CN102574260B - 用于精确边缘精整的装置和方法 - Google Patents

用于精确边缘精整的装置和方法 Download PDF

Info

Publication number
CN102574260B
CN102574260B CN201080042810.3A CN201080042810A CN102574260B CN 102574260 B CN102574260 B CN 102574260B CN 201080042810 A CN201080042810 A CN 201080042810A CN 102574260 B CN102574260 B CN 102574260B
Authority
CN
China
Prior art keywords
finished
edge
sensor
sensing layer
relative
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201080042810.3A
Other languages
English (en)
Chinese (zh)
Other versions
CN102574260A (zh
Inventor
J·W·布朗
D·L·德鲁姆
G·N·库德瓦
S·卢
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Corning Inc
Original Assignee
Corning Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Corning Inc filed Critical Corning Inc
Publication of CN102574260A publication Critical patent/CN102574260A/zh
Application granted granted Critical
Publication of CN102574260B publication Critical patent/CN102574260B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B9/00Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
    • B24B9/02Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
    • B24B9/06Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
    • B24B9/08Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass
    • B24B9/10Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass of plate glass
    • B24B9/102Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass of plate glass for travelling sheets
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/02Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation according to the instantaneous size and required size of the workpiece acted upon, the measuring or gauging being continuous or intermittent
    • B24B49/04Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation according to the instantaneous size and required size of the workpiece acted upon, the measuring or gauging being continuous or intermittent involving measurement of the workpiece at the place of grinding during grinding operation
    • B24B49/045Specially adapted gauging instruments
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/10Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation involving electrical means
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B9/00Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
    • B24B9/02Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
    • B24B9/06Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
    • B24B9/08Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass
    • B24B9/10Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass of plate glass

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
CN201080042810.3A 2009-08-27 2010-08-26 用于精确边缘精整的装置和方法 Expired - Fee Related CN102574260B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US23746809P 2009-08-27 2009-08-27
US61/237,468 2009-08-27
PCT/US2010/046721 WO2011031506A2 (en) 2009-08-27 2010-08-26 Apparatus and method for precision edge finishing

Publications (2)

Publication Number Publication Date
CN102574260A CN102574260A (zh) 2012-07-11
CN102574260B true CN102574260B (zh) 2015-12-16

Family

ID=43733041

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201080042810.3A Expired - Fee Related CN102574260B (zh) 2009-08-27 2010-08-26 用于精确边缘精整的装置和方法

Country Status (5)

Country Link
JP (1) JP5718336B2 (enExample)
KR (1) KR20120057633A (enExample)
CN (1) CN102574260B (enExample)
TW (1) TWI503206B (enExample)
WO (1) WO2011031506A2 (enExample)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101389377B1 (ko) * 2012-09-05 2014-04-25 삼성코닝정밀소재 주식회사 유리기판 면취 장치
US9733670B2 (en) 2012-09-26 2017-08-15 Apple Inc. Computer display or cover glass/cell attachment to frame
CN103612174A (zh) * 2013-12-09 2014-03-05 秦皇岛星晟科技有限公司 金刚石磨轮自动对中装置
CN107107296B (zh) 2014-09-22 2020-01-31 康宁股份有限公司 用于处理玻璃物品边缘的研磨加工设备
JP6514542B2 (ja) * 2015-03-26 2019-05-15 AvanStrate株式会社 ガラス基板の製造方法
JP2018522810A (ja) * 2015-07-21 2018-08-16 コーニング インコーポレイテッド ガラス基板をエッジ仕上げするための方法および装置
CN107285610B (zh) * 2016-03-31 2020-07-10 北京小米移动软件有限公司 热弯玻璃结构的加工方法、热弯玻璃结构和电子设备
CN106041667A (zh) * 2016-05-20 2016-10-26 京东方科技集团股份有限公司 一种基板及其磨边检测方法、对位方法和装置
CN106926084A (zh) * 2017-04-28 2017-07-07 京东方科技集团股份有限公司 玻璃边缘研磨设备
EP3537245A1 (en) * 2018-03-08 2019-09-11 Beijing Apollo Ding Rong Solar Technology Co., Ltd. Edging method and apparatus
CN108436650A (zh) * 2018-03-08 2018-08-24 北京铂阳顶荣光伏科技有限公司 磨边方法及装置
CN111037458A (zh) * 2019-12-17 2020-04-21 西安奕斯伟硅片技术有限公司 一种监测装置和硅片处理装置
EP4023392A1 (en) * 2020-12-28 2022-07-06 Tecnomec Borghi S.r.l. Apparatus for deburring and trimming the edges of slab-shaped objects

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003340697A (ja) * 2002-05-28 2003-12-02 Nakamura Tome Precision Ind Co Ltd 硬質脆性板の側辺加工方法及び装置
CN1506286A (zh) * 2002-10-31 2004-06-23 三星康宁精密琉璃株式会社 玻璃基板的输送系统
CN1623219A (zh) * 2001-12-27 2005-06-01 考夫乐科学方案有限公司 高性能非接触支承平台
US20060219605A1 (en) * 2004-11-08 2006-10-05 Devitt Andrew J Non-contact porous air bearing and glass flattening device
CN1874872A (zh) * 2003-10-27 2006-12-06 康宁股份有限公司 用于磨削和/或抛光玻璃板的边缘的设备和方法
JP2008213090A (ja) * 2007-03-02 2008-09-18 Asahi Glass Co Ltd ガラス板の端面研削装置

