JP5778141B2 - 基板上に材料を印刷するための方法 - Google Patents
基板上に材料を印刷するための方法 Download PDFInfo
- Publication number
- JP5778141B2 JP5778141B2 JP2012517906A JP2012517906A JP5778141B2 JP 5778141 B2 JP5778141 B2 JP 5778141B2 JP 2012517906 A JP2012517906 A JP 2012517906A JP 2012517906 A JP2012517906 A JP 2012517906A JP 5778141 B2 JP5778141 B2 JP 5778141B2
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- Prior art keywords
- layer
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- printing
- photopolymerizable
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- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2002—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
- G03F7/2012—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image using liquid photohardening compositions, e.g. for the production of reliefs such as flexographic plates or stamps
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
- G02F1/133711—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by organic films, e.g. polymeric films
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2002—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
- G03F7/2014—Contact or film exposure of light sensitive plates such as lithographic plates or circuit boards, e.g. in a vacuum frame
- G03F7/2016—Contact mask being integral part of the photosensitive element and subject to destructive removal during post-exposure processing
- G03F7/2018—Masking pattern obtained by selective application of an ink or a toner, e.g. ink jet printing
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2002—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
- G03F7/2014—Contact or film exposure of light sensitive plates such as lithographic plates or circuit boards, e.g. in a vacuum frame
- G03F7/2016—Contact mask being integral part of the photosensitive element and subject to destructive removal during post-exposure processing
- G03F7/202—Masking pattern being obtained by thermal means, e.g. laser ablation
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2022—Multi-step exposure, e.g. hybrid; backside exposure; blanket exposure, e.g. for image reversal; edge exposure, e.g. for edge bead removal; corrective exposure
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T403/00—Joints and connections
- Y10T403/57—Distinct end coupler
- Y10T403/5741—Separate screw or pin-type connections
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Nonlinear Science (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Mathematical Physics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
- Printing Methods (AREA)
- Manufacture Or Reproduction Of Printing Formes (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US22266909P | 2009-07-02 | 2009-07-02 | |
| US61/222,669 | 2009-07-02 | ||
| PCT/US2010/040723 WO2011002967A1 (en) | 2009-07-02 | 2010-07-01 | Method for printing a material onto a substrate |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2012532343A JP2012532343A (ja) | 2012-12-13 |
| JP2012532343A5 JP2012532343A5 (enExample) | 2013-06-27 |
| JP5778141B2 true JP5778141B2 (ja) | 2015-09-16 |
Family
ID=42697258
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012517906A Expired - Fee Related JP5778141B2 (ja) | 2009-07-02 | 2010-07-01 | 基板上に材料を印刷するための方法 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US8899148B2 (enExample) |
| EP (1) | EP2448764B1 (enExample) |
| JP (1) | JP5778141B2 (enExample) |
