JP2009014492A5 - - Google Patents

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Publication number
JP2009014492A5
JP2009014492A5 JP2007176300A JP2007176300A JP2009014492A5 JP 2009014492 A5 JP2009014492 A5 JP 2009014492A5 JP 2007176300 A JP2007176300 A JP 2007176300A JP 2007176300 A JP2007176300 A JP 2007176300A JP 2009014492 A5 JP2009014492 A5 JP 2009014492A5
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JP
Japan
Prior art keywords
movable body
oscillator device
potential
rotation axis
conductive regions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2007176300A
Other languages
English (en)
Japanese (ja)
Other versions
JP2009014492A (ja
JP5432440B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2007176300A priority Critical patent/JP5432440B2/ja
Priority claimed from JP2007176300A external-priority patent/JP5432440B2/ja
Priority to US12/599,688 priority patent/US8339014B2/en
Priority to PCT/JP2008/062244 priority patent/WO2009005160A2/en
Priority to TW097125115A priority patent/TWI364400B/zh
Publication of JP2009014492A publication Critical patent/JP2009014492A/ja
Publication of JP2009014492A5 publication Critical patent/JP2009014492A5/ja
Application granted granted Critical
Publication of JP5432440B2 publication Critical patent/JP5432440B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2007176300A 2007-07-04 2007-07-04 揺動体装置 Expired - Fee Related JP5432440B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2007176300A JP5432440B2 (ja) 2007-07-04 2007-07-04 揺動体装置
US12/599,688 US8339014B2 (en) 2007-07-04 2008-06-30 Oscillator device
PCT/JP2008/062244 WO2009005160A2 (en) 2007-07-04 2008-06-30 Oscillator device
TW097125115A TWI364400B (en) 2007-07-04 2008-07-03 Oscillator device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007176300A JP5432440B2 (ja) 2007-07-04 2007-07-04 揺動体装置

Publications (3)

Publication Number Publication Date
JP2009014492A JP2009014492A (ja) 2009-01-22
JP2009014492A5 true JP2009014492A5 (enExample) 2010-08-26
JP5432440B2 JP5432440B2 (ja) 2014-03-05

Family

ID=40120261

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007176300A Expired - Fee Related JP5432440B2 (ja) 2007-07-04 2007-07-04 揺動体装置

Country Status (4)

Country Link
US (1) US8339014B2 (enExample)
JP (1) JP5432440B2 (enExample)
TW (1) TWI364400B (enExample)
WO (1) WO2009005160A2 (enExample)

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5473253B2 (ja) 2008-06-02 2014-04-16 キヤノン株式会社 複数の導電性領域を有する構造体、及びその製造方法
JP5473579B2 (ja) 2009-12-11 2014-04-16 キヤノン株式会社 静電容量型電気機械変換装置の制御装置、及び静電容量型電気機械変換装置の制御方法
JP5424847B2 (ja) 2009-12-11 2014-02-26 キヤノン株式会社 電気機械変換装置
JP5414546B2 (ja) * 2010-01-12 2014-02-12 キヤノン株式会社 容量検出型の電気機械変換素子
JP5603739B2 (ja) 2010-11-02 2014-10-08 キヤノン株式会社 静電容量型電気機械変換装置
US9493344B2 (en) 2010-11-23 2016-11-15 Honeywell International Inc. MEMS vertical comb structure with linear drive/pickoff
JP5947511B2 (ja) 2011-09-08 2016-07-06 キヤノン株式会社 電気機械変換装置
US10349543B2 (en) * 2013-02-22 2019-07-09 Vibrant Composites Inc. Layered assemblies
JP6175868B2 (ja) * 2013-04-03 2017-08-09 株式会社豊田中央研究所 Ｍｅｍｓ装置
DE102014002823B4 (de) * 2014-02-25 2017-11-02 Northrop Grumman Litef Gmbh Mikromechanisches bauteil mit geteilter, galvanisch isolierter aktiver struktur und verfahren zum betreiben eines solchen bauteils
JP6262629B2 (ja) * 2014-09-30 2018-01-17 株式会社日立製作所 慣性センサ
JP6472313B2 (ja) 2015-04-16 2019-02-20 キヤノン株式会社 探触子及び情報取得装置
JP2017058418A (ja) * 2015-09-14 2017-03-23 富士電機株式会社 光走査装置および内視鏡
DE102016213026A1 (de) * 2016-07-18 2018-01-18 Carl Zeiss Smt Gmbh Sensor-Einrichtung
JP2016200834A (ja) * 2016-08-10 2016-12-01 キヤノン株式会社 可動ミラー
US9900707B1 (en) 2016-11-29 2018-02-20 Cirrus Logic, Inc. Biasing of electromechanical systems microphone with alternating-current voltage waveform
GB2557367A (en) * 2016-11-29 2018-06-20 Cirrus Logic Int Semiconductor Ltd Mems device
JP7410935B2 (ja) 2018-05-24 2024-01-10 ザ リサーチ ファウンデーション フォー ザ ステイト ユニバーシティー オブ ニューヨーク 容量性センサ
US11101746B2 (en) * 2018-12-13 2021-08-24 Beijing Voyager Technology Co., Ltd. Bipolar staggered comb drive for bidirectional MEMS actuation
JP7516009B2 (ja) 2019-02-20 2024-07-16 キヤノン株式会社 発振器、撮像装置
JP7493922B2 (ja) 2019-08-26 2024-06-03 キヤノン株式会社 発振器、撮像装置
JP7414428B2 (ja) 2019-08-26 2024-01-16 キヤノン株式会社 発振器、照明装置、撮像装置および装置
DE102021200083A1 (de) 2021-01-07 2022-07-07 Robert Bosch Gesellschaft mit beschränkter Haftung Mikromechanische Struktur und Verfahren zur Herstellung einer mikromechanischen Struktur
DE102021200235A1 (de) 2021-01-13 2022-07-14 Robert Bosch Gesellschaft mit beschränkter Haftung Mikromechanisches Bauteil für eine Sensorvorrichtung
JP2024004653A (ja) * 2022-06-29 2024-01-17 セイコーエプソン株式会社 物理量センサー及び慣性計測装置
IT202200014548A1 (it) * 2022-07-11 2024-01-11 St Microelectronics Srl Struttura di rilevamento per un accelerometro mems avente prestazioni migliorate e relativo procedimento di fabbricazione

