verfahrwagen für eine solche Vorrichtung und Verfahren zum Betreiben derselben |
JP7066333B2 (ja) * | 2017-05-17 | 2022-05-13 | キヤノン株式会社 | 搬送システム、加工システム、物品の製造方法、搬送システムの制御方法及び可動機構 |
CN113166693B (zh) * | 2019-01-11 | 2024-08-23 | 日商乐华生命科學有限公司 | 无菌作业装置的驱动机构 |
CN110349895B (zh) * | 2019-06-28 | 2021-06-25 | 上海提牛机电设备有限公司 | 一种利用气缸移动的机构及晶圆传输系统 |
Family Cites Families (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1994001354A1 (en) * | 1992-07-07 | 1994-01-20 | Ebara Corporation | Magnetically levitated carrying apparatus |
JPH09140118A (ja) * | 1995-09-12 | 1997-05-27 | Fanuc Ltd | リニアモータ駆動型の送り装置 |
JPH09322518A (ja) * | 1996-05-28 | 1997-12-12 | Mitsubishi Electric Corp | 永久磁石使用同期形リニアモータ |
JP3818342B2 (ja) * | 1997-10-06 | 2006-09-06 | 株式会社安川電機 | リニアモータ |
JP4094769B2 (ja) * | 1999-05-18 | 2008-06-04 | 日本トムソン株式会社 | 可動コイル型リニアモータを内蔵したスライド装置 |
JP2001025229A (ja) * | 1999-07-06 | 2001-01-26 | Nippon Thompson Co Ltd | 可動コイル型リニアモータを内蔵したスライド装置 |
JP2001298941A (ja) * | 2000-04-11 | 2001-10-26 | Sodick Co Ltd | リニアモータ駆動の軸送り装置 |
KR100399423B1 (ko) * | 2000-07-28 | 2003-09-29 | 주식회사 앤디텍 | 선형 모터 |
WO2002043228A1 (fr) * | 2000-11-21 | 2002-05-30 | Kabushiki Kaisha Yaskawa Denki | Moteur lineaire |
JP2003022960A (ja) * | 2001-07-09 | 2003-01-24 | Canon Inc | ステージ装置及びその駆動方法 |
KR100446443B1 (ko) * | 2001-12-17 | 2004-09-01 | 미래산업 주식회사 | 핸들러의 반도체 소자 이송장치 |
US6798088B2 (en) * | 2002-11-07 | 2004-09-28 | Industrial Technology Research Institute | Structure for symmetrically disposed linear motor operated tool machine |
JP2005209670A (ja) * | 2004-01-20 | 2005-08-04 | Canon Inc | 磁気浮上装置 |
KR20070021183A (ko) * | 2004-06-11 | 2007-02-22 | 가부시키가이샤 야스카와덴키 | 무빙 마그넷형 리니어 슬라이더 |
JP2006034017A (ja) * | 2004-07-16 | 2006-02-02 | Shin Etsu Chem Co Ltd | 工作機械用リニアモータ |
DE102005007489A1 (de) * | 2005-02-17 | 2006-08-24 | Siemens Ag | Holzbearbeitungsmaschine mit linearem Direktantrieb |
CN101278467B (zh) * | 2005-09-30 | 2010-09-01 | Thk株式会社 | 线性同步电动机以及线性电动机促动器 |
JP4886355B2 (ja) * | 2006-05-02 | 2012-02-29 | 日本トムソン株式会社 | 可動マグネット型リニアモータを内蔵したスライド装置 |
US9524896B2 (en) * | 2006-09-19 | 2016-12-20 | Brooks Automation Inc. | Apparatus and methods for transporting and processing substrates |
JP5250267B2 (ja) * | 2008-01-11 | 2013-07-31 | ヤマハ発動機株式会社 | リニアモータ及び部品移載装置 |
JP5419384B2 (ja) * | 2008-05-20 | 2014-02-19 | 東京エレクトロン株式会社 | 真空処理装置 |
JP5470770B2 (ja) * | 2008-08-07 | 2014-04-16 | シンフォニアテクノロジー株式会社 | 真空処理装置 |
JP5549062B2 (ja) * | 2008-08-07 | 2014-07-16 | シンフォニアテクノロジー株式会社 | 搬送装置 |
JP5426180B2 (ja) * | 2009-01-20 | 2014-02-26 | 富士機械製造株式会社 | リニアモータ |
KR20100090406A (ko) * | 2009-02-06 | 2010-08-16 | 한국철도기술연구원 | 추진 및 안내 일체형 튜브 운송 시스템 |
EP2633946B1 (en) * | 2010-10-26 | 2016-04-06 | Murata Machinery, Ltd. | Conveyance system |
US8794426B2 (en) * | 2011-03-31 | 2014-08-05 | Ats Automation Tooling Systems Inc. | Pallet-based position adjustment system and method |
-
2012
- 2012-08-21 JP JP2012182091A patent/JP6156716B2/ja active Active
-
2013
- 2013-08-15 TW TW102129280A patent/TWI574898B/zh active
- 2013-08-19 US US13/970,375 patent/US9156632B2/en not_active Expired - Fee Related
- 2013-08-20 KR KR1020130098333A patent/KR102151460B1/ko active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
KR102151460B1 (ko) | 2020-09-03 |
JP2014042366A (ja) | 2014-03-06 |
KR20140024818A (ko) | 2014-03-03 |
US20140054136A1 (en) | 2014-02-27 |
US9156632B2 (en) | 2015-10-13 |
TW201410568A (zh) | 2014-03-16 |
TWI574898B (zh) | 2017-03-21 |
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