JP5718336B2 - 精密エッジ仕上げのための装置及び方法 - Google Patents
精密エッジ仕上げのための装置及び方法 Download PDFInfo
- Publication number
- JP5718336B2 JP5718336B2 JP2012526956A JP2012526956A JP5718336B2 JP 5718336 B2 JP5718336 B2 JP 5718336B2 JP 2012526956 A JP2012526956 A JP 2012526956A JP 2012526956 A JP2012526956 A JP 2012526956A JP 5718336 B2 JP5718336 B2 JP 5718336B2
- Authority
- JP
- Japan
- Prior art keywords
- edge
- finishing
- finishing material
- sensing layer
- sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000000034 method Methods 0.000 title claims description 46
- 239000000463 material Substances 0.000 claims description 149
- 238000003754 machining Methods 0.000 claims description 52
- 238000012545 processing Methods 0.000 claims description 36
- 239000003302 ferromagnetic material Substances 0.000 claims description 17
- 230000005294 ferromagnetic effect Effects 0.000 claims description 7
- 239000012530 fluid Substances 0.000 description 56
- 239000011521 glass Substances 0.000 description 43
- 238000005498 polishing Methods 0.000 description 33
- 230000001939 inductive effect Effects 0.000 description 17
- 238000000227 grinding Methods 0.000 description 16
- 230000005291 magnetic effect Effects 0.000 description 8
- 238000006073 displacement reaction Methods 0.000 description 7
- 230000008569 process Effects 0.000 description 7
- 238000005259 measurement Methods 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 238000005452 bending Methods 0.000 description 3
- 230000008901 benefit Effects 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 238000004891 communication Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 230000002349 favourable effect Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000005096 rolling process Methods 0.000 description 2
- 230000003068 static effect Effects 0.000 description 2
- 230000037303 wrinkles Effects 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 239000002178 crystalline material Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 238000007730 finishing process Methods 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000002241 glass-ceramic Substances 0.000 description 1
- 238000005342 ion exchange Methods 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 230000009191 jumping Effects 0.000 description 1
- 238000000608 laser ablation Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000012805 post-processing Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000003252 repetitive effect Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 230000007480 spreading Effects 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B9/00—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
- B24B9/02—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
- B24B9/06—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
- B24B9/08—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass
- B24B9/10—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass of plate glass
- B24B9/102—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass of plate glass for travelling sheets
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
- B24B49/02—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation according to the instantaneous size and required size of the workpiece acted upon, the measuring or gauging being continuous or intermittent
- B24B49/04—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation according to the instantaneous size and required size of the workpiece acted upon, the measuring or gauging being continuous or intermittent involving measurement of the workpiece at the place of grinding during grinding operation
- B24B49/045—Specially adapted gauging instruments
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
