JP5840294B2 - ナノ構造層を有する発光ダイオードならびに製造方法および使用方法 - Google Patents
ナノ構造層を有する発光ダイオードならびに製造方法および使用方法 Download PDFInfo
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- JP5840294B2 JP5840294B2 JP2014523888A JP2014523888A JP5840294B2 JP 5840294 B2 JP5840294 B2 JP 5840294B2 JP 2014523888 A JP2014523888 A JP 2014523888A JP 2014523888 A JP2014523888 A JP 2014523888A JP 5840294 B2 JP5840294 B2 JP 5840294B2
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- 238000000034 method Methods 0.000 title claims description 52
- 239000002086 nanomaterial Substances 0.000 title claims description 32
- 238000004519 manufacturing process Methods 0.000 title claims description 6
- 239000004065 semiconductor Substances 0.000 claims description 74
- 239000000758 substrate Substances 0.000 claims description 56
- IJGRMHOSHXDMSA-UHFFFAOYSA-N nitrogen Substances N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 54
- 239000000463 material Substances 0.000 claims description 51
- 229910052757 nitrogen Inorganic materials 0.000 claims description 45
- 229910021417 amorphous silicon Inorganic materials 0.000 claims description 44
- 229910052782 aluminium Inorganic materials 0.000 claims description 43
- -1 AlGaInP Inorganic materials 0.000 claims description 42
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 42
- 238000005530 etching Methods 0.000 claims description 38
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 claims description 28
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 20
- 229910052710 silicon Inorganic materials 0.000 claims description 20
- 239000010703 silicon Substances 0.000 claims description 20
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 claims description 18
- 229910002704 AlGaN Inorganic materials 0.000 claims description 16
- 229910002601 GaN Inorganic materials 0.000 claims description 16
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 16
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 claims description 10
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims description 10
- 230000001678 irradiating effect Effects 0.000 claims description 8
- 239000000395 magnesium oxide Substances 0.000 claims description 8
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 claims description 8
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 claims description 8
- HZXMRANICFIONG-UHFFFAOYSA-N gallium phosphide Chemical group [Ga]#P HZXMRANICFIONG-UHFFFAOYSA-N 0.000 claims description 7
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 7
- 238000000151 deposition Methods 0.000 claims description 5
- 229910010272 inorganic material Inorganic materials 0.000 claims description 5
- 239000011147 inorganic material Substances 0.000 claims description 5
- 229910001218 Gallium arsenide Inorganic materials 0.000 claims description 4
- 229910020068 MgAl Inorganic materials 0.000 claims description 4
- 229910052733 gallium Inorganic materials 0.000 claims description 4
- MNKMDLVKGZBOEW-UHFFFAOYSA-M lithium;3,4,5-trihydroxybenzoate Chemical compound [Li+].OC1=CC(C([O-])=O)=CC(O)=C1O MNKMDLVKGZBOEW-UHFFFAOYSA-M 0.000 claims description 4
- 229910052596 spinel Inorganic materials 0.000 claims description 4
- 239000011029 spinel Substances 0.000 claims description 4
- 239000011787 zinc oxide Substances 0.000 claims description 4
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 claims description 3
- 229910005540 GaP Inorganic materials 0.000 claims description 2
- 229910000980 Aluminium gallium arsenide Inorganic materials 0.000 claims 3
- FTWRSWRBSVXQPI-UHFFFAOYSA-N alumanylidynearsane;gallanylidynearsane Chemical compound [As]#[Al].[As]#[Ga] FTWRSWRBSVXQPI-UHFFFAOYSA-N 0.000 description 47
