JP5936174B2 - 天井走行車システム及び天井走行車システムでの移載制御方法 - Google Patents

天井走行車システム及び天井走行車システムでの移載制御方法 Download PDF

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JP5936174B2
JP5936174B2 JP2014526819A JP2014526819A JP5936174B2 JP 5936174 B2 JP5936174 B2 JP 5936174B2 JP 2014526819 A JP2014526819 A JP 2014526819A JP 2014526819 A JP2014526819 A JP 2014526819A JP 5936174 B2 JP5936174 B2 JP 5936174B2
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Prior art keywords
overhead traveling
traveling vehicle
sensor
local
track
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JP2014526819A
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English (en)
Japanese (ja)
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JPWO2014017221A1 (ja
Inventor
達司 太田
達司 太田
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Murata Machinery Ltd
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Murata Machinery Ltd
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67733—Overhead conveying
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B65G1/0407—Storage devices mechanical using stacker cranes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B65G1/0407—Storage devices mechanical using stacker cranes
    • B65G1/0414—Storage devices mechanical using stacker cranes provided with satellite cars adapted to travel in storage racks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B66—HOISTING; LIFTING; HAULING
    • B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
    • B66C13/00—Other constructional features or details
    • B66C13/18—Control systems or devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B66—HOISTING; LIFTING; HAULING
    • B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
    • B66C19/00—Cranes comprising trolleys or crabs running on fixed or movable bridges or gantries
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67288—Monitoring of warpage, curvature, damage, defects or the like
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67736—Loading to or unloading from a conveyor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0297—Wafer cassette

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Automation & Control Theory (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Control And Safety Of Cranes (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Control Of Position, Course, Altitude, Or Attitude Of Moving Bodies (AREA)
  • Electric Propulsion And Braking For Vehicles (AREA)
  • Carriers, Traveling Bodies, And Overhead Traveling Cranes (AREA)
JP2014526819A 2012-07-26 2013-06-18 天井走行車システム及び天井走行車システムでの移載制御方法 Active JP5936174B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2012165564 2012-07-26
JP2012165564 2012-07-26
PCT/JP2013/066700 WO2014017221A1 (ja) 2012-07-26 2013-06-18 天井走行車システム及び天井走行車システムでの移載制御方法

Publications (2)

Publication Number Publication Date
JP5936174B2 true JP5936174B2 (ja) 2016-06-15
JPWO2014017221A1 JPWO2014017221A1 (ja) 2016-07-07

Family

ID=49997037

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014526819A Active JP5936174B2 (ja) 2012-07-26 2013-06-18 天井走行車システム及び天井走行車システムでの移載制御方法

Country Status (8)

Country Link
US (1) US10037908B2 (ko)
EP (1) EP2878552B1 (ko)
JP (1) JP5936174B2 (ko)
KR (1) KR101680271B1 (ko)
CN (1) CN104395207B (ko)
SG (1) SG11201407694VA (ko)
TW (1) TWI534056B (ko)
WO (1) WO2014017221A1 (ko)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
PT2620391E (pt) * 2012-01-30 2014-08-26 Carefusion Germany 326 Gmbh Método para retirar de armazenamento embalagens de medicamentos
TWI520258B (zh) * 2013-09-27 2016-02-01 華亞科技股份有限公司 起吊裝置及自動化搬運系統
CN106463442B (zh) * 2014-06-19 2019-11-05 村田机械株式会社 载具的临时保管装置以及临时保管方法
WO2015194266A1 (ja) * 2014-06-19 2015-12-23 村田機械株式会社 キャリアの一時保管装置と保管方法
JP6256783B2 (ja) * 2014-09-10 2018-01-10 村田機械株式会社 一時保管システムと、これを用いた搬送システム、及び一時保管方法
EP3388368B1 (en) * 2015-12-08 2020-07-01 Murata Machinery, Ltd. Conveyance system
SG11201804593PA (en) * 2015-12-08 2018-06-28 Murata Machinery Ltd Conveyance system and conveyance method
EP3424845B1 (en) * 2016-03-03 2021-08-11 Murata Machinery, Ltd. Temporary storage system
SG11201810030TA (en) * 2016-05-20 2018-12-28 Murata Machinery Ltd Transport vehicle and transport method
KR102020227B1 (ko) * 2017-08-24 2019-09-10 세메스 주식회사 캐리어 이송 장치 및 방법
US10622236B2 (en) * 2017-08-30 2020-04-14 Taiwan Semiconductor Manufacturing Co., Ltd. Apparatus and method for handling wafer carrier doors
GB201803771D0 (en) * 2018-03-09 2018-04-25 Ocado Innovation Ltd Transporting device position determining apparatus and method
KR102080877B1 (ko) * 2018-05-28 2020-02-24 세메스 주식회사 레이스웨이 유닛 및 이를 갖는 oht
US20220013392A1 (en) * 2018-10-29 2022-01-13 Murata Machinery, Ltd. Ceiling traveling vehicle, ceiling traveling vehicle system, and method for detecting obstacle
CN113371614B (zh) * 2020-03-10 2023-01-31 长鑫存储技术有限公司 自动化天车防撞系统及方法
CN115028103B (zh) * 2022-06-09 2024-01-09 长鑫存储技术有限公司 一种装载装置及自动物料搬送系统
JP2024017825A (ja) 2022-07-28 2024-02-08 株式会社ダイフク 物品搬送設備

