JP5891800B2 - ガラスの研磨方法 - Google Patents
ガラスの研磨方法 Download PDFInfo
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- JP5891800B2 JP5891800B2 JP2012004037A JP2012004037A JP5891800B2 JP 5891800 B2 JP5891800 B2 JP 5891800B2 JP 2012004037 A JP2012004037 A JP 2012004037A JP 2012004037 A JP2012004037 A JP 2012004037A JP 5891800 B2 JP5891800 B2 JP 5891800B2
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- glass
- polishing
- abrasive
- water
- component
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- 238000005498 polishing Methods 0.000 title claims description 113
- 239000011521 glass Substances 0.000 title claims description 84
- 238000000034 method Methods 0.000 title claims description 18
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 53
- 239000002351 wastewater Substances 0.000 claims description 40
- 239000012528 membrane Substances 0.000 claims description 27
- 239000003795 chemical substances by application Substances 0.000 claims description 18
- 229910000420 cerium oxide Inorganic materials 0.000 claims description 12
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 claims description 12
- 239000005303 fluorophosphate glass Substances 0.000 claims description 8
- 238000000108 ultra-filtration Methods 0.000 claims description 8
- 239000005365 phosphate glass Substances 0.000 claims description 7
- 238000004140 cleaning Methods 0.000 claims description 5
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims description 4
- 239000010922 glass waste Substances 0.000 claims description 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 2
- 239000002223 garnet Substances 0.000 claims description 2
- 238000007865 diluting Methods 0.000 claims 1
- 239000012510 hollow fiber Substances 0.000 description 19
- 238000011084 recovery Methods 0.000 description 15
- 239000000725 suspension Substances 0.000 description 15
- 239000002245 particle Substances 0.000 description 12
- 239000003082 abrasive agent Substances 0.000 description 5
- 239000003513 alkali Substances 0.000 description 4
- 239000003792 electrolyte Substances 0.000 description 4
- 238000001914 filtration Methods 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 238000012423 maintenance Methods 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 239000006061 abrasive grain Substances 0.000 description 2
- 239000011575 calcium Substances 0.000 description 2
- 239000011362 coarse particle Substances 0.000 description 2
- 239000012141 concentrate Substances 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000000706 filtrate Substances 0.000 description 2
- 239000011777 magnesium Substances 0.000 description 2
- 230000001172 regenerating effect Effects 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 238000000638 solvent extraction Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 1
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 238000005054 agglomeration Methods 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 229910052788 barium Inorganic materials 0.000 description 1
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 238000005119 centrifugation Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 230000001186 cumulative effect Effects 0.000 description 1
- 239000002270 dispersing agent Substances 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- GPRLSGONYQIRFK-UHFFFAOYSA-N hydron Chemical compound [H+] GPRLSGONYQIRFK-UHFFFAOYSA-N 0.000 description 1
- 239000002440 industrial waste Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 229910052744 lithium Inorganic materials 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 239000012466 permeate Substances 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 239000005368 silicate glass Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 230000003381 solubilizing effect Effects 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910052712 strontium Inorganic materials 0.000 description 1
- CIOAGBVUUVVLOB-UHFFFAOYSA-N strontium atom Chemical compound [Sr] CIOAGBVUUVVLOB-UHFFFAOYSA-N 0.000 description 1
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Description
Claims (5)
- 粒子状の研磨剤を用いてリン酸ガラスおよびフツリン酸ガラスのいずれかのガラスを研磨した際に発生する排水もしくは前記ガラスの研磨に用いるガラス研磨装置の洗浄および前記ガラスの研磨に用いる研磨パッドのドレッシングのいずれかの作業の際に発生する排水のいずれかの研磨排水を前記研磨剤が濃縮された濃縮水と前記ガラスの成分を含有する濾過水とに限外濾過膜を用いて分離する濃縮工程と、
前記濃縮水のガラス屑を取り除くことなく前記ガラスの研磨に用いる再利用工程と、
を具備することを特徴とするガラスの研磨方法。 - 前記濾過水は、イオン化したガラス成分を含有することを特徴とする請求項1に記載のガラスの研磨方法。
- 前記研磨剤は水中での分散性が高い良分散性であることを特徴とする請求項1または請求項2に記載のガラスの研磨方法。
- 前記研磨剤は酸化セリウム系、ジルコニア系、アルミナ系およびガーネット系のいずれかであることを特徴とする請求項1ないし請求項3のいずれか1項に記載のガラスの研磨方法。
- 前記濃縮工程の前に、前記排水を水で希釈するガラス成分の濃度調整工程を備えることを特徴とする請求項1に記載のガラスの研磨方法。
Priority Applications (1)
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JP2012004037A JP5891800B2 (ja) | 2012-01-12 | 2012-01-12 | ガラスの研磨方法 |
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JP2012004037A JP5891800B2 (ja) | 2012-01-12 | 2012-01-12 | ガラスの研磨方法 |
Publications (2)
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JP2013141737A JP2013141737A (ja) | 2013-07-22 |
JP5891800B2 true JP5891800B2 (ja) | 2016-03-23 |
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JP2012004037A Active JP5891800B2 (ja) | 2012-01-12 | 2012-01-12 | ガラスの研磨方法 |
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Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
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CN109366343B (zh) * | 2018-11-20 | 2023-08-08 | 辽宁科技大学 | 一种磁性磨料筛分、过滤、回收装置及方法 |
WO2020145121A1 (ja) * | 2019-01-10 | 2020-07-16 | コニカミノルタ株式会社 | 研磨剤の再生方法及び研磨剤リサイクル処理システム |
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JP3341601B2 (ja) * | 1996-10-18 | 2002-11-05 | 日本電気株式会社 | 研磨剤の回収再利用方法および装置 |
JP2006190890A (ja) * | 2005-01-07 | 2006-07-20 | Fuji Photo Film Co Ltd | 研磨液及びそれを用いた研磨方法 |
JP5016826B2 (ja) * | 2006-01-30 | 2012-09-05 | Hoya株式会社 | 成形用ガラス素材の製造方法、ガラス素材、及びガラス光学素子の製造方法 |
JP5163078B2 (ja) * | 2007-11-29 | 2013-03-13 | 株式会社Sumco | 研磨装置とその方法 |
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