JP2012154919A5 - - Google Patents

Download PDF

Info

Publication number
JP2012154919A5
JP2012154919A5 JP2011286686A JP2011286686A JP2012154919A5 JP 2012154919 A5 JP2012154919 A5 JP 2012154919A5 JP 2011286686 A JP2011286686 A JP 2011286686A JP 2011286686 A JP2011286686 A JP 2011286686A JP 2012154919 A5 JP2012154919 A5 JP 2012154919A5
Authority
JP
Japan
Prior art keywords
movable element
length
substrate
axis
disposed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2011286686A
Other languages
English (en)
Japanese (ja)
Other versions
JP5852437B2 (ja
JP2012154919A (ja
Filing date
Publication date
Priority claimed from US13/012,671 external-priority patent/US8539836B2/en
Application filed filed Critical
Publication of JP2012154919A publication Critical patent/JP2012154919A/ja
Publication of JP2012154919A5 publication Critical patent/JP2012154919A5/ja
Application granted granted Critical
Publication of JP5852437B2 publication Critical patent/JP5852437B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2011286686A 2011-01-24 2011-12-27 デュアルプルーフマスを有するｍｅｍｓセンサ Active JP5852437B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US13/012,671 US8539836B2 (en) 2011-01-24 2011-01-24 MEMS sensor with dual proof masses
US13/012,671 2011-01-24

Publications (3)

Publication Number Publication Date
JP2012154919A JP2012154919A (ja) 2012-08-16
JP2012154919A5 true JP2012154919A5 (enExample) 2015-02-05
JP5852437B2 JP5852437B2 (ja) 2016-02-03

Family

ID=45470465

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011286686A Active JP5852437B2 (ja) 2011-01-24 2011-12-27 デュアルプルーフマスを有するｍｅｍｓセンサ

Country Status (4)

Country Link
US (1) US8539836B2 (enExample)
EP (1) EP2479579B1 (enExample)
JP (1) JP5852437B2 (enExample)
CN (1) CN102608354B (enExample)