- B24B49/10—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation involving electrical means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B9/00—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
- B24B9/02—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
- B24B9/06—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
- B24B9/08—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass
- B24B9/10—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass of plate glass
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Inorganic Chemistry (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US23746809P | 2009-08-27 | 2009-08-27 | |
| US61/237,468 | 2009-08-27 | ||
| PCT/US2010/046721 WO2011031506A2 (en) | 2009-08-27 | 2010-08-26 | Apparatus and method for precision edge finishing |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2013503049A JP2013503049A (ja) | 2013-01-31 |
| JP2013503049A5 JP2013503049A5 (enExample) | 2013-10-10 |
| JP5718336B2 true JP5718336B2 (ja) | 2015-05-13 |
Family
ID=43733041
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012526956A Expired - Fee Related JP5718336B2 (ja) | 2009-08-27 | 2010-08-26 | 精密エッジ仕上げのための装置及び方法 |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP5718336B2 (enExample) |
| KR (1) | KR20120057633A (enExample) |
| CN (1) | CN102574260B (enExample) |
| TW (1) | TWI503206B (enExample) |
| WO (1) | WO2011031506A2 (enExample) |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101389377B1 (ko) * | 2012-09-05 | 2014-04-25 | 삼성코닝정밀소재 주식회사 | 유리기판 면취 장치 |
| US9733670B2 (en) | 2012-09-26 | 2017-08-15 | Apple Inc. | Computer display or cover glass/cell attachment to frame |
| CN103612174A (zh) * | 2013-12-09 | 2014-03-05 | 秦皇岛星晟科技有限公司 | 金刚石磨轮自动对中装置 |
| CN107107296B (zh) | 2014-09-22 | 2020-01-31 | 康宁股份有限公司 | 用于处理玻璃物品边缘的研磨加工设备 |
| JP6514542B2 (ja) * | 2015-03-26 | 2019-05-15 | AvanStrate株式会社 | ガラス基板の製造方法 |
| JP2018522810A (ja) * | 2015-07-21 | 2018-08-16 | コーニング インコーポレイテッド | ガラス基板をエッジ仕上げするための方法および装置 |
| CN107285610B (zh) * | 2016-03-31 | 2020-07-10 | 北京小米移动软件有限公司 | 热弯玻璃结构的加工方法、热弯玻璃结构和电子设备 |
| CN106041667A (zh) * | 2016-05-20 | 2016-10-26 | 京东方科技集团股份有限公司 | 一种基板及其磨边检测方法、对位方法和装置 |
| CN106926084A (zh) * | 2017-04-28 | 2017-07-07 | 京东方科技集团股份有限公司 | 玻璃边缘研磨设备 |
| EP3537245A1 (en) * | 2018-03-08 | 2019-09-11 | Beijing Apollo Ding Rong Solar Technology Co., Ltd. | Edging method and apparatus |
| CN108436650A (zh) * | 2018-03-08 | 2018-08-24 | 北京铂阳顶荣光伏科技有限公司 | 磨边方法及装置 |
| CN111037458A (zh) * | 2019-12-17 | 2020-04-21 | 西安奕斯伟硅片技术有限公司 | 一种监测装置和硅片处理装置 |
| EP4023392A1 (en) * | 2020-12-28 | 2022-07-06 | Tecnomec Borghi S.r.l. | Apparatus for deburring and trimming the edges of slab-shaped objects |
Family Cites Families (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63215904A (ja) * | 1987-03-04 | 1988-09-08 | Mitsubishi Electric Corp | 光変位計によるマ−キング線検出方法 |
| JPH0398745A (ja) * | 1989-09-06 | 1991-04-24 | Kawasaki Heavy Ind Ltd | 数値制御式孔明け加工機のワーク位置自動検出方法及びその装置 |
| FI84564C (fi) * | 1990-03-29 | 1991-12-27 | Tamglass Oy | Anordning foer slipning av en glasskivas kant. |
| KR960029026A (ko) * | 1995-01-17 | 1996-08-17 | 이해규 | 무게추를 사용한 연질재 공작물의 모서리부 가공장치 |
| JP3620679B2 (ja) * | 1996-08-27 | 2005-02-16 | 信越半導体株式会社 | 遊離砥粒によるウエーハの面取装置及び面取方法 |
| JPH10151552A (ja) * | 1996-11-22 | 1998-06-09 | Asahi Glass Co Ltd | 板状体の周縁研削方法及び装置 |
| JP3628538B2 (ja) * | 1999-01-12 | 2005-03-16 | シャープ株式会社 | 基板面取装置 |
| KR20010056053A (ko) * | 1999-12-14 | 2001-07-04 | 김형벽ㅂ | 부재 모서리 양면 자동 연마장치 |
| US6328641B1 (en) * | 2000-02-01 | 2001-12-11 | Advanced Micro Devices, Inc. | Method and apparatus for polishing an outer edge ring on a semiconductor wafer |
| TWI222423B (en) * | 2001-12-27 | 2004-10-21 | Orbotech Ltd | System and methods for conveying and transporting levitated articles |
| JP4037169B2 (ja) * | 2002-05-28 | 2008-01-23 | 中村留精密工業株式会社 | 硬質脆性板の側辺加工方法 |