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005294614A (ja) * 2004-04-01 2005-10-20 Asyst Shinko Inc 警報および通報装置
JP2006298567A (ja) * 2005-04-20 2006-11-02 Murata Mach Ltd 天井走行車
JP2009029529A (ja) * 2007-07-24 2009-02-12 Hokuyo Automatic Co 搬送台車及び光測距装置
JP2011086733A (ja) * 2009-10-14 2011-04-28 Sinfonia Technology Co Ltd キャリア移載促進装置
JP2011114406A (ja) * 2009-11-24 2011-06-09 Sony Corp 撮像装置、撮像方法およびプログラム
JP2012111635A (ja) * 2010-11-04 2012-06-14 Muratec Automation Co Ltd 搬送システム及び搬送方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4465415B2 (ja) 2000-03-15 2010-05-19 ムラテックオートメーション株式会社 天井走行搬送装置
JP2007331906A (ja) * 2006-06-16 2007-12-27 Murata Mach Ltd 天井走行車システム
JP4688824B2 (ja) * 2007-01-12 2011-05-25 村田機械株式会社 天井走行車システム及び天井走行車システムの周囲の処理装置の搬出入方法
KR101015225B1 (ko) * 2008-07-07 2011-02-18 세메스 주식회사 기판 처리장치 및 이의 기판 이송 방법
JP4807424B2 (ja) * 2009-03-17 2011-11-02 村田機械株式会社 天井搬送システムと物品の移載方法
JP5429570B2 (ja) * 2010-03-08 2014-02-26 株式会社ダイフク 物品搬送設備
JP5382470B2 (ja) * 2010-11-04 2014-01-08 村田機械株式会社 搬送システム及び搬送方法

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005294614A (ja) * 2004-04-01 2005-10-20 Asyst Shinko Inc 警報および通報装置
JP2006298567A (ja) * 2005-04-20 2006-11-02 Murata Mach Ltd 天井走行車
JP2009029529A (ja) * 2007-07-24 2009-02-12 Hokuyo Automatic Co 搬送台車及び光測距装置
JP2011086733A (ja) * 2009-10-14 2011-04-28 Sinfonia Technology Co Ltd キャリア移載促進装置
JP2011114406A (ja) * 2009-11-24 2011-06-09 Sony Corp 撮像装置、撮像方法およびプログラム
JP2012111635A (ja) * 2010-11-04 2012-06-14 Muratec Automation Co Ltd 搬送システム及び搬送方法

Also Published As

Publication number Publication date
EP2878552B1 (en) 2021-01-13
US20150170946A1 (en) 2015-06-18
EP2878552A4 (en) 2016-03-09
CN104395207A (zh) 2015-03-04
TW201412618A (zh) 2014-04-01
JPWO2014017221A1 (ja) 2016-07-07
KR101680271B1 (ko) 2016-11-28
SG11201407694VA (en) 2014-12-30
TWI534056B (zh) 2016-05-21
EP2878552A1 (en) 2015-06-03
US10037908B2 (en) 2018-07-31
WO2014017221A1 (ja) 2014-01-30
KR20150016315A (ko) 2015-02-11
CN104395207B (zh) 2016-07-06

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