| WO (1) | WO2011002967A1 (enExample) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8241835B2 (en) | 2008-01-30 | 2012-08-14 | E I Du Pont De Nemours And Company | Device and method for preparing relief printing form |
| US8652761B2 (en) * | 2011-02-18 | 2014-02-18 | David A. Recchia | Photosensitive resin laminate and thermal processing of the same |
| WO2013032860A1 (en) * | 2011-08-26 | 2013-03-07 | E. I. Du Pont De Nemours And Company | Method for preparing a relief printing form |
| US9097974B2 (en) | 2012-08-23 | 2015-08-04 | E I Du Pont De Nemours And Company | Method for preparing a relief printing form |
| US9711744B2 (en) * | 2012-12-21 | 2017-07-18 | 3M Innovative Properties Company | Patterned structured transfer tape |
| JP6592246B2 (ja) * | 2015-01-27 | 2019-10-16 | 株式会社コムラテック | 電子回路基板およびその製造方法 |
| CN104536210B (zh) * | 2015-02-03 | 2017-09-29 | 京东方科技集团股份有限公司 | 一种配向膜印刷板的制备方法 |
| US9678429B2 (en) | 2015-08-18 | 2017-06-13 | Macdermid Printing Solutions, Llc | Method of creating hybrid printing dots in a flexographic printing plate |
| JP6278942B2 (ja) * | 2015-10-21 | 2018-02-14 | 日本航空電子工業株式会社 | フレキソ印刷による絶縁膜の形成方法 |
| BR112018067374B1 (pt) | 2016-02-26 | 2023-05-02 | Trio Labs, Inc | Sistema para fabricação de compósito em pó e método para fabricação de um compósito em pó |
Family Cites Families (91)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB574244A (en) | 1958-07-25 | 1945-12-28 | Sparklets Ltd | Improvements in or relating to means for producing a spray of atomised liquid |
| NL101499C (enExample) | 1951-08-20 | |||
| BE552701A (enExample) | 1955-12-23 | |||
| NL287134A (enExample) | 1959-08-05 | |||
| BE611541A (enExample) | 1961-01-13 | |||
| US3264103A (en) | 1962-06-27 | 1966-08-02 | Du Pont | Photopolymerizable relief printing plates developed by dry thermal transfer |
| US4323636A (en) | 1971-04-01 | 1982-04-06 | E. I. Du Pont De Nemours And Company | Photosensitive block copolymer composition and elements |
| CA1099435A (en) | 1971-04-01 | 1981-04-14 | Gwendyline Y. Y. T. Chen | Photosensitive block copolymer composition and elements |
| US3796602A (en) | 1972-02-07 | 1974-03-12 | Du Pont | Process for stripping polymer masks from circuit boards |
| US4045231A (en) | 1975-03-15 | 1977-08-30 | Tokyo Ohka Kogyo Kabushiki Kaisha | Photosensitive resin composition for flexographic printing plates |
| JPS538655A (en) | 1976-07-13 | 1978-01-26 | Teijin Ltd | Method of removing nonnset resin |
| US4177074A (en) | 1978-01-25 | 1979-12-04 | E. I. Du Pont De Nemours And Company | Butadiene/acrylonitrile photosensitive, elastomeric polymer compositions for flexographic printing plates |
| JPS55135838A (en) | 1979-04-12 | 1980-10-23 | Asahi Chem Ind Co Ltd | Surface treating method for photosensitive elastomer printing plate |
| DE3137416A1 (de) | 1981-09-19 | 1983-03-31 | Basf Ag, 6700 Ludwigshafen | Fotopolymerisierbare gemische und elemente daraus |
| US4431723A (en) | 1981-09-21 | 1984-02-14 | E. I. Du Pont De Nemours And Company | Aqueous processible, alcohol resistant flexographic printing plates |
| JPS5863939A (ja) * | 1981-10-13 | 1983-04-16 | Asahi Chem Ind Co Ltd | 印刷原版及びその製造方法 |
| US4460675A (en) | 1982-01-21 | 1984-07-17 | E. I. Du Pont De Nemours And Company | Process for preparing an overcoated photopolymer printing plate |
| US4427759A (en) | 1982-01-21 | 1984-01-24 | E. I. Du Pont De Nemours And Company | Process for preparing an overcoated photopolymer printing plate |
| US4517279A (en) | 1982-08-31 | 1985-05-14 | Uniroyal, Inc. | Photosensitive elastomeric polymer composition for flexographic printing plates - processable in semi-aqueous basic solution or solvent systems |
