WO2008143191A1 - Memsセンサおよびその製造方法 - Google Patents
Memsセンサおよびその製造方法 Download PDFInfo
- Publication number
- WO2008143191A1 WO2008143191A1 PCT/JP2008/059078 JP2008059078W WO2008143191A1 WO 2008143191 A1 WO2008143191 A1 WO 2008143191A1 JP 2008059078 W JP2008059078 W JP 2008059078W WO 2008143191 A1 WO2008143191 A1 WO 2008143191A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- manufacturing
- same
- mems sensor
- base layer
- deformation part
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000011368 organic material Substances 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00436—Shaping materials, i.e. techniques for structuring the substrate or the layers on the substrate
- B81C1/00444—Surface micromachining, i.e. structuring layers on the substrate
- B81C1/00468—Releasing structures
- B81C1/00476—Releasing structures removing a sacrificial layer
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/0802—Details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/12—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance
- G01P15/123—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance by piezo-resistive elements, e.g. semiconductor strain gauges
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/02—Sensors
- B81B2201/0228—Inertial sensors
- B81B2201/0235—Accelerometers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/01—Suspended structures, i.e. structures allowing a movement
- B81B2203/0118—Cantilevers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
- G01P2015/084—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass
- G01P2015/0842—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass the mass being of clover leaf shape
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/84—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by variation of applied mechanical force, e.g. of pressure
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
- Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
- Y10T29/49155—Manufacturing circuit on or in base
- Y10T29/49156—Manufacturing circuit on or in base with selective destruction of conductive paths
Abstract
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US12/451,497 US20100116057A1 (en) | 2007-05-17 | 2008-05-16 | Mems sensor and method of manufacturing the same |
JP2009515218A JPWO2008143191A1 (ja) | 2007-05-17 | 2008-05-16 | Memsセンサおよびその製造方法 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007131831 | 2007-05-17 | ||
JP2007-131831 | 2007-05-17 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2008143191A1 true WO2008143191A1 (ja) | 2008-11-27 |
Family
ID=40031892
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2008/059078 WO2008143191A1 (ja) | 2007-05-17 | 2008-05-16 | Memsセンサおよびその製造方法 |
Country Status (3)
Country | Link |
---|---|
US (1) | US20100116057A1 (ja) |
JP (1) | JPWO2008143191A1 (ja) |
WO (1) | WO2008143191A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101825902B1 (ko) * | 2010-03-18 | 2018-02-06 | 로베르트 보쉬 게엠베하 | 피에조 저항성 마이크로메커니컬 센서 소자 및 측정 방법 |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102275860B (zh) * | 2010-06-11 | 2014-12-31 | 张家港丽恒光微电子科技有限公司 | 惯性微机电传感器的制造方法 |
JPWO2011161917A1 (ja) * | 2010-06-25 | 2013-08-19 | パナソニック株式会社 | 加速度センサ |
DE102011119349A1 (de) * | 2011-11-25 | 2013-05-29 | Bizerba Gmbh & Co. Kg | Verfahren zur Herstellung eines Dünnschichtsensorelements |
KR101614330B1 (ko) * | 2013-08-06 | 2016-04-21 | 고어텍 인크 | 내충격기능을 구비한 실리콘 기반의 mems 마이크로폰,이러한 mems 마이크로폰을 포함하는 시스템 및 패키지 |
US11186481B2 (en) * | 2017-11-30 | 2021-11-30 | Taiwan Semiconductor Manufacturing Company, Ltd. | Sensor device and manufacturing method thereof |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0798328A (ja) * | 1993-09-28 | 1995-04-11 | Mazda Motor Corp | 半導体センサ |