Families Citing this family (43)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9229026B2 (en) * 2011-04-13 2016-01-05 Northrop Grumman Guaidance and Electronics Company, Inc. Accelerometer systems and methods
CN104185792B (zh) 2012-01-12 2017-03-29 村田电子有限公司 加速度传感器结构及其使用
US9018937B2 (en) * 2012-01-17 2015-04-28 Honeywell International Inc. MEMS-based voltmeter
JP6002481B2 (ja) * 2012-07-06 2016-10-05 日立オートモティブシステムズ株式会社 慣性センサ
US9290067B2 (en) * 2012-08-30 2016-03-22 Freescale Semiconductor, Inc. Pressure sensor with differential capacitive output
US9470709B2 (en) * 2013-01-28 2016-10-18 Analog Devices, Inc. Teeter totter accelerometer with unbalanced mass
US9297825B2 (en) * 2013-03-05 2016-03-29 Analog Devices, Inc. Tilt mode accelerometer with improved offset and noise performance
ITTO20130237A1 (it) 2013-03-22 2014-09-23 St Microelectronics Srl Struttura microelettromeccanica di rilevamento ad asse z ad elevata sensibilita', in particolare per un accelerometro mems
JP5783201B2 (ja) * 2013-03-27 2015-09-24 株式会社デンソー 容量式物理量センサ
JP5783222B2 (ja) * 2013-03-27 2015-09-24 株式会社デンソー 加速度センサ
JP2014190807A (ja) * 2013-03-27 2014-10-06 Denso Corp 加速度センサ
JP5900398B2 (ja) * 2013-03-27 2016-04-06 株式会社デンソー 加速度センサ
WO2014156119A1 (ja) * 2013-03-27 2014-10-02 株式会社デンソー 物理量センサ
JP6146566B2 (ja) * 2013-08-06 2017-06-14 セイコーエプソン株式会社 物理量センサー、電子機器、および移動体
US8973439B1 (en) * 2013-12-23 2015-03-10 Invensense, Inc. MEMS accelerometer with proof masses moving in anti-phase direction normal to the plane of the substrate
WO2015149331A1 (zh) 2014-04-03 2015-10-08 台湾超微光学股份有限公司 光谱仪、光谱仪的波导片的制造方法及其结构
US10073113B2 (en) 2014-12-22 2018-09-11 Analog Devices, Inc. Silicon-based MEMS devices including wells embedded with high density metal
JP6464770B2 (ja) 2015-01-21 2019-02-06 株式会社デンソー 物理量センサおよびその製造方法
CN106153982B (zh) * 2015-04-03 2019-05-17 中芯国际集成电路制造(上海)有限公司 一种mems加速度传感器及其制作方法
US10078098B2 (en) 2015-06-23 2018-09-18 Analog Devices, Inc. Z axis accelerometer design with offset compensation
US9720012B2 (en) * 2015-07-21 2017-08-01 Nxp Usa, Inc. Multi-axis inertial sensor with dual mass and integrated damping structure
JP6468167B2 (ja) * 2015-11-03 2019-02-13 株式会社デンソー 力学量センサ
DE102016209241B4 (de) * 2016-05-27 2025-07-03 Robert Bosch Gmbh Mikromechanisches Bauteil für eine Drucksensorvorrichtung
JP6816603B2 (ja) 2017-03-27 2021-01-20 セイコーエプソン株式会社 物理量センサー、電子機器、および移動体
JP6911444B2 (ja) 2017-03-27 2021-07-28 セイコーエプソン株式会社 物理量センサー、電子機器、および移動体
JP6897224B2 (ja) 2017-03-27 2021-06-30 セイコーエプソン株式会社 物理量センサー、電子機器、および移動体
US20190049482A1 (en) * 2017-08-10 2019-02-14 Analog Devices, Inc. Differential z-axis resonant mems accelerometers and related methods
US10759656B2 (en) * 2017-09-29 2020-09-01 Apple Inc. MEMS sensor with dual pendulous proof masses
US10732196B2 (en) * 2017-11-30 2020-08-04 Invensense, Inc. Asymmetric out-of-plane accelerometer
US10895457B2 (en) 2018-03-08 2021-01-19 Analog Devices, Inc. Differential z-axis resonant accelerometry
DE102018213746A1 (de) * 2018-08-15 2020-02-20 Robert Bosch Gmbh Mikromechanischer Inertialsensor
US10816569B2 (en) 2018-09-07 2020-10-27 Analog Devices, Inc. Z axis accelerometer using variable vertical gaps
US11255873B2 (en) 2018-09-12 2022-02-22 Analog Devices, Inc. Increased sensitivity z-axis accelerometer
US11733263B2 (en) 2018-09-21 2023-08-22 Analog Devices, Inc. 3-axis accelerometer
US11099207B2 (en) 2018-10-25 2021-08-24 Analog Devices, Inc. Low-noise multi-axis accelerometers and related methods
JP6870761B2 (ja) * 2019-05-15 2021-05-12 株式会社村田製作所 ロバストなｚ軸加速度センサ
US11499987B2 (en) * 2020-06-17 2022-11-15 Nxp Usa, Inc. Z-axis inertial sensor with extended motion stops
WO2022133312A1 (en) 2020-12-18 2022-06-23 Analog Devices, Inc. Accelerometer with translational motion of masses
EP4116717B1 (en) 2021-07-05 2024-10-23 Murata Manufacturing Co., Ltd. Accelerometer with two seesaws
EP4116718A1 (en) * 2021-07-05 2023-01-11 Murata Manufacturing Co., Ltd. Seesaw accelerometer
EP4141453B1 (en) * 2021-08-25 2024-04-03 Murata Manufacturing Co., Ltd. Seesaw accelerometer
JP2023146375A (ja) * 2022-03-29 2023-10-12 セイコーエプソン株式会社 物理量センサー及び慣性計測装置
DE102024204437A1 (de) 2024-05-14 2025-11-20 Robert Bosch Gesellschaft mit beschränkter Haftung Mikroelektromechanisches Sensorbauteil und mikroelektromechanischer Inertialsensor