| US4540649A (en) | 1984-09-12 | 1985-09-10 | Napp Systems (Usa) Inc. | Water developable photopolymerizable composition and printing plate element containing same |
| US4753865A (en) | 1986-01-22 | 1988-06-28 | E. I. Du Pont De Nemours And Company | Photosensitive compositions containing microgels |
| US4726877A (en) | 1986-01-22 | 1988-02-23 | E. I. Du Pont De Nemours And Company | Methods of using photosensitive compositions containing microgels |
| GB8700599D0 (en) | 1987-01-12 | 1987-02-18 | Vickers Plc | Printing plate precursors |
| US4806506A (en) | 1987-09-14 | 1989-02-21 | E. I. Du Pont De Nemours And Company | Process for detackifying photopolymer flexographic printing plates |
| US4894315A (en) | 1988-08-30 | 1990-01-16 | E. I. Du Pont De Nemours And Company | Process for making flexographic printing plates with increased flexibility |
| US4956252A (en) | 1988-08-30 | 1990-09-11 | E. I. Dupont De Nemours And Company | Aqueous processible photosensitive compositions containing core shell microgels |
| NL8900784A (nl) | 1989-03-30 | 1990-10-16 | Grafische Handelsonderneming G | Belichtingsinrichting voor het kopieren van beeldoriginelen. |
| JPH03239263A (ja) * | 1990-02-16 | 1991-10-24 | Fujitsu Ltd | 光硬化性樹脂組成物 |
| JPH0427113A (ja) | 1990-04-23 | 1992-01-30 | Tadahiro Omi | レジスト処理装置、レジスト処理方法及びレジストパターン |
| EP0460919A3 (en) | 1990-06-05 | 1993-04-28 | Nippon Paint Co., Ltd. | Process for exposing a photosensitive resin composition to light |
| US5215859A (en) | 1990-07-26 | 1993-06-01 | Minnesota Mining And Manufacturing Company | Backside ionizing irradiation in a flexographic printing plate process |
| US5175072A (en) | 1990-07-26 | 1992-12-29 | Minnesota Mining And Manufacturing Company | Flexographic printing plate process |
| US5015556A (en) | 1990-07-26 | 1991-05-14 | Minnesota Mining And Manufacturing Company | Flexographic printing plate process |
| EP0469735B1 (en) | 1990-07-31 | 1998-06-10 | Minnesota Mining And Manufacturing Company | Device for forming flexographic printing plate |
| DE69128274T2 (de) | 1990-11-05 | 1998-04-23 | Ciba Geigy Ag | Photopolymerisierbare Zusammensetzungen |
| SE502087C2 (sv) | 1991-05-28 | 1995-08-07 | Misomex Ab | Förfarande och anordning för laserkopiering med höj- och sänkbar laserenhet |
| DE4133290A1 (de) | 1991-10-08 | 1993-04-15 | Herberts Gmbh | Verfahren zur herstellung von mehrschichtlackierungen unter verwendung von radikalisch und/oder kationisch polymerisierbaren klarlacken |
| JP3150746B2 (ja) | 1992-03-06 | 2001-03-26 | 大阪酸素工業株式会社 | 立体構造物の表面に樹脂被膜を形成するための装置 |
| US5719009A (en) | 1992-08-07 | 1998-02-17 | E. I. Du Pont De Nemours And Company | Laser ablatable photosensitive elements utilized to make flexographic printing plates |
| US5607814A (en) | 1992-08-07 | 1997-03-04 | E. I. Du Pont De Nemours And Company | Process and element for making a relief image using an IR sensitive layer |
| US5262275A (en) | 1992-08-07 | 1993-11-16 | E. I. Du Pont De Nemours And Company | Flexographic printing element having an IR ablatable layer and process for making a flexographic printing plate |
| JPH06214377A (ja) * | 1993-01-19 | 1994-08-05 | Toshiba Corp | Apr印刷版 |
| US5679485A (en) | 1993-03-31 | 1997-10-21 | Nippon Zeon Co., Ltd. | Photosensitive composition, photosensitive rubber plate and process for producing same, and flexographic plate and process for producing same |
| US5301610A (en) | 1993-04-30 | 1994-04-12 | E. I. Du Pont De Nemours And Company | Method and apparatus for making spiral wound sleeves for printing cylinders and product thereof |