- 150000002500 ions Chemical class 0.000 description 25
- 238000010884 ion-beam technique Methods 0.000 description 22
- 229910052581 Si3N4 Inorganic materials 0.000 description 21
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 21
- 238000001020 plasma etching Methods 0.000 description 17
- 230000015572 biosynthetic process Effects 0.000 description 16
- 229910052751 metal Inorganic materials 0.000 description 15
- 239000002184 metal Substances 0.000 description 15
- 230000008569 process Effects 0.000 description 14
- 238000004544 sputter deposition Methods 0.000 description 14
- 150000001875 compounds Chemical class 0.000 description 13
- 238000012876 topography Methods 0.000 description 10
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 9
- 239000013078 crystal Substances 0.000 description 9
- 229910010271 silicon carbide Inorganic materials 0.000 description 8
- 238000000605 extraction Methods 0.000 description 7
- 235000012431 wafers Nutrition 0.000 description 7
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 6
- 239000010408 film Substances 0.000 description 6
- 229910052594 sapphire Inorganic materials 0.000 description 6
- 239000010980 sapphire Substances 0.000 description 6
- 239000000460 chlorine Substances 0.000 description 5
- 230000003252 repetitive effect Effects 0.000 description 5
- 239000010409 thin film Substances 0.000 description 5
- 238000001039 wet etching Methods 0.000 description 5
- 238000001878 scanning electron micrograph Methods 0.000 description 4
- 238000001465 metallisation Methods 0.000 description 3
- 230000009467 reduction Effects 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N argon Substances [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 238000003491 array Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- GPXJNWSHGFTCBW-UHFFFAOYSA-N Indium phosphide Chemical compound [In]#P GPXJNWSHGFTCBW-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 239000008186 active pharmaceutical agent Substances 0.000 description 1
- 238000000149 argon plasma sintering Methods 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000002800 charge carrier Substances 0.000 description 1
- 150000001793 charged compounds Chemical class 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000000407 epitaxy Methods 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- 238000009616 inductively coupled plasma Methods 0.000 description 1
- 230000005596 ionic collisions Effects 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- 239000006193 liquid solution Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000005459 micromachining Methods 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 238000009828 non-uniform distribution Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 239000004038 photonic crystal Substances 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 238000006862 quantum yield reaction Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 238000007788 roughening Methods 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000013518 transcription Methods 0.000 description 1
- 230000035897 transcription Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/20—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a particular shape, e.g. curved or truncated substrate
- H01L33/22—Roughened surfaces, e.g. at the interface between epitaxial layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/20—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a particular shape, e.g. curved or truncated substrate
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/005—Processes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/005—Processes