JPH07167885A (ja) * | 1993-12-13 | 1995-07-04 | Omron Corp | 半導体加速度センサ及びその製造方法、ならびに当該半導体加速度センサによる加速度検出方式 |
JPH0843434A (ja) * | 1994-07-28 | 1996-02-16 | Matsushita Electric Ind Co Ltd | 力学量センサおよびその製造方法 |
Family Cites Families (24)
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US5241864A (en) * | 1992-06-17 | 1993-09-07 | Motorola, Inc. | Double pinned sensor utilizing a tensile film |
JP3536544B2 (ja) * | 1996-09-05 | 2004-06-14 | 株式会社デンソー | 半導体力学量センサの製造方法 |
JP3328575B2 (ja) * | 1998-03-25 | 2002-09-24 | 日本碍子株式会社 | 加速度センサ素子、加速度センサ及びこれらの製造方法 |
DE19844686A1 (de) * | 1998-09-29 | 2000-04-06 | Fraunhofer Ges Forschung | Mikromechanischer Drehratensensor und Verfahren zur Herstellung |
US7154372B2 (en) * | 2001-01-10 | 2006-12-26 | Sensirion Ag | Micromechanical flow sensor with tensile coating |
JP2002357619A (ja) * | 2001-06-01 | 2002-12-13 | Mitsubishi Electric Corp | 加速度センサ及びその製造方法 |
JP4216525B2 (ja) * | 2002-05-13 | 2009-01-28 | 株式会社ワコー | 加速度センサおよびその製造方法 |
US20040007063A1 (en) * | 2002-05-29 | 2004-01-15 | California Institute Of Technology | Micro machined polymer beam structure method and resulting device for spring applications |
JP2004045269A (ja) * | 2002-07-12 | 2004-02-12 | Mitsubishi Electric Corp | 容量式加速度センサ |
US7367232B2 (en) * | 2004-01-24 | 2008-05-06 | Vladimir Vaganov | System and method for a three-axis MEMS accelerometer |
JP4272115B2 (ja) * | 2004-06-03 | 2009-06-03 | Okiセミコンダクタ株式会社 | 加速度センサ及びその製造方法 |
WO2005124306A1 (en) * | 2004-06-15 | 2005-12-29 | Canon Kabushiki Kaisha | Semiconductor device |
JP2006133192A (ja) * | 2004-11-09 | 2006-05-25 | Nippon Soken Inc | 静電容量式湿度センサおよびその製造方法 |
JP4553720B2 (ja) * | 2004-12-21 | 2010-09-29 | Okiセミコンダクタ株式会社 | 半導体装置及びその製造方法 |
JP2006250653A (ja) * | 2005-03-09 | 2006-09-21 | Ricoh Co Ltd | 半導体センサの製造方法 |
US7461559B2 (en) * | 2005-03-18 | 2008-12-09 | Citizen Holdings Co., Ltd. | Electromechanical transducer and method of fabricating the same |
JP2006295149A (ja) * | 2005-03-18 | 2006-10-26 | Citizen Watch Co Ltd | 機械・電気変換器とその製造方法 |
US7977757B2 (en) * | 2005-05-19 | 2011-07-12 | Rohm Co., Ltd. | MEMS element, MEMS device and MEMS element manufacturing method |
JP5008834B2 (ja) * | 2005-05-19 | 2012-08-22 | ローム株式会社 | Mems素子およびその製造方法 |
US7481113B2 (en) * | 2005-07-27 | 2009-01-27 | Ricoh Company, Ltd. | Semiconductor sensor with projection for preventing proof mass from sticking to cover plate |
JP4688600B2 (ja) * | 2005-07-29 | 2011-05-25 | 株式会社リコー | 半導体センサの製造方法 |
US7562575B2 (en) * | 2005-08-05 | 2009-07-21 | Hitachi Metals, Ltd. | Impact-resistant acceleration sensor |
US7652575B2 (en) * | 2005-10-27 | 2010-01-26 | Hewlett-Packard Development Company, L.P. | Monitoring of packages |
JP5195102B2 (ja) * | 2008-07-11 | 2013-05-08 | 大日本印刷株式会社 | センサおよびその製造方法 |
-
2008
- 2008-05-16 JP JP2009515218A patent/JPWO2008143191A1/ja active Pending
- 2008-05-16 WO PCT/JP2008/059078 patent/WO2008143191A1/ja active Application Filing
- 2008-05-16 US US12/451,497 patent/US20100116057A1/en not_active Abandoned
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0798328A (ja) * | 1993-09-28 | 1995-04-11 | Mazda Motor Corp | 半導体センサ |
JPH07167885A (ja) * | 1993-12-13 | 1995-07-04 | Omron Corp | 半導体加速度センサ及びその製造方法、ならびに当該半導体加速度センサによる加速度検出方式 |
JPH0843434A (ja) * | 1994-07-28 | 1996-02-16 | Matsushita Electric Ind Co Ltd | 力学量センサおよびその製造方法 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101825902B1 (ko) * | 2010-03-18 | 2018-02-06 | 로베르트 보쉬 게엠베하 | 피에조 저항성 마이크로메커니컬 센서 소자 및 측정 방법 |
Also Published As
Publication number | Publication date |
---|---|
US20100116057A1 (en) | 2010-05-13 |
JPWO2008143191A1 (ja) | 2010-08-05 |
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