JP5845152B2 - 半導体装置、携帯通信機器、及び、半導体装置の製造方法 - Google Patents
半導体装置、携帯通信機器、及び、半導体装置の製造方法 Download PDFInfo
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- JP5845152B2 JP5845152B2 JP2012166265A JP2012166265A JP5845152B2 JP 5845152 B2 JP5845152 B2 JP 5845152B2 JP 2012166265 A JP2012166265 A JP 2012166265A JP 2012166265 A JP2012166265 A JP 2012166265A JP 5845152 B2 JP5845152 B2 JP 5845152B2
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Description
1.本願において、実施形態は、必要に応じて、便宜上複数のセクションに分けて記載する場合もあるが、特にそうでない旨明示した場合を除き、これらは相互に独立別個のものではなく、単一の例の各部分、一方が他方の一部詳細または一部または全部の変形例等である。また、原則として、同様の部分は繰り返しを省略する。また、実施の態様における各構成要素は、特にそうでない旨明示した場合、理論的にその数に限定される場合および文脈から明らかにそうでない場合を除き、必須のものではない。
以下では、実施形態について詳述する。各図中において、同一または同様の部分は同一または類似の記号または参照番号で示し、説明は原則として繰り返さない。
ANTa:アンテナ端子
TX1a、TX2a:送信端子
RX1a、RX2a:受信端子
VDDa:電源端子
GNDa:接地端子
CTLa:制御端子
Communication Services)が使用される場合には、概ね、800MHzから1GHzの周波数帯域、および1.7GHzから2.2GHzの周波数帯域の信号が、アンテナに入出力される。一方、移動体通信プロトコルとしてGSM(Global System for Mobile Communication)が使用される場合には、概ね、800MHzから1GHzの周波数帯域の信号が、アンテナに入出力される。アンテナ端子ANTa、送信端子TX1a、TX2a、受信端子RX1a、RX2aは、これらの周波数帯域の信号(より具体的には、800MHzから2.2GHzの周波数帯域の信号)を取り扱う端子である。よって、これらの端子を総称して「高周波信号端子」と呼ぶことがある。一方、制御端子CTLa、電源端子VDDa、接地端子GNDaは、高周波信号を取り扱わない端子である。
ANTb:アンテナ端子
TX1b、TX2b:送信端子
RX1b、RX2b:受信端子
VDDb:電源端子
GNDb:接地端子
CTLb:アンテナスイッチSW2の制御信号が入力される制御端子
X=2πfL ・・・(1)
で表わされる。ここで、fは、当該ボンディングワイヤで伝送される信号の周波数であり、Lはボンディングワイヤのインダクタンスである。また、ボンディングワイヤのインダクタンスLは、
L=h・lB(1.4×10−6 ln(h・lB/d)− 7.6×10−6)
・・・(2)
で近似できる。ここで、hはボンディングワイヤのループ高さ(図12参照)であり、dはボンディングワイヤの直径であり、lBはボンディングワイヤのワイヤ長である。
以上に示された半導体装置1の構成は、様々な用途に適用できるが、特に、携帯通信機器に適用されることが好適である。
Communication Services))に対応した送受信処理を行う。
ANTb:アンテナ端子
TX1b:送信端子
RX1b:受信端子
VDDb:電源端子
GNDb:接地端子
CTLb:アンテナスイッチSW3の制御信号が入力される制御端子
以下では、上記されている本実施形態の半導体装置(1、1A)の製造方法の一例を説明する。以下では、下側半導体チップ3と上側半導体チップ4とが同一チップである半導体装置1の製造方法を説明するが、下側半導体チップ3と上側半導体チップ4とが異なるチップである半導体装置1Aも同様の製造方法によって製造できる。
(1) 半導体装置は、第1半導体チップと、第2半導体チップと、第1外部端子と、第2外部端子と、第1ボンディングワイヤと、第2ボンディングワイヤとを備えている。第1半導体チップは、第1表側主面と第1裏側主面とを有し、第1表側主面に第1ボンディングパッドを有する。第2半導体チップは、第2表側主面と第2裏側主面とを有し、第1半導体チップの第1表側主面に第2裏側主面が対向するように設けられ、且つ、第2表側主面に第2ボンディングパッドを有する。第1及び第2外部端子は、第2半導体チップの第2表側主面よりも第1半導体チップの第1表側主面により近くなるように配置されている。第1ボンディングワイヤは、第1ボンディングパッドと第1外部端子とを接続し、第2ボンディングワイヤは、第2ボンディングパッドと第2外部端子とを接続する。第1ボンディングワイヤの第1外部端子へのボンディングがボールボンディングによって行われ、第1ボンディングワイヤの第1ボンディングパッドへのボンディングがウェッジボンディングによって行われている。また、第2ボンディングワイヤの第2ボンディングパッドとのボンディングがボールボンディングによって行われ、第2ボンディングワイヤの第2外部端子へのボンディングがウェッジボンディングによって行われている。