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63215904A (ja) * 1987-03-04 1988-09-08 Mitsubishi Electric Corp 光変位計によるマ−キング線検出方法
JPH0398745A (ja) * 1989-09-06 1991-04-24 Kawasaki Heavy Ind Ltd 数値制御式孔明け加工機のワーク位置自動検出方法及びその装置
FI84564C (fi) * 1990-03-29 1991-12-27 Tamglass Oy Anordning foer slipning av en glasskivas kant.
KR960029026A (ko) * 1995-01-17 1996-08-17 이해규 무게추를 사용한 연질재 공작물의 모서리부 가공장치
JP3620679B2 (ja) * 1996-08-27 2005-02-16 信越半導体株式会社 遊離砥粒によるウエーハの面取装置及び面取方法
JPH10151552A (ja) * 1996-11-22 1998-06-09 Asahi Glass Co Ltd 板状体の周縁研削方法及び装置
JP3628538B2 (ja) * 1999-01-12 2005-03-16 シャープ株式会社 基板面取装置
KR20010056053A (ko) * 1999-12-14 2001-07-04 김형벽ㅂ 부재 모서리 양면 자동 연마장치
US6328641B1 (en) * 2000-02-01 2001-12-11 Advanced Micro Devices, Inc. Method and apparatus for polishing an outer edge ring on a semiconductor wafer
US20070138228A1 (en) * 2005-12-16 2007-06-21 Brown James W Method and apparatus for finishing a glass sheet
JP5104035B2 (ja) * 2007-05-24 2012-12-19 Jfeスチール株式会社 形鋼の耳状突起物除去方法
JP5301818B2 (ja) * 2007-11-26 2013-09-25 中村留精密工業株式会社 ガラス基板の側辺加工装置における補正値の登録方法
JP5301919B2 (ja) * 2008-08-12 2013-09-25 中村留精密工業株式会社 硬質脆性板の面取装置

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1623219A (zh) * 2001-12-27 2005-06-01 考夫乐科学方案有限公司 高性能非接触支承平台
JP2003340697A (ja) * 2002-05-28 2003-12-02 Nakamura Tome Precision Ind Co Ltd 硬質脆性板の側辺加工方法及び装置
CN1506286A (zh) * 2002-10-31 2004-06-23 三星康宁精密琉璃株式会社 玻璃基板的输送系统
CN1874872A (zh) * 2003-10-27 2006-12-06 康宁股份有限公司 用于磨削和/或抛光玻璃板的边缘的设备和方法
US20060219605A1 (en) * 2004-11-08 2006-10-05 Devitt Andrew J Non-contact porous air bearing and glass flattening device
JP2008213090A (ja) * 2007-03-02 2008-09-18 Asahi Glass Co Ltd ガラス板の端面研削装置

Also Published As

Publication number Publication date
JP2013503049A (ja) 2013-01-31
WO2011031506A3 (en) 2011-06-16
WO2011031506A2 (en) 2011-03-17
TW201114550A (en) 2011-05-01
TWI503206B (zh) 2015-10-11
CN102574260A (zh) 2012-07-11
KR20120057633A (ko) 2012-06-05
JP5718336B2 (ja) 2015-05-13

Similar Documents

Publication Publication Date Title
CN102574260B (zh) 用于精确边缘精整的装置和方法
KR102588457B1 (ko) 임프린트·리소그래피용 각형 기판 및 그의 제조 방법
US7662024B2 (en) Method and apparatus for precision polishing of optical components
US9205528B2 (en) Electronic grade glass substrate and making method
KR101983395B1 (ko) 양두 평면 연삭법 및 양두 평면 연삭반
US9017143B2 (en) Method for manufacturing electronic grade synthetic quartz glass substrate
US7018272B2 (en) Pressure feed grinding of AMLCD substrate edges
CN107295797B (zh) 高精度球体尺寸测量装置和球体研磨装置
KR20100048951A (ko) 보이스 코일에 의한 선형 압력 인가 그라인딩
US10232488B2 (en) Abrasive machining apparatus for processing edges of glass articles
US10543576B2 (en) Glass substrate support apparatuses and methods of providing flexible glass substrate support
Wang et al. A controllable material removal strategy considering force-geometry model of belt grinding processes
JP4417130B2 (ja) ガラス基板の垂直保持装置
JP7070010B2 (ja) キャリアの製造方法および半導体ウェーハの研磨方法
CN103118837A (zh) 特别地用于具有直边的玻璃片的数控研磨机
JP4591830B2 (ja) ウェーハ面取り装置
JP2007313596A (ja) 心無し研削盤および心無し研削盤のワーク仕上げ寸法管理方法
CN111941266B (zh) 覆盖物的厚度测量方法及研磨方法
KR101892894B1 (ko) 리드 프레임 표면 연마 장치
KR20170088182A (ko) 리드 프레임 표면 연마 장치
US20080248729A1 (en) Method and Apparatus for Manufacturing Optical Elements
US20250114892A1 (en) System for surface machining a curved part
CN102695584A (zh) 用于引导工具的系统
JP5862007B2 (ja) 基板移送装置、基板移送方法およびそれを用いた塗布装置
KR102421573B1 (ko) 판유리 가공 장치

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20151216

Termination date: 20170826