| US6210854B1 (en) | 1993-08-27 | 2001-04-03 | E. I. Du Pont De Nemours And Company | Aqueous developable flexographic printing plate |
| JP3044689B2 (ja) | 1994-10-14 | 2000-05-22 | 日本ゼオン株式会社 | 感光性エラストマー組成物及び感光性ゴム版 |
| DE69512007T2 (de) | 1994-12-13 | 2000-01-27 | Macdermid Imaging Technology Inc., Waterbury | Weichreliefsphotopolymerdruckplatten für Flexographie |
| US5863704A (en) | 1995-04-26 | 1999-01-26 | Nippon Zeon Company, Ltd. | Photosensitive composition and photosensitive rubber plate |
| US5506086A (en) | 1995-05-01 | 1996-04-09 | E. I. Du Pont De Nemours And Company | Process for making a flexographic printing plate |
| US6238837B1 (en) | 1995-05-01 | 2001-05-29 | E.I. Du Pont De Nemours And Company | Flexographic element having an infrared ablatable layer |
| US5654125A (en) | 1995-05-01 | 1997-08-05 | E. I. Du Pont De Nemours And Company | Laser apparatus and process of use |
| EP0830217B1 (de) | 1995-05-04 | 1999-11-24 | NÖLLE GmbH | Vorrichtung zum härten einer schicht auf einem substrat |
| US5798019A (en) | 1995-09-29 | 1998-08-25 | E. I. Du Pont De Nemours And Company | Methods and apparatus for forming cylindrical photosensitive elements |
| DE19536805A1 (de) | 1995-10-02 | 1997-04-03 | Basf Lacke & Farben | Zur Herstellung von Flexodruckplatten durch digitale Informationsübertragung geeignetes mehrschichtiges Aufzeichnungselement |
| US5766819A (en) | 1995-11-29 | 1998-06-16 | E. I. Dupont De Nemours And Company | Donor elements, assemblages, and associated processes with flexible ejection layer(s) for laser-induced thermal transfer |
| US5888697A (en) | 1996-07-03 | 1999-03-30 | E. I. Du Pont De Nemours And Company | Flexographic printing element having a powder layer |
| US5771809A (en) | 1996-10-18 | 1998-06-30 | Hecht; Myer H. | Method of making a coating plate with raised printing areas |
| US6143451A (en) | 1996-11-26 | 2000-11-07 | E. I. Du Pont De Nemours And Company | Imaged laserable assemblages and associated processes with high speed and durable image-transfer characteristics for laser-induced thermal transfer |
| US6217965B1 (en) | 1997-05-23 | 2001-04-17 | Creo Srl | Flexographic varnishing plates |
| US5840463A (en) | 1997-07-14 | 1998-11-24 | E. I. Du Pont De Nemours And Company | Photosensitive donor element assemblages and associated process for laser-induced thermal transfer |
| EP0908778B1 (en) | 1997-09-16 | 2002-11-27 | Asahi Kasei Kabushiki Kaisha | Photosensitive element for flexographic printing |
| EP0945753B1 (en) | 1998-03-25 | 2003-03-05 | Noritsu Koki Co., Ltd. | Photographic processing apparatus |
| DE19909152C2 (de) | 1999-03-02 | 2001-06-07 | Du Pont Deutschland | Photopolymerisierbares Aufzeichnungselement und Verfahren zur Herstellung von flexographischen Druckformen |
| US6797454B1 (en) | 1999-09-07 | 2004-09-28 | E. I. Du Pont De Nemours And Company | Method and apparatus for thermal processing a photosensitive element |
| DE19957900A1 (de) | 1999-12-01 | 2001-06-07 | Basf Ag | Lichthärtung von strahlungshärtbaren Massen unter Schutzgas |
| EP1160627A3 (en) | 2000-06-01 | 2004-08-18 | ASML Netherlands B.V. | Lithographic apparatus, device manufacturing method, and device manufactured thereby |
| DE10061116A1 (de) | 2000-12-07 | 2002-06-13 | Basf Drucksysteme Gmbh | Fotoempfindliches flexographisches Druckelement mit mindestens zwei IR-ablativen Schichten |