- H01L33/0062—Processes for devices with an active region comprising only III-V compounds
- H01L33/0066—Processes for devices with an active region comprising only III-V compounds with a substrate not being a III-V compound
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/005—Processes
- H01L33/0062—Processes for devices with an active region comprising only III-V compounds
- H01L33/0066—Processes for devices with an active region comprising only III-V compounds with a substrate not being a III-V compound
- H01L33/007—Processes for devices with an active region comprising only III-V compounds with a substrate not being a III-V compound comprising nitride compounds
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/26—Materials of the light emitting region
- H01L33/30—Materials of the light emitting region containing only elements of group III and group V of the periodic system
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/26—Materials of the light emitting region
- H01L33/30—Materials of the light emitting region containing only elements of group III and group V of the periodic system
- H01L33/32—Materials of the light emitting region containing only elements of group III and group V of the periodic system containing nitrogen
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2933/00—Details relating to devices covered by the group H01L33/00 but not provided for in its subgroups
- H01L2933/0083—Periodic patterns for optical field-shaping in or on the semiconductor body or semiconductor body package, e.g. photonic bandgap structures
Description
本明細書は、例えば、以下の事項も提供する。
(項目1)
少なくとも2つの層を含む複数の層
を含み、
前記複数の層の第1の層は、ナノ構造表面を有し、前記ナノ構造表面は、波配向構造パターンを有する、伸長リッジ要素の準周期性かつ異方性のアレイを含み、各リッジ要素は、波状断面を有し、実質的に、第1の方向に配向される、発光ダイオード。
(項目2)
前記第1の層は、半導体層である、項目1に記載の発光ダイオード。
(項目3)
前記第1の層は、アルミニウム含有半導体を含む、項目2に記載の発光ダイオード。
(項目4)
前記アルミニウム含有半導体は、AlAs、AlGaAs、AlGaInP、AlGaN、およびAlGaInNから選択される、項目3に記載の発光ダイオード。
(項目5)
前記第1の層は、ガリウム含有半導体を含む、項目2に記載の発光ダイオード。
(項目6)
前記アルミニウム含有半導体は、GaP、GaAs、GaN、AlGaAs、AlGaInP、AlGaN、およびAlGaInNから選択される、項目5に記載の発光ダイオード。
(項目7)
前記ナノ構造表面は、発光表面である、項目1に記載の発光ダイオード。
(項目8)
前記ナノ構造表面は、前記複数の層の背面外側に配置される、項目7に記載の発光ダイオード。
(項目9)
前記ナノ構造表面は、前記複数の層の第2の層に隣接して配置される、内部表面である、項目7に記載の発光ダイオード。
(項目10)
前記第1の層は、少なくとも2つの半導体層間に配置される、透明無機材料を含む、項目1に記載の発光ダイオード。
(項目11)
前記複数の層は、サファイア(Al 2 O 3 )、シリコン(Si)、炭化ケイ素(SiC)、スピネル(MgAl 2 O 4 )、ネオジガレート(NdGaO 3 )、没食子酸リチウム(LiGaO 2 )、酸化亜鉛(ZnO)、酸化マグネシウム(MgO)、ガリウムリン(GaP)、ガリウムヒ素(GaAs)、および窒化ガリウム(GaN)から選択される、基板を含む、項目1に記載の発光ダイオード。
(項目12)
項目1に記載の発光ダイオードを含む、素子。
(項目13)
純窒化アルミニウム以外のアルミニウム含有半導体材料から形成され、波配向構造パターンおよび波状断面を有する、準周期性かつ異方性のアレイに配置される、複数の伸長要素であって、前記複数の伸長要素のうちの少なくともいくつかは、前記アルミニウム含有半導体材料の内側領域と、前記内側領域の第1の部分を被覆する、窒化アルミニウムを含有する第1の外側領域との断面構造を有する、複数の伸長要素
を含む、硬質ナノマスク。
(項目14)
前記内側領域の第2の部分を被覆し、波高点において、前記第1の外側領域と接続する、窒化アルミニウムを含有する第2の外側領域をさらに含み、前記第1の外側領域は、実質的に、前記第2の外側領域より厚い、項目13に記載のナノマスク。
(項目15)
前記アルミニウム含有半導体材料は、AlAs、AlGaAs、AlGaInP、AlGaN、およびAlGaInNから選択される、項目13に記載のナノマスク。
(項目16)
発光半導体素子を作製する方法であって、
非晶質シリコンの層をアルミニウム含有半導体層の表面上に堆積するステップと、
前記非晶質シリコンの表面を窒素イオンの斜めビームによって照射し、波配向構造を前記非晶質シリコンの層内に形成するステップと、
前記非晶質シリコンの表面を窒素イオンの斜めビームによってさらに照射し、前記波配向構造を前記アルミニウム含有半導体層の表面に転写し、ナノマスクを形成するステップであって、前記ナノマスクは、波配向構造パターンおよび波状断面を有する、伸長要素の準周期性かつ異方性のアレイを含む、ステップと
を含む、方法。
(項目17)
前記ナノマスクは、前記アルミニウム含有半導体層の内側領域と、前記内側領域の第1の部分を被覆する、窒化アルミニウムを含有する第1の外側領域と、前記内側領域の第2の部分を被覆し、波高点において、前記第1の外側領域と接続する、窒化アルミニウムを含有する第2の外側領域との断面構造を有し、前記第1の外側領域は、実質的に、前記第2の外側領域より厚い、項目16に記載の方法。
(項目18)
前記ナノマスクをエッチングし、前記第2の外側領域を除去するステップをさらに含む、項目17に記載の方法。
(項目19)
前記第2の外側領域を除去後、前記第2の外側領域の下方にあった前記アルミニウム含有半導体層の部分をエッチングするステップをさらに含む、項目18に記載の方法。
(項目20)
前記ナノマスクを形成後、前記非晶質シリコンを除去するステップをさらに含む、項目16に記載の方法。
Claims (20)
- 少なくとも2つの層を含む複数の層
を含み、