| KR100596050B1 (ko) * | 2002-10-31 | 2006-07-03 | 삼성코닝정밀유리 주식회사 | 유리기판의 이송시스템 |
| US7125319B2 (en) * | 2003-10-27 | 2006-10-24 | Corning Incorporated | Apparatus and method for grinding and/or polishing an edge of a glass sheet |
| US7908885B2 (en) * | 2004-11-08 | 2011-03-22 | New Way Machine Components, Inc. | Non-contact porous air bearing and glass flattening device |
| US20070138228A1 (en) * | 2005-12-16 | 2007-06-21 | Brown James W | Method and apparatus for finishing a glass sheet |
| JP5051613B2 (ja) * | 2007-03-02 | 2012-10-17 | 旭硝子株式会社 | ガラス板の端面研削装置 |
| JP5104035B2 (ja) * | 2007-05-24 | 2012-12-19 | Jfeスチール株式会社 | 形鋼の耳状突起物除去方法 |
| JP5301818B2 (ja) * | 2007-11-26 | 2013-09-25 | 中村留精密工業株式会社 | ガラス基板の側辺加工装置における補正値の登録方法 |
| JP5301919B2 (ja) * | 2008-08-12 | 2013-09-25 | 中村留精密工業株式会社 | 硬質脆性板の面取装置 |
-
2010
- 2010-08-25 TW TW099128469A patent/TWI503206B/zh not_active IP Right Cessation
- 2010-08-26 KR KR1020127007055A patent/KR20120057633A/ko not_active Abandoned
- 2010-08-26 JP JP2012526956A patent/JP5718336B2/ja not_active Expired - Fee Related
- 2010-08-26 CN CN201080042810.3A patent/CN102574260B/zh not_active Expired - Fee Related
- 2010-08-26 WO PCT/US2010/046721 patent/WO2011031506A2/en not_active Ceased
Also Published As
| Publication number | Publication date |
|---|---|
| JP2013503049A (ja) | 2013-01-31 |
| WO2011031506A3 (en) | 2011-06-16 |
| WO2011031506A2 (en) | 2011-03-17 |
| TW201114550A (en) | 2011-05-01 |
| TWI503206B (zh) | 2015-10-11 |
| CN102574260B (zh) | 2015-12-16 |
| CN102574260A (zh) | 2012-07-11 |
| KR20120057633A (ko) | 2012-06-05 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP5718336B2 (ja) | 精密エッジ仕上げのための装置及び方法 | |
| TWI554362B (zh) | 兩頭平面硏磨法及兩頭平面硏磨盤 | |
| JP6791866B2 (ja) | 金属素板を切断する方法 | |
| CN103659575A (zh) | 研磨方法及研磨装置 | |
| US10232488B2 (en) | Abrasive machining apparatus for processing edges of glass articles | |
| JP2013138175A5 (enExample) | ||
| JP2015098053A (ja) | 曲げ加工機におけるワークの曲げ半径及び送りの測定のための測定ユニット | |
| ES2991412T3 (es) | Procedimiento para determinar el espesor de una banda de material cuando la banda de material se alimenta a la zona de mecanizado de una máquina herramienta | |
| KR20100123820A (ko) | 시트의 처짐 평가방법 및 평가장치 | |
| JP2013503049A5 (enExample) | ||
| WO2017138511A1 (ja) | 高精度球体寸法測定装置および球体研磨装置 | |
| JPH1085819A (ja) | オンラインロールプロファイル測定装置 | |
| JP2015228463A5 (enExample) | ||
| JP6621448B2 (ja) | パターン転写装置およびパターン転写方法 | |
| KR20120036874A (ko) | 편평한 가공물을 머시닝하는 방법 | |
| JP2020076715A (ja) | 塗工量の計測方法 | |
| CN107883964A (zh) | 环抛加工中工件环上单点运动轨迹检测装置及利用该装置进行检测的方法 | |
| JP2009045636A (ja) | スラブの研削方法、熱間圧延用スラブ及びそれらを用いた鋼板の製造方法 | |
| JP4598820B2 (ja) | ウェブ屈曲装置および方法 | |
| US9260263B2 (en) | Substrate aligning unit, substrate processing apparatus having the same, and method of aligning substrate using the same | |
| CN113134878B (zh) | 用于加工工件的设备和方法 | |
| JP2004516940A (ja) | フローフォーミング方法および装置 | |
| JP5862007B2 (ja) | 基板移送装置、基板移送方法およびそれを用いた塗布装置 | |
| JP3415101B2 (ja) | 床下型車輪旋盤装置 | |
| JP2005334752A (ja) | 枚葉塗布装置、およびダイ位置決め方法 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20130815 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20130815 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20140715 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20140716 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20141007 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20141111 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20150129 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20150224 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20150318 |
|
| R150 | Certificate of patent or registration of utility model |
Ref document number: 5718336 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
| LAPS | Cancellation because of no payment of annual fees |