JP5852437B2 - デュアルプルーフマスを有するｍｅｍｓセンサ - Google Patents

デュアルプルーフマスを有するｍｅｍｓセンサ Download PDF

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Publication number
JP5852437B2
JP5852437B2 JP2011286686A JP2011286686A JP5852437B2 JP 5852437 B2 JP5852437 B2 JP 5852437B2 JP 2011286686 A JP2011286686 A JP 2011286686A JP 2011286686 A JP2011286686 A JP 2011286686A JP 5852437 B2 JP5852437 B2 JP 5852437B2
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movable element
length
substrate
axis
disposed
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Japanese (ja)
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JP2012154919A5 (enExample
JP2012154919A (ja
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シー．マクニール アンドリュー
シー．マクニール アンドリュー
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NXP USA Inc
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NXP USA Inc
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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0831—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type having the pivot axis between the longitudinal ends of the mass, e.g. see-saw configuration
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0837—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being suspended so as to only allow movement perpendicular to the plane of the substrate, i.e. z-axis sensor

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Micromachines (AREA)
JP2011286686A 2011-01-24 2011-12-27 デュアルプルーフマスを有するｍｅｍｓセンサ Active JP5852437B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US13/012,671 US8539836B2 (en) 2011-01-24 2011-01-24 MEMS sensor with dual proof masses
US13/012,671 2011-01-24

Publications (3)

Publication Number Publication Date
JP2012154919A JP2012154919A (ja) 2012-08-16
JP2012154919A5 JP2012154919A5 (enExample) 2015-02-05
JP5852437B2 true JP5852437B2 (ja) 2016-02-03

Family

ID=45470465

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011286686A Active JP5852437B2 (ja) 2011-01-24 2011-12-27 デュアルプルーフマスを有するｍｅｍｓセンサ

Country Status (4)

Country Link
US (1) US8539836B2 (enExample)
EP (1) EP2479579B1 (enExample)
JP (1) JP5852437B2 (enExample)
CN (1) CN102608354B (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10663480B2 (en) 2017-03-27 2020-05-26 Seiko Epson Corporation Physical quantity sensor, electronic apparatus, and vehicle
JP2020187118A (ja) * 2019-05-15 2020-11-19 株式会社村田製作所 ロバストなｚ軸加速度センサ
US10850975B2 (en) 2017-03-27 2020-12-01 Seiko Epson Corporation Physical quantity sensor manufacturing method, physical quantity sensor, electronic device, and vehicle

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US9290067B2 (en) * 2012-08-30 2016-03-22 Freescale Semiconductor, Inc. Pressure sensor with differential capacitive output
US9470709B2 (en) * 2013-01-28 2016-10-18 Analog Devices, Inc. Teeter totter accelerometer with unbalanced mass
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JP5783201B2 (ja) * 2013-03-27 2015-09-24 株式会社デンソー 容量式物理量センサ
JP5783222B2 (ja) * 2013-03-27 2015-09-24 株式会社デンソー 加速度センサ
JP2014190807A (ja) * 2013-03-27 2014-10-06 Denso Corp 加速度センサ
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WO2014156119A1 (ja) * 2013-03-27 2014-10-02 株式会社デンソー 物理量センサ
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US8973439B1 (en) * 2013-12-23 2015-03-10 Invensense, Inc. MEMS accelerometer with proof masses moving in anti-phase direction normal to the plane of the substrate
WO2015149331A1 (zh) 2014-04-03 2015-10-08 台湾超微光学股份有限公司 光谱仪、光谱仪的波导片的制造方法及其结构
US10073113B2 (en) 2014-12-22 2018-09-11 Analog Devices, Inc. Silicon-based MEMS devices including wells embedded with high density metal
JP6464770B2 (ja) 2015-01-21 2019-02-06 株式会社デンソー 物理量センサおよびその製造方法
CN106153982B (zh) * 2015-04-03 2019-05-17 中芯国际集成电路制造(上海)有限公司 一种mems加速度传感器及其制作方法
US10078098B2 (en) 2015-06-23 2018-09-18 Analog Devices, Inc. Z axis accelerometer design with offset compensation
US9720012B2 (en) * 2015-07-21 2017-08-01 Nxp Usa, Inc. Multi-axis inertial sensor with dual mass and integrated damping structure
JP6468167B2 (ja) * 2015-11-03 2019-02-13 株式会社デンソー 力学量センサ
DE102016209241B4 (de) * 2016-05-27 2025-07-03 Robert Bosch Gmbh Mikromechanisches Bauteil für eine Drucksensorvorrichtung
JP6911444B2 (ja) 2017-03-27 2021-07-28 セイコーエプソン株式会社 物理量センサー、電子機器、および移動体
US20190049482A1 (en) * 2017-08-10 2019-02-14 Analog Devices, Inc. Differential z-axis resonant mems accelerometers and related methods
US10759656B2 (en) * 2017-09-29 2020-09-01 Apple Inc. MEMS sensor with dual pendulous proof masses
US10732196B2 (en) * 2017-11-30 2020-08-04 Invensense, Inc. Asymmetric out-of-plane accelerometer
US10895457B2 (en) 2018-03-08 2021-01-19 Analog Devices, Inc. Differential z-axis resonant accelerometry
DE102018213746A1 (de) * 2018-08-15 2020-02-20 Robert Bosch Gmbh Mikromechanischer Inertialsensor
US10816569B2 (en) 2018-09-07 2020-10-27 Analog Devices, Inc. Z axis accelerometer using variable vertical gaps
US11255873B2 (en) 2018-09-12 2022-02-22 Analog Devices, Inc. Increased sensitivity z-axis accelerometer
US11733263B2 (en) 2018-09-21 2023-08-22 Analog Devices, Inc. 3-axis accelerometer
US11099207B2 (en) 2018-10-25 2021-08-24 Analog Devices, Inc. Low-noise multi-axis accelerometers and related methods
US11499987B2 (en) * 2020-06-17 2022-11-15 Nxp Usa, Inc. Z-axis inertial sensor with extended motion stops
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EP4116718A1 (en) * 2021-07-05 2023-01-11 Murata Manufacturing Co., Ltd. Seesaw accelerometer
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JP2023146375A (ja) * 2022-03-29 2023-10-12 セイコーエプソン株式会社 物理量センサー及び慣性計測装置
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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10663480B2 (en) 2017-03-27 2020-05-26 Seiko Epson Corporation Physical quantity sensor, electronic apparatus, and vehicle
US10850975B2 (en) 2017-03-27 2020-12-01 Seiko Epson Corporation Physical quantity sensor manufacturing method, physical quantity sensor, electronic device, and vehicle
US11292714B2 (en) 2017-03-27 2022-04-05 Seiko Epson Corporation Physical quantity sensor manufacturing method, physical quantity sensor, electronic device, and vehicle
JP2020187118A (ja) * 2019-05-15 2020-11-19 株式会社村田製作所 ロバストなｚ軸加速度センサ

Also Published As

Publication number Publication date
EP2479579A1 (en) 2012-07-25
EP2479579B1 (en) 2014-06-04
US8539836B2 (en) 2013-09-24
US20120186347A1 (en) 2012-07-26
CN102608354A (zh) 2012-07-25
CN102608354B (zh) 2016-01-20
JP2012154919A (ja) 2012-08-16

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