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5331852A (en) * 1991-09-11 1994-07-26 The Charles Stark Draper Laboratory, Inc. Electromagnetic rebalanced micromechanical transducer
JPH11337342A (ja) * 1998-05-25 1999-12-10 Toyota Motor Corp 半導体角速度センサおよびその製造方法
US6164134A (en) * 1999-01-29 2000-12-26 Hughes Electronics Corporation Balanced vibratory gyroscope and amplitude control for same
US7079299B1 (en) * 2000-05-31 2006-07-18 The Regents Of The University Of California Staggered torsional electrostatic combdrive and method of forming same
EP1410047B1 (de) * 2001-07-26 2007-02-28 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Mikromechanisches bauelement
DE10152254A1 (de) * 2001-10-20 2003-04-30 Bosch Gmbh Robert Mikromechanisches Bauelement und entsprechendes Herstellungsverfahren
US6972883B2 (en) * 2002-02-15 2005-12-06 Ricoh Company, Ltd. Vibration mirror, optical scanning device, and image forming using the same, method for making the same, and method for scanning image
US7026184B2 (en) * 2003-02-26 2006-04-11 Carnegie Mellon University Method of fabricating microstructures and devices made therefrom
US7031040B2 (en) * 2003-05-16 2006-04-18 Ricoh Company, Ltd. Optical scanning apparatus, optical writing apparatus, image forming apparatus, and method of driving vibration mirror
US7085122B2 (en) * 2003-05-21 2006-08-01 The Regents Of The University Of California MEMS tunable capacitor based on angular vertical comb drives
JP2004354108A (ja) * 2003-05-27 2004-12-16 Matsushita Electric Works Ltd 角速度センサおよびその製造方法
JP4390194B2 (ja) * 2004-03-19 2009-12-24 株式会社リコー 偏向ミラー、偏向ミラー製造方法、光書込装置及び画像形成装置
JP2006003131A (ja) * 2004-06-15 2006-01-05 Canon Inc 電位センサ
JP2006178408A (ja) * 2004-11-25 2006-07-06 Ricoh Co Ltd スキャナ素子、光走査装置および画像形成装置
JP2006154315A (ja) * 2004-11-29 2006-06-15 Canon Inc 静電櫛歯型揺動体装置、及びその作製方法
JP2006162495A (ja) * 2004-12-09 2006-06-22 Seiko Instruments Inc 力学量センサ
US7382137B2 (en) * 2005-05-27 2008-06-03 Canon Kabushiki Kaisha Potential measuring apparatus
JP5159062B2 (ja) * 2006-08-09 2013-03-06 キヤノン株式会社 角速度センサ
JP5105949B2 (ja) * 2007-04-27 2012-12-26 キヤノン株式会社 センサ
JP5247182B2 (ja) * 2008-02-19 2013-07-24 キヤノン株式会社 角速度センサ

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