JP2014182133A5 - - Google Patents

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Publication number
JP2014182133A5
JP2014182133A5 JP2014051006A JP2014051006A JP2014182133A5 JP 2014182133 A5 JP2014182133 A5 JP 2014182133A5 JP 2014051006 A JP2014051006 A JP 2014051006A JP 2014051006 A JP2014051006 A JP 2014051006A JP 2014182133 A5 JP2014182133 A5 JP 2014182133A5
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JP
Japan
Prior art keywords
speed sensor
coupled
axis
spring structure
driving direction
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JP2014051006A
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English (en)
Japanese (ja)
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JP6366170B2 (ja
JP2014182133A (ja
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Priority claimed from US13/833,290 external-priority patent/US9506756B2/en
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Publication of JP2014182133A publication Critical patent/JP2014182133A/ja
Publication of JP2014182133A5 publication Critical patent/JP2014182133A5/ja
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Publication of JP6366170B2 publication Critical patent/JP6366170B2/ja
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JP2014051006A 2013-03-15 2014-03-14 多軸速度センサ Active JP6366170B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US13/833,290 2013-03-15
US13/833,290 US9506756B2 (en) 2013-03-15 2013-03-15 Multiple axis rate sensor

Publications (3)

Publication Number Publication Date
JP2014182133A JP2014182133A (ja) 2014-09-29
JP2014182133A5 true JP2014182133A5 (enExample) 2017-03-30
JP6366170B2 JP6366170B2 (ja) 2018-08-01

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Family Applications (1)

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JP2014051006A Active JP6366170B2 (ja) 2013-03-15 2014-03-14 多軸速度センサ

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US (1) US9506756B2 (enExample)
JP (1) JP6366170B2 (enExample)
CN (1) CN104049101B (enExample)

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DE102011056971A1 (de) * 2011-12-23 2013-06-27 Maxim Integrated Products, Inc. Mikromechanischer Coriolis-Drehratensensor
US9194704B2 (en) * 2013-03-13 2015-11-24 Freescale Semiconductor, Inc. Angular rate sensor having multiple axis sensing capability
TWI489111B (zh) * 2014-06-10 2015-06-21 Richtek Technology Corp 多微機電元件之訊號處理方法與適用此方法之複合微機電裝置
EP3034997B1 (en) * 2014-12-18 2020-12-16 RISE Research Institutes of Sweden AB Mems gyro
KR101776583B1 (ko) * 2015-07-01 2017-09-11 주식회사 신성씨앤티 멤스 자이로스코프에 사용되는 멤스 링크 기구
DE102015213469A1 (de) * 2015-07-17 2017-01-19 Robert Bosch Gmbh Drehratensensor mit mehrfacher Auswertung über Betrieb bei mehreren Frequenzen
US10809061B2 (en) * 2016-01-27 2020-10-20 Hitachi, Ltd. Vibratory gyroscope including a plurality of inertial bodies
US10126129B2 (en) * 2016-07-11 2018-11-13 Nxp Usa, Inc. Vibration and shock robust gyroscope
JP6571065B2 (ja) * 2016-12-08 2019-09-04 株式会社東芝 振動装置
US20180252526A1 (en) * 2017-03-06 2018-09-06 Nxp Usa, Inc. Mems device with in-plane quadrature compensation
DE102017216010A1 (de) * 2017-09-12 2019-03-14 Robert Bosch Gmbh Mikromechanische Drehraten-Sensoranordnung und entsprechendes Herstellungsverfahren
CN109696165A (zh) * 2017-10-20 2019-04-30 立锜科技股份有限公司 微机电装置
DE102017219933A1 (de) * 2017-11-09 2019-05-09 Robert Bosch Gmbh Drehratensensor mit einem eine Haupterstreckungsebene aufweisenden Substrat, Herstellungsverfahren für einen Drehratensensor
US11733263B2 (en) 2018-09-21 2023-08-22 Analog Devices, Inc. 3-axis accelerometer
JP6922961B2 (ja) * 2018-10-18 2021-08-18 株式会社村田製作所 回転運動検出用微小電気機械デバイス
US11448854B2 (en) 2019-02-21 2022-09-20 Alcon, Inc. Angle adjustment system
WO2020258177A1 (zh) * 2019-06-27 2020-12-30 瑞声声学科技(深圳)有限公司 一种差分谐振器及mems传感器
US11891297B2 (en) * 2019-07-05 2024-02-06 Aac Acoustic Technologies (Shenzhen) Co., Ltd. Motion control structure and actuator
CN110411347B (zh) * 2019-08-13 2021-02-23 安徽理工大学 数控机床工作台瞬时旋转中心的检测装置及其检测方法
DE102020202158A1 (de) * 2020-02-19 2021-08-19 Robert Bosch Gesellschaft mit beschränkter Haftung Mikromechanische Drehraten-Sensoranordnung, Drehraten-Sensorarray und entsprechendes Herstellungsverfahren
DE102020205372A1 (de) * 2020-04-28 2021-10-28 Robert Bosch Gesellschaft mit beschränkter Haftung Mikromechanisches Bauteil für einen Drehratensensor und entsprechendes Herstellungsverfahren
DE102020205369A1 (de) * 2020-04-28 2021-10-28 Robert Bosch Gesellschaft mit beschränkter Haftung Mikromechanisches Bauteil für einen Drehratensensor und entsprechendes Herstellungsverfahren
CN115812153A (zh) * 2020-06-08 2023-03-17 美国亚德诺半导体公司 应力释放mems陀螺仪
EP4162282A4 (en) 2020-06-08 2024-11-13 Analog Devices, Inc. TRAINING STRESS RELEASE AND DETECTION APPARATUS
US11519726B2 (en) 2020-06-19 2022-12-06 Analog Devices, Inc. Mechanism for selective coupling in microelectromechanical systems inertial sensors
US11698257B2 (en) 2020-08-24 2023-07-11 Analog Devices, Inc. Isotropic attenuated motion gyroscope
CN115727840B (zh) * 2021-08-31 2025-10-31 华为技术有限公司 惯性传感器和电子设备
DE102023204632A1 (de) * 2022-05-17 2023-11-23 Murata Manufacturing Co., Ltd. MEMS-Gyroskop, das Drehungen in einer Ebene erfasst
US12146742B2 (en) * 2022-06-13 2024-11-19 Commissariat A L'energie Atomique Et Aux Energies Alternatives Inertial navigation sensor with reduced footprint

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US6859751B2 (en) * 2001-12-17 2005-02-22 Milli Sensor Systems & Actuators, Inc. Planar inertial measurement units based on gyros and accelerometers with a common structure
US6837107B2 (en) * 2003-04-28 2005-01-04 Analog Devices, Inc. Micro-machined multi-sensor providing 1-axis of acceleration sensing and 2-axes of angular rate sensing
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US7168317B2 (en) * 2003-11-04 2007-01-30 Chung-Shan Institute Of Science And Technology Planar 3-axis inertial measurement unit
KR20090052832A (ko) * 2006-03-10 2009-05-26 콘티넨탈 테베스 아게 운트 코. 오하게 커플링 바를 구비한 회전 속도 센서
US7461552B2 (en) 2006-10-23 2008-12-09 Custom Sensors & Technologies, Inc. Dual axis rate sensor
DE102007030120B4 (de) * 2007-06-29 2010-04-08 Litef Gmbh Drehratensensor
DE102007054505B4 (de) * 2007-11-15 2016-12-22 Robert Bosch Gmbh Drehratensensor
DE102009001247A1 (de) * 2009-02-27 2010-09-09 Sensordynamics Ag Mikro-elektro-mechanischer Sensor
DE102009001248B4 (de) * 2009-02-27 2020-12-17 Hanking Electronics, Ltd. MEMS-Gyroskop zur Ermittlung von Rotationsbewegungen um eine x-, y- oder z-Achse
DE102009001922A1 (de) * 2009-03-26 2010-09-30 Sensordynamics Ag Mikro-Gyroskop zur Ermittlung von Rotationsbewegungen um drei senkrecht aufeinanderstehende Raumachsen x, y und z
DE102009002066A1 (de) * 2009-03-31 2010-10-07 Sensordynamics Ag Verfahren zum Erfassen von Beschleunigungen und Drehraten sowie MEMS-Sensor
DE102009026511A1 (de) * 2009-05-27 2010-12-02 Sensordynamics Ag Mikro-Gyroskop zur Ermittlung von Rotationsbewegungen um mindestens eine von drei senkrecht aufeinanderstehenden Raumachsen
US8266961B2 (en) * 2009-08-04 2012-09-18 Analog Devices, Inc. Inertial sensors with reduced sensitivity to quadrature errors and micromachining inaccuracies
ITTO20091042A1 (it) * 2009-12-24 2011-06-25 St Microelectronics Srl Giroscopio integrato microelettromeccanico con migliorata struttura di azionamento
JP5822177B2 (ja) * 2011-05-20 2015-11-24 セイコーエプソン株式会社 ジャイロセンサー、電子機器
DE102011057032B4 (de) * 2011-12-23 2019-09-19 Hanking Electronics, Ltd. Mikro-Gyroskop und Verfahren zum Betreiben eines Mikro-Gyroskops
DE102011057081A1 (de) * 2011-12-28 2013-07-04 Maxim Integrated Products, Inc. Mikro-Drehratensensor und Verfahren zum Betreiben eines Mikro-Drehratensensors

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