CN104049101B - 多轴速度传感器 - Google Patents

多轴速度传感器 Download PDF

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Publication number
CN104049101B
CN104049101B CN201410095382.0A CN201410095382A CN104049101B CN 104049101 B CN104049101 B CN 104049101B CN 201410095382 A CN201410095382 A CN 201410095382A CN 104049101 B CN104049101 B CN 104049101B
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speed sensor
axis
drive
coupling spring
spring structure
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Chinese (zh)
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CN104049101A (zh
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A·C·迈克奈尔
林义真
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Italian Semiconductor International Co
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NXP USA Inc
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5705—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis
    • G01C19/5712—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis the devices involving a micromechanical structure

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
CN201410095382.0A 2013-03-15 2014-03-14 多轴速度传感器 Active CN104049101B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US13/833,290 US9506756B2 (en) 2013-03-15 2013-03-15 Multiple axis rate sensor
US13/833,290 2013-03-15

Publications (2)

Publication Number Publication Date
CN104049101A CN104049101A (zh) 2014-09-17
CN104049101B true CN104049101B (zh) 2018-09-18

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CN201410095382.0A Active CN104049101B (zh) 2013-03-15 2014-03-14 多轴速度传感器

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US (1) US9506756B2 (enExample)
JP (1) JP6366170B2 (enExample)
CN (1) CN104049101B (enExample)

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US10126129B2 (en) * 2016-07-11 2018-11-13 Nxp Usa, Inc. Vibration and shock robust gyroscope
JP6571065B2 (ja) * 2016-12-08 2019-09-04 株式会社東芝 振動装置
US20180252526A1 (en) * 2017-03-06 2018-09-06 Nxp Usa, Inc. Mems device with in-plane quadrature compensation
DE102017216010A1 (de) * 2017-09-12 2019-03-14 Robert Bosch Gmbh Mikromechanische Drehraten-Sensoranordnung und entsprechendes Herstellungsverfahren
CN109696165A (zh) * 2017-10-20 2019-04-30 立锜科技股份有限公司 微机电装置
DE102017219933A1 (de) * 2017-11-09 2019-05-09 Robert Bosch Gmbh Drehratensensor mit einem eine Haupterstreckungsebene aufweisenden Substrat, Herstellungsverfahren für einen Drehratensensor
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JP6922961B2 (ja) 2018-10-18 2021-08-18 株式会社村田製作所 回転運動検出用微小電気機械デバイス
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WO2020258177A1 (zh) * 2019-06-27 2020-12-30 瑞声声学科技(深圳)有限公司 一种差分谐振器及mems传感器
US11891297B2 (en) * 2019-07-05 2024-02-06 Aac Acoustic Technologies (Shenzhen) Co., Ltd. Motion control structure and actuator
CN110411347B (zh) * 2019-08-13 2021-02-23 安徽理工大学 数控机床工作台瞬时旋转中心的检测装置及其检测方法
DE102020202158A1 (de) * 2020-02-19 2021-08-19 Robert Bosch Gesellschaft mit beschränkter Haftung Mikromechanische Drehraten-Sensoranordnung, Drehraten-Sensorarray und entsprechendes Herstellungsverfahren
DE102020205369A1 (de) * 2020-04-28 2021-10-28 Robert Bosch Gesellschaft mit beschränkter Haftung Mikromechanisches Bauteil für einen Drehratensensor und entsprechendes Herstellungsverfahren
DE102020205372A1 (de) * 2020-04-28 2021-10-28 Robert Bosch Gesellschaft mit beschränkter Haftung Mikromechanisches Bauteil für einen Drehratensensor und entsprechendes Herstellungsverfahren
WO2021252364A1 (en) * 2020-06-08 2021-12-16 Analog Devices, Inc. Stress-relief mems gyroscope
WO2021252398A1 (en) 2020-06-08 2021-12-16 Analog Devices, Inc. Drive and sense stress relief apparatus
US11519726B2 (en) 2020-06-19 2022-12-06 Analog Devices, Inc. Mechanism for selective coupling in microelectromechanical systems inertial sensors
US11698257B2 (en) 2020-08-24 2023-07-11 Analog Devices, Inc. Isotropic attenuated motion gyroscope
CN115727840B (zh) * 2021-08-31 2025-10-31 华为技术有限公司 惯性传感器和电子设备
DE102021212100A1 (de) * 2021-10-27 2023-04-27 Robert Bosch Gesellschaft mit beschränkter Haftung Mikromechanisches Bauteil für einen Drehratensensor
DE102023204632A1 (de) * 2022-05-17 2023-11-23 Murata Manufacturing Co., Ltd. MEMS-Gyroskop, das Drehungen in einer Ebene erfasst
US12146742B2 (en) * 2022-06-13 2024-11-19 Commissariat A L'energie Atomique Et Aux Energies Alternatives Inertial navigation sensor with reduced footprint

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CN102334010A (zh) * 2009-02-27 2012-01-25 感应动力股份公司 用于测定绕x轴、y轴和/或z轴的旋转运动的MEMS陀螺仪
CN102378895A (zh) * 2009-03-31 2012-03-14 感应动力股份公司 一种用于检测加速度和旋转速度的方法及微机电传感器
CN102498365A (zh) * 2009-08-04 2012-06-13 模拟设备公司 对于正交误差和微机械加工不准确性具有降低的敏感性的惯性传感器

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CN102334009A (zh) * 2009-02-27 2012-01-25 感应动力股份公司 微机电传感器
CN102334010A (zh) * 2009-02-27 2012-01-25 感应动力股份公司 用于测定绕x轴、y轴和/或z轴的旋转运动的MEMS陀螺仪
CN102378895A (zh) * 2009-03-31 2012-03-14 感应动力股份公司 一种用于检测加速度和旋转速度的方法及微机电传感器
CN102498365A (zh) * 2009-08-04 2012-06-13 模拟设备公司 对于正交误差和微机械加工不准确性具有降低的敏感性的惯性传感器

Also Published As

Publication number Publication date
JP6366170B2 (ja) 2018-08-01
US9506756B2 (en) 2016-11-29
US20140260610A1 (en) 2014-09-18
JP2014182133A (ja) 2014-09-29
CN104049101A (zh) 2014-09-17

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