(8) (1)乃至(4)のいずれかに記載の半導体装置において、第1半導体チップの第1裏側裏面には、第1接着剤層が接合され、第2半導体チップの第2裏側裏面には、第2接着剤層が接合されている。第2接着剤層は、第1接着剤層よりも厚い。第2ボンディングワイヤは、第2ボンディングパッドの近傍において第2接着剤層に埋め込まれている。
第1表側主面と第1裏側主面とを有し、第1表側主面に第1ボンディングパッドを有する第1半導体チップと、第2表側主面と第2裏側主面とを有し、第2表側主面に第2ボンディングパッドを有する第2半導体チップとを用意する工程、
第1及び第2外部端子を形成する工程、
第1ボンディングパッドと第1外部端子とを接続するように第1ボンディングワイヤをボンディングする工程、
第1半導体チップの第1表側主面に第2裏側主面が対向するように、且つ、第1及び第2外部端子が第2半導体チップの第2表側主面よりも第1半導体チップの第1表側主面により近くなるように、第2半導体チップを第1半導体チップに接着剤層を介して接合する工程、及び、
第2ボンディングパッドと第2外部端子とを接続するように第2ボンディングワイヤをボンディングする工程。
ここで、第1ボンディングワイヤの第1外部端子へのボンディングがボールボンディングによって行われ、第1ボンディングワイヤの第1ボンディングパッドへのボンディングがウェッジボンディングによって行われる。また、第2ボンディングワイヤの第2ボンディングパッドとのボンディングがボールボンディングによって行われ、第2ボンディングワイヤの第2外部端子へのボンディングがウェッジボンディングによって行われる。
第1表側主面と第1裏側主面とを有し、第1表側主面に第1ボンディングパッドを有する第1半導体チップと、第2表側主面と第2裏側主面とを有し、第2表側主面に第2ボンディングパッドを有する第2半導体チップとを用意する工程、
第1及び第2外部端子を形成する工程、
第1ボンディングパッドと第1外部端子とを接続するように第1ボンディングワイヤをボンディングする工程、
第1半導体チップの第1表側主面に第2裏側主面が対向するように、且つ、第1及び第2外部端子が第2半導体チップの第2表側主面よりも第1半導体チップの第1表側主面により近くなるように、第2半導体チップを第1半導体チップに接着剤層を介して接合する工程、及び、
第2ボンディングパッドと第2外部端子とを接続するように第2ボンディングワイヤをボンディングする工程。
ここで、第1ボンディングワイヤのループ高さが、第2ボンディングワイヤのループ高さよりも高い。
2 :外部端子
3 :下側半導体チップ
3a:表側主面
3b:裏側主面
4、24:上側半導体チップ
4a:表側主面
4b:裏側主面
5 :接着剤層
6 :ボンディングパッド
7 :接着剤層
8 :ボンディングパッド
9 :レジン封止体
9a:表面
9b:裏面
11:ボンディングワイヤ
11a:接続部
11b:接続部
12:ボンディングワイヤ
12a:接続部
12b:接続部
13a:始点
13b:終点
14a:始点
14b:終点
15:アンテナ
20:トランシーバーIC
21:送信用増幅器
22:受信用低ノイズ増幅器
23:弾性波フィルタ
30、30A:トランシーバーIC
31:送信用増幅器
32:受信用低ノイズ増幅器
33:弾性波フィルタ
34:分波器
40、40A:携帯通信機器
51:ウエハ
51a:表側主面
51b:裏側主面
52:BGテープ
53:ダイシングフレーム
54:ダイシングテープ
55:ダイシング溝
56:金属ベースシート
57:ダイシング溝
ANTa、ANTb:アンテナ端子
CTLa、CTLb:制御端子
GNDa、GNDb:接地端子
RX1a、RX2a、RX1b、RX2b:受信端子
SW1、SW2、SW3:アンテナスイッチ
TX1a、TX2a、TX1b、TX2b:送信端子
TRX1b、TRX2b、TRX3b、TRX4b:送受信端子
VDDa、VDDb:電源端子
Claims (13)
- 第1表側主面と第1裏側主面とを有し、前記第1表側主面に第1ボンディングパッドを有する第1半導体チップと、
第2表側主面と第2裏側主面とを有し、前記第1半導体チップの前記第1表側主面に前記第2裏側主面が対向するように設けられ、且つ、前記第2表側主面に第2ボンディングパッドを有する第2半導体チップと、
前記第2半導体チップの前記第2表側主面よりも前記第1半導体チップの前記第1表側主面により近くなるように配置された第1及び第2外部端子と、
前記第1ボンディングパッドと前記第1外部端子とを接続する第1ボンディングワイヤと、
前記第2ボンディングパッドと前記第2外部端子とを接続する第2ボンディングワイヤ
とを含み、
前記第2ボンディングワイヤの径が、前記第1ボンディングワイヤの径よりも太い
半導体装置。 - 請求項1に記載の半導体装置であって、
前記第1半導体チップと前記第2半導体チップとが、同一チップである