| US6773859B2 (en) | 2001-03-06 | 2004-08-10 | E. I. Du Pont De Nemours And Company | Process for making a flexographic printing plate and a photosensitive element for use in the process |
| US7348123B2 (en) | 2001-04-18 | 2008-03-25 | E.I. Du Pont De Nemours And Company | Process for preparing a flexographic printing plate |
| US6766740B1 (en) | 2002-02-21 | 2004-07-27 | Precision Rubber Plate Co., Inc. | Apparatus and method using a UV light collimator to expose a photopolymer plate |
| CA2477779A1 (en) | 2002-03-14 | 2003-09-25 | E.I. Du Pont De Nemours And Company | Photosensitive element for use as flexographic printing plate |
| DE10241851A1 (de) | 2002-09-09 | 2004-03-18 | Basf Drucksysteme Gmbh | Verfahren zur Herstellung von Flexodruckformen durch thermische Entwicklung |
| JP4080839B2 (ja) | 2002-10-21 | 2008-04-23 | シャープ株式会社 | フレキソ印刷版の製造方法および印刷物の製造方法 |
| MXPA05008777A (es) | 2003-02-19 | 2005-10-18 | Asahi Kasei Chemicals Corp | Proceso para producir placa de impresion revelable con agua para el uso en implesion en relieve. |
| US20040234886A1 (en) | 2003-03-12 | 2004-11-25 | Rudolph Michael Lee | Photosensitive element for use as flexographic printing plate |
| JP2005017352A (ja) | 2003-06-23 | 2005-01-20 | Fuji Photo Film Co Ltd | フレキソ印刷版の製版方法 |
| DE112004001662B4 (de) | 2003-09-12 | 2013-08-08 | Eastman Kodak Co. (N.D.Ges.D. Staates New Jersey) | Verfahren zur Erzeugung einer Reliefdruckplatte |
| JP2005283778A (ja) * | 2004-03-29 | 2005-10-13 | Fuji Photo Film Co Ltd | 印刷版の作製方法および印刷版露光装置 |
| JP2005283961A (ja) | 2004-03-30 | 2005-10-13 | Fuji Photo Film Co Ltd | 印刷版露光装置 |
| JP4342373B2 (ja) * | 2004-04-30 | 2009-10-14 | 東京応化工業株式会社 | 凸版印刷用感光性印刷原版、凸版印刷版の製造方法、および該製造方法用遮光インク |
| US7632625B2 (en) | 2004-05-25 | 2009-12-15 | Roberts David H | Method of pre-exposing relief image printing plate |
| CN101018819B (zh) | 2004-09-13 | 2011-12-07 | 旭化成电子材料株式会社 | 制备光敏树脂的固化产物的方法 |
| US7401552B2 (en) | 2004-09-16 | 2008-07-22 | Agfa Graphics N.V. | Method for manufacturing a flexographic printing master |
| US7081331B2 (en) | 2004-11-12 | 2006-07-25 | Ryan Vest | Method for thermally processing photosensitive printing sleeves |
| WO2008034810A2 (en) | 2006-09-18 | 2008-03-27 | Agfa Graphics Nv | A device and a process for coating a peripheral surface of a sleeve body |
| JP2009034913A (ja) * | 2007-08-02 | 2009-02-19 | Nakan Corp | フレキソ印刷版およびその製造方法、薄膜および液晶表示素子の製造方法 |
| US7767383B2 (en) * | 2007-08-08 | 2010-08-03 | Roberts David H | Method of pre-exposing relief image printing plate |
| JP5128210B2 (ja) * | 2007-09-03 | 2013-01-23 | イーストマン コダック カンパニー | 凸版印刷版の製造方法 |
| ES2578680T3 (es) | 2007-09-07 | 2016-07-29 | Precision Rubber Plate Co., Inc | Sistema y método para exponer un placa de polímero digital |
| US8241835B2 (en) | 2008-01-30 | 2012-08-14 | E I Du Pont De Nemours And Company | Device and method for preparing relief printing form |
| US20090245613A1 (en) * | 2008-03-31 | 2009-10-01 | Wu Judy Wailing | Method And System For Producing Digital Electronic Document Security Graphics Files |
-
2010
- 2010-07-01 EP EP10731880.0A patent/EP2448764B1/en not_active Not-in-force
- 2010-07-01 US US13/320,831 patent/US8899148B2/en active Active
- 2010-07-01 WO PCT/US2010/040723 patent/WO2011002967A1/en not_active Ceased
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| WO2011002967A1 (en) | 2011-01-06 |
| EP2448764B1 (en) | 2016-03-02 |
| EP2448764A1 (en) | 2012-05-09 |
| JP2012532343A (ja) | 2012-12-13 |
| US20120060711A1 (en) | 2012-03-15 |
| US8899148B2 (en) | 2014-12-02 |
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