JP5707713B2 - 浮上搬送装置及びローラ駆動ユニット - Google Patents

浮上搬送装置及びローラ駆動ユニット Download PDF

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JP5707713B2
JP5707713B2 JP2010054502A JP2010054502A JP5707713B2 JP 5707713 B2 JP5707713 B2 JP 5707713B2 JP 2010054502 A JP2010054502 A JP 2010054502A JP 2010054502 A JP2010054502 A JP 2010054502A JP 5707713 B2 JP5707713 B2 JP 5707713B2
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transport
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conveyance
opening
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JP2011184186A (ja
JP2011184186A5 (enExample
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芳幸 和田
芳幸 和田
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IHI Corp
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IHI Corp
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JP2010054502A 2010-03-11 2010-03-11 浮上搬送装置及びローラ駆動ユニット Active JP5707713B2 (ja)

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JP2010054502A JP5707713B2 (ja) 2010-03-11 2010-03-11 浮上搬送装置及びローラ駆動ユニット

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JP2010054502A JP5707713B2 (ja) 2010-03-11 2010-03-11 浮上搬送装置及びローラ駆動ユニット

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JP2011184186A JP2011184186A (ja) 2011-09-22
JP2011184186A5 JP2011184186A5 (enExample) 2012-11-15
JP5707713B2 true JP5707713B2 (ja) 2015-04-30

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Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5915358B2 (ja) * 2012-04-26 2016-05-11 株式会社Ihi 搬送装置
KR101610215B1 (ko) 2012-04-26 2016-04-07 가부시키가이샤 아이에이치아이 반송 장치
JP7166817B2 (ja) * 2018-07-12 2022-11-08 株式会社荏原製作所 基板搬送装置および基板搬送装置を備える基板処理装置
TWI692432B (zh) * 2019-05-15 2020-05-01 晶彩科技股份有限公司 薄板輸送裝置及其方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06127095A (ja) * 1992-10-16 1994-05-10 Nec Corp 非接触リボンフィード機構
JP3518612B2 (ja) * 1993-01-26 2004-04-12 株式会社リコー 動力伝達機構
JP4613800B2 (ja) * 2004-12-01 2011-01-19 株式会社Ihi 浮上装置および搬送装置
JP4344755B2 (ja) * 2007-04-09 2009-10-14 株式会社日本設計工業 薄板状材料搬送用ローラユニット及び薄板状材料搬送装置

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