半導体装置。 - 請求項1又は2に記載の半導体装置であって、
前記第1半導体チップと前記第2半導体チップとは、アンテナに入出力される信号を処理する回路を構成する回路素子を集積化している
半導体装置。 - 請求項2に記載の半導体装置であって、
前記第1半導体チップと前記第2半導体チップのそれぞれは、アンテナに接続されるアンテナスイッチを集積化している
半導体装置。 - 請求項1又は2に記載の半導体装置であって、
前記第1半導体チップと前記第2半導体チップのそれぞれは、アンテナに供給される送信信号を増幅する送信用増幅器、アンテナから受け取った受信信号を増幅する受信用増幅器、アンテナから受け取った受信信号が入力される弾性波フィルタ、アンテナに接続されるアンテナスイッチの送受信端子に接続される分波器のいずれかを集積化している
半導体装置。 - 請求項1又は2に記載の半導体装置であって、
前記第1半導体チップの前記第1裏側主面には、第1接着剤層が接合されており、
前記第2半導体チップの前記第2裏側主面には、第2接着剤層が接合されており、
前記第2接着剤層は、前記第1接着剤層よりも厚く、
前記第2ボンディングワイヤは、前記第2ボンディングパッドの近傍において前記第2接着剤層に埋め込まれている
半導体装置。 - 請求項1又は2に記載の半導体装置であって、
前記第1ボンディングワイヤの前記第1外部端子へのボンディングがボールボンディングによって行われ、
前記第1ボンディングワイヤの前記第1ボンディングパッドへのボンディングがウェッジボンディングによって行われ、
前記第2ボンディングワイヤの前記第2ボンディングパッドとのボンディングがボールボンディングによって行われ、
前記第2ボンディングワイヤの前記第2外部端子へのボンディングがウェッジボンディングによって行われている
半導体装置。 - 請求項1又は2に記載の半導体装置であって、
前記第1ボンディングワイヤのループ高さが、前記第2ボンディングワイヤのループ高さよりも高い
半導体装置。 - アンテナと、
半導体装置
とを具備し、
前記半導体装置が、
第1表側主面と第1裏側主面とを有し、前記第1表側主面に第1ボンディングパッドを有する第1半導体チップと、
第2表側主面と第2裏側主面とを有し、前記第1半導体チップの前記第1表側主面に前記第2裏側主面が対向するように設けられ、且つ、前記第2表側主面に第2ボンディングパッドを有する第2半導体チップと、
前記第2半導体チップの前記第2表側主面よりも前記第1半導体チップの前記第1表側主面により近くなるように配置された第1及び第2外部端子と、
前記第1ボンディングパッドと前記第1外部端子とを接続する第1ボンディングワイヤと、
前記第2ボンディングパッドと前記第2外部端子とを接続する第2ボンディングワイヤ
とを含み、
前記第1半導体チップと前記第2半導体チップとは、前記アンテナに入出力される信号を処理する回路を構成する回路素子を集積化しており、
前記第2ボンディングワイヤの径が、前記第1ボンディングワイヤの径よりも太い
携帯通信機器。 - 請求項9に記載の携帯通信機器であって、
前記第1半導体チップと前記第2半導体チップとが、同一チップであり、
前記回路素子は、前記アンテナに接続されるアンテナスイッチである
携帯通信機器。 - 第1表側主面と第1裏側主面とを有し、前記第1表側主面に第1ボンディングパッドを有する第1半導体チップと、第2表側主面と第2裏側主面とを有し、前記第2表側主面に第2ボンディングパッドを有する第2半導体チップとを用意する工程と、
第1及び第2外部端子を形成する工程と、
前記第1ボンディングパッドと前記第1外部端子とを接続するように第1ボンディングワイヤをボンディングする工程と、
前記第1半導体チップの前記第1表側主面に前記第2裏側主面が対向するように、且つ、前記第1及び第2外部端子が前記第2半導体チップの前記第2表側主面よりも前記第1半導体チップの前記第1表側主面により近くなるように、前記第2半導体チップを前記第1半導体チップに接着剤層を介して接合する工程と、
前記第2ボンディングパッドと前記第2外部端子とを接続するように第2ボンディングワイヤをボンディングする工程
とを含み、
前記第2ボンディングワイヤの径が、前記第1ボンディングワイヤの径よりも太い
半導体装置の製造方法。 - 請求項11に記載の半導体装置の製造方法であって、
前記第1ボンディングワイヤの前記第1外部端子へのボンディングがボールボンディングによって行われ、
前記第1ボンディングワイヤの前記第1ボンディングパッドへのボンディングがウェッジボンディングによって行われ、
前記第2ボンディングワイヤの前記第2ボンディングパッドとのボンディングがボールボンディングによって行われ、
前記第2ボンディングワイヤの前記第2外部端子へのボンディングがウェッジボンディングによって行われる
半導体装置の製造方法。 - 請求項12に記載の半導体装置の製造方法であって、
前記第1ボンディングワイヤと前記第2ボンディングワイヤのボンディングは、前記第1ボンディングワイヤのループ高さが、第2ボンディングワイヤのループ高さよりも高い
半導体装置の製造方法。
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