前記複数の層の第1の層は、ナノ構造表面を有し、前記ナノ構造表面は、波配向構造パターンを有する、伸長リッジ要素の準周期性かつ異方性のアレイを含み、各リッジ要素は、波状断面を有し、実質的に、第1の方向に配向される、発光ダイオード。 - 前記第1の層は、半導体層である、請求項1に記載の発光ダイオード。
- 前記第1の層は、アルミニウム含有半導体を含む、請求項2に記載の発光ダイオード。
- 前記アルミニウム含有半導体は、AlAs、AlGaAs、AlGaInP、AlGaN、およびAlGaInNから選択される、請求項3に記載の発光ダイオード。
- 前記第1の層は、ガリウム含有半導体を含む、請求項2に記載の発光ダイオード。
- 前記ガリウム含有半導体は、GaP、GaAs、GaN、AlGaAs、AlGaInP、AlGaN、およびAlGaInNから選択される、請求項5に記載の発光ダイオード。
- 前記ナノ構造表面は、発光表面である、請求項1に記載の発光ダイオード。
- 前記ナノ構造表面は、前記複数の層の背面外側に配置される、請求項7に記載の発光ダイオード。
- 前記ナノ構造表面は、前記複数の層の第2の層に隣接して配置される、内部表面である、請求項7に記載の発光ダイオード。
- 前記第1の層は、少なくとも2つの半導体層間に配置される、透明無機材料を含む、請求項1に記載の発光ダイオード。
- 前記複数の層は、サファイア(Al2O3)、シリコン(Si)、炭化ケイ素(SiC)、スピネル(MgAl2O4)、ネオジガレート(NdGaO3)、没食子酸リチウム(LiGaO2)、酸化亜鉛(ZnO)、酸化マグネシウム(MgO)、ガリウムリン(GaP)、ガリウムヒ素(GaAs)、および窒化ガリウム(GaN)から選択される、基板を含む、請求項1に記載の発光ダイオード。
- 請求項1に記載の発光ダイオードを含む、素子。
- 純窒化アルミニウム以外のアルミニウム含有半導体材料から形成され、波配向構造パターンおよび波状断面を有する、準周期性かつ異方性のアレイに配置される、複数の伸長要素であって、前記複数の伸長要素のうちの少なくともいくつかは、前記アルミニウム含有半導体材料の内側領域と、前記内側領域の第1の部分を被覆する、窒化アルミニウムを含有する第1の外側領域との断面構造を有する、複数の伸長要素
を含む、硬質ナノマスク。 - 前記内側領域の第2の部分を被覆し、波高点において、前記第1の外側領域と接続する、窒化アルミニウムを含有する第2の外側領域をさらに含み、前記第1の外側領域は、実質的に、前記第2の外側領域より厚い、請求項13に記載のナノマスク。
- 前記アルミニウム含有半導体材料は、AlAs、AlGaAs、AlGaInP、AlGaN、およびAlGaInNから選択される、請求項13に記載のナノマスク。
- 発光半導体素子を作製する方法であって、
非晶質シリコンの層をアルミニウム含有半導体層の表面上に堆積するステップと、
前記非晶質シリコンの表面を窒素イオンの斜めビームによって照射し、波配向構造を前記非晶質シリコンの層内に形成するステップと、
前記非晶質シリコンの表面を窒素イオンの斜めビームによってさらに照射し、前記波配向構造を前記アルミニウム含有半導体層の表面に転写し、ナノマスクを形成するステップであって、前記ナノマスクは、波配向構造パターンおよび波状断面を有する、伸長要素の準周期性かつ異方性のアレイを含む、ステップと
を含む、方法。 - 前記ナノマスクは、前記アルミニウム含有半導体層の内側領域と、前記内側領域の第1の部分を被覆する、窒化アルミニウムを含有する第1の外側領域と、前記内側領域の第2の部分を被覆し、波高点において、前記第1の外側領域と接続する、窒化アルミニウムを含有する第2の外側領域との断面構造を有し、前記第1の外側領域は、実質的に、前記第2の外側領域より厚い、請求項16に記載の方法。
- 前記ナノマスクをエッチングし、前記第2の外側領域を除去するステップをさらに含む、請求項17に記載の方法。
- 前記第2の外側領域を除去後、前記第2の外側領域の下方にあった前記アルミニウム含有半導体層の部分をエッチングするステップをさらに含む、請求項18に記載の方法。
- 前記ナノマスクを形成後、前記非晶質シリコンを除去するステップをさらに含む、請求項16に記載の方法。
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WO2013006077A1 (en) * | 2011-07-06 | 2013-01-10 | Wostec, Inc. | Solar cell with nanostructured layer and methods of making and using |
KR20140054183A (ko) | 2011-08-05 | 2014-05-08 | 워스텍, 인코포레이티드 | 나노구조 층을 갖는 발광 다이오드 및 그의 제조 및 사용 방법 |
WO2013089578A1 (en) | 2011-12-12 | 2013-06-20 | Wostec, Inc. | Sers-sensor with nanostructured surface and methods of making and using |
WO2013109157A1 (en) * | 2012-01-18 | 2013-07-25 | Wostec, Inc. | Arrangements with pyramidal features having at least one nanostructured surface and methods of making and using |
US9500789B2 (en) | 2013-03-13 | 2016-11-22 | Wostec, Inc. | Polarizer based on a nanowire grid |
-
2011
- 2011-08-05 KR KR1020147005864A patent/KR20140054183A/ko not_active Application Discontinuation
- 2011-08-05 RU RU2014104535/28A patent/RU2569638C2/ru active
- 2011-08-05 EP EP11870692.8A patent/EP2740162B1/en active Active
- 2011-08-05 WO PCT/RU2011/000594 patent/WO2013022365A1/en unknown
- 2011-08-05 JP JP2014523888A patent/JP5840294B2/ja active Active
- 2011-08-05 CN CN201180073886.7A patent/CN103999244B/zh active Active
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2014
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2015
- 2015-11-13 US US14/941,253 patent/US9660142B2/en active Active
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EP2740162A1 (en) | 2014-06-11 |
KR20140054183A (ko) | 2014-05-08 |
RU2569638C2 (ru) | 2015-11-27 |
RU2014104535A (ru) | 2015-09-10 |
US20160133791A1 (en) | 2016-05-12 |
US20140151715A1 (en) | 2014-06-05 |
EP2740162B1 (en) | 2019-07-03 |
CN103999244A (zh) | 2014-08-20 |
EP2740162A4 (en) | 2015-03-11 |
US9660142B2 (en) | 2017-05-23 |
WO2013022365A1 (en) | 2013-02-14 |
CN103999244B (zh) | 2017-02-15 |
JP2014522119A (ja) | 2014-08-28 |
US9224918B2 (en) | 2015-12-29 |
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