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5331853A (en) 1991-02-08 1994-07-26 Alliedsignal Inc. Micromachined rate and acceleration sensor
US5488862A (en) 1993-10-18 1996-02-06 Armand P. Neukermans Monolithic silicon rate-gyro with integrated sensors
AU1965495A (en) * 1994-03-10 1995-09-25 Iskra Instrumenti Otoce, D.O.O. Measuring instrument with eccentrically positioned coil
US6651500B2 (en) 2001-10-03 2003-11-25 Litton Systems, Inc. Micromachined silicon tuned counterbalanced accelerometer-gyro with quadrature nulling
FI119299B (fi) * 2005-06-17 2008-09-30 Vti Technologies Oy Menetelmä kapasitiivisen kiihtyvyysanturin valmistamiseksi ja kapasitiivinen kiihtyvyysanturi
US7624638B2 (en) * 2006-11-09 2009-12-01 Mitsubishi Electric Corporation Electrostatic capacitance type acceleration sensor
WO2008133183A1 (ja) 2007-04-20 2008-11-06 Alps Electric Co., Ltd. 静電容量型加速度センサ
US8136400B2 (en) 2007-11-15 2012-03-20 Physical Logic Ag Accelerometer
DE102008017156A1 (de) * 2008-04-03 2009-10-08 Continental Teves Ag & Co. Ohg Mikromechanischer Beschleunigungssensor
DE102008001442A1 (de) * 2008-04-29 2009-11-05 Robert Bosch Gmbh Mikromechanisches Bauelement und Verfahren zum Betrieb eines mikromechanischen Bauelements
DE102008040525B4 (de) * 2008-07-18 2017-05-24 Robert Bosch Gmbh Mikromechanisches Sensorelement
US8020443B2 (en) * 2008-10-30 2011-09-20 Freescale Semiconductor, Inc. Transducer with decoupled sensing in mutually orthogonal directions
US20110203373A1 (en) * 2008-11-13 2011-08-25 Mitsubishi Electric Corporation Acceleration sensor
US8205498B2 (en) * 2008-11-18 2012-06-26 Industrial Technology Research Institute Multi-axis capacitive accelerometer
DE102009000594A1 (de) * 2009-02-04 2010-08-05 Robert Bosch Gmbh Beschleunigungssensor und Verfahren zum Betreiben eines Beschleunigungssensors
JP5426906B2 (ja) 2009-03-10 2014-02-26 パナソニック株式会社 加速度センサ
JP2010210432A (ja) * 2009-03-10 2010-09-24 Panasonic Electric Works Co Ltd 加速度センサの製造方法及びその製造方法で製造された加速度センサ
US8220330B2 (en) * 2009-03-24 2012-07-17 Freescale Semiconductor, Inc. Vertically integrated MEMS sensor device with multi-stimulus sensing
JP2011022137A (ja) * 2009-06-15 2011-02-03 Rohm Co Ltd Ｍｅｍｓ装置及びその製造方法
DE102009029202B4 (de) * 2009-09-04 2017-05-24 Robert Bosch Gmbh Verfahren zum Herstellen eines mikromechanischen Systems
JP5527015B2 (ja) * 2010-05-26 2014-06-18 セイコーエプソン株式会社 素子構造体、慣性センサー、電子機器
JP5527019B2 (ja) * 2010-05-28 2014-06-18 セイコーエプソン株式会社 物理量センサーおよび電子機器
DE102010029645B4 (de) * 2010-06-02 2018-03-29 Robert Bosch Gmbh Mikromechanisches Bauelement mit einer Teststruktur zur Bestimmung der Schichtdicke einer Abstandsschicht und Verfahren zum Herstellen einer solchen Teststruktur

Similar Documents

Publication Publication Date Title
JP2012154919A5 (enExample)
JP2012152890A5 (enExample)
JP2012521565A5 (enExample)
JP5852437B2 (ja) デュアルプルーフマスを有するｍｅｍｓセンサ
JP5924521B2 (ja) ジグザグ形のねじりばねを有するｍｅｍｓセンサ
JP6366170B2 (ja) 多軸速度センサ
JP2010536036A5 (enExample)
CN106370889B (zh) 具有双重质量块和集成式阻尼结构的多轴惯性传感器
TWI642616B (zh) 具有動作限制器之微機電裝置
JP2010517014A5 (enExample)
JP2014182133A5 (enExample)
JP5148688B2 (ja) 加速度センサ
JP2011521797A5 (enExample)
TWI589512B (zh) 微機械構造及製造微機械構造的方法
CN106153087B (zh) 偏移抑制电极
JP2013213754A5 (enExample)
CN105371834B (zh) 检测质量块及采用该检测质量块的陀螺仪
JP2013238437A5 (enExample)
JP2008170402A (ja) 静電容量検出型の物理量センサ
JP2011209574A5 (enExample)
CN105731353A (zh) 微机电装置
US9891052B2 (en) Micromechanical gyroscope structure
JP2010190636A5 (enExample)
JP2014137298A5 (enExample)
WO2013190931A1 (ja) 回転角加速度測定装置