JP5936174B2 - 天井走行車システム及び天井走行車システムでの移載制御方法 - Google Patents
天井走行車システム及び天井走行車システムでの移載制御方法 Download PDFInfo
- Publication number
- JP5936174B2 JP5936174B2 JP2014526819A JP2014526819A JP5936174B2 JP 5936174 B2 JP5936174 B2 JP 5936174B2 JP 2014526819 A JP2014526819 A JP 2014526819A JP 2014526819 A JP2014526819 A JP 2014526819A JP 5936174 B2 JP5936174 B2 JP 5936174B2
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- Prior art keywords
- overhead traveling
- traveling vehicle
- sensor
- local
- track
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67733—Overhead conveying
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/0407—Storage devices mechanical using stacker cranes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/0407—Storage devices mechanical using stacker cranes
- B65G1/0414—Storage devices mechanical using stacker cranes provided with satellite cars adapted to travel in storage racks
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B66—HOISTING; LIFTING; HAULING
- B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
- B66C13/00—Other constructional features or details
- B66C13/18—Control systems or devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B66—HOISTING; LIFTING; HAULING
- B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
- B66C19/00—Cranes comprising trolleys or crabs running on fixed or movable bridges or gantries
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67288—Monitoring of warpage, curvature, damage, defects or the like
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67736—Loading to or unloading from a conveyor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0297—Wafer cassette
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Automation & Control Theory (AREA)
- Warehouses Or Storage Devices (AREA)
- Control And Safety Of Cranes (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Control Of Position, Course, Altitude, Or Attitude Of Moving Bodies (AREA)
- Electric Propulsion And Braking For Vehicles (AREA)
- Carriers, Traveling Bodies, And Overhead Traveling Cranes (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012165564 | 2012-07-26 | ||
JP2012165564 | 2012-07-26 | ||
PCT/JP2013/066700 WO2014017221A1 (ja) | 2012-07-26 | 2013-06-18 | 天井走行車システム及び天井走行車システムでの移載制御方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP5936174B2 true JP5936174B2 (ja) | 2016-06-15 |
JPWO2014017221A1 JPWO2014017221A1 (ja) | 2016-07-07 |
Family
ID=49997037
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2014526819A Active JP5936174B2 (ja) | 2012-07-26 | 2013-06-18 | 天井走行車システム及び天井走行車システムでの移載制御方法 |
Country Status (8)
Country | Link |
---|---|
US (1) | US10037908B2 (ko) |
EP (1) | EP2878552B1 (ko) |
JP (1) | JP5936174B2 (ko) |
KR (1) | KR101680271B1 (ko) |
CN (1) | CN104395207B (ko) |
SG (1) | SG11201407694VA (ko) |
TW (1) | TWI534056B (ko) |
WO (1) | WO2014017221A1 (ko) |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
PT2620391E (pt) * | 2012-01-30 | 2014-08-26 | Carefusion Germany 326 Gmbh | Método para retirar de armazenamento embalagens de medicamentos |
TWI520258B (zh) * | 2013-09-27 | 2016-02-01 | 華亞科技股份有限公司 | 起吊裝置及自動化搬運系統 |
CN106463442B (zh) * | 2014-06-19 | 2019-11-05 | 村田机械株式会社 | 载具的临时保管装置以及临时保管方法 |
WO2015194266A1 (ja) * | 2014-06-19 | 2015-12-23 | 村田機械株式会社 | キャリアの一時保管装置と保管方法 |
JP6256783B2 (ja) * | 2014-09-10 | 2018-01-10 | 村田機械株式会社 | 一時保管システムと、これを用いた搬送システム、及び一時保管方法 |
EP3388368B1 (en) * | 2015-12-08 | 2020-07-01 | Murata Machinery, Ltd. | Conveyance system |
SG11201804593PA (en) * | 2015-12-08 | 2018-06-28 | Murata Machinery Ltd | Conveyance system and conveyance method |
EP3424845B1 (en) * | 2016-03-03 | 2021-08-11 | Murata Machinery, Ltd. | Temporary storage system |
SG11201810030TA (en) * | 2016-05-20 | 2018-12-28 | Murata Machinery Ltd | Transport vehicle and transport method |
KR102020227B1 (ko) * | 2017-08-24 | 2019-09-10 | 세메스 주식회사 | 캐리어 이송 장치 및 방법 |
US10622236B2 (en) * | 2017-08-30 | 2020-04-14 | Taiwan Semiconductor Manufacturing Co., Ltd. | Apparatus and method for handling wafer carrier doors |
GB201803771D0 (en) * | 2018-03-09 | 2018-04-25 | Ocado Innovation Ltd | Transporting device position determining apparatus and method |
KR102080877B1 (ko) * | 2018-05-28 | 2020-02-24 | 세메스 주식회사 | 레이스웨이 유닛 및 이를 갖는 oht |
US20220013392A1 (en) * | 2018-10-29 | 2022-01-13 | Murata Machinery, Ltd. | Ceiling traveling vehicle, ceiling traveling vehicle system, and method for detecting obstacle |
CN113371614B (zh) * | 2020-03-10 | 2023-01-31 | 长鑫存储技术有限公司 | 自动化天车防撞系统及方法 |
CN115028103B (zh) * | 2022-06-09 | 2024-01-09 | 长鑫存储技术有限公司 | 一种装载装置及自动物料搬送系统 |
JP2024017825A (ja) | 2022-07-28 | 2024-02-08 | 株式会社ダイフク | 物品搬送設備 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005294614A (ja) * | 2004-04-01 | 2005-10-20 | Asyst Shinko Inc | 警報および通報装置 |
JP2006298567A (ja) * | 2005-04-20 | 2006-11-02 | Murata Mach Ltd | 天井走行車 |
JP2009029529A (ja) * | 2007-07-24 | 2009-02-12 | Hokuyo Automatic Co | 搬送台車及び光測距装置 |
JP2011086733A (ja) * | 2009-10-14 | 2011-04-28 | Sinfonia Technology Co Ltd | キャリア移載促進装置 |
JP2011114406A (ja) * | 2009-11-24 | 2011-06-09 | Sony Corp | 撮像装置、撮像方法およびプログラム |
JP2012111635A (ja) * | 2010-11-04 | 2012-06-14 | Muratec Automation Co Ltd | 搬送システム及び搬送方法 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4465415B2 (ja) | 2000-03-15 | 2010-05-19 | ムラテックオートメーション株式会社 | 天井走行搬送装置 |
JP2007331906A (ja) * | 2006-06-16 | 2007-12-27 | Murata Mach Ltd | 天井走行車システム |
JP4688824B2 (ja) * | 2007-01-12 | 2011-05-25 | 村田機械株式会社 | 天井走行車システム及び天井走行車システムの周囲の処理装置の搬出入方法 |
KR101015225B1 (ko) * | 2008-07-07 | 2011-02-18 | 세메스 주식회사 | 기판 처리장치 및 이의 기판 이송 방법 |
JP4807424B2 (ja) * | 2009-03-17 | 2011-11-02 | 村田機械株式会社 | 天井搬送システムと物品の移載方法 |
JP5429570B2 (ja) * | 2010-03-08 | 2014-02-26 | 株式会社ダイフク | 物品搬送設備 |
JP5382470B2 (ja) * | 2010-11-04 | 2014-01-08 | 村田機械株式会社 | 搬送システム及び搬送方法 |
-
2013
- 2013-06-18 JP JP2014526819A patent/JP5936174B2/ja active Active
- 2013-06-18 WO PCT/JP2013/066700 patent/WO2014017221A1/ja active Application Filing
- 2013-06-18 EP EP13822626.1A patent/EP2878552B1/en active Active
- 2013-06-18 CN CN201380034416.9A patent/CN104395207B/zh active Active
- 2013-06-18 SG SG11201407694VA patent/SG11201407694VA/en unknown
- 2013-06-18 US US14/412,225 patent/US10037908B2/en active Active
- 2013-06-18 KR KR1020147034264A patent/KR101680271B1/ko active IP Right Grant
- 2013-07-24 TW TW102126433A patent/TWI534056B/zh active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005294614A (ja) * | 2004-04-01 | 2005-10-20 | Asyst Shinko Inc | 警報および通報装置 |
JP2006298567A (ja) * | 2005-04-20 | 2006-11-02 | Murata Mach Ltd | 天井走行車 |
JP2009029529A (ja) * | 2007-07-24 | 2009-02-12 | Hokuyo Automatic Co | 搬送台車及び光測距装置 |
JP2011086733A (ja) * | 2009-10-14 | 2011-04-28 | Sinfonia Technology Co Ltd | キャリア移載促進装置 |
JP2011114406A (ja) * | 2009-11-24 | 2011-06-09 | Sony Corp | 撮像装置、撮像方法およびプログラム |
JP2012111635A (ja) * | 2010-11-04 | 2012-06-14 | Muratec Automation Co Ltd | 搬送システム及び搬送方法 |
Also Published As
Publication number | Publication date |
---|---|
EP2878552B1 (en) | 2021-01-13 |
US20150170946A1 (en) | 2015-06-18 |
EP2878552A4 (en) | 2016-03-09 |
CN104395207A (zh) | 2015-03-04 |
TW201412618A (zh) | 2014-04-01 |
JPWO2014017221A1 (ja) | 2016-07-07 |
KR101680271B1 (ko) | 2016-11-28 |
SG11201407694VA (en) | 2014-12-30 |
TWI534056B (zh) | 2016-05-21 |
EP2878552A1 (en) | 2015-06-03 |
US10037908B2 (en) | 2018-07-31 |
WO2014017221A1 (ja) | 2014-01-30 |
KR20150016315A (ko) | 2015-02-11 |
CN104395207B (zh) | 2016-07-06 |
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