JP2011521797A5 - - Google Patents

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Publication number
JP2011521797A5
JP2011521797A5 JP2011511659A JP2011511659A JP2011521797A5 JP 2011521797 A5 JP2011521797 A5 JP 2011521797A5 JP 2011511659 A JP2011511659 A JP 2011511659A JP 2011511659 A JP2011511659 A JP 2011511659A JP 2011521797 A5 JP2011521797 A5 JP 2011521797A5
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Japan
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section
movable element
rotating shaft
forming
dimension
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JP2011511659A
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English (en)
Japanese (ja)
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JP5474946B2 (ja
JP2011521797A (ja
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Priority claimed from US12/129,548 external-priority patent/US8096182B2/en
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Publication of JP2011521797A publication Critical patent/JP2011521797A/ja
Publication of JP2011521797A5 publication Critical patent/JP2011521797A5/ja
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Publication of JP5474946B2 publication Critical patent/JP5474946B2/ja
Expired - Fee Related legal-status Critical Current
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JP2011511659A 2008-05-29 2009-03-11 パッケージ応力を補償する応力逃がしを有する容量性センサ Expired - Fee Related JP5474946B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US12/129,548 US8096182B2 (en) 2008-05-29 2008-05-29 Capacitive sensor with stress relief that compensates for package stress
US12/129,548 2008-05-29
PCT/US2009/036755 WO2009145963A1 (en) 2008-05-29 2009-03-11 Capacitive sensor with stress relief that compensates for package stress

Publications (3)

Publication Number Publication Date
JP2011521797A JP2011521797A (ja) 2011-07-28
JP2011521797A5 true JP2011521797A5 (enExample) 2012-04-26
JP5474946B2 JP5474946B2 (ja) 2014-04-16

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Family Applications (1)

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JP2011511659A Expired - Fee Related JP5474946B2 (ja) 2008-05-29 2009-03-11 パッケージ応力を補償する応力逃がしを有する容量性センサ

Country Status (4)

Country Link
US (1) US8096182B2 (enExample)
JP (1) JP5474946B2 (enExample)
CN (1) CN102046514B (enExample)
WO (1) WO2009145963A1 